SIST EN ISO 25178-607:2019
(Main)Geometrical product specifications (GPS) - Surface texture: Areal - Part 607: Nominal characteristics of non-contact (confocal microscopy) instruments (ISO 25178-607:2018)
Geometrical product specifications (GPS) - Surface texture: Areal - Part 607: Nominal characteristics of non-contact (confocal microscopy) instruments (ISO 25178-607:2018)
This document describes the influence quantities and instrument characteristics of confocal
microscopy systems for areal measurement of surface topography. Because surface profiles can be
extracted from surface topography images, the methods described in this document can be applied to
profiling measurements as well.
Geometrische Produktspezifikationen (GPS) - Oberflächenbeschaffenheit: Flächenhaft - Teil 607: Merkmale von berührungslos messenden Geräten (konfokale Mikroskopie) (ISO 25178-607:2018)
Dieses Dokument beschreibt die Einflussgrößen und Messgerätseigenschaften von konfokalen Mikroskopie-systemen zur flächenhaften Messung von Oberflächentopographien. Da Oberflächenprofile aus Oberflächen¬topographiebildern extrahierbar sind, können die Verfahren, die in diesem Dokument beschrieben werden, auch auf Profilmessungen angewendet werden.
Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 607: Caractéristiques nominales des instruments sans contact (microscopie confocale) (ISO 25178-607:2018)
Le présent document décrit les grandeurs d'influence et les caractéristiques des instruments utilisés dans les systèmes de microscopie confocale (MC) pour le mesurage surfacique de la topographie des surfaces. Comme les profils de surface peuvent être extraits des images par topographie de surface, les métodes décrites dans le présent document peuvent également être appliqués aux mesures de profilage
Specifikacija geometrijskih veličin izdelka (GPS) - Tekstura površine: ravna - 607. del: Imenske značilnosti nekontaktnih instrumentov (konfokalna mikroskopija) (ISO 25178-607:2018)
Ta dokument opisuje vplivne veličine in značilnosti instrumentov sistemov konfokalne mikroskopije za merjenje topografije ravne površine. Ker je mogoče profile površine izluščiti iz topografskih slik površine, je večino metod, opisanih v tem dokumentu, mogoče uporabiti tudi za meritve profiliranja.
General Information
Standards Content (Sample)
SLOVENSKI STANDARD
SIST EN ISO 25178-607:2019
01-junij-2019
Specifikacija geometrijskih veličin izdelka (GPS) - Tekstura površine: ravna - 607.
del: Imenske značilnosti nekontaktnih instrumentov (konfokalna mikroskopija)
(ISO 25178-607:2018)
Geometrical product specifications (GPS) - Surface texture: Areal - Part 607: Nominal
characteristics of non-contact (confocal microscopy) instruments (ISO 25178-607:2018)
Geometrische Produktspezifikationen (GPS) - Oberflächenbeschaffenheit: Flächenhaft -
Teil 607: Merkmale von berührungslos messenden Geräten (konfokale Mikroskopie)
(ISO 25178-607:2018)
Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 607:
Caractéristiques nominales des instruments sans contact (microscopie confocale) (ISO
25178-607:2018)
Ta slovenski standard je istoveten z: EN ISO 25178-607:2019
ICS:
17.040.20 Lastnosti površin Properties of surfaces
17.040.40 Specifikacija geometrijskih Geometrical Product
veličin izdelka (GPS) Specification (GPS)
SIST EN ISO 25178-607:2019 en,fr,de
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.
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SIST EN ISO 25178-607:2019
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SIST EN ISO 25178-607:2019
EN ISO 25178-607
EUROPEAN STANDARD
NORME EUROPÉENNE
April 2019
EUROPÄISCHE NORM
ICS 17.040.20
English Version
Geometrical product specifications (GPS) - Surface texture:
Areal - Part 607: Nominal characteristics of non-contact
(confocal microscopy) instrumentss (ISO 25178-
607:2018)
Spécification géométrique des produits (GPS) - État de Geometrische Produktspezifikationen (GPS) -
surface: Surfacique - Partie 607: Caractéristiques Oberflächenbeschaffenheit: Flächenhaft - Teil 607:
nominales des instruments sans contact (microscopie Merkmale von berührungslos messenden Geräten
confocale) (ISO 25178-607:2018) (konfokale Mikroskopie) (ISO 25178-607:2018)
This European Standard was approved by CEN on 15 February 2019.
CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this
European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references
concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN
member.
This European Standard exists in three official versions (English, French, German). A version in any other language made by
translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management
Centre has the same status as the official versions.
CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania,
Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland,
Turkey and United Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION
EUROPÄISCHES KOMITEE FÜR NORMUNG
CEN-CENELEC Management Centre: Rue de la Science 23, B-1040 Brussels
© 2019 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 25178-607:2019 E
worldwide for CEN national Members.
