Nanotechnologies - Vocabulary - Part 8: Nanomanufacturing processes (ISO/TS 80004-8:2020)

This document defines terms related to nanomanufacturing processes in the field of nanotechnologies.
All the process terms in this document are relevant to nanomanufacturing, however, many of the listed processes are not exclusively relevant to the nanoscale. Terms that are not exclusive are noted within the definitions. Depending on controllable conditions, such processes can result in material features at the nanoscale or, alternatively, at larger scales.
There are many other terms that name tools, components, materials, systems control methods or metrology methods associated with nanomanufacturing that are beyond the scope of this document.
Terms and definitions from other parts of the ISO/TS 80004 series are reproduced in Clause 3 for context and better understanding.

Nanotechnologien - Fachwörterverzeichnis - Teil 8: Industrieller Nanoherstellungsprozess (ISO/TS 80004-8:2020)

Dieses Dokument legt Begriffe zu industriellen Nanoherstellungsprozessen auf dem Gebiet der Nanotechnologien fest.
Alle in diesem Dokument enthaltenen prozessbezogenen Begriffe sind für die industrielle Nanoherstellung von Bedeutung, viele der aufgeführten Prozesse jedoch sind nicht ausschließlich auf den Nanomaßstab anwendbar. Begriffe, die nicht in dieser Weise exklusiv sind, sind in den Definitionen als solche gekennzeichnet. In Abhängigkeit von regelbaren Bedingungen können derartige Prozesse zu Materialeigenschaften im Nanomaßstab oder alternativ auch in größeren Maßstäben führen.
Es gibt im Zusammenhang mit der industriellen Nanoherstellung viele weitere Begriffe, die Werkzeuge, Teile, Werkstoffe, Verfahren zur Systemkontrolle oder Messtechnik-Verfahren bezeichnen, die aber nicht Gegenstand des Anwendungsbereiches dieses Dokumentes sind.
Um den Zusammenhang zu verdeutlichen und für ein besseres Verständnis zu sorgen, werden in Abschnitt 3 Begriffe aus anderen Teilen der Reihe ISO/TS 80004 wiedergegeben.

Nanotechnologies - Vocabulaire - Partie 8: Processus de nanofabrication (ISO/TS 80004-8:2020)

Le présent document définit une liste de termes liés aux procédés de nanofabrication dans le domaine des nanotechnologies.
Dans le présent document, tous les termes liés aux procédés se rapportent à la nanofabrication; cependant, bon nombre des procédés mentionnés ne se rapportent pas exclusivement à l'échelle nanométrique. Lorsque des termes sont non exclusifs à la nanofabrication, cela est indiqué dans leur définition. Selon que les conditions sont maîtrisables ou non, de tels procédés peuvent donner lieu à des matériaux à l'échelle nanométrique ou à de plus grandes échelles.
Il existe de nombreux autres termes qui désignent des outils, des composants, des matériaux, des méthodes de contrôle de systèmes ou des méthodes métrologiques associées à la nanofabrication, mais qui ne relèvent pas du domaine d'application du présent document.
Des termes et définitions d'autres parties de la série de normes ISO/TS 80004 sont repris dans l'Article 3 à des fins de contexte et d'une meilleure compréhension.

Nanotehnologije - Slovar - 8. del: Procesi nanoproizvodnje (ISO/TS 80004-8:2020)

General Information

Status
Published
Publication Date
01-Dec-2020
Technical Committee
Current Stage
6060 - Definitive text made available (DAV) - Publishing
Start Date
02-Dec-2020
Completion Date
02-Dec-2020

