ASTM E1603/E1603M-11(2017)
(Practice)Standard Practice for Leakage Measurement Using the Mass Spectrometer Leak Detector or Residual Gas Analyzer in the Hood Mode
Standard Practice for Leakage Measurement Using the Mass Spectrometer Leak Detector or Residual Gas Analyzer in the Hood Mode
SIGNIFICANCE AND USE
5.1 Test Method A—This test method is the most frequently used in leak testing components. Testing of components is correlated to a standard leak, and the actual leak rate is measured. Acceptance is based on the maximum system allowable leakage. For most production needs, acceptance is based on acceptance of parts leaking less than an established leakage rate, which will ensure safe performance over the projected life of the component. Care must be exercised to ensure that large systems are calibrated with the standard leak located at a representative place on the test volume. As the volume tends to be large (>1 m3) and there are often low conductance paths involved, a check of the response time as well as system sensitivity should be made.
5.2 Test Method B—This test method is used for testing vacuum systems either as a step in the final test of a new system or as a maintenance practice on equipment used for manufacturing, environmental test, or conditioning parts. As with Test Method A, the response time and a system sensitivity check may be required for large volumes.
5.3 Test Method C—This test method is to be used only when there is no convenient method of connecting the LD to the outlet of the high-vacuum pump. If a helium LD is used and the high-vacuum pump is an ion pump or cryopump, leak testing is best accomplished during the roughing cycle, as these pumps leave a relatively high percentage of helium in the high-vacuum chamber. This will limit the maximum sensitivity that can be obtained.
SCOPE
1.1 This practice covers procedures for testing the sources of gas leaking at the rate of 1 × 10 −8 Pa m3/s (1 × 10−9 standard-cm3/s at 0°C) or greater. These test methods may be conducted on any object that can be evacuated and to the other side of which helium or other tracer gas may be applied. The object must be structurally capable of being evacuated to pressures of 0.1 Pa (approximately 10−3 torr).
1.2 Three test methods are described;
1.2.1 Test Method A—For the object under test capable of being evacuated, but having no inherent pumping capability.
1.2.2 Test Method B—For the object under test with integral pumping capability.
1.2.3 Test Method C—For the object under test as in Test Method B, in which the vacuum pumps of the object under test replace those normally used in the leak detector (LD).
1.3 Units—The values stated in either SI or std-cc/sec units are to be regarded separately as standard. The values stated in each system may not be exact equivalents: therefore, each system shall be used independently of the other. Combining values from the two systems may result in non-conformance with the standard.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
1.5 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
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Designation: E1603/E1603M − 11 (Reapproved 2017)
Standard Practice for
Leakage Measurement Using the Mass Spectrometer Leak
1
Detector or Residual Gas Analyzer in the Hood Mode
ThisstandardisissuedunderthefixeddesignationE1603/E1603M;thenumberimmediatelyfollowingthedesignationindicatestheyear
of original adoption or, in the case of revision, the year of last revision.Anumber in parentheses indicates the year of last reapproval.
A superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope 2. Referenced Documents
2
2.1 ASTM Standards:
1.1 This practice covers procedures for testing the sources
−8 3 −9
E1316Terminology for Nondestructive Examinations
of gas leaking at the rate of 1×10 Pa m /s (1×10
3
3
standard-cm /s at 0°C) or greater. These test methods may be
2.2 ASNT Standards:
conducted on any object that can be evacuated and to the other
SNT-TC-1ARecommended Practice for Personnel Qualifi-
side of which helium or other tracer gas may be applied. The
cation and Certification in Nondestructive Testing
object must be structurally capable of being evacuated to
ANSI/ASNT-CP-189Standard for Qualification and Certifi-
−3
pressures of 0.1 Pa (approximately 10 torr).
cation of Nondestructive Testing Personnel
2.3 Military Standard:
1.2 Three test methods are described;
MIL-STD-410 Nondestructive Testing Personnel Qualifica-
1.2.1 Test Method A—For the object under test capable of
4
tion and Certification
being evacuated, but having no inherent pumping capability.
2.4 AIA Standard:
1.2.2 Test Method B—Fortheobjectundertestwithintegral
NAS-410Certification and Qualification of Nondestructive
pumping capability.
5
Test Personnel
1.2.3 Test Method C—For the object under test as in Test
MethodB,inwhichthevacuumpumpsoftheobjectundertest
3. Terminology
replace those normally used in the leak detector (LD).
3.1 Definitions—For definitions of terms used in this
1.3 Units—The values stated in either SI or std-cc/sec units
practice, see Terminology E1316.
are to be regarded separately as standard. The values stated in
each system may not be exact equivalents: therefore, each
4. Summary of Practice
system shall be used independently of the other. Combining
4.1 These test methods covered in this practice require a
values from the two systems may result in non-conformance
heliumLDthatcanprovideasystemsensitivityof10%orless
with the standard.
of the intended leakage rate to be measured.
1.4 This standard does not purport to address all of the
4.2 Test Method A—This test method is used to helium leak
safety concerns, if any, associated with its use. It is the
test objects that are capable of being evacuated to a reasonable
responsibility of the user of this standard to establish appro-
test pressure by the LD pumps during an acceptable length of
priate safety and health practices and determine the applica-
time(seeFig.1).Thisrequiresthattheobjectbecleananddry.
bility of regulatory limitations prior to use.