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SIST EN ISO 25178-607:2019
EN ISO 25178-607:2019 (E)
Contents Page
European foreword . 3
Endorsement notice . 3
2
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SIST EN ISO 25178-607:2019
EN ISO 25178-607:2019 (E)
European foreword
This document (EN ISO 25178-607:2019) has been prepared by Technical Committee ISO/TC 213
"Dimensional and geometrical product specifications and verification" in collaboration with Technical
Committee CEN/TC 290 “Dimensional and geometrical product specification and verification” the
secretariat of which is held by AFNOR.
This European Standard shall be given the status of a national standard, either by publication of an
identical text or by endorsement, at the latest by October 2019, and conflicting national standards shall
be withdrawn at the latest by October 2019.
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. CEN shall not be held responsible for identifying any or all such patent rights.
According to the CEN-CENELEC Internal Regulations, the national standards organizations of the
following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria,
Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia,
France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta,
Netherlands, Norway, Poland, Portugal, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland,
Turkey and the United Kingdom.
Endorsement notice
The text of ISO 25178-607:2019 has been approved by CEN as EN ISO 25178-607 without any
modification.
3
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SIST EN ISO 25178-607:2019
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SIST EN ISO 25178-607:2019
INTERNATIONAL ISO
STANDARD 25178-607
First edition
2019-03
Geometrical product specifications
(GPS) — Surface texture: Areal —
Part 607:
Nominal characteristics of non-contact
(confocal microscopy) instruments
Spécification géométrique des produits (GPS) — État de surface:
Surfacique —
Partie 607: Caractéristiques nominales des instruments sans contact
(microscopie confocale)
Reference number
ISO 25178-607:2019(E)
©
ISO 2019
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SIST EN ISO 25178-607:2019
ISO 25178-607:2019(E)
COPYRIGHT PROTECTED DOCUMENT
© ISO 2019
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting
on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address
below or ISO’s member body in the country of the requester.
ISO copyright office
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Phone: +41 22 749 01 11
Fax: +41 22 749 09 47
Email: copyright@iso.org
Website: www.iso.org
Published in Switzerland
ii © ISO 2019 – All rights reserved
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SIST EN ISO 25178-607:2019
ISO 25178-607:2019(E)
Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Descriptions of the influence quantities . 5
Annex A (informative) Classification of in-plane scanning techniques for confocal microscopes .7
Annex B (informative) Theory of operation of confocal microscopes .13
Annex C (informative) Thin and thick films with confocal microscopes.17
Annex D (informative) Relation to the GPS matrix model .19
Bibliography .20
© ISO 2019 – All rights reserved iii
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SIST EN ISO 25178-607:2019
ISO 25178-607:2019(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2 (see www .iso .org/directives).
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of
any patent rights identified during the development of the document will be in the Introduction and/or
on the ISO list of patent declarations received (see www .iso .org/patents).
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation of the voluntary nature of standards, the meaning of ISO specific terms and
expressions related to conformity assessment, as well as information about ISO's adherence to the
World Trade Organization (WTO) principles in the Technical Barriers to Trade (TBT) see www .iso
.org/iso/foreword .html.
This document was prepared by Technical Committee ISO/TC 213, Dimensional and geometrical product
specifications and verification.
A list of all parts in the ISO 25178 series can be found on the ISO website.
Any feedback or questions on this document should be directed to the user’s national standards body. A
complete listing of these bodies can be found at www .iso .org/members .html.
iv © ISO 2019 – All rights reserved
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SIST EN ISO 25178-607:2019
ISO 25178-607:2019(E)
Introduction
This document is a geometrical product specification (GPS) standard and is to be regarded as a general
GPS standard (see ISO 14638). It influences the chain link F of the chains of standards on areal surface
texture and profile surface texture.
The ISO/GPS matrix model given in ISO 14638 gives an overview of the ISO/GPS system of which this
document is a part. The fundamental rules of ISO/GPS given in ISO 8015 apply to this document and
the default decision rules given in ISO 14253-1 apply to the specifications made in accordance with this
document, unless otherwise indicated.
For more detailed information of the relation of this document to other standards and the GPS matrix
model, see Annex D.
This document describes the metrological characteristics of confocal microscopes designed for the
measurement of surface topography maps.
For detailed information on the confocal microscopy technique, see Annex A and Annex B.
NOTE Portions of this document, particularly the informative sections, describe patented systems and
methods. This information is provided only to assist users in understanding the operating principles of confocal
microscopy. This document is not intended to establish priority for any intellectual property, nor does it imply a
license to proprietary technologies described herein.