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SLOVENSKI STANDARD
SIST-TS CEN ISO/TS 80004-8:2021
01-februar-2021
Nadomešča:
SIST-TS CEN ISO/TS 80004-8:2015
Nanotehnologije - Slovar - 8. del: Procesi nanoproizvodnje (ISO/TS 80004-8:2020)
Nanotechnologies - Vocabulary - Part 8: Nanomanufacturing processes (ISO/TS 80004-
8:2020)
Nanotechnologien - Fachwörterverzeichnis - Teil 8: Industrieller
Nanoherstellungsprozess (ISO/TS 80004-8:2020)
Nanotechnologies - Vocabulaire - Partie 8: Processus de nanofabrication (ISO/TS 80004
-8:2020)
Ta slovenski standard je istoveten z: CEN ISO/TS 80004-8:2020
ICS:
01.040.07 Naravoslovne in uporabne Natural and applied sciences
vede (Slovarji) (Vocabularies)
07.120 Nanotehnologije Nanotechnologies
SIST-TS CEN ISO/TS 80004-8:2021 en,fr,de
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

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SIST-TS CEN ISO/TS 80004-8:2021

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SIST-TS CEN ISO/TS 80004-8:2021


CEN ISO/TS 80004-8
TECHNICAL SPECIFICATION

SPÉCIFICATION TECHNIQUE

December 2020
TECHNISCHE SPEZIFIKATION
ICS 01.040.07; 07.120 Supersedes CEN ISO/TS 80004-8:2015
English Version

Nanotechnologies - Vocabulary - Part 8:
Nanomanufacturing processes (ISO/TS 80004-8:2020)
Nanotechnologies - Vocabulaire - Partie 8: Processus Nanotechnologien - Fachwörterverzeichnis - Teil 8:
de nanofabrication (ISO/TS 80004-8:2020) Industrieller Nanoherstellungsprozess (ISO/TS 80004-
8:2020)
This Technical Specification (CEN/TS) was approved by CEN on 26 October 2020 for provisional application.

The period of validity of this CEN/TS is limited initially to three years. After two years the members of CEN will be requested to
submit their comments, particularly on the question whether the CEN/TS can be converted into a European Standard.

CEN members are required to announce the existence of this CEN/TS in the same way as for an EN and to make the CEN/TS
available promptly at national level in an appropriate form. It is permissible to keep conflicting national standards in force (in
parallel to the CEN/TS) until the final decision about the possible conversion of the CEN/TS into an EN is reached.

CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway,
Poland, Portugal, Republic of North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and
United Kingdom.





EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION

EUROPÄISCHES KOMITEE FÜR NORMUNG

CEN-CENELEC Management Centre: Rue de la Science 23, B-1040 Brussels
© 2020 CEN All rights of exploitation in any form and by any means reserved Ref. No. CEN ISO/TS 80004-8:2020 E
worldwide for CEN national Members.

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SIST-TS CEN ISO/TS 80004-8:2021
CEN ISO/TS 80004-8:2020 (E)
Contents Page
European foreword . 3

2

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SIST-TS CEN ISO/TS 80004-8:2021
CEN ISO/TS 80004-8:2020 (E)
European foreword
This document (CEN ISO/TS 80004-8:2020) has been prepared by Technical Committee ISO/TC 229
"Nanotechnologies" in collaboration with Technical Committee CEN/TC 352 “Nanotechnologies” the
secretariat of which is held by AFNOR.
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. CEN shall not be held responsible for identifying any or all such patent rights.
This document supersedes CEN ISO/TS 80004-8:2015.
According to the CEN-CENELEC Internal Regulations, the national standards organizations of the
following countries are bound to announce this Technical Specification: Austria, Belgium, Bulgaria,
Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland,
Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Republic of
North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the
United Kingdom.
Endorsement notice
The text of ISO/TS 80004-8:2020 has been approved by CEN as CEN ISO/TS 80004-8:2020 without any
modification.


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SIST-TS CEN ISO/TS 80004-8:2021

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SIST-TS CEN ISO/TS 80004-8:2021
TECHNICAL ISO/TS
SPECIFICATION 80004-8
Second edition
2020-11
Nanotechnologies — Vocabulary —
Part 8:
Nanomanufacturing processes
Nanotechnologies — Vocabulaire —
Partie 8: Processus de nanofabrication
Reference number
ISO/TS 80004-8:202
...

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