EN ISO 18452:2016
(Main)Fine ceramics (advanced ceramics, advanced technical ceramics) - Determination of thickness of ceramic films by contact-probe profilometer (ISO 18452:2005)
Fine ceramics (advanced ceramics, advanced technical ceramics) - Determination of thickness of ceramic films by contact-probe profilometer (ISO 18452:2005)
ISO 18452:2005 specifies a method for the determination of the film thickness of a fine ceramic film and ceramic coatings by a contact-probe profilometer. The method is suitable for film thicknesses in the range of 10 nm to 10 000 nm.
Hochleistungskeramik - Bestimmung der Dicke keramischer Schichten mit einem Kontaktprofilometer (ISO 18452:2005)
Diese Internationale Norm legt ein Verfahren zur Bestimmung der Schichtdicke feinkeramischer Schichten und keramischer Beschichtungen mit einem Kontaktprofilometer fest. Das Verfahren ist für Schichtdicken im Bereich von 10 nm bis 10 000 nm geeignet.
ANMERKUNG Das Verfahren erfordert eine ausgeprägte und deutlich geformte Grenze zwischen beschichtetem und unbeschichtetem Bereich des Grundwerkstoffes (Substrat).
Céramiques techniques - Détermination de l'épaisseur des films céramiques avec un profilomètre à contact (ISO 18452:2005)
L'ISO 18452 :2005 spécifie une méthode permettant de déterminer l'épaisseur d'un film céramique technique et de revêtements céramiques à l'aide d'un profilomètre à contact. La méthode est adaptée à des épaisseurs de film comprises entre 10 nm et 10 000 nm.
NOTE La méthode nécessite une frontière distincte et clairement formée entre les parties revêtue et non revêtue du substrat.
Fina keramika (sodobna keramika, sodobna tehnična keramika) - Ugotavljanje debeline keramične plasti z merilnikom profilov (ISO 18452:2005)
Ta mednarodni standard podaja metodo za ugotavljanje debeline fine keramične plasti in keramičnih prevlek z merilnikom profilov. Metoda je primerna za debelino plasti v razponu od 10 nm do 10.000 nm.
General Information
Relations
Standards Content (Sample)
SLOVENSKI STANDARD
01-junij-2016
1DGRPHãþD
SIST EN 1071-1:2004
)LQDNHUDPLND VRGREQDNHUDPLNDVRGREQDWHKQLþQDNHUDPLND 8JRWDYOMDQMH
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Fine ceramics (advanced ceramics, advanced technical ceramics) - Determination of
thickness of ceramic films by contact-probe profilometer (ISO 18452:2005)
Hochleistungskeramik - Bestimmung der Dicke keramischer Schichten mit einem
Kontaktprofilometer (ISO 18452:2005)
Céramiques techniques - Détermination de l'épaisseur des films céramiques avec un
profilomètre à contact (ISO 18452:2005)
Ta slovenski standard je istoveten z: EN ISO 18452:2016
ICS:
25.220.99 Druge obdelave in prevleke Other treatments and
coatings
81.060.30 Sodobna keramika Advanced ceramics
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.
EN ISO 18452
EUROPEAN STANDARD
NORME EUROPÉENNE
April 2016
EUROPÄISCHE NORM
ICS 81.060.30 Supersedes EN 1071-1:2003
English Version
Fine ceramics (advanced ceramics, advanced technical
ceramics) - Determination of thickness of ceramic films by
contact-probe profilometer (ISO 18452:2005)
Céramiques techniques - Détermination de l'épaisseur Hochleistungskeramik - Bestimmung der Dicke
des films céramiques avec un profilomètre à contact keramischer Schichten mit einem Kontaktprofilometer
(ISO 18452:2005) (ISO 18452:2005)
This European Standard was approved by CEN on 25 March 2016.
CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this
European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references
concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN
member.
This European Standard exists in three official versions (English, French, German). A version in any other language made by
translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management
Centre has the same status as the official versions.
CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania,
Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and
United Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION
EUROPÄISCHES KOMITEE FÜR NORMUNG
CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels
© 2016 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 18452:2016 E
worldwide for CEN national Members.