© ISO 2019 – All rights reserved v
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SIST EN ISO 25178-607:2019
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SIST EN ISO 25178-607:2019
INTERNATIONAL STANDARD ISO 25178-607:2019(E)
Geometrical product specifications (GPS) — Surface
texture: Areal —
Part 607:
Nominal characteristics of non-contact (confocal
microscopy) instruments
1 Scope
This document describes the influence quantities and instrument characteristics of confocal
microscopy systems for areal measurement of surface topography. Because surface profiles can be
extracted from surface topography images, the methods described in this document can be applied to
profiling measurements as well.
2 Normative references
There are no normative references in this document.
3 Terms and definitions
For the purposes of this document, the terms and definitions given in ISO 25178-600 and the
following apply.
ISO and IEC maintain terminological databases for use in standardization at the following addresses:
— ISO Online browsing platform: available at https: //www .iso .org/obp
— IEC Electropedia: available at http: //www .electropedia .org/
3.1
confocal microscopy
measurement method wherein the localization of optically sectioned images during an axial scan
through the focus of a microscope’s objective provides a means to determine an areal surface
topography image
Note 1 to entry: See also ISO 25178-6:2010, 3.3.6.
Note 2 to entry: Confocal microscopes produce optically sectioned images by restricting the illumination onto
the sample and through the detection system by means of a pattern, scanning this pattern in-plane to fill the
image (see also Figure B.1).
Note 3 to entry: Illumination and detection patterns could be one or several points, slits or any order of
structures, that effectively reduce the illuminated area of the surface. The geometry of these patterns influences
the evaluation of the sectioned images and has direct influence on the metrological characteristics of the
instrument.
Note 4 to entry: The difference between a confocal point sensor and a confocal microscope is defined by the
in-plane scanning scheme. In the confocal microscope one or multiple parallel working light paths scan the
surface. This is realized with various optical elements. In contrast, the single point confocal probe scans only one
point on the sample at a time by moving either the sample or the probe. A single point confocal chromatic probe
arrangement is described in ISO 25178-602:2010, Annex B.
Note 5 to entry: Table 1 compiles alternative terms that conform at least in part to the above definition.
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SIST EN ISO 25178-607:2019
ISO 25178-607:2019(E)
Table 1 — Examples of alternative terms sometimes used for confocal microscope
Acronym Term
ICM imaging confocal microscope
a
LSCM laser-scanning confocal microscope (see also A.2)
a
CLSM confocal laser-scanning microscope (same method as LSCM)
CSLM confocal-scanning laser microscope (same method as LSCM)
a
LSM laser-scanning microscope (same method as LSCM)
DSCM disc-scanning confocal microscope (see also A.3)
PACM or PAM programmable array confocal microscope or programmable array microscope (see also A.4)
MSCM microdisplay scanning confocal microscope (same method as PACM)
RSOM real-time scanning optical microscope
CSOM confocal-scanning optical microscope
a
The term ‘laser-scanning microscope’ has also been used to refer to laser-based scanning probes with height sensors,
such as triangulation or dynamic focus, which are different from the confocal methods described here.
3.2
illumination pattern
arrangement of single or repetitive structures placed on a conjugate image position of the microscope’s
objective (typically the field diaphragm position), restricting the illuminated parts on the sample
Note 1 to entry: The illumination pattern can be a single pinhole, equally spaced pinholes on a grid, slits, parallel
slits or any other pattern that effectively reduces the amount of illuminated area.
3.3
detection pattern
arrangement of single or repetitive structures placed on a conjugate image position of the microscope’s
objective, blocking the out-of-focus light reflected from the surface and from previously illuminated parts
Note 1 to entry: The illumination and detection patterns need not have the same geometry.
3.4
in-plane scanning
mechanical or optical displacement of the illumination and/or detection patterns to fulfil an optical
section image
Note 1 to entry: Annex A describes the principle of in-plane scanning for typical confocal arrangements.
3.5
axial scan
mechanical or optical displacement between the sample under inspection and the imaging optics
Note 1 to entry: The imaging optics is nominally parallel to the axial scan axis of the microscope.
3.6
axial scan length
total range travelled by the confocal microscope axial scan, usually the total displacement between the
sample and the microscope’s objective translated along its optical axis during data acquisition
Note 1 to entry: This parameter might be limited by the overall range of the axial scanner, but is generally a
parameter chosen by the operator taking account of the height range of the surface topography.
3.7
axial response
signal recorded for an individual image point of the confocal image as a function of the axial scan
position
Note 1 to entry: See Figure 1.
