SIST EN ISO 11554:2006
(Main)Optics and photonics - Lasers and laser-related equipment - Test methods for laser beam power, energy and temporal characteristics (ISO 11554:2006)
Optics and photonics - Lasers and laser-related equipment - Test methods for laser beam power, energy and temporal characteristics (ISO 11554:2006)
2005-12-12 SJ: email from M Umbreit - P Kurtz agrees that this item can be cited in the OJEU (he put the contrary in his assessment).
Optik und Photonik - Laser und Laseranlagen - Prüfverfahren für Leistung, Energie und Kenngrößen des Zeitverhaltens von Laserstrahlen (ISO 11554:2006)
Diese Internationale Norm legt Prüfverfahren zur Bestimmung der Leistung und Energie von Dauerstrich- und Pulslasern sowie für die Kenngrößen für das Zeitverhalten fest: Pulsform, Pulsdauer und Pulsfolgefrequenz. Prüf- und Auswerteverfahren für die Leistungsstabilität von Dauerstrichlasern, Energiestabilität von Pulslasern und Pulsdauerstabilität werden ebenfalls angegeben.
Die Prüfverfahren, die in dieser Internationalen Norm angegeben werden, dienen zur Prüfung und Charakterisierung von Lasern.
Optique et photonique - Lasers et équipements associés aux lasers - Méthodes d'essai de la puissance et de l'énergie des faisceaux lasers et de leurs caractéristiques temporelles (ISO 11554:2006)
Optika in fotonska tehnologija - Laserji in laserska oprema - Preskusne metode za moč žarka, energijo in časovne karakteristike (ISO 11554:2006)
General Information
Relations
Standards Content (Sample)
SLOVENSKI STANDARD
SIST EN ISO 11554:2006
01-julij-2006
1DGRPHãþD
SIST EN ISO 11554:2003
2SWLNDLQIRWRQVNDWHKQRORJLMD/DVHUMLLQODVHUVNDRSUHPD3UHVNXVQHPHWRGH]D
PRþåDUNDHQHUJLMRLQþDVRYQHNDUDNWHULVWLNH ,62
Optics and photonics - Lasers and laser-related equipment - Test methods for laser
beam power, energy and temporal characteristics (ISO 11554:2006)
Optik und Photonik - Laser und Laseranlagen - Prüfverfahren für Leistung, Energie und
Kenngrößen des Zeitverhaltens von Laserstrahlen (ISO 11554:2006)
Optique et photonique - Lasers et équipements associés aux lasers - Méthodes d'essai
de la puissance et de l'énergie des faisceaux lasers et de leurs caractéristiques
temporelles (ISO 11554:2006)
Ta slovenski standard je istoveten z: EN ISO 11554:2006
ICS:
31.260
SIST EN ISO 11554:2006 en
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.
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EUROPEAN STANDARD
EN ISO 11554
NORME EUROPÉENNE
EUROPÄISCHE NORM
May 2006
ICS 31.260 Supersedes EN ISO 11554:2003
English Version
Optics and photonics - Lasers and laser-related equipment -
Test methods for laser beam power, energy and temporal
characteristics (ISO 11554:2006)
Optique et photonique - Lasers et équipements associés Optik und Photonik - Laser und Laseranlagen -
aux lasers - Méthodes d'essai de la puissance et de Prüfverfahren für Leistung, Energie und Kenngrößen des
l'énergie des faisceaux lasers et de leurs caractéristiques Zeitverhaltens von Laserstrahlen (ISO 11554:2006)
temporelles (ISO 11554:2006)
This European Standard was approved by CEN on 16 March 2006.
CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European
Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national
standards may be obtained on application to the Central Secretariat or to any CEN member.
This European Standard exists in three official versions (English, French, German). A version in any other language made by translation
under the responsibility of a CEN member into its own language and notified to the Central Secretariat has the same status as the official
versions.
CEN members are the national standards bodies of Austria, Belgium, Cyprus, Czech Republic, Denmark, Estonia, Finland, France,
Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania,
Slovakia, Slovenia, Spain, Sweden, Switzerland and United Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION
EUROPÄISCHES KOMITEE FÜR NORMUNG
Management Centre: rue de Stassart, 36 B-1050 Brussels
© 2006 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 11554:2006: E
worldwide for CEN national Members.
