ISO/TS 15338:2020
(Main)Surface chemical analysis — Glow discharge mass spectrometry — Operating procedures
Surface chemical analysis — Glow discharge mass spectrometry — Operating procedures
This document gives procedures for the operation and use of glow discharge mass spectrometry (GD-MS). There are several GD-MS systems from different manufacturers in use and this document describes the differences in their operating procedures when appropriate. NOTE This document is intended to be read in conjunction with the instrument manufacturers' manuals and recommendations.
Analyse chimique des surfaces — Spectrométrie de masse à décharge luminescente (GD-MS) — Introduction à l'utilisation
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Standards Content (Sample)
TECHNICAL ISO/TS
SPECIFICATION 15338
Second edition
2020-02
Surface chemical analysis — Glow
discharge mass spectrometry —
Operating procedures
Analyse chimique des surfaces — Spectrométrie de masse à décharge
luminescente (GD-MS) — Introduction à l'utilisation
Reference number
ISO/TS 15338:2020(E)
©
ISO 2020
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ISO/TS 15338:2020(E)
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ii © ISO 2020 – All rights reserved
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ISO/TS 15338:2020(E)
Contents Page
Foreword .iv
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Principle . 1
5 Apparatus . 1
6 Routine operations . 6
6.1 Cleaning the system . 6
6.2 Support gas handling . 6
7 Calibration . 7
7.1 Mass calibration . 7
7.2 Detector calibration . 7
7.3 Routine checks . 8
8 Data acquisition. 9
8.1 Sample preparation . 9
8.2 Procedure setup . 9
8.3 Data acquiring .10
9 Quantification .
...
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