ASTM E1603/E1603M-11
(Test Method)Standard Practice for Leakage Measurement Using the Mass Spectrometer Leak Detector or Residual Gas Analyzer in the Hood Mode
Standard Practice for Leakage Measurement Using the Mass Spectrometer Leak Detector or Residual Gas Analyzer in the Hood Mode
SIGNIFICANCE AND USE
Test Method A—This test method is the most frequently used in leak testing components. Testing of components is correlated to a standard leak, and the actual leak rate is measured. Acceptance is based on the maximum system allowable leakage. For most production needs, acceptance is based on acceptance of parts leaking less than an established leakage rate, which will ensure safe performance over the projected life of the component. Care must be exercised to ensure that large systems are calibrated with the standard leak located at a representative place on the test volume. As the volume tends to be large (>1 m3) and there are often low conductance paths involved, a check of the response time as well as system sensitivity should be made.
Test Method B—This test method is used for testing vacuum systems either as a step in the final test of a new system or as a maintenance practice on equipment used for manufacturing, environmental test, or conditioning parts. As with Test Method A, the response time and a system sensitivity check may be required for large volumes.
Test Method C—This test method is to be used only when there is no convenient method of connecting the LD to the outlet of the high-vacuum pump. If a helium LD is used and the high-vacuum pump is an ion pump or cryopump, leak testing is best accomplished during the roughing cycle, as these pumps leave a relatively high percentage of helium in the high-vacuum chamber. This will limit the maximum sensitivity that can be obtained.
SCOPE
1.1 This practice covers procedures for testing the sources of gas leaking at the rate of 1 × 10−8 Pa m3/s (1 × 10−9 standard-cm3/s at 0°C) or greater. These test methods may be conducted on any object that can be evacuated and to the other side of which helium or other tracer gas may be applied. The object must be structurally capable of being evacuated to pressures of 0.1 Pa (approximately 10−3 torr).
1.2 Three test methods are described;
1.2.1 Test Method A—For the object under test capable of being evacuated, but having no inherent pumping capability.
1.2.2 Test Method B—For the object under test with integral pumping capability.
1.2.3 Test Method C—For the object under test as in Test Method B, in which the vacuum pumps of the object under test replace those normally used in the leak detector (LD).
1.3 Units—The values stated in either SI or std-cc/sec units are to be regarded separately as standard. The values stated in each system may not be exact equivalents: therefore, each system shall be used independently of the other. Combining values from the two systems may result in non-conformance with the standard.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
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Designation: E1603/E1603M − 11
Standard Practice for
Leakage Measurement Using the Mass Spectrometer Leak
1
Detector or Residual Gas Analyzer in the Hood Mode
ThisstandardisissuedunderthefixeddesignationE1603/E1603M;thenumberimmediatelyfollowingthedesignationindicatestheyear
of original adoption or, in the case of revision, the year of last revision.Anumber in parentheses indicates the year of last reapproval.
A superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
3
1. Scope* 2.2 ASNT Standards:
SNT-TC-1ARecommended Practice for Personnel Qualifi-
1.1 This practice covers procedures for testing the sources
−8 3 −9 cation and Certification in Nondestructive Testing
of gas leaking at the rate of 1×10 Pa m /s (1×10
3 ANSI/ASNT-CP-189Standard for Qualification and Certifi-
standard-cm /s at 0°C) or greater. These test methods may be
cation of Nondestructive Testing Personnel
conducted on any object that can be evacuated and to the other
2.3 Military Standard:
side of which helium or other tracer gas may be applied. The
MIL-STD-410 Nondestructive Testing Personnel Qualifica-
object must be structurally capable of being evacuated to
4
−3
tion and Certification
pressures of 0.1 Pa (approximately 10 torr).
2.4 AIA Standard:
1.2 Three test methods are described;
NAS-410Certification and Qualification of Nondestructive
1.2.1 Test Method A—For the object under test capable of
5
Test Personnel
being evacuated, but having no inherent pumping capability.
1.2.2 Test Method B—Fortheobjectundertestwithintegral
3. Terminology
pumping capability.
3.1 Definitions—For definitions of terms used in this
1.2.3 Test Method C—For the object under test as in Test
practice, see Terminology E1316.
MethodB,inwhichthevacuumpumpsoftheobjectundertest
replace those normally used in the leak detector (LD).
4. Summary of Practice
1.3 Units—The values stated in either SI or std-cc/sec units
4.1 These test methods covered in this practice require a
are to be regarded separately as standard. The values stated in
heliumLDthatcanprovideasystemsensitivityof10%orless
each system may not be exact equivalents: therefore, each
of the intended leakage rate to be measured.
system shall be used independently of the other. Combining
4.2 Test Method A—This test method is used to helium leak
values from the two systems may result in non-conformance
test objects that are capable of being evacuated to a reasonable
with the standard.
test pressure by the LD pumps during an acceptable length of
1.4 This standard does not purport to address all of the
time(seeFig.1).Thisrequiresthattheobjectbecleananddry.
safety concerns, if any, associated with its use. It is the
Auxiliary vacuum pumps having greater capacity than those in
responsibility of the user of this standard to establish appro-
the LD may be used in conjunction with them. The leak test
priate safety and health practices and determine the applica-
sensitivity will be reduced under these conditions.
bility of regulatory limitations prior to use.
4.3 Test Method B—This test method is used to leak test
equipmentthatcanprovideitsownvacuum(thatis,equipment
2. Referenced Documents
2 that has a built-in pumping system) at least to a level of a few
2.1 ASTM Standards:
hundred pascals (a few torr) or lower. Refer to Fig. 2.