2 © ISO 2019 – All rights reserved
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SIST EN ISO 25178-607:2019
ISO 25178-607:2019(E)
Key
a normalized detector signal
b z-height
1 background offset
2 full width at half maximum
3 axial response
Figure 1 — Schematic axial response signal
3.8
full width at half maximum
FWHM
Δ
z-HM
region of the axial response symmetrical to the maximum peak where the signal falls to one-half of the
maximum peak signal
Note 1 to entry: The FWHM is used as a metric (or estimator) of the thickness of the optically sectioned slice.
3.9
maximum signal position
position of the axial scan where the amplitude of the axial response is maximum
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SIST EN ISO 25178-607:2019
ISO 25178-607:2019(E)
3.10
background offset
value of the axial response for axial positions far from the maximum signal position
Note 1 to entry: The background offset might be caused by residual reflected and scattered light within the
instrument and from the sample, “cross talking” between pinholes and incomplete sectioning behaviour of the
light path.
Note 2 to entry: Methods exist which reduce or make use of background offset effects.
3.11
axial steps
distance between two consecutive confocal images during an axial scan
3.12
confocal imaging rate
number of confocal images per second provided by a confocal microscope without axial scan
3.13
axial scanning rate
number of confocal images per second provided by a confocal microscope during an axial scan,
expressed as the number of acquired plane sections per second
Note 1 to entry: The axial scanning rate might be equal to or lower than the confocal imaging rate depending on
the scanning hardware used and the processing algorithms.
3.14
flatness calibration surface
reference surface used to measure and adjust for the microscope flatness error
Note 1 to entry: The calibration surface is typically an optically flat single surface mirror (flatness ≤ λ/10 and
roughness average R < 0,5 nm).
a
3.15
confocal peak location algorithm
algorithm used to estimate the maximum signal position of the surface point from the axial response
Note 1 to entry: The maximum signal (confocal peak) position is equated to the axial location of the surface.
Note 2 to entry: The confocal peak is not necessarily represented by the absolute maximum of the axial response;
there are multiple algorithms (see Annex B).
3.16
maximum measurable local slope
largest slope that can be measured on an optically smooth surface
Note 1 to entry: See ISO 25178-600:2019, Annex A.
3.17
confocal stack
series of optical sections taken during an axial scan
3.18
confocal topography image
areal topography image derived from a stack of optical sections obtained during an axial scan
Note 1 to entry: Generally, for each pixel of the image the confocal peak location algorithm (3.15) is applied to the
confocal stack (3.17) to calculate the height of the surface.
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SIST EN ISO 25178-607:2019
ISO 25178-607:2019(E)
3.19
confocal intensity image
areal intensity image derived from a stack of optical sections obtained during an axial scan
Note 1 to entry: For each pixel of the image an algorithm is applied that finds the reflected intensity of the surface.
The applied algorithm might be different from the algorithm (3.15) to find the height of the surface.
Note 2 to entry: Such a group of images typically shows a depth of field close to the axial scan range.
4 Descriptions of the influence quantities
Influence quantities for confocal microscopy instruments are given in Table 2. The table indicates the
metrological characteristics (see ISO 25178-600:2019, Table 1) affected by deviations in the influence
quantities.
Table 2 — Influence quantities for confocal microscopy
Metrological
Component Element Influence quantities characteristic
affected
λ Measurement optical wavelength α
0 z
(see ISO 25178-600)
Light source
B Measurement optical bandwidth α
λ0 z
(ISO 25178-600)
A Microscope numerical aperture α , α , α , W
N x y z R
(see ISO 25178-600)
M Magnification between object sizes on the surface and α , α
IMG x y
image sizes on the sensor
Δ Optical aberrations – a function describing net deviations in α
PATH z
the measured optical path of the system, derived from im-
perfections in the optics and the topography of the flatness
Microscope imaging
calibration surface
system
Q General quality of the optical components used, including α , α , z , l ,
OPT x y FLT x
aberrations, transmission and alignment errors l , l , W , Δ , Δ
y z R x y
P Lateral distortion of the magnified image on the camera α , α , α , z ,
DISxy x y z FLT
l , l , l , W
x y z R,
Δ , Δ
x y
U Illumination uniformity – distribution of illumination across α , α , α , z ,
I(x,y) x y z FLT
the field of view of the object (a highly uniform, constant l , l , l
x y z
distribution is desired)
a
These influence quantities arise from the interaction between the instrument and the sample being measured.
