23.160 - Vacuum technology
ICS 23.160 Details
Vacuum technology
Vakuumtechnik
Technologie du vide
Vakumska tehnologija
General Information
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This document specifies methods for measuring the volume flow rate, maximum throughput, pumping capacity, base pressure cryogenic vacuum pump, cooldown time and crossover value of cryogenic vacuum pumps. It is applicable to two-stage, closed-loop gaseous helium cryogenic vacuum pumps, which can be directly flanged to a vacuum chamber.
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This document describes a special design of an ionisation vacuum gauge which has a well-defined ionising electron path length.[2] Due to the construction design, it leads to good measurement accuracy, long-term stability, as well as gauge independent and reproducible sensitivity for nitrogen and relative sensitivity factors[3][4]. It is designed for the measurement range of 10-6 Pa to 10-2 Pa. This document describes only those dimensions and potentials of the gauge head which are relevant for the electron and ion trajectories. This document does not describe the electrical components necessary to operate the ionisation vacuum gauge in detail. The gauge head can be operated by voltage and power sources and ammeters commercially available, but also by a controller specially built for the purpose of the operation of this gauge head. The ionisation vacuum gauge described in this document can be built by any experienced manufacturer of other ionisation vacuum gauges. It is not subject to intellectual property protection. It is assumed for this document that the applicant is familiar with both the physics and principles of ionisation vacuum gauges as well as high and ultra-high vacuum technology in general.
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This document specifies methods for the measurement of pumping characteristics of non-evaporable getters (NEGs). It is applicable to all sizes and all types of NEGs, including those: — with the shape of pill, disk, ring, strip, module, cartridge; — with pump structures; — and NEG coatings on inner surface of pipes and vacuum chamber. A significant difference of pumping characteristics of the NEG and other vacuum pumps is that the pumping speed of the NEG depends on the sorption quantity. Furthermore, especially in the case of NEG coating, the sticking probability rather than the pumping speed is often the index of the pumping performance. Therefore, this document specifies the methods for measuring the pumping speed, the sorption quantity, and the sticking probability of NEGs. WARNING It is assumed that the user is familiar with the handling of combustible gases and poisonous ones and with ultra-high vacuum technology.
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This document defines terms related to spinning rotor gauges (SRGs), specifies the necessary parameters for SRGs, details their calibration procedure and describes which measurement uncertainties to consider when operating these gauges. This document is applicable to pressure up to 2 Pa.
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This document specifies three methods for measuring the volume flow rate and one method each for measuring the base pressure, the compression ratio, and the critical backing pressure of a vacuum pump. The first method for measuring the volume flow rate (the throughput method) is the basic concept, in which a steady gas flow is injected into the pump while the inlet pressure is measured. In practice, the measurement of gas throughput may be complicated or inexact. For this reason, two other methods are specified which avoid the direct measurement of throughput. The second method for measuring the volume flow rate (the orifice method) is used when there is very small throughput at very small inlet pressures (under a high or ultra-high vacuum). It is based on measuring the ratio of pressures in a two-chamber test dome in which the two chambers are separated by a wall with a circular orifice. The third method for measuring the volume flow rate (the pump-down method) is well suited for automated measurement. It is based on the evacuation of a large vessel. The volume flow rate is calculated from two pressures, before and after a pumping interval, and from the volume of the test dome. Different effects, such as leak and desorption rates, gas cooling by nearly isentropic expansion during the pumping interval, and increasing flow resistance in the connection line between test dome and pump caused by molecular flow at low pressures, influence the results of the pressure measurement and the resulting volume flow rate. The choice of the required measurement methods depends on the properties of the specific kinds of vacuum pump, e.g. the measurement of the critical backing pressure is only necessary for vacuum pumps which need a backing pump. All data that are measured on a vacuum pump, but not specified in this document (e.g. measurement of power consumption), are defined in the specific pump standard.