E1316Terminology for Nondestructive Examinations
4.4 Test Method C—When a vacuum system is capable of
−2 −4
producing internal pressures of less than 2×10 Pa (2×10
torr) in the presence of leaks, these leaks may be located and
1
This practice is under the jurisdiction of ASTM Committee E07 on Nonde-
structive Testing and is the direct responsibility of Subcommittee E07.08 on Leak
Testing Method.
3
CurrenteditionapprovedJuly1,2011.PublishedJuly2011.Originallyapproved AvailablefromAmericanSocietyforNondestructiveTesting(ASNT),P.O.Box
in 1994. Last previous edition approved in 2006 as E1603-99(2006). DOI: 28518, 1711 Arlingate Ln., Columbus, OH 43228-0518, http://www.asnt.org.
4
10.1520/E1603_E1603M-11. Available from Standardization Documents Order Desk, DODSSP, Bldg. 4,
2
For referenced ASTM standards, visit the ASTM website, www.astm.org, or Section D, 700 Robbins Ave., Philadelphia, PA 19111-5098, http://
contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM dodssp.daps.dla.mil.
5
Standards volume information, refer to the standard’s Document Summary page on Available fromAerospace IndustriesAssociation ofAmerica, Inc. (AIA), 1000
the ASTM website. WilsonBlvd.,Suite1700,Arlington,VA22209-3928,http://www.aia-aerospace.org.
*A Summary of Changes section appears at the end of this standard
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
1
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E1603/E1603M − 11
leakage
...
This document is not anASTM standard and is intended only to provide the user of anASTM standard an indication of what changes have been made to the previous version. Because
it may not be technically possible to adequately depict all changes accurately, ASTM recommends that users consult prior editions as appropriate. In all cases only the current version
of the standard as published by ASTM is to be considered the official document.
Designation:E1603–99 (Reapproved 2006)
Standard Test Methods for Designation:E1603/E1603M–11
Standard Practice for
Leakage Measurement Using the Mass Spectrometer Leak
1
Detector or Residual Gas Analyzer in the Hood Mode
ThisstandardisissuedunderthefixeddesignationE1603/E1603M;thenumberimmediatelyfollowingthedesignationindicatestheyear
of original adoption or, in the case of revision, the year of last revision.Anumber in parentheses indicates the year of last reapproval.
A superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope
−14 *
1.1These test methods cover procedures for testing the sources of gas leaking at the rate of 4.4310 moles/s (1310
−8
3 −9
1.1 This practice covers procedures for testing the sources of gas leaking at the rate of 1 310 Pa m /s (1 310
3
standard-cm /s at 0°C) or greater.These test methods may be conducted on any object that can be evacuated and to the other side
of which helium or other tracer gas may be applied. The object must be structurally capable of being evacuated to pressures of
−3
0.1 Pa (approximately 10 torr).
1.2 Three test methods are described;
1.2.1 Test Method A—For the object under test capable of being evacuated, but having no inherent pumping capability.
1.2.2 Test Method B—For the object under test with integral pumping capability.
1.2.3 Test Method C—FortheobjectundertestasinTestMethodB,inwhichthevacuumpumpsoftheobjectundertestreplace
those normally used in the leak detector (LD).
1.3The values stated in SI units are to be regarded as standard. The values given in brackets are for information only.
1.3 Units—The values stated in either SI or std-cc/sec units are to be regarded separately as standard.The values stated in each
system may not be exact equivalents: therefore, each system shall be used independently of the other. Combining values from the
two systems may result in non-conformance with the standard.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility
of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory
limitations prior to use.
2. Referenced Documents
2
2.1 ASTM Standards:
E1316 Terminology for Nondestructive Examinations
3
2.2 ASNT Standards:
SNT-TC-1A Recommended Practice for Personnel Qualification and Certification in Nondestructive Testing
ANSI/ASNT-CP-189 Standard for Qualification and Certification of Nondestructive Testing Personnel
2.3 Military Standard:
4
MIL-STD-410 Nondestructive Testing Personnel Qualification and Certification
2.4 AIA Standard:
5
NAS-410 Certification and Qualification of Nondestructive Test Personnel
1
These test methods are under the jurisdiction of ASTM Committee
1
This practice is under the jurisdiction ofASTM Committee E07 on Nondestructive Testing and areis the direct responsibility of Subcommittee E07.08 on Leak Testing
Method.
Current edition approved Feb.July 1, 2006.2011. Published February 2006.July 2011. Originally approved in 1994. Last previous edition approved in 19992006 as
E1603-99(2006). DOI: 10.1520/E1603-99R06.10.1520/E1603_E1603M-11.
2
ForreferencedASTMstandards,visittheASTMwebsite,www.astm.org,orcontactASTMCustomerServiceatservice@astm.org.For Annual Book of ASTM Standards
volume information, refer to the standard’s Document Summary page on the ASTM website.
3
Available from American Society for Nondestructive Testing (ASNT), P.O. Box 28518, 1711 Arlingate Ln., Columbus, OH 43228-0518, http://www.asnt.org.
4
Available from Standardization Documents Order Desk, DODSSP, Bldg. 4, Section D, 700 Robbins Ave., Philadelphia, PA 19111-5098, http://dodssp.daps.dla.mil.
5
Available from Aerospace Industries Association of America, Inc. (AIA), 1250 Eye St., NW, Washington, DC 20005.
5
Available from Aerospace Industries Association of America, Inc. (AIA), 1000 Wilson Blvd., Suite 1700, Arlington, VA 22209-3928, http://www.aia-aerospace.org.
*A Summary of Changes section appears at the end of this standard.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.
1
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E1603/E1603M–11
3. Terminology
3.1 Definitions—For definitions of terms used in these test methods,this practice, see Terminology E1316.
4. Summary of Test MethodsPractice
4.1 These test methods covered in this practice require a helium LD that can provide a system sensitivity of 10% or less of the
intended leaka
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