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SIST EN ISO 25178-607:2019
ISO 25178-607:2019(E)
Table 2 (continued)
Metrological
Component Element Influence quantities characteristic
affected
δ x-pixel spacing of the imaging camera α , W
x x R
Camera
δ y-pixel spacing of the imaging camera α W
y y, R
f Axial scanning rate (3.13) α , l
z z z
Acquisition
z Axial scan length (3.6) α , l
TOT z z
Δ Axial steps (3.11) α
software
z z
Controller
T Integration time required to complete a single scan in z N
I M
Profile
analysis A Confocal peak location algorithm (see 3.15) α , l
ALG z z
software
Lateral sampling interval – equal to the lateral pixel W
R
D or
x
spacing of the camera (δ , δ ) divided by the magnification
x y
D
y
(ISO 25178-600)
Δ Scan linearity α , l
z-LIN z z
Instrument overall
Instrument noise
N N
I M
(see ISO 25178-600)
N Environmental vibration – unwanted motion between the N
VIB M
surface being measured and the optical system
a
θ Tilt – relative angle between the optical axis of the system α , α , α
TLT x y z
and the local sample normal. Object surface slopes that cause
light to reflect near to the edge or outside of the numerical
aperture of the objective also likely cause significant signal
loss. Therefore, in optical systems the maximum measura-
ble local slope (3.16) is largely determined by the numerical
aperture. The issue is illustrated in ISO 25178-600
Sample
a
n Complex index of refraction of dissimilar materials α
z
a
T Thickness of transparent or semi-transparent surface films α
FLM z
(see Annex C for more information)
a
F Under-resolved features – object features with lateral dimen- α
UR z
sions in the order of or smaller than the lateral resolution
a
These influence quantities arise from the interaction between the instrument and the sample being measured.
6 © ISO 2019 – All rights reserved
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SIST EN ISO 25178-607:2019
ISO 25178-607:2019(E)
Annex A
(informative)
Classification of in-plane scanning techniques for confocal
microscopes
A.1 General
This annex describes some technical principles used for scanning the illumination and detection
patterns of a confocal arrangement in the plane perpendicular to the optical axis (x,y plane) to produce
an optical section. To recover a topography map of the surface, the in-plane scanning is combined with
axial scanning to produce a sequence of optical sections. The axial scanning process is described in
Annex B.
A number of different confocal arrangements have been developed. There are different techniques for in-
plane scanning, for illumination and detection patterns, and for detector arrangements. Each different
configuration optimizes a given application such as maximization of light efficiency, optimization of
signal-to-noise ratio, optimization of speed, simplification or reduction of hardware cost, adaptation to
different excitation wavelengths and others. Three typical configurations of confocal microscopes are
laser scanning, disc scanning and programmable array scanning.
A.2 Laser-scanning confocal microscope (LSCM) configuration
In a laser-scanning confocal microscope the illumination and detection pattern consists of two single
pinholes placed on optically conjugate planes. The beam emerging from the illumination pinhole
is scanned in a raster fashion across the sample in order to build up a confocal image point by point.
Figure A.1 shows the basic configuration of a LSCM. A laser beam illuminates a pinhole. The image of
the pinhole is formed on the sample placed on the focal plane of the objective. The light reflected or
backscattered from the sample passes back through the objective and is imaged onto a second pinhole
called the confocal aperture placed on a conjugate position to the illumination pinhole. A detector on
the rear of the confocal aperture records the signal reflected from the surface. Light reflected from out-
of-focus positions reaches the confocal aperture plane as an out-of-focus image, resulting in a low signal
at the detection plane. The beam of the illumination pinhole is scanned in a raster fashion along the x-
and y-directions in order to generate a confocal image. Generally, the beam is deflected by two mirrors
that rotate in perpendicular directions.
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SIST EN ISO 25178-607:2019
ISO 25178-607:2019(E)
Key
1 laser
2 illumination pinhole
3 beamsplitter
4 detector
5 detection pinhole
6 field lens
7 beam scanning device
8 objective
9 axial scanning device
10 sample
Dash-dotted lines: optical axes
Solid lines: illumination and observation path
Figure A.1 — Typical arrangement of a LSCM
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SIST EN ISO 25178-607:2019
ISO 25178-607:2019(E)
A.3 Disc-scanning confocal microscope (DSCM) configuration
The structure of the pattern for the in-plane scanning can be multiple pinholes or slits. Figure A.2 shows
the basic schematic of a disc-scanning confocal microscope, exemplified by a multi-pinhole pattern. A
light source is collimated and directed to a multi-pinhole disc. The disc contains a pattern of apertures
(Figure A.3) that functions simultaneously as illumination pattern and detection pattern. Each one of
the pinholes is imaged onto the surface by means of a field lens and the microscope’s objective. The
light reflected or backscattered from the surfaces for each illuminated spot passes back through the
objective and the field lens and is focused onto the same pinhole of the disc. Light arising from the focal
plane is well focused on the disc surface while light from out-of-focus regions is focused onto planes
before or after the disc. Each one of the pinholes acts as an illumination and detection element at the
same time. Light transmitted through the pinholes is focused onto a two-dimensional light detector, like
a CCD camera. The disc is rotated at high speed, illuminating and filtering out-of-focus light sequentially
and produ
...