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- Standard28 pagesEnglish languagesale 15% off
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This document specifies methods for measuring the volume flow rate, base pressure, water vapour tolerance, power consumption, and the lowest start-up temperature of positive displacement vacuum pumps, which discharge gas against atmospheric pressure and with a usual base pressure In this document, it is necessary to use the determinations of volume flow rate and base pressure specified in ISO 21360‑1. This document also applies to the testing of other types of pumps which can discharge gas against atmospheric pressure, e.g. drag pumps.
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This document gives definitions of vacuum pumps and related terms. It is a continuation of ISO 3529‑1 which defines general terms used in vacuum technology.
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This document specifies the dimensions of the clamped-type quick-release couplings used in vacuum technology, as well as those of the O-rings and their carriers associated with these couplings, used to ensure vacuum tightness. NOTE The dimensions retained for the coupling diameter ensure the compatibility of the quick-release coupling with the corresponding vacuum flanges specified in ISO 1609[1].
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This document specifies the dimensions of fixed or rotatable bolted knife-edge flanges used in vacuum systems for pressures ranging from atmospheric to as low as 10−11 Pa.
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This document specifies the dimensions of non-knife-edge flanges and collars used in vacuum technology. The dimensions ensure interchangeability between bolted, clamped and rotatable flanges: a) whether the assembly be homogeneous (for example, bolted flanges or clamped flanges) or heterogeneous (for example, bolted flanges assembled with clamped flanges either by means of bolts or clamps or by means of bolts and rotatable flanges). b) whether the sealing rings used with the flanges be elastomer O-rings or metal sealing rings, provided that they are compatible with the linear sealing loads given in Annex A.
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- Standard12 pagesEnglish languagesale 15% off
This document specifies mounting dimensions for vacuum pipeline fittings (elbows, tees and crosses) of knife-edge flanges for nominal bores from 16 mm to 200 mm.
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This document specifies mounting dimensions for vacuum pipeline fittings (elbows, tees and crosses) of non knife-edge flange for nominal bores from 10 mm to 250 mm of the R5 series.
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This document defines dimensions of right-angle valves that are compatible with the mounting dimensions of elbows defined in ISO 9803-1 and ISO 9803-2. This document covers right-angle valves with flanges defined in ISO 2861, ISO 1609 and ISO 3669.
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- Standard3 pagesEnglish languagesale 15% off
This document defines general terms used in vacuum technology. It gives theoretical definitions as precise as possible, bearing in mind the need for use of the concept in practice.
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- Standard10 pagesEnglish languagesale 15% off
This document defines terms related to capacitance diaphragm gauges (CDGs), specifies which parameters have to be given for CDGs, details their calibration procedure and describes which measurement uncertainties have to be considered when operating these gauges. This document complements ISO 3567 and ISO 27893 when calibrating CDGs and using them as reference standards.
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This document specifies methods and special requirements for measuring the maximum tolerable pressure difference, effective compression ratio, compression ratio with zero throughput and overflow valve pressure difference of mechanical booster vacuum pumps. It applies to mechanical booster vacuum pumps employed for medium vacuum or rough vacuum applications including gas-cooled mechanical booster vacuum pump and multiple mechanical booster vacuum pump systems. It covers particular characteristics of mechanical boosters that are different from those of the usual positive displacement vacuum pumps. Maximum tolerable pressure difference Δpmax, effective compression ratio Keff, compression ratio with zero throughput K0 and overflow valve pressure difference Δp1 are special characteristics of the performance of mechanical booster vacuum pumps.
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This document, in conjunction with ISO 21360-1, specifies methods for the measurement of performance characteristics of turbomolecular vacuum pumps. It is applicable to all sizes and all types of turbomolecular vacuum pumps, including those — with mechanical or magnetic bearings; — with or without an additional drag stage(s) or other pumping stages on the shaft; — with one or more inlet ports. Since turbomolecular vacuum pumps are backed by primary pumps, their performance cannot be completely defined by the volume flow rate curve. Also, the driving device and the backing pressure of the turbomolecular vacuum pump is important to the performance. The following completes the performance characteristics: — information about throughputs and backing pressure of the turbomolecular vacuum pump; — the compression ratio curve (compression ratio vs backing pressure of turbomolecular vacuum pump).
