IEC 62047-7:2011

Semiconductor devices - Micro-electromechanical devices - Part 7: MEMS BAW filter and duplexer for radio frequency control and selection

IEC 62047-7:2011 describes terms, definition, symbols, configurations, and test methods that can be used to evaluate and determine the performance characteristics of BAW resonator, filter, and duplexer devices as radio frequency control and selection devices. This standard specifies the methods of tests and general requirements for BAW resonator, filter, and duplexer devices of assessed quality using either capability or qualification approval procedures.

Dispositifs à semiconducteurs - Dispositifs microélectromécaniques - Partie 7: Filtre et duplexeur BAW MEMS pour la commande et le choix des fréquences radioélectriques

La CEI 62047-7:2011 définit les termes, les définitions, les symboles, les configurations, et les méthodes d'essai susceptibles d'être utilisés pour évaluer et déterminer les caractéristiques d'aptitude à la fonction des dispositifs de résonateurs, filtres et duplexeurs BAW en tant que dispositifs de commande et de choix des fréquences radioélectriques. La présente norme spécifie les méthodes d'essai et les exigences générales relatives aux dispositifs de résonateur, de filtre et de duplexeur BAW sous assurance de la qualité, au moyen des procédures d'agrément de savoir-faire ou d'homologation.

General Information

• Status: Published
• Publication Date: 15-Jun-2011
• ICS: 01 - GENERALITIES. TERMINOLOGY. STANDARDIZATION. DOCUMENTATION
• ICS: 31.080.99 - Other semiconductor devices
• Technical Committee: SC 47F - Micro-electromechanical systems
• Drafting Committee: WG 1 - TC 47/SC 47F/WG 1
• Current Stage: PPUB - Publication issued
• Start Date: 30-Jun-2011
• Completion Date: 16-Jun-2011

Standards Content (Sample)

IEC 62047-7 ®
Edition 1.0 2011-06
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
colour
inside
Semiconductor devices – Micro-electromechanical devices –
Part 7: MEMS BAW filter and duplexer for radio frequency control and selection

Dispositifs à semiconducteurs – Dispositifs microélectromécaniques –
Partie 7: Filtre et duplexeur BAW MEMS pour la commande et le choix des
fréquences radioélectriques
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IEC 62047-7 ®
Edition 1.0 2011-06
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
colour
inside
Semiconductor devices – Micro-electromechanical devices –
Part 7: MEMS BAW filter and duplexer for radio frequency control and selection

Dispositifs à semiconducteurs – Dispositifs microélectromécaniques –
Partie 7: Filtre et duplexeur BAW MEMS pour la commande et le choix des
fréquences radioélectriques
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
COMMISSION
ELECTROTECHNIQUE
PRICE CODE
INTERNATIONALE
CODE PRIX U
ICS 31.080.99 ISBN 978-2-88912-537-1

– 2 – 62047-7  IEC:2011
CONTENTS
FOREWORD . 4
1 Scope . 6
2 Normative references . 6
3 Terms and definitions . 6
3.1 General terms . 6
3.2 Related with BAW filter . 7
3.3 Related with BAW duplexer . 9
3.4 Characteristic parameters . 10
3.4.1 BAW resonator . 10
3.4.2 BAW filter and duplexer . 13
3.4.3 Temperature characteristics . 16
4 Essential ratings and characteristic parameters . 16
4.1 Resonator, filter and duplexer marking . 16
4.2 Additional information . 17
5 Test methods . 17
5.1 Test procedure . 17
5.2 RF characteristics . 19
5.2.1 Insertion attenuation, IA . 19
5.2.2 Return attenuation, RA . 20
5.2.3 Bandwidth . 21
5.2.4 Isolation . 21
5.2.5 Ripple . 22
5.2.6 Voltage standing wave ratio (VSWR) . 22
5.2.7 Impedances of input and output . 23
5.3 Reliability test method . 23
5.3.1 Test procedure . 23
Annex A (informative) Geometries of BAW resonators . 25
Annex B (informative) Operation of BAW resonators . 26
Bibliography . 28

Figure 1 – Basic structure of BAW resonator . 7
Figure 2 – Topologies for BAW filter design . 8
Figure 3 – Frequency responses of ladder and lattice type BAW filters . 8
Figure 4 – An example of BAW duplexer configuration . 9
Figure 5 – Equivalent circuit of BAW resonator (one-port resonator) . 10
Figure 6 – Measurement procedure of BAW filters and duplexers . 18
Figure 7 – Electrical measurement setup of BAW resonators, filters and duplexers . 19
Figure 8 – Insertion attenuation of BAW filter . 20
Figure 9 – Return attenuation of BAW filter . 21
Figure 10 – Isolation (Tx-Rx) of BAW duplexer . 22
Figure 11 – Ripple of BAW filter . 22
Figure 12 – Smith chart plot of input and output impedances of BAW filter . 23
Figure 13 – Block diagram of a test setup for evaluating the reliability of BAW
resonators and filters . 24

62047-7  IEC:2011 – 3 –
Figure A.1 – Geometry comparison of BAW resonators . 25
Figure B.1 – Modified BVD (Butterworth-Van Dyke) equivalent circuit model . 27

– 4 – 62047-7  IEC:2011
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
SEMICONDUCTOR DEVICES –
MICRO-ELECTROMECHANICAL DEVICES –

Part 7: MEMS BAW filter and duplexer
for radio frequency control and selection

FOREWORD
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International Standard IEC 62047-7 has been prepared by subcommittee 47F: Micro-
electromechanical systems, of IEC technical committee 47: Semiconductor devices.
The text of this standard is based on the following documents:
FDIS Report on voting
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