Auxiliary vacuum pumps having greater capacity than those in
1.5 This international standard was developed in accor-
the LD may be used in conjunction with them. The leak test
dance with internationally recognized principles on standard-
sensitivity will be reduced under these conditions.
ization established in the Decision on Principles for the
Development of International Standards, Guides and Recom-
mendations issued by the World Trade Organization Technical
2
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
Barriers to Trade (TBT) Committee.
contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
Standards volume information, refer to the standard’s Document Summary page on
the ASTM website.
3
AvailablefromAmericanSocietyforNondestructiveTesting(ASNT),P.O.Box
1
This practice is under the jurisdiction of ASTM Committee E07 on Nonde- 28518, 1711 Arlingate Ln., Columbus, OH 43228-0518, http://www.asnt.org.
4
structive Testing and is the direct responsibility of Subcommittee E07.08 on Leak Available from Standardization Documents Order Desk, DODSSP, Bldg. 4,
Testing Method. Section D, 700 Robbins Ave., Philadelphia, PA 19111-5098, http://
CurrenteditionapprovedJune1,2017.PublishedJuly2017.Originallyapproved dodssp.daps.dla.mil.
5
in1994.Lastpreviouseditionapprovedin2011asE1603-11.DOI:10.1520/E1603 Available fromAerospace IndustriesAssociation ofAmerica, Inc. (AIA), 1000
_E1603M-11R17. WilsonBlvd.,Suite1700,Arlington,VA22209-3928,http://www.aia-aerospace.org.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
1
---------------------- Page: 1 ----------------------
E1603/E1603M − 11 (2017)
FIG. 1 Test Method A
4.3 Test Method B—This test method is used to leak test
equipmentthatcanprovideitsownvacuum(thatis,equipment
that has a
...
This document is not an ASTM standard and is intended only to provide the user of an ASTM standard an indication of what changes have been made to the previous version. Because
it may not be technically possible to adequately depict all changes accurately, ASTM recommends that users consult prior editions as appropriate. In all cases only the current version
of the standard as published by ASTM is to be considered the official document.
Designation: E1603/E1603M − 11 E1603/E1603M − 11 (Reapproved 2017)
Standard Practice for
Leakage Measurement Using the Mass Spectrometer Leak
1
Detector or Residual Gas Analyzer in the Hood Mode
This standard is issued under the fixed designation E1603/E1603M; the number immediately following the designation indicates the year
of original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval.
A superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope*Scope
−8 3 −9 3
1.1 This practice covers procedures for testing the sources of gas leaking at the rate of 1 × 10 Pa m /s (1 × 10 standard-cm /s
at 0°C) or greater. These test methods may be conducted on any object that can be evacuated and to the other side of which helium
or other tracer gas may be applied. The object must be structurally capable of being evacuated to pressures of 0.1 Pa (approximately
−3
10 torr).
1.2 Three test methods are described;
1.2.1 Test Method A—For the object under test capable of being evacuated, but having no inherent pumping capability.
1.2.2 Test Method B—For the object under test with integral pumping capability.
1.2.3 Test Method C—For the object under test as in Test Method B, in which the vacuum pumps of the object under test replace
those normally used in the leak detector (LD).
1.3 Units—The values stated in either SI or std-cc/sec units are to be regarded separately as standard. The values stated in each
system may not be exact equivalents: therefore, each system shall be used independently of the other. Combining values from the
two systems may result in non-conformance with the standard.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility
of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory
limitations prior to use.
1.5 This international standard was developed in accordance with internationally recognized principles on standardization
established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued
by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
2. Referenced Documents
2
2.1 ASTM Standards:
E1316 Terminology for Nondestructive Examinations
3
2.2 ASNT Standards:
SNT-TC-1A Recommended Practice for Personnel Qualification and Certification in Nondestructive Testing
ANSI/ASNT-CP-189 Standard for Qualification and Certification of Nondestructive Testing Personnel
2.3 Military Standard:
4
MIL-STD-410 Nondestructive Testing Personnel Qualification and Certification
2.4 AIA Standard:
5
NAS-410 Certification and Qualification of Nondestructive Test Personnel
3. Terminology
3.1 Definitions—For definitions of terms used in this practice, see Terminology E1316.
1
This practice is under the jurisdiction of ASTM Committee E07 on Nondestructive Testing and is the direct responsibility of Subcommittee E07.08 on Leak Testing
Method.
Current edition approved July 1, 2011June 1, 2017. Published July 2011July 2017. Originally approved in 1994. Last previous edition approved in 20062011 as
E1603 - 99E1603 - 11.(2006). DOI: 10.1520/E1603_E1603M-11.10.1520/E1603_E1603M-11R17.
2
For referenced ASTM standards, visit the ASTM website, www.astm.org, or contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM Standards
volume information, refer to the standard’s Document Summary page on the ASTM website.
3
Available from American Society for Nondestructive Testing (ASNT), P.O. Box 28518, 1711 Arlingate Ln., Columbus, OH 43228-0518, http://www.asnt.org.
4
Available from Standardization Documents Order Desk, DODSSP, Bldg. 4, Section D, 700 Robbins Ave., Philadelphia, PA 19111-5098, http://dodssp.daps.dla.mil.
5
Available from Aerospace Industries Association of America, Inc. (AIA), 1000 Wilson Blvd., Suite 1700, Arlington, VA 22209-3928, http://www.aia-aerospace.org.
*A Summary of Changes section appears at the end of this standard
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
1
---------------------- Page: 1 ----------------------
E1603/E1603M − 11 (2017)
4. Summary of Practice
4.1 These test methods covered in this practice require a helium LD that can provide a system sensitivity of 10 % or less of the
intended leakage rate to be measured.
4.2 Test Method A—This test method is u
...
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