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This document describes procedures to measure outgassing rates from components designed for vacuum chambers and of vacuum chambers as a whole. The outgassing rates are expected to be lower than 10−5 Pa m3 s−1 (10−2 Pa L s−1) at 23 °C and to emerge from devices that are suitable for high or ultra-high vacuum applications. The molecular mass of the outgassing species or vapour is below 300 u. The upper limit 10−5 Pa m3 s−1 of total outgassing rate is specified independent of the size, the total surface area and texture or state of the outgassing material. If a specific outgassing rate (outgassing rate per area) is determined, the area is not a specific surface area including the surface roughness, but the nominal geometrical one. When it is difficult to determine the nominal geometrical surface area of the sample, such as powders, porous materials, very rough surfaces, or complex devices, mass specific outgassing rate (e.g. outgassing rate per gram) is used. For many practical applications, it is sufficient to determine the total outgassing rate. If a measuring instrument, which sensitivity is gas species dependent, is used, the total outgassing rate are given in nitrogen equivalent. In cases, however, where the total outgassing rate is too high, the disturbing gas species is identified, and its outgassing rate is measured in order to improve the sample material. This document covers both cases. Some outgassing molecules can adsorb on a surface with a residence time that is much longer than the total time of measurement. Such molecules cannot be detected by a detecting instrument when there is no direct line of sight. This is considered as a surface effect and surface analytical investigations are more useful than general outgassing rate measurements considered here. Also, molecules that are released from the surface by irradiation of UV light or X-rays, are out of the scope of this document. This document is written to standardize the measurement of outgassing rates in such a way that values obtained at different laboratories and by different methods are comparable. To this end, for any of the described methods, traceability is provided to the System International (SI) for the most important parameters of each method and according to the metrological level. Outgassing rate measurements by mass loss, which were mainly developed for testing of spacecraft and satellite materials, are not gas specific. For acceptable measurement times, mass loss measurements require significantly higher outgassing rates (>10−5 Pa m3 s−1) than typical for high and ultrahigh vacuum components. Also, it is not possible to measure the sample in situ due to the weight of the vacuum chamber, since the balances are not vacuum compatible. For these reasons, mass loss measurements are not considered in this document. It is assumed that the user of this document is familiar with high and ultra-high vacuum technology and the corresponding measuring instrumentation such as ionization gauges and quadrupole mass spectrometers.
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- Technical specification39 pagesEnglish languagesale 15% off
This document describes procedures to characterize quadrupole mass spectrometers (QMSs) with an ion source of electron impact ionization and which are designed for the measurement of atomic mass-to-charge ratios m/z This document is not applicable to QMSs with other ion sources, such as chemical ionization, photo-ionization or field ionization sources and for the measurements of higher m/z, which are mainly used to specify organic materials. It is well known from published investigations on the metrological characteristics of quadrupole mass spectrometers that their indications of partial pressures depend significantly on the settings of the instrument, the total pressure, and the composition of the gas mixture. For this reason, it is not possible to calibrate a quadrupole mass spectrometer for all possible kinds of use. The characterization procedures described in this document cover the applications of continuous leak monitoring of a vacuum system, leak rate measurement with tracer gas, residual gas analysis and outgassing rate measurements. The user can select that characterization procedure that best suits his or her needs. These characterization procedures can also be useful for other applications. It is also well known that the stability of several parameters of quadrupole mass spectrometers, in particular sensitivity, are rather poor. Therefore, when a parameter has been calibrated, it needs frequent recalibration when accuracy is required. For practical reasons this can only be accomplished by in situ calibrations. To this end, this document not only describes how a quadrupole mass spectrometer can be calibrated by a calibration laboratory or a National Metrological Institute with direct traceability to the System International (SI), but also how calibrated parameters can be frequently checked and maintained in situ. By their physical principle, quadrupole mass spectrometers need high vacuum within the instrument. By reducing dimensions or by special ion sources combined with