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EN ISO 11554:2006 (E)
Foreword
This document (EN ISO 11554:2006) has been prepared by Technical Committee ISO/TC 172
"Optics and optical instruments" in collaboration with Technical Committee CEN/TC 123 "Lasers
and photonics", the secretariat of which is held by DIN.
This European Standard shall be given the status of a national standard, either by publication of an
identical text or by endorsement, at the latest by November 2006, and conflicting national
standards shall be withdrawn at the latest by November 2006.
This document supersedes EN ISO 11554:2003.
This document has been prepared under a mandate given to CEN by the European Commission
and the European Free Trade Association, and supports essential requirements of EU Directive(s).
For relationship with EU Directive(s), see informative Annex ZA, which is an integral part of this
document.
According to the CEN/CENELEC Internal Regulations, the national standards organizations of the
following countries are bound to implement this European Standard: Austria, Belgium, Cyprus,
Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland,
Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania,
Slovakia, Slovenia, Spain, Sweden, Switzerland and United Kingdom.
Endorsement notice
The text of ISO 11554:2006 has been approved by CEN as EN ISO 11554:2006 without any
modifications.
2
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EN ISO 11554:2006 (E)
ANNEX ZA
(informative)
Relationship between this European Standard and the Essential
Requirements of EU Directive 98/37/EC
This European Standard has been prepared under a mandate given to CEN by the European
Commission and the European Free Trade Association to provide one means of conforming to
Essential Requirements of the New Approach Directive for machinery 98/37/EC amended by
Directive 98/79/EC.
Once this standard is cited in the Official Journal of the European Communities under that Directive
and has been implemented as a national standard in at least one Member State, compliance with
the normative clauses of this standard confers, within the limits of the scope of this standard, a
presumption of conformity with the corresponding Essential Requirements 1.5.10 Radiation and
1.5.12 Laser equipment of that Directive and associated EFTA regulations.
WARNING: Other requirements and other EU Directives may be applicable to the products falling
within the scope of this International standard.
3
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INTERNATIONAL ISO
STANDARD 11554
Third edition
2006-05-01
Optics and photonics — Lasers and
laser-related equipment — Test methods
for laser beam power, energy and
temporal characteristics
Optique et photonique — Lasers et équipements associés aux lasers —
Méthodes d'essai de la puissance et de l'énergie des faisceaux lasers
et de leurs caractéristiques temporelles
Reference number
ISO 11554:2006(E)
©
ISO 2006
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ISO 11554:2006(E)
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ii © ISO 2006 – All rights reserved
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ISO 11554:2006(E)
Contents Page
Foreword. iv
Introduction . v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions. 1
4 Symbols and units of measurement. 2
5 Measurement principles. 3
6 Measurement configuration, test equipment and auxiliary devices . 3
6.1 Preparation . 3
6.2 Control of environmental impacts . 6
6.3 Detectors . 6
6.4 Beam-forming optics. 7
6.5 Optical attenuators . 7
7 Measurements. 7
7.1 General. 7
7.2 Power of cw lasers. 7
7.3 Power stability of cw lasers. 8
7.4 Pulse energy of pulsed lasers . 8
7.5 Energy stability of pulsed lasers. 8
7.6 Temporal pulse shape, pulse duration, rise time, fall time and peak power. 8
7.7 Pulse duration stability . 8
7.8 Pulse repetition rate . 8
7.9 Small signal cut-off frequency . 9
8 Evaluation. 9
8.1 General. 9
8.2 Power of cw lasers. 9
8.3 Power stability of cw lasers. 10
8.4 Pulse energy of pulsed lasers . 10
8.5 Energy stability of pulsed lasers. 10
8.6 Temporal pulse shape, pulse duration, rise time, fall time and peak power. 10
8.7 Pulse duration stability . 13
8.8 Pulse repetition rate . 13
8.9 Small signal cut-off frequency . 13
9 Test Report . 13
Annex A (informative) Relative intensity noise (RIN) . 16
Bibliography . 18
© ISO 2006 – All rights reserved iii
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ISO 11554:2006(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies
(ISO member bodies). The work of preparing International Standards is normally carried out through ISO
technical committees. Each member body interested in a subject for which a technical committee has been
established has the right to be represented on that committee. International organizations, governmental and
non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the
International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.
International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2.
The main task of technical committees is to prepare International Standards. Draft International Standards
adopted by the technical committees are circulated to the member bodies for voting. Publication as an
International Standard requires approval by at least 75 % of the member bodies casting a vote.
