ISO/TS 6737:2023

Vacuum technology — Vacuum gauges — Characteristics for a stable ionisation vacuum gauge

This document describes a special design of an ionisation vacuum gauge which has a well-defined ionising electron path length.[2] Due to the construction design, it leads to good measurement accuracy, long-term stability, as well as gauge independent and reproducible sensitivity for nitrogen and relative sensitivity factors[3][4]. It is designed for the measurement range of 10-6 Pa to 10-2 Pa. This document describes only those dimensions and potentials of the gauge head which are relevant for the electron and ion trajectories. This document does not describe the electrical components necessary to operate the ionisation vacuum gauge in detail. The gauge head can be operated by voltage and power sources and ammeters commercially available, but also by a controller specially built for the purpose of the operation of this gauge head. The ionisation vacuum gauge described in this document can be built by any experienced manufacturer of other ionisation vacuum gauges. It is not subject to intellectual property protection. It is assumed for this document that the applicant is familiar with both the physics and principles of ionisation vacuum gauges as well as high and ultra-high vacuum technology in general.

Technique du vide — Manomètres à vide — Caractéristiques des manomètres à ionisation stable

General Information

• Status: Published
• Publication Date: 27-Nov-2023
• ICS: 23.160 - Vacuum technology
• Technical Committee: ISO/TC 112 - Vacuum technology
• Drafting Committee: ISO/TC 112 - Vacuum technology
• Current Stage: 6060 - International Standard published
• Start Date: 28-Nov-2023
• Due Date: 19-Apr-2024
• Completion Date: 28-Nov-2023

Standards Content (Sample)

TECHNICAL ISO/TS
SPECIFICATION 6737
First edition
2023-11
Vacuum technology — Vacuum
gauges — Characteristics for a stable
ionisation vacuum gauge
Technique du vide — Manomètres à vide — Caractéristiques des
manomètres à ionisation stable
Reference number
ISO/TS 6737:2023(E)
© ISO 2023

---------------------- Page: 1 ----------------------
ISO/TS 6737:2023(E)
COPYRIGHT PROTECTED DOCUMENT
© ISO 2023
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on
the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below
or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: [phone]
Email: [e-mail]
Website: www.iso.org
Published in Switzerland
ii
  © ISO 2023 – All rights reserved

---------------------- Page: 2 ----------------------
ISO/TS 6737:2023(E)
Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Symbols and abbreviated terms.2
5 General description of the design . 2
5.1 Components . 2
5.2 Mode of operation . 3
6 Specifications of the ionisation vacuum gauge. 4
6.1 General specifications and requirements for the gauge head . 4
6.2 Electrical equipment . 5
7 Dimensions and potentials .6
7.1 General . 6
7.2 Dimensions and tolerances . . . 7
7.3 Potentials . 9
7.4 Cathode . . 9
7.5 Anode cage . 9
7.6 Gaps between electrodes .
...

FINAL
TECHNICAL ISO/DTS
DRAFT
SPECIFICATION 6737
ISO/TC 112
Vacuum technology — Vacuum
Secretariat: DIN
gauges — Characteristics for a stable
Voting begins on:
2023-07-07 ionisation vacuum gauge
Voting terminates on:
Technique du vide — Manomètres à vide — Caractéristiques des
2023-09-01
manomètres à ionisation stable
RECIPIENTS OF THIS DRAFT ARE INVITED TO
SUBMIT, WITH THEIR COMMENTS, NOTIFICATION
OF ANY RELEVANT PATENT RIGHTS OF WHICH
THEY ARE AWARE AND TO PROVIDE SUPPOR TING
DOCUMENTATION.
IN ADDITION TO THEIR EVALUATION AS
Reference number
BEING ACCEPTABLE FOR INDUSTRIAL, TECHNO-
ISO/DTS 6737:2023(E)
LOGICAL, COMMERCIAL AND USER PURPOSES,
DRAFT INTERNATIONAL STANDARDS MAY ON
OCCASION HAVE TO BE CONSIDERED IN THE
LIGHT OF THEIR POTENTIAL TO BECOME STAN-
DARDS TO WHICH REFERENCE MAY BE MADE IN
NATIONAL REGULATIONS. © ISO 2023