differential pumping the operational range can be extended to higher pressures, up to atmospheric pressure. This document, however, does not include quadrupole mass spectrometers with differential pumping technology. Therefore, it does not cover pressures exceeding 1 Pa on the inlet flange of the quadrupole mass spectrometer. This document does not describe how the initial adjustment of a quadrupole mass spectrometer by the manufacturer or by a service given order by the manufacturer should be made. The purpose of such an initial adjustment is mainly to provide a correct m/z scale, constant mass resolution or constant transmission, and is very specific to the instrument. Instead, it is assumed for this document that a manufacturer's readjustment procedure exists which can be carried on-site by a user. This procedure is intended to ensure that the quadrupole mass spectrometer is in a well-defined condition for the characterization. It is the intention of this document that the user gets the best possible metrological quality from his quadrupole mass spectrometer. From investigations it is known that in most cases this can be achieved in the so called "scan mode". The bar graph may also be of an adequate quality depending on the software used for evaluation of the data taken by the quadrupole mass spectrometer. The trend mode, however, often involves the additional uncertainty that a shift of the peak value position on the mass scale causes a shift in ion current. For this reason, the scan mode is preferable for most of the measurement procedures of this document. It is not the intent of this document that all the parameters described be determined for each quadrupole mass spectrometer. However, it is intended that the value of a parameter addressed in this document be determined according to the procedure described in this document if it is given or measured (e.g. for an inspection test). It is assumed for this document that the applicant
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ISO 19685:2017 identifies parameters of Pirani gauges, their calibration procedure, and describes measurement uncertainties to be considered when operating these gauges. ISO 19685:2017 applies to Pirani vacuum gauges operating over a pressure range of 0,01 Pa to 150 kPa. ISO 19685:2017 complements ISO 3567 and ISO 27893 when calibrating Pirani gauges and using them as reference standards. In addition, ISO 19685:2017 defines procedures to characterize Pirani gauges for response time and hysteresis.
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This standard gives requirements and the corresponding test/assessment methods applicable to leak detection kits (leak detector) based on the measurement of pressure change. Leak detection kits are intended to be used with double skin, underground or above ground, pressurized or non-pressurized, tanks or pipework designed for water polluting liquids/fluids. The kits are usually composed of:
- measuring device;
- evaluation device;
- alarm device;
- pressure generator;
- pressure relief device;
- liquid stop device;
- condensate trap.
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ISO 3529-3:2014 gives definitions of total and partial pressure vacuum gauges. lt is a continuation of ISO 3529‑1, which defines general terms used in vacuum technology, and of ISO 3529‑2, which gives definitions of vacuum pumps and related terms.
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This European Standard is applicable to process gas compressors and process gas compressor units having an operating pressure greater than 0,5 bar (gauge), an input shaft power greater than 0,5 kW and designed to compress all gases other than air, nitrogen or inert gases which are covered in Part 1. This document deals with all significant hazards, hazardous situations and events relevant to the design, installation, operation, maintenance, dismantling and disposal of process gas compressors and process gas compressor units, when they are used as intended and under conditions of misuse which are reasonably foreseeable by the manufacture. This part of EN 1012 includes under the general term compressor units those machines which comprise: - the compressor; - a drive system including the prime mover; - any component or device supplied which is necessary for operation. This part of EN 1012 is not applicable to compressors which are manufactured before the date of publication of this document by CEN. The requirements of this European Standard do not take into account the interaction between the compressor/compressor unit and other processes carried out on site. Excluded are: - refrigerant compressors used in refrigerating systems or heat pumps for which the safety requirements are given in EN 60335-2-34 or EN 12693; - the specification of performance levels and/or safety integrity levels for safety related parts of control systems. Performance levels and/or safety integrity levels are an important aspect of compressor design and should be determined by the manufacturer and the user based on a risk assessment (see Introduction). This European Standard does not cover those safety aspects of road transport dealt with by EC legislation for trailers.