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Geometrical product specifications (GPS) - Surface texture: Areal - Part 607: Nominal
characteristics of non-contact (confocal microscopy) instruments (ISO/DIS 25178-
607:2017)
Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 607:
Caractéristiques nominales des instruments sans contact (microscopie confocale)
(ISO/DIS 25178-607:2017)
Ta slovenski standard je istoveten z: prEN ISO 25178-607
ICS:
17.040.20 Lastnosti površin Properties of surfaces
17.040.40 6SHFLILNDFLMDJHRPHWULMVNLK Geometrical Product
YHOLþLQL]GHOND *36 Specification (GPS)
oSIST prEN ISO 25178-607:2017 en,fr,de
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.
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oSIST prEN ISO 25178-607:2017
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oSIST prEN ISO 25178-607:2017
DRAFT INTERNATIONAL STANDARD
ISO/DIS 25178-607
ISO/TC 213 Secretariat: DS
Voting begins on: Voting terminates on:
2017-03-31 2017-06-22
Geometrical product specifications (GPS) — Surface
texture: Areal —
Part 607:
Nominal characteristics of non-contact (confocal
microscopy) instruments
Spécification géométrique des produits (GPS) — État de surface: Surfacique —
Partie 607: Caractéristiques nominales des instruments sans contact (microscopie confocale)
ICS: 17.040.20
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ii © ISO 2017 – All rights reserved
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Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Descriptions of the influence quantities . 5
Annex A (informative) Classification of in-plane scanning technologiesfor confocal microscopes .7
Annex B (informative) Theory of operation of confocal microscopes .13
Annex C (informative) Thin and thick films with CMs .17
Annex D (informative) Relation to the GPS matrix model .19
Bibliography .20
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Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2 (see www .iso .org/ directives).
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of
any patent rights identified during the development of the document will be in the Introduction and/or
on the ISO list of patent declarations received (see www .iso .org/ patents).
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation on the meaning of ISO specific terms and expressions related to conformity assessment,
as well as information about ISO’s adherence to the World Trade Organization (WTO) principles in the
Technical Barriers to Trade (TBT) see the following URL: www . i so .org/ iso/ foreword .html.
This document was prepared by Technical Committee ISO/TC 213, Dimensional and geometrical product
specifications and verification.
A list of all parts in the ISO 25178- series can be found on the ISO website
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Introduction
This document is a Geometrical Product Specification (GPS) standard and is to be regarded as a general
GPS standard (see ISO/TR 14638). It influences the chain link F of the chain of standards on areal
surface texture and profile surface texture.
The ISO/GPS matrix model given in ISO 14638 gives an overview of the ISO/GPS system of which this
document is a part. The fundamental rules of ISO/GPS given in ISO 8015 apply to this document and
the default decision rules given in ISO 14253-1 apply to the specifications made in accordance with this
document, unless otherwise indicated.
For more detailed information of the relation of this document to other standards and the GPS matrix
model, see Annex D.
This document describes the metrological characteristics of confocal microscopes designed for the
measurement of surface topography maps.
For detailed information on the confocal microscopy technique, see Annex A and Annex B.
NOTE Portions of this document, particularly the informative sections, describe patented systems and
methods. This information is provided only to assist users in understanding the operating principles of confocal
microscopy. This document is not intended to establish priority for any intellectual property, nor does it imply a
license to proprietary technologies described herein.
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DRAFT INTERNATIONAL STANDARD ISO/DIS 25178-607:2017(E)
Geometrical product specifications (GPS) — Surface
texture: Areal —
Part 607:
Nominal characteristics of non-contact (confocal
microscopy) instruments
1 Scope
This document describes the influence quantities and instrument characteristics of confocal microscopy
(CM) systems for areal measurement of surface topography.
2 Normative references
There are no normative references in this document.
3 Terms and definitions
For the purposes of this document, the terms and definitions given in ISO 25178-600:2016 and the
following apply.
ISO and IEC maintain terminological databases for use in standardization at the following addresses:
— ISO Online browsing platform: available at http:// www .iso .org/ obp
— IEC Electropedia: available at http:// www .electropedia .org/
3.1
confocal microscopy
(CM)
measurement method wherein the localization of optically sectioned images during an axial scan
through the focus of a microscope’s objective provides a means to determine an areal surface
topography image
Note 1 to entry: See also a description for confocal microscopy [ISO 25178-6:2010, 3.3.6].
Note 2 to entry: Confocal microscopes produce optically sectioned images by restricting the illumination onto
the sample and through the detection system by means of a pattern and scanning the aforementioned pattern in-
plane to fill the image (see also Figure B.1).