Attention is drawn to the possibility that some of the elements of this document may be the subject of patent
rights. ISO shall not be held responsible for identifying any or all such patent rights.
ISO 11554 was prepared by Technical Committee ISO/TC 172, Optics and photonics, Subcommittee SC 9,
Electro-optical systems.
This third edition cancels and replaces the second edition (ISO 11554:2003), which has been technically
revised.
For the purposes of this International Standard, the CEN annex regarding fulfilment of European Council
Directives has been removed.
iv © ISO 2006 – All rights reserved
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ISO 11554:2006(E)
Introduction
The measurement of laser power (energy for pulsed lasers) is a common type of measurement performed by
laser manufacturers and users. Power (energy) measurements are needed for laser safety classification,
stability specifications, maximum laser output specifications, damage avoidance, specific application
requirements, etc. This document provides guidance on performing laser power (energy) measurements as
applied to stability characterization. The stability criteria are described for various temporal regions (e.g.,
short-term, medium-term and long-term) and provide methods to quantify these specifications. This
International Standard also covers pulse measurements where detector response speed can be critically
important when analysing pulse shape or peak power of short pulses. To standardize reporting of power
(energy) measurement results, a report template is also included.
This International Standard is a Type B standard as stated in ISO 12100-1.
The provisions of this International standard may be supplemented or modified by a Type C standard.
Note that for machines which are covered by the scope of a Type C standard and which have been designed
and built according to the provisions of that standard, the provisions of that Type C standard take precedence
over the provisions of this Type B standard.
© ISO 2006 – All rights reserved v
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INTERNATIONAL STANDARD ISO 11554:2006(E)
Optics and photonics — Lasers and laser-related equipment —
Test methods for laser beam power, energy and temporal
characteristics
1 Scope
This International Standard specifies test methods for determining the power and energy of continuous-wave
and pulsed laser beams, as well as their temporal characteristics of pulse shape, pulse duration and pulse
repetition rate. Test and evaluation methods are also given for the power stability of cw-lasers, energy stability
of pulsed lasers and pulse duration stability.
The test methods given in this International Standard are used for the testing and characterization of lasers.
2 Normative references
The following referenced documents are indispensable for the application of this document. For dated
references, only the edition cited applies. For undated references, the last edition of the referenced document
(including any amendments) applies.
ISO 11145:2006, Optics and optical instruments — Lasers and laser-related equipment — Vocabulary and
symbols
IEC 61040:1990, Power and energy measuring detectors, instruments and equipment for laser radiation
International vocabulary of basic and general terms in metrology (VIM). BIPM, IEC, IFCC, ISO, IUPAC, IUPAP,
OIML, 2nd ed. 1993
3 Terms and definitions
For the purposes of this document, the terms and definitions given in ISO 11145, in the VIM and the following
apply.
3.1
relative intensity noise
RIN
R( f )
single-sided spectral density of the power fluctuations normalized to the square of the average power as a
function of the frequency f
NOTE 1 The relative intensity noise R( f ) or RIN as defined above is explicitly spoken of as the “relative intensity noise
spectral density”, but usually simply referred to as RIN.
NOTE 2 For further details, see Annex A.
3.2
small signal cut-off frequency
f
c
frequency at which the laser power output modulation drops to half the value obtained at low frequencies
when applying small, constant input power modulation and increasing the frequency
© ISO 2006 – All rights reserved 1
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ISO 11554:2006(E)
4 Symbols and units of measurement
The symbols and units specified in ISO 11145 and in Table 1 are used in this International Standard.
Table 1 — Symbols and units of measurement
Symbol Unit Term
f Hz Frequency
f Hz Small signal cut-off frequency
c
[ f , f] Hz Frequency range for which the relative intensity noise R( f ) is given
1 2
k 1 Coverage factor for the determination of uncertainty
m 1 Reading
m 1 Mean value of readings
P W Power averaged over the sampling period
Mean power, averaged over the measurement period at the operating conditions
W
P
specified by the manufacturer
Relative power fluctuation to a 95 % confidence level for the appropriate
∆P 1
sampling period [∆P (1 µs) and/or ∆P (1 ms) and/or ∆P (0,1 s) and/or ∆P (1 s)]
Q J Mean pulse energy
∆Q 1 Relative pulse energy fluctuation to a 95 % confidence level
−1
R( f ) Hz or dB/Hz Relative intensity noise, RIN
S(t) 1 Detector signal
s 1 Measured standard deviation
T s Pulse repetition period
t s Measurement period
Expanded relative uncertainty corresponding to a 95 % confidence level
U 1
rel
(coverage factor k = 2)
Expanded relative uncertainty of calibration corresponding to a 95 % confidence
U (C) 1
rel
level (coverage factor k = 2)
τ s Fall time of laser pulse
F
∆τ 1 Relative pulse duration fluctuation with regard to τ to a 95 % confidence level
H H
τ s Rise time of laser pulse
R
∆τ 1 Relative pulse duration fluctuation with regard to τ to a 95 % confidence level
10 10
[1]
NOTE 1 For further details regarding 95 % confidence level see ISO 2602 .