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This European Standard is applicable to process gas compressors and process gas compressor units having an operating pressure greater than 0,5 bar (gauge), an input shaft power greater than 0,5 kW and designed to compress all gases other than air, nitrogen or inert gases which are covered in Part 1. This document deals with all significant hazards, hazardous situations and events relevant to the design, installation, operation, maintenance, dismantling and disposal of process gas compressors and process gas compressor units, when they are used as intended and under conditions of misuse which are reasonably foreseeable by the manufacturer (see Clause 4).
This part of EN 1012 includes under the general term compressor units those machines which comprise:
- the compressor;
- a drive system including the prime mover;
- any component or device supplied which is necessary for operation.
This part of EN 1012 is not applicable to compressors which are manufactured before the date of publication of this document by CEN.
The requirements of this European Standard do not take into account the interaction between the compressor/compressor unit and other processes carried out on site.
Excluded are:
- refrigerant compressors used in refrigerating systems or heat pumps for which the safety requirements are given in EN 60335-2-34 or EN 12693;
- the specification of performance levels and/or safety integrity levels for safety related parts of control systems.
Performance levels and/or safety integrity levels are an important aspect of compressor design and should be determined by the manufacturer and the user based on a risk assessment (see Introduction).
This European Standard does not cover those safety aspects of road transport dealt with by EC legislation for trailers.
- Standard105 pagesEnglish languagesale 10% offe-Library read for1 day
This part of EN 1012 is applicable to compressors and compressor units having an operating pressure greater than 0,5 bar and designed to compress air, nitrogen or inert gases. This document deals with all significant hazards, hazardous situations and events relevant to the design, installation, operation, maintenance, dismantling and disposal of compressors and compressor units, when they are used as intended and under conditions of misuse which are reasonably foreseeable by the manufacturer (see Clause 4).
This part of EN 1012 includes under the general term compressor units those machines which comprise:
- the compressor;
- a drive system;
- any component or device which is necessary for operation.
This part also covers the general requirements relating to process gas compressors; for specific requirements see prEN 1012-3 which applies.
This part covers compressors driven by any power media, including battery powered and which are fitted in or used with motor vehicles.
This part of EN 1012 does not cover requirements for compressors used in potentially explosive atmospheres.
This part of EN 1012 is not applicable to compressors which are manufactured before the date of publication of this document by CEN.
- Standard39 pagesEnglish languagesale 10% offe-Library read for1 day
ISO 14291:2012 defines terms relevant to quadrupole mass spectrometers (QMSs) and specifies the parameters required for specification by QMS manufacturers necessary for proper calibration and for maintaining the quality of partial pressure measurement. ISO 14291:2012 applies to QMSs with an ion source of the electron impact ionization type. Such QMSs are designed for the measurement of atomic mass-to-charge ratios m/z typically /z above 300, which are mainly used to specify organic materials, lie outside the scope of ISO 14291:2012.
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ISO 27893:2011 gives guidelines for the determination and reporting of measurement uncertainties arising during vacuum gauge calibration by direct comparison with a reference gauge carried out in accordance with ISO/TS 3567. ISO 27893:2011 describes methods for uniform reporting of uncertainties in vacuum gauge certificates. Uncertainties reported in accordance with the guidelines given in ISO 27893:2011 are transferable in the sense that the uncertainty evaluated for one result can be used as a component in the uncertainty evaluation of another measurement or calibration in which the first result is used. ISO 27893:2011 defines two measurement models that are sufficient to cover most practical cases. However, it is possible that the models given cannot be applied to newly developed vacuum gauges.
