ISO 15470:2017

Surface chemical analysis - X-ray photoelectron spectroscopy - Description of selected instrumental performance parameters

ISO 15470:2017 describes the way in which specific aspects of the performance of an X-ray photoelectron spectrometer are described.

Analyse chimique des surfaces — Spectroscopie de photoélectrons X — Description de certains paramètres relatifs à la performance instrumentale

General Information

• Status: Published
• Publication Date: 01-Mar-2017
• ICS: 71.040.40 - Chemical analysis
• Technical Committee: ISO/TC 201/SC 7 - Electron spectroscopies
• Drafting Committee: ISO/TC 201/SC 7 - Electron spectroscopies
• Current Stage: 9093 - International Standard confirmed
• Start Date: 16-Jul-2022
• Completion Date: 13-Dec-2025

Relations

• Revises: ISO 15470:2004 - Surface chemical analysis - X-ray photoelectron spectroscopy - Description of selected instrumental performance parameters
• Effective Date: 16-Jul-2016

Overview

ISO 15470:2017 provides a standardized framework for describing selected instrumental performance parameters of X-ray photoelectron spectrometers (XPS). Published as the second edition by ISO/TC 201/SC 7, the document aims to make manufacturer specifications and instrument data comparable and unambiguous for users and purchasers of XPS systems. It complements existing vocabularies and calibration methods referenced in ISO 18115 and ISO 15472.

Practical value: the standard helps labs, instrument buyers, and manufacturers present and interpret performance claims consistently, improving equipment selection, benchmarking, and quality assurance for surface chemical analysis.

Key Topics

• Scope and purpose: Describes which aspects of spectrometer performance should be documented and the agreed meaning of those items.

• Method of analysis: Requires a short description of analytical methods available in the system and optional techniques integrated in the instrument.

• Samples and system configuration: Specifies allowable sample size/shape and the geometric configuration and tolerances of significant components (for example, angular tolerances).

• X-ray source details: Requires specification of anode type, unwanted X-ray energies and relative intensities, anode power (potential and filament emission current for each operating mode), and expected anode lifetime (guaranteed, mean historical, or graphical performance vs hours).

• Intensity performance and energy resolution: Defines measurement of energy resolution using the FWHM of the Ag 3d peak from a cleaned silver foil, with peak height and FWHM reported for each operating mode. Drift over 10 min and 1 h is desirable to state.

• Energy scale and calibration: Requires repeatability statistics for Cu 2p peak binding energy on re-positioned samples and binding energy error at Ag 3d when calibrated with Cu 2p and Au 4f. References ISO 15472 for calibration methodology.

• Linearity and response function: Specifies maximum useful count rate and limits for count-rate linearity (example: ±2%), and requires the spectrometer response function or its energy dependence.

• Imaging and lateral resolution: Defines three validated methods to measure lateral resolution (Methods 1–3), including use of isolated features, material edges, and knife-edge over a deep hole. Resolution metrics are described in terms of FWHM or 12%–88% intensity transitions.

• Charge neutralization and angle-resolved XPS: Describes required reporting of neutralization methods and example effectiveness data (e.g., C 1s peaks in PET), plus provisions for sample manipulation for angle-resolved measurements.

• Vacuum environment: Instrument vacuum conditions relevant to performance should be reported.

Applications

• Vendor specification and comparison of XPS systems
• Acceptance testing and procurement evaluation
• Laboratory QA/QC and method validation
• Instrument maintenance planning and lifetime estimation

Related Standards

• ISO 18115 (Surface chemical analysis - Vocabulary) for terms and definitions
• ISO 15472 for binding energy scale calibration methods

By following ISO 15470:2017, organizations can improve clarity in instrument datasheets, ensure consistent performance reporting, and facilitate objective comparison and selection of XPS instrumentation for surface chemical analysis.

Standards Content (Sample)

INTERNATIONAL ISO
STANDARD 15470
Second edition
2017-03
Surface chemical analysis — X-ray
photoelectron spectroscopy —
Description of selected instrumental
performance parameters
Analyse chimique des surfaces — Spectroscopie de photoélectrons
X — Description de certains paramètres relatifs à la performance
instrumentale
Reference number
©
ISO 2017
© ISO 2017, Published in Switzerland
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form
or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior
written permission. Permission can be requested from either ISO at the address below or ISO’s member body in the country of
the requester.
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ii © ISO 2017 – All rights reserved

Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Abbreviated terms . 1
5 Description of selected instrumental performance parameters . 1
5.1 Method of analysis . 1
5.2 Samples . 1
5.3 System configuration . 2
5.4 X-ray source . 2
5.4.1 Anode type . 2
5.4.2 Anode power . 2
5.4.3 Expected anode lifetime . 2
5.5 Spectrometer intensity performance and energy resolution . 2
5.6 Spectrometer energy scale . 2
5.7 Spectrometer intensity linearity. 3
5.8 Spectrometer response function . 3
5.9 Imaging and selected area resolution . 3
5.9.1 General. 3
5.9.2 Method 1 . 3
5.9.3 Method 2 . 3
5.9.4 Method 3 . 4
5.10 Charge neutralization . 4
5.11 Angle-resolved XPS . 4
5.12 Vacuum environment . 4
Bibliography . 5
Foreword
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electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2 (see www .iso .org/ directives).
Attention is drawn to the possibility that some of the elements of this document may be the subject of
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URL: w w w . i s o .org/ iso/ foreword .html.
This document was prepared by Technical Committee ISO/TC 201, Surface chemical analysis,
Subcommittee SC 7, X-ray photoelectron spectroscopy.
This second edition cancels and replaces the first edition (ISO 15470:2004), of which it constitutes a
minor revision.
The changes compared to the previous edition are as follows:
— a typo has been corrected in 5.10;
— a Bibliography has been added;
— the text has been editorially revised to comply with the most recent drafting rules.
iv © ISO 2017 – All rights reserved

Introduction
X-ray photoelectron spectrometers are produced by many manufacturers throughout the world. While
the basic principle of the XPS analytical method in each instrument is the same, the specific designs of
the instruments and the way that performance specifications are provided differ widely. As a result,
it is often difficult to compare the performance of instruments from one manufacturer with those
from another. This document provides a basic list of items devised to enable all X-ray photoelectron
spectrometers to be described in a common manner. This document is not intended to replace the
manufacturer’s specification, which may extend to 30 or more pages. It is intended that, where certain
items are defined in that specification, there is an agreed and defined meaning to that item.
INTERNATIONAL STANDARD ISO 15470:2017(E)
Surface chemical analysis — X-ray photoelectron
spectroscopy — Description of selected instrumental
performance parameters
1 Scope
This document describes the way in which specific aspects of the performance of an X-ray photoelectron
spectrometer are described.
2 Normative references
The following documents are referred to in the text in such a way that some or all of their content
constitutes
...