Note 3 to entry: Illumination and detection patterns could be one or several points, slits, or any order of
structures, that effectively reduces the illuminated area of the surface. The geometry of these patterns
influences the evaluation of the sectioned images and has direct influence on the metrological characteristics of
the instrument.
Note 4 to entry: The difference between a confocal point sensor and a confocal microscope is defined by the
in-plane scanning scheme. In the confocal microscope one or multiple parallel working light paths scan the
surface. This is realized with various optical elements. In contrast the single point confocal probe scans only one
point on the sample at a time by moving either the sample or the probe. A single point confocal chromatic probe
arrangement is described in ISO 25178-602:2010, Annex B.
Note 5 to entry: Table 1 compiles alternative terms that conform at least in part to the above definition.
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Table 1 — Examples of alternative terms sometimes used for confocal microscope
Acronym Term
ICM Imaging confocal microscope
LSCM Laser scanninga confocal microscope (see also A.2)
CLSM Confocal laser scanninga microscope (same method as LSCM)
CSLM Confocal scanning laser microscope (same method as LSCM)
LSM Laser scanning microscope (same method as LSCM)a
DSCM Disc scanning confocal microscope (see also A.3)
PACM or PAM Programmable array confocal microscope or programmable array microscope (see
also A.4)
MSCM Microdisplay scanning confocal microscope (same method as PACM)
RSOM Real-time scanning optical microscope
CSOM Confocal scanning optical microscope
a
The term, “laser scanning microscope,” has also been used to refer to laser-based scanning probes with height sensors,
such as triangulation or dynamic focus, which are different from the confocal methods described here.
3.2
illumination pattern
arrangement of single or repetitive structures placed on a conjugate image position of the microscope’s
objective (typically the field diaphragm position), restricting the illuminated parts on the sample
Note 1 to entry: The illumination pattern can be a single pinhole, equally spaced pinholes on a grid, slits, parallel
slits, or any other pattern that effectively reduces the amount of illuminated area.
3.3
detection pattern
arrangement of single or repetitive structures placed on a conjugate image position of the microscope’s
objective, blocking the out-of–focus light reflected from the surface and from previously illuminated parts
Note 1 to entry: The illumination and detection patterns need not have the same geometry.
3.4
optical sectioning strength
degree to which a confocal microscope rejects out of focus light
Note 1 to entry: The optical sectioning strength depends on the numerical aperture (see ISO 25178-600:2016,
3.3.6) of the objective.
Note 2 to entry: The optical sectioning strength depends on both the size and shape of individual features and on
the arrangement of features in both the illumination and detection patterns.
3.5
in-plane scanning
mechanical or optical displacement of the illumination and/or detection patterns to fulfill an optical
section image
Note 1 to entry: Annex A describes the principle of in-plane scanning for typical confocal arrangements.
3.6
axial scan
mechanical or optical displacement between the sample under inspection and the imaging optics
Note 1 to entry: The imaging optics is nominally parallel to the axial scan axis of the microscope.
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3.7
axial scan length
total range traveled by the CM axial scan, usually the total displacement between the sample and the
microscope’s objective translated along its optical axis during data acquisition
Note 1 to entry: This parameter may be limited by the overall range of the axial scanner but is generally a
parameter chosen by the operator taking account of the height range of the surface topography.
3.8
axial response
signal recorded for an individual image point of the confocal image as a function of the axial scan
position
Note 1 to entry: See Figure 1.
Key
a normalized detector signal
b z (µm)
1 background offset
2 full width at half maximum
3 axial response
Figure 1 — Schematic axial response signal
3.9
full width at half maximum
FWHM
region of the axial response symmetrical to the maximum peak where the signal falls to one-half of the
maximum peak signal
Note 1 to entry: The FWHM is used as a metric (or estimator) of the thickness of the optically sectioned slice.
3.10
maximum signal position
position of the axial scan where the amplitude of the axial response is maximum
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3.11
background offset
value of the axial response for axial positions far from the maximum peak
Note 1 to entry: The background offset may be caused by residual reflected and scattered light within the
instrument and from the sample, “cross talking” between pinholes and incomplete sectioning behaviour of the
light path.
Note 2 to entry: Methods exist which reduce or make use of background offset effects.
3.12
axial steps
distance between two consecutive confocal images during an axial scan
3.13
confocal imaging rate
number of confocal images per second provided by a confocal microscope without axial scan
3.14
axial scanning rate
number of confocal images per second provided by a confocal microscope during an axial scan,
expressed as the number of acquired plane sections per second
Note 1 to entry: The axial scanning rate may be equal to or lower than the confocal imaging rate depending on
the scanning hardware used and the processing algorithms.