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This standard is applicable to all types of compressors. The standard lists the significant hazards associated with compressors and specifies safety requirements applicable to the design, installation, operation, maintenance and dismantling of compressors during their foreseeable lifetime and subsequent disposal. Compressors intended for use in special applications shall also comply with any specific standards relating to those applications. This standard specifies safety requirements for all compressors and additional requirements for the following specific types: Compressors for various types of gases - oil-lubricated air compressors - oil-flooded air compressors - oil-free air compressors - compressors for handling hazardous gases (gas compressors) - compressors for handling oxygen - compressors for handling acetylene Compressors for extreme temperature and pressures - high pressure compressors, over 40 bar - compressors for low inlet temperatures, below 0 oC. Other types of compressors - large compressors (over 1000 kW, input power) - portable and skid mounted air compressors - compressors exposed for potentially explosive atmospheres Exceptions The following compressors are excluded from the scope of this standard: - compressors having a shaft input power of less than 0,5 kW - compressors for gases other than acetylene, having a maximum allowable working pressure of less than 0,5 bar - refrigerant compressors used in refrigerating systems or heat pumps as defined in EN 378.
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ISO 27892:2010 specifies a method for the measurement of rapid shutdown torque (destructive torque) of turbomolecular pumps in which gas momentum is produced by axial flow type blades and/or helical channels. The main forces leading to failure of turbomolecular pumps are torques around the rotational axis. Other insignificant forces and moments that can occur lie outside the scope of ISO 27892:2010. There are two kinds of failure: rapid shutdown by whole burst and softer crash of rotor. ISO 27892:2010 applies to both. The same measurement method can be used for turbomolecular pumps and molecular drag pumps.
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ISO 2151:2004 specifies methods for the measurement, determination and declaration of the noise emission from portable and stationary compressors and vacuum pumps. It prescribes the mounting, loading and working conditions under which measurements are to be made, and includes measurement or determination of the noise emission expressed as the sound power level under specified load conditions and the emission sound pressure level at the work station under specified load conditions.
It is applicable to compressors for various types of gases, oil-lubricated air compressors, oil-flooded air compressors, water injected air compressors, oil-free air compressors, compressors for handling hazardous gases (gas compressors), compressors for handling oxygen, compressors for handling acetylene, high pressure compressors (over 40 bar/4 MPa), compressors for application at low inlet temperatures (i.e. below 0 °C), large compressors (over 1 000 kW input power), portable and skid-mounted air compressors, and rotary positive displacement blowers and centrifugal blowers and exhausters in applications of 2 bar/0,2 MPa or less. It is not applicable to compressors for gases other than acetylene having a maximum allowable working pressure of less than 0,5 bar/0,05 MPa, refrigerant compressors used in refrigerating systems or heat pumps, nor to hand-held portable compressors.
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ISO 27894:2009 defines terms relating to hot cathode ionization vacuum gauges, and specifies which parameters are given by manufacturers of hot cathode ionization gauges and which measurement uncertainties have to be considered when operating these gauges.
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ISO 27895:2009 specifies methods for the leak testing of vacuum valves used for control of gas flow or vacuum pressure in a vacuum system.It is applicable to vacuum valves that can be closed to leak rates less than 1 x 10-5 Pa m3/s for trace gas. The methods employ a sealing arrangement for the valve body, which is also specified in ISO 27895:2009. The methods are suitable for the verification of valve specifications. A valve leak rate less than the nominal leak rate specified by the manufacturer during and after the operation enables the specification of such valve operating conditions as operating pressure range, permissible pressure difference between ports, bake-out temperature or operating temperature, and life cycle.
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This standard is applicable to all vacuum pumps, vacuum pump combinations and vacuum pumping systems. The standard lists the significant hazards associated with vacuum pumps and specifies safety requirements applicable to the design, installation, operation, maintenance and dismantling of vacuum pumps during their foreseeable life and subsequent disposal.
The scope does not include pumps designed to pump continuously on open systems where the pump inlet pressure is above 75 kPA (750 mbar) absolute, i.e. vacuum cleaners, ventilation fans).