NOTE 2 The expanded uncertainty is obtained by multiplying the standard uncertainty by a coverage factor k = 2. It is
[3]
determined according to the Guide to the Expression of Uncertainty in Measurement . In general, with this coverage
factor, the value of the measurand lies with a probability of approximately 95 % within the interval defined by the expanded
uncertainty.
−1
NOTE 3 R( f ) expressed in dB/Hz equals 10 lg R( f ) with R( f ) given in Hz .
2 © ISO 2006 – All rights reserved
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ISO 11554:2006(E)
5 Measurement principles
The laser beam is directed on to the detector surface to produce a signal with amplitude proportional to the
power or energy of the laser. The amplitude versus time is measured. Radiation emitted by sources with large
divergence angles is collected by an integrating sphere. Beam forming and attenuation devices may be used
when appropriate.
The evaluation method depends on the parameter to be determined and is described in Clause 8.
6 Measurement configuration, test equipment and auxiliary devices
6.1 Preparation
6.1.1 Sources with small divergence angles
The laser beam and the optical axis of the measuring system shall be coaxial. Select the diameter
(cross-section) of the optical system such that it accommodates the entire cross-section of the laser beam and
so that clipping or diffraction loss is smaller than 10 % of the intended measurement uncertainty.
Arrange an optical axis so that it is coaxial with the laser beam to be measured. Suitable optical alignment
devices are available for this purpose (e.g., aligning lasers or steering mirrors). Mount the attenuators or
beam-forming optics such that the optical axis runs through the geometrical centres. Care should be exercised
to avoid systematic errors.
NOTE 1 Reflections, external ambient light, thermal radiation and air currents are all potential sources of errors.
After the initial preparation is completed, make an evaluation to determine if the entire laser beam reaches the
detector surface. For this determination, apertures of different diameters can be introduced into the beam path
in front of each optical component. Reduce the aperture size until the output signal has been reduced by 5 %.
This aperture should have a diameter at least 20 % smaller than the aperture of the optical component. For
divergent beams, the aperture should be placed immediately in front of the detector to assure total beam
capture.
NOTE 2 Remove these apertures before performing the power (energy) measurements described in Clause 7.
6.1.2 Sources with large divergence angles
The radiation emitted by sources with large divergence angles shall be collected by an integrating sphere. The
collected radiation is subjected to multiple reflections from the wall of the integrating sphere; this leads to a
uniform irradiance of the surface proportional to the collected flux. A detector located in the wall of the sphere
measures this irradiance. An opaque screen shields the detector from the direct radiation of the device being
measured. The emitting device is positioned at or near the entrance of the integrating sphere, so that no direct
radiation will reach the detector.
Figure 1 shows an integrating sphere measurement configuration for a small emitting source positioned inside
the integrating sphere. Large-sized sources should, of course, be positioned outside the sphere but close
enough to the input aperture so that all emitted radiation enters the sphere.
© ISO 2006 – All rights reserved 3
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ISO 11554:2006(E)
Key
1 integrating sphere 3 device being measured
2 diffusing opaque screen 4 detector
Figure 1 — Schematic arrangement for the measurement of highly divergent sources
6.1.3 RIN measurement
The measuring arrangement for determination of the RIN is shown in Figure 2. The beam propagates through
the lens, an attenuator or other lossy medium, and falls on the detector. When adjusting the measuring
arrangement, feedback of the output power into the laser shall be minimized to avoid measurement errors.
The RIN, R( f ) is determined at reference plane A, before any losses. The Poisson component of the RIN is
increased at plane B due to losses, and again at plane C due to inefficiency in the detection process.
NOTE For an explanation of the different components of RIN, see Annex A.
