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ASTM E1504-06

(Practice)

Standard Practice for Reporting Mass Spectral Data in Secondary Ion Mass Spectrometry (SIMS)

Standard Practice for Reporting Mass Spectral Data in Secondary Ion Mass Spectrometry (SIMS)

SIGNIFICANCE AND USE
This practice is intended for use in reporting the experimental and data reduction procedures described in other publications.
SCOPE
1.1 This practice provides the minimum information necessary to describe the instrumental, experimental, and data reduction procedures used in acquiring and reporting secondary ion mass spectrometry (SIMS) mass spectral data.
This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

General Information

Status
Historical
Publication Date
31-Oct-2006
ICS
71.040.50 - Physicochemical methods of analysis
Technical Committee
E42 - Surface Analysis
Drafting Committee
E42.06 - SIMS
Current Stage
Ref Project

Relations

Replaces
ASTM E1504-92(2001) - Standard Practice for Reporting Mass Spectral Data in Secondary Ion Mass Spectrometry (SIMS)
Effective Date
01-Nov-2006
Replaced By
ASTM E1504-11 - Standard Practice for Reporting Mass Spectral Data in Secondary Ion Mass Spectrometry (SIMS)
Effective Date
01-Nov-2011
Referred By
ASTM E1635-06(2019) - Standard Practice for Reporting Imaging Data in Secondary Ion Mass Spectrometry (SIMS)
Effective Date
01-Nov-2006
Referred By
ASTM F2847-17 - Standard Practice for Reporting and Assessment of Residues on Single-Use Implants and Single-Use Sterile Instruments
Effective Date
01-Nov-2006

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ASTM E1504-06 - Standard Practice for Reporting Mass Spectral Data in Secondary Ion Mass Spectrometry (SIMS)ASTM E1504-06 - Standard Practice for Reporting Mass Spectral Data in Secondary Ion Mass Spectrometry (SIMS)
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ASTM E1504-06 - Standard Practice for Reporting Mass Spectral Data in Secondary Ion Mass Spectrometry (SIMS)
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NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation:E1504–06
Standard Practice for
Reporting Mass Spectral Data in Secondary Ion Mass
1
Spectrometry (SIMS)
This standard is issued under the fixed designation E1504; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope 6.1.1 If a standard commercial SIMS instrument is used,
specify the manufacturer, model number, and type of analyzer
1.1 This practice provides the minimum information neces-
used. Specify the manufacturer and model number of any
sary to describe the instrumental, experimental, and data
accessory or auxiliary equipment that would affect the data
reduction procedures used in acquiring and reporting second-
contained within the mass spectrum (for example, additional
ary ion mass spectrometry (SIMS) mass spectral data.
vacuum pumping attachments, primary ion mass filter, primary
1.2 This standard does not purport to address all of the
ion sources, electron flood guns, etc.). If any nonstandard
safety concerns, if any, associated with its use. It is the
modification has been made to the instrumentation, describe
responsibility of the user of this standard to establish appro-
the modification in detail.
priate safety and health practices and determine the applica-
6.1.2 If a noncommercial SIMS system is used, specify the
bility of regulatory limitations prior to use.
components composing the system (for example, ion gun,
2. Referenced Documents pumping system, vacuum chamber, and mass filter). Specify
2
the manufacturer and model number if the components are of
2.1 ASTM Standards:
commercial origin. If the components are home-built, specify
E673 Terminology Relating to Surface Analysis
them in such detail that their potential effect on the obtained
3. Terminology
mass spectrum may be deduced by an individual experienced
in SIMS and vacuum technology.
3.1 Definitions—For definitions of terms used in this prac-
6.2 Specimen—Describe the specimen in as much detail as
tice, refer to Terminology E673.
possible. Such factors would include, but are not limited to,
4. Summary of Practice
sample preparation and handling, sample history, bulk and
trace composition, physical dimensions, sample homogeneity,
4.1 Experimental conditions and reporting procedures that
crystallinity, and any preanalysis cleaning procedure used.
affect SIMS mass spectral data are presented in order to
Describe in detail the method of sample mounting. Describe
standardize the reporting of such data to facilitate comparisons
any conductive coating or grids placed on the sample for
with other laboratories and analytical techniques.
charge compensation. If a subsrate is used, include substrate
5. Significance and Use
composition, purity, and any methods of cleaning.
6.3 Experimental Conditions:
5.1 This practice is intended for use in reporting the
6.3.1 Primary Ion Source and Ion Optical Column—If a
experimental and data reduction procedures described in other
commercial ion source is being used, then the manufacturer
publications.
and model number should be specified. If the ion source is a
6. Information to be Reported
custom design, the it should be described in detail and
6.1 Instrumentation: appropriate literature references given, if applicable. The
species extracted from the ion source must be specified. If the
Primary Ion Column provides mass filtering, then the selected
1
This practice is under the jurisdiction of ASTM Committee E42 on Surface
mass-filer species must be specified. If there is no mass-
Analysis and is the direct responsibility of Subcommittee E42.06 on SIMS.
filtering, then the purity of the material used for ion production
Current edition approved Nov. 1, 2006. Published November 2006. Originally
must be specified. State the ion energy and the impact energy
approved in 1992. Last previous edition approved in 2001 as E1504 – 92 (2001).
DOI: 10.1520/E1504-06.
of the primary beam. State the angle of incidence of the
2
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
primary ion beam with respect to the surface normal of the
contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
sampleaswellastheioncurrent(andthemethodbywhichthis
Standards volume information, refer to the standard’s Document Summary page on
the ASTM website. is measured). State whether the ion beam is rastered and the
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.
1