Vacuum pumps intended for use in special applications shall also comply with any specific standards relating to those applications.
- Standard32 pagesEnglish languagesale 10% offe-Library read for1 day
This standard is applicable to all vacuum pumps, vacuum pump combinations and vacuum pumping systems. The standard lists the significant hazards associated with vacuum pumps and specifies safety requirements applicable to the design, installation, operation, maintenance and dismantling of vacuum pumps during their foreseeable life and subsequent disposal.
The scope does not include pumps designed to pump continuously on open systems where the pump inlet pressure is above 75 kPA (750 mbar) absolute, i.e. vacuum cleaners, ventilation fans).
Vacuum pumps intended for use in special applications shall also comply with any specific standards relating to those applications.
- Standard32 pagesEnglish languagesale 10% offe-Library read for1 day
This International Standard specifies methods for the measurement, determination and declaration of the noise emission from portable and stationary compressors and vacuum pumps. It prescribes the mounting, loading and working conditions under which measurements are to be made, and includes measurement or determination of the noise emission expressed as - the sound power level under specified load conditions, - the emission sound pressure level at the work station under specified load conditions.
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The measurements deal with diffusion pumps, ejector pumps, and booster pumps, i.e. pumps capable of operation in both the molecular and laminar flow regions.
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The considered method of measurement deals with vapours jet vacuum pumps, diffusions pumps and diffusion-ejector pumps. The dependence of the performance of these pumps on the backing pressure can only be completely described be means of a curve relating the inlet and backing pressure over the range of operation. The recommended test dome and the principle of the test equipment are illustrated.
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Only leak detectors are described which have an integral high vacuum system to maintain the sensing element of the mass spectrometer at a low pressure. Two procedures are outlined, one to determine the minimum detectable leak rate and the other for determination of the minimum detectable concentration ratio.
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This part 1 of ISO 18623 is applicable to compressors and compressor units having an operating pressure greater than 0,5 bar and designed to compress air, nitrogen or inert gases. This standard deals with all significant hazards, hazardous situations and events relevant to the design, installation, operation, maintenance, dismantling and disposal of compressors and compressor units, when they are used as intended and under conditions of misuse which are reasonably foreseeable by the manufacturer (see Clause 4).
This part of ISO 18623 includes under the general term compressor units those machines which comprise:
- the compressor;
- a drive system;
- any component or device which is necessary for operation.
This part covers compressors driven by any power media, including battery powered and which are fitted in or used with motor vehicles.
The significant hazards dealt with in the standard are identified in Annex A.
It does not cover requirements for compressors and compressor units used in potentially explosive atmospheres.
It is not applicable to compressors and compressor units which are manufactured before the date of publication of this standard.
It does not cover compressors and compressor units for processing petroleum, petrochemicals, or chemicals within the scope of ISO/TC 67.
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This standard is applicable to all vacuum pumps, vacuum pump combinations and vacuum pumping systems. The standard lists the significant hazards associated with vacuum pumps and specifies safety requirements applicable to the design, installation, operation, maintenance and dismantling of vacuum pumps during their foreseeable life and subsequent disposal.
The scope does not include pumps designed to pump continuously on open systems where the pump inlet pressure is above 75 kPA (750 mbar) absolute, i.e. vacuum cleaners, ventilation fans).
Vacuum pumps intended for use in special applications shall also comply with any specific standards relating to those applications.
- Draft7 pagesEnglish languagesale 10% offe-Library read for1 day
This part of EN 1012 is applicable to compressors having an operating pressure greater than 0,5 bar and designed to utilise all gases other than air, nitrogen or inert gases which are covered in part 1. The standard lists the significant hazards associated with compressors and specifies safety requirements applicable to the design, installation, operation, maintenance and dismantling of compressors during their foreseeable lifetime and subsequent disposal.
This part of EN 1012 includes under the general term compressors, those machines which comprise;
- the compressor itself
- a prime mover
- any component or device supplied which is necessary for safe operation of the compressor.