To measure RIN, an electrical splitter sends the dc detector signal produced by a test laser to a meter while
the ac electrical noise is amplified and then displayed on an electrical spectrum analyser. RIN depends on
numerous quantities, the primary ones being:
⎯ frequency;
⎯ output power;
⎯ temperature;
⎯ modulation frequency;
⎯ time delay and magnitude of optical feedback;
⎯ mode-suppression ratio;
⎯ relaxation oscillation frequency.
Consequently, variations or changes in these quantities should be minimized during the measurement
process.
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ISO 11554:2006(E)
6.1.4 Measurement of small signal cut-off frequency
For determination of the small signal cut-off frequency, f , of lasers, the laser is modulated as described in 7.9
c
and the ac output power measured. Figure 3 shows the basic measurement arrangement for the case of diode
lasers. When adjusting the measuring arrangement, feedback of the output power into the laser shall be
minimized to avoid measurement errors.
Key
1 laser 5 electrical splitter
2 lens 6 meter
3 attenuator or other lossy medium 7 pre-amplifier
4 detector 8 electrical spectrum analyser
A reference plane that defines RIN
B Poisson RIN increases due to losses
C detector adds shot-noise RIN
NOTE See reference [4].
Figure 2 — Measurement arrangement for RIN determination
Key
D device being measured G adjustable frequency ac generator
1
PD detector (e.g. photodetector) G dc generator
2
M measuring instrument for ac output power C , C coupling capacitors
1 2
Figure 3 — Measurement arrangement for determination
of the small signal cut-off frequency of diode lasers
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ISO 11554:2006(E)
6.2 Control of environmental impacts
Take suitable precautions, such as vibration mechanical and acoustical isolation of the test set-up, shielding
from extraneous radiation, temperature stabilization of the laboratory and choice of low-noise amplifiers, in
order to ensure that the contribution to the total error is less than 10 % of the intended uncertainty. Check by
performing background measurements such as described in Clause 7, but with the laser beam blocked from
the detector (e.g. by a beam stop in the laser resonator or close to the laser output). The value for the
standard deviation (laser beam blocked) obtained by an evaluation as described in Clause 8 shall be smaller
than one tenth of the value obtained from a measurement with the laser beam reaching the detector.
6.3 Detectors
The radiation detector shall be in accordance with IEC 61040:1990, in particular with Clauses 3 and 4.
Furthermore, the following points shall be noted:
a) Calibrated power (energy) meter:
⎯ any wavelength dependency, non-linearity or non-uniformity of the detector or the electronic device
shall be minimized or corrected by use of a calibration procedure;
⎯ the direct measurement, i.e. using a planar-surface detector without an integrating sphere, can only
be used when it has been determined that the sensitivity of the detector is uniform and independent
on incident angles, α, to within at least the divergence angle, Θ, of the incident beam (see Figure 4)
and the entire beam reaches the sensitive surface of the detector; for measuring beams with large
divergence, an integrating sphere detector should be used to assure collection of all the emitted
radiation [see 6.3, b)];
⎯ detectors used for all quantitative measurements shall be calibrated with traceability back to relevant
national standards.
Key
1 planar detector
Θ divergence angle of the beam
α maximum acceptance angle
Figure 4 — Planar detector — Illustration of angles
b) Calibrated integrating sphere:
⎯ the area of the sphere openings shall be small compared to the overall surface area of the sphere;
⎯ the inner surface of the sphere and screen shall have a uniform diffusing coating with a high
reflectance (ρ > 0,9);
⎯ the total losses through the sphere ports shall be less than 5 %;
6 © ISO 2006 – All rights reserved
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ISO 11554:2006(E)
⎯ if the device being measured is mounted inside the sphere, the sphere surface shall be large
compared to the device surface, the screen and the apertures;
⎯ the sphere and detector assembly shall be calibrated with traceability back to relevant national
standards.
c) Time resolving detector:
⎯ it shall be confirmed, from manufacturer’s data or by measurement, that the output quantity of the
detector (e.g. the voltage) is linearly dependent on the input quantity (laser power); any wavelength
dependency, non-linearity or non-uniformity of the detector and any associated electronic devices
shall be minimized or corrected by use of a calibration procedure;
⎯ the electrical frequency bandwidth of the detector, including the bandwidth of all associated
electronics, shall correctly reproduce the temporal laser pulse shape.
When measuring pulse shape characteristics (e.g. peak power, pulse width, etc.), the rise time and the fall
time of the detector (including the amplifier and oth
...
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