---------------------- Page: 1 ----------------------
E1504–06
dwell time, the spot size, and the total irradiated area. Specify if known. Provide the compositio
...

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SIGNIFICANCE AND USE
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SIGNIFICANCE AND USE
5.1 Auger electron spectroscopy and X-ray photoelectron spectroscopy are used extensively for the surface analysis of materials. This practice summarizes methods for determining the specimen area contributing to the detected signal (a) for instruments in which a focused electron beam can be scanned over a region with dimensions greater than the dimensions of the specimen area viewed by the analyzer, and (b) by employing a sample with a sharp edge.  
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5.6 Examples of the application of the methods described in this practice have been publis...
SCOPE
1.1 This practice describes methods for determining the specimen area contributing to the detected signal in Auger electron spectrometers and some types of X-ray photoelectron spectrometers (spectrometer analysis area) when this area is defined by the electron collection lens and aperture system of the electron energy analyzer. The practice is applicable only to those X-ray photoelectron spectrometers in which the specimen area excited by the incident X-ray beam is larger than the specimen area viewed by the analyzer, in which the photoelectrons travel in a field-free region from the specimen to the analyzer entrance. Some of the methods described here require an auxiliary electron gun mounted to produce an electron beam of variable energy on the specimen (“electron-gun method”). Other experiments require a sample with a sharp edge, such as a wafer covered with a uniform clean layer (for example, gold (Au) or silver (Ag)) and cleaved to obtain a long side (“sharp-edge method”).  
1.2 This practice is recommended as a useful means for determining the specimen area viewed by the analyzer for different conditions of spectrometer operation, for verifying adequate specimen and beam alignment, and for characterizing the imaging properties of the electron energy analyzer.  
1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.  
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.  
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Standard Practice for Reporting Mass Spectral Data in Secondary Ion Mass Spectrometry (SIMS)

SIGNIFICANCE AND USE
5.1 This practice is intended for use in reporting the experimental and data reduction procedures described in other publications.
SCOPE
1.1 This practice provides the minimum information necessary to describe the instrumental, experimental, and data reduction procedures used in acquiring and reporting secondary ion mass spectrometry (SIMS) mass spectral data.  
1.2 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.  
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.  
1.4 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.

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ASTM E2426-10(2019)(Practice)
Standard Practice for Pulse Counting System Dead Time Determination by Measuring Isotopic Ratios with SIMS

SIGNIFICANCE AND USE
5.1 Electron multipliers are commonly used in pulse-counting mode to detect ions from magnetic sector mass spectrometers. The electronics used to amplify, detect and count pulses from the electron multipliers always have a characteristic time interval after the detection of a pulse, during which no other pulses can be counted. This characteristic time interval is known as the “dead time.” The dead time has the effect of reducing the measured count rate compared with the “true” count rate.  
5.2 In order to measure count rates accurately over the entire dynamic range of a pulse counting detector, such as an electron multiplier, the dead time of the entire pulse counting system must be well known. Accurate count rate measurement forms the basis of isotopic ratio measurements as well as elemental abundance determinations.  
5.3 The procedure described herein has been successfully used to determine the dead time of counting systems on SIMS instruments.6 The accurate determination of the dead time by this method has been a key component of precision isotopic ratio measurements made by SIMS.
SCOPE
1.1 This practice provides the Secondary Ion Mass Spectrometry (SIMS) analyst with a method for determining the dead time of the pulse-counting detection systems on the instrument. This practice also allows the analyst to determine whether the apparent dead time is independent of count rate.  
1.2 This practice is applicable to most types of mass spectrometers that have pulse-counting detectors.  
1.3 This practice does not describe methods for precise or accurate isotopic ratio measurements.  
1.4 This practice does not describe methods for the proper operation of pulse counting systems and detectors for mass spectrometry.  
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.  
1.6 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.

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