In addition it applies to partly completed compressors having a compressor in combination with some of these components as well as compressor assemblies operating in combination.
Excluded are refrigerant compressors used in refrigerating systems or heat pumps as defined in EN 378-1.
- Draft31 pagesEnglish languagesale 10% offe-Library read for1 day
This standard is applicable to all vacuum pumps, vacuum pump combinations and vacuum pumping systems. The standard lists the significant hazards associated with vacuum pumps and specifies safety requirements applicable to the design, installation, operation, maintenance and dismantling of vacuum pumps during their foreseeable life and subsequent disposal.
The scope does not include pumps designed to pump continuously on open systems where the pump inlet pressure is above 75 kPA (750 mbar) absolute, i.e. vacuum cleaners, ventilation fans).
Vacuum pumps intended for use in special applications shall also comply with any specific standards relating to those applications.
- Draft7 pagesEnglish languagesale 10% offe-Library read for1 day
This part of EN 1012 is applicable to compressors having an operating pressure greater than 0,5 bar and designed to utilise all gases other than air, nitrogen or inert gases which are covered in part 1. The standard lists the significant hazards associated with compressors and specifies safety requirements applicable to the design, installation, operation, maintenance and dismantling of compressors during their foreseeable lifetime and subsequent disposal. This part of EN 1012 includes under the general term compressors, those machines which comprise; - the compressor itself - a prime mover - any component or device supplied which is necessary for safe operation of the compressor. In addition it applies to partly completed compressors having a compressor in combination with some of these components as well as compressor assemblies operating in combination. Excluded are refrigerant compressors used in refrigerating systems or heat pumps as defined in EN 378-1.
- Draft31 pagesEnglish languagesale 10% offe-Library read for1 day
ISO 3669:2017 specifies the dimensions of fixed or rotatable bolted knife-edge flanges used in vacuum systems for pressures ranging from atmospheric to as low as 10−11 Pa.
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This standard specifies the requirements for leak detection systems - class I for use with double-skin systems, designed for water polluting fluids.
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ISO 2861:2013 specifies the dimensions of the clamped-type quick-release couplings used in vacuum technology, as well as those of the O-rings and their carriers associated with these couplings, used to ensure vacuum tightness.
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This part of ISO 21360 specifies methods for measuring the volume flow rate, base pressure, water vapour tolerance, power consumption, and the lowest start-up temperature of positive displacement vacuum pumps, which discharge gas against atmospheric pressure and with a usual base pressure In this part of ISO 21360, it is necessary to use the determinations of volume flow rate and base pressure specified in ISO 21360‑1. This part of ISO 21360 also applies to the testing of other types of pumps which can discharge gas against atmospheric pressure, e.g. drag pumps.
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This standard is applicable to all types of compressors. The standard lists the significant hazards associated with compressors and specifies safety requirements applicable to the design, installation, operation, maintenance and dismantling of compressors during their foreseeable lifetime and subsequent disposal. Compressors intended for use in special applications shall also comply with any specific standards relating to those applications. This standard specifies safety requirements for all compressors and additional requirements for the following specific types: Compressors for various types of gases - oil-lubricated air compressors - oil-flooded air compressors - oil-free air compressors - compressors for handling hazardous gases (gas compressors) - compressors for handling oxygen - compressors for handling acetylene Compressors for extreme temperature and pressures - high pressure compressors, over 40 bar - compressors for low inlet temperatures, below 0 oC. Other types of compressors - large compressors (over 1000 kW, input power) - portable and skid mounted air compressors - compressors exposed for potentially explosive atmospheres Exceptions The following compressors are excluded from the scope of this standard: - compressors having a shaft input power of less than 0,5 kW - compressors for gases other than acetylene, having a maximum allowable working pressure of less than 0,5 bar - refrigerant compressors used in refrigerating systems or heat pumps as defined in EN 378.
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