3.15
flatness calibration surface
reference surface used to measure and adjust for the microscope flatness error
Note 1 to entry: The calibration surface is typically an optically flat single surface mirror (flatness ≤ λ/10 and
Ra < 0,5 nm).
3.16
confocal peak location algorithm
algorithm used to estimate the axial (height) position of the surface point from the axial response
Note 1 to entry: The confocal peak is equated to the axial location of the surface.
Note 2 to entry: The confocal peak is not necessarily represented by the absolute maximum of the axial response;
there are multiple algorithms (see Annex B).
3.17
maximum measurable local slope
largest slope that can be measured on an optically smooth surface
Note 1 to entry: See ISO 25178-600:2016, Annex A.
3.18
confocal stack
series of optical sections taken during an axial scan
3.19
confocal topography image
areal topography image derived from a stack of optical sections obtained during an axial scan
Note 1 to entry: For each pixel of the image the confocal peak location algorithm (3.16) is applied to the confocal
stack (3.18) to calculate the height of the surface.
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3.20
confocal intensity image
areal intensity image derived from a stack of optical sections obtained during an axial scan
Note 1 to entry: For each pixel of the image an algorithm is applied that finds the reflected intensity of the surface.
The applied algorithm may be different from the algorithm (3.16) to find the height of the surface.
Note 2 to entry: Such an image typically shows a depth of field close to the axial scan range.
4 Descriptions of the influence quantities
Influence quantities for CM instruments are given in Table 2. The table indicates the metrological
characteristics (see ISO 25178-600:2016, Table 1) affected by deviations in the influence quantities.
Table 2 — Influence quantities for confocal microscopy
Metrological
Compo-
Element Influence quantities characteris-
nent
tic affected
λ Measurement optical wavelength α
0 z
(see ISO 25178-600:2016, 3.3.3)
Light source
B Measurement optical bandwidth α
λ0 z
(ISO 25178-600:2016, 3.3.2)
A microscope numerical aperture α , α , α , W
N x y z R
(see ISO 25178-600:2016, 3.3.6)
M magnification between object sizes on the surface and image α , α
IMG x y
sizes on the sensor
Δ optical aberrations – a function describing net deviations in the α
PATH z
measured optical path of the system, derived from imperfec-
tions in the optics and topography of the reference surface
Microscope imaging
Q general quality of the optical components used, including aber- α , α , z ,
OPT x y FLT
system
rations, transmission, alignment errors etc. l , l , l , W ,
x y z R
Δ
PERxy
P lateral distortion of the magnified image on the camera α , α , α ,
DISxy x y z
z , l , l , l ,
FLT x y z
W Δ
R, PERxy
U (x- illumination uniformity – distribution of illumination across the α , α , α ,
I x y z
,y) field of view of the object (a highly uniform, constant distribu- z , l , l , l
FLT x y z
tion is desired)
Δ x-pixel spacing of the imaging camera α , W
x x R
Camera
Δ y-pixel spacing of the imaging camera α W
y y, R
f axial scanning rate (3.14) α , l
z z Z
Acqui-
z axial scan length (3.7) α , l
TOT z Z
sition
Δ axial steps (3.12) α
z z
Software
Controller
T integration time required to complete a single scan in z N
I M
Profile A confocal peak location algorithm (see 3.16) α , l
ALG z z
Analysis
Software
a
These influence quantities arise from the interaction between the instrument and the sample being measured.
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Table 2 (continued)
Metrological
Compo-
Element Influence quantities characteris-
nent
tic affected
lateral sampling interval – equal to the lateral pixel spac- W
R
D or
x
ing of the camera (Δ Δ ) divided by the magnification
x, y
D
y
(ISO 25178-600:2016, 3.1.15)
Δ scan linearity α , l
z-LIN z z
Instrument Overall
instrument noise
N N
I M
(see ISO 25178-600:2016, 3.1.12)
N environmental vibration – unwanted motion between the sur- N
VIB M
face being measured and the optical system.
a
θ tilt – relative angle between the optical axis of the system and α , α , α
TLT x y z
the local sample normal. Object surface slopes that cause light
to reflect at or near to the edge or outside of the numerical aper-
ture of the objective also likely cause significant signal loss.
Sample
a
n the complex index of refraction of dissimilar materials. α
z
a
T thickness of transparent or semi-transparent films α
FLM z
a
F Under resolved features - Object features having lateral dimen- α
UR z
sions on the order of or smaller than the lateral resolution.
a
These influence quantities arise from the interaction between the instrument and the sample being measured.
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Annex A
(informative)
Classification of in-plane scanning technologiesfor confocal
microscopes
A.1 General
This annex describes some technical principles used for scanning the illumination and detection
patterns of a confocal arrangement in the plane perpendicular to the optical axis (x,y plane) to produce
an optical section.
...
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