---------------------- Page: 1 ----------------------
ISO/DTS 6737:2023(E)
FINAL
TECHNICAL ISO/DTS
DRAFT
SPECIFICATION 6737
ISO/TC 112
Vacuum technology — Vacuum
Secretariat: DIN
gauges — Characteristics for a stable
Voting begins on:
ionisation vacuum gauge
Voting terminates on:
Technique du vide — Manomètres à vide — Caractéristiques des
manomètres à ionisation stable
COPYRIGHT PROTECTED DOCUMENT
© ISO 2023
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on
the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below
or ISO’s member body in the country of the requester.
RECIPIENTS OF THIS DRAFT ARE INVITED TO
ISO copyright office
SUBMIT, WITH THEIR COMMENTS, NOTIFICATION
OF ANY RELEVANT PATENT RIGHTS OF WHICH
CP 401 • Ch. de Blandonnet 8
THEY ARE AWARE AND TO PROVIDE SUPPOR TING
CH-1214 Vernier, Geneva
DOCUMENTATION.
Phone: [phone]
IN ADDITION TO THEIR EVALUATION AS
Reference number
Email: [e-mail]
BEING ACCEPTABLE FOR INDUSTRIAL, TECHNO­
ISO/DTS 6737:2023(E)
Website: www.iso.org
LOGICAL, COMMERCIAL AND USER PURPOSES,
DRAFT INTERNATIONAL STANDARDS MAY ON
Published in Switzerland
OCCASION HAVE TO BE CONSIDERED IN THE
LIGHT OF THEIR POTENTIAL TO BECOME STAN­
DARDS TO WHICH REFERENCE MAY BE MADE IN
ii
  © ISO 2023 – All rights reserved
NATIONAL REGULATIONS. © ISO 2023

---------------------- Page: 2 ----------------------
ISO/DTS 6737:2023(E)
Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Symbols and abbreviated terms.2
5 General description of the design . 2
5.1 Components . 2
5.2 Mode of operation . 3
6 Specifications of the ionisation vacuum gauge. 4
6.1 General specifications and requirements for the gauge head . 4
6.2 Electrical equipment . 5
7 Dimensions a
...

ISO/TC 112
ISO/CD TSDTS 6737(en:2023(E)
Date:2023-06-22
Secretariat:  DIN
Vacuum technology — Vacuum gauges — Characteristics for a stable ionisation vacuum gauge
Technique du vide — Manomètres à vide — Caractéristiques des manomètres à ionisation stable

---------------------- Page: 1 ----------------------
ISO/CD TS 6737:2023(E)
© ISO 2023
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this
publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical,
including photocopying, or posting on the internet or an intranet, without prior written permission. Permission can
be requested from either ISO at the address below or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: + 41 22 749 01 11
E-mail: [e-mail]
Website: www.iso.orgError! Hyperlink reference not valid.
Published in Switzerland
2 © ISO 2023 – All rights reserved
ii © ISO 2023 – All rights reserved

---------------------- Page: 2 ----------------------
ISO/CD TS 6737:2023(E)
Contents
Foreword . 3
Introduction. 3
Scope . 3
Normative references . 3
Terms and definitions . 3
Symbols and abbreviated terms . 3
General description of the design . 3
Components . 3
Mode of operation . 3
Specifications of the ionisation vacuum gauge . 3
General specifications and requirements for the gauge head . 3
Electrical equipment . 3
Dimensions and potentials . 3
General . 3
Dimensions and tolerances . 3
Potentials . 3
Cathode . 3
Anode cage . 3
Gaps between electrodes . 3
Electrode materials . 3
Electrical feedthroughs . 3
Surrounding tube (envelope) and flanges . 3
Magnetic fields . 3
Characteristics of the gauge (informative) . 3
Sensitivity .
...