Contents Page
European foreword . 3
European foreword
The text of ISO 18452:2005 has been prepared by Technical Committee ISO/TC 206 “Fine ceramics” of
the International Organization for Standardization (ISO) and has been taken over as EN ISO 18452:2016
by Technical Committee CEN/TC 184 “Advanced technical ceramics” the secretariat of which is held by
DIN.
This European Standard shall be given the status of a national standard, either by publication of an
identical text or by endorsement, at the latest by October 2016, and conflicting national standards shall
be withdrawn at the latest by October 2016.
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. CEN [and/or CENELEC] shall not be held responsible for identifying any or all such patent
rights.
This document supersedes EN 1071-1:2003.
According to the CEN-CENELEC Internal Regulations, the national standards organizations of the
following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria,
Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia,
France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta,
Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland,
Turkey and the United Kingdom.
Endorsement notice
The text of ISO 18452:2005 has been approved by CEN as EN ISO 18452:2016 without any modification.
INTERNATIONAL ISO
STANDARD 18452
First edition
2005-11-15
Fine ceramics (advanced ceramics,
advanced technical ceramics) —
Determination of thickness of ceramic
films by contact-probe profilometer
Céramiques techniques — Détermination de l'épaisseur des films
céramiques avec un profilomètre à contact
Reference number
ISO 18452:2005(E)
ISO 18452:2005(E)
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©
ii ISO 2005 – All rights reserved
ISO 18452:2005(E)
Contents Page
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Principle of measurement . 1
5 Test environment . 1
6 Apparatus . 2
7 Test pieces . 3
8 Procedure . 4
9 Calculation . 5
10 Limits to step height . 5
11 Test report . 6
Annex A (informative) Effect of amplification factor and levelling error on measured layer thickness 7
©
ISO 2005 – All rights reserved iii
ISO 18452:2005(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies
(ISO member bodies). The work of preparing International Standards is normally carried out through ISO
technical committees. Each member body interested in a subject for which a technical committee has been
established has the right to be represented on that committee. International organizations, governmental and
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Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.
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The main task of technical committees is to prepare International Standards. Draft International Standards
adopted by the technical committees are circulated to the member bodies for voting. Publication as an
International Standard requires approval by at least 75 % of the member bodies casting a vote.
Attention is drawn to the possibility that some of the elements of this document may be the subject of patent
rights. ISO shall not be held responsible for identifying any or all such patent rights.
ISO 18452 was prepared by Technical Committee ISO/TC 206, Fine ceramics.
©
iv ISO 2005 – All rights reserved
INTERNATIONAL STANDARD ISO 18452:2005(E)
Fine ceramics (advanced ceramics, advanced technical
ceramics) — Determination of thickness of ceramic films by
contact-probe profilometer
1 Scope
This International Standard specifies a method for the determination of the film thickness of a fine ceramic film
and ceramic coatings by a contact-probe profilometer. The method is suitable for film thicknesses in the range
of 10 nmto 10 000 nm.
NOTE The method requires a distinct and clearly formed boundary between coated and uncoated parts of the substrate.
2 Normative references
The following referenced documents are indispensable for the application of this document. For dated
references, only the edition cited applies. For undated references, the latest edition of the referenced document
(including any amendments) applies.
ISO 3274, Geometrical Product Specifications (GPS)— Surface texture: Profile method— Nominal
characteristics of contact (stylus) instruments
3 Terms and definitions
For the purposes of this document, the following terms and definitions apply.
3.1
fine ceramic film
coating consisting of a fine ceramic material which thinly covers the substrate surface
EXAMPLE Typical materials are oxides, carbides, nitrides, etc., deposited by methods such as vacuum evaporating,
sputtering, chemical vapour deposition, etc.
4 Principle of measurement
This International Standard concerns the measurement of the film thickness of fine ceramic coatings on a
substrate using a contact-probe profilometer. The film thickness shall be calculated from the profile which is
obtained by scanning the contact probe in the direction C→ B→ A, as shown in Figure 1. The profile is in
proportion to the difference in height between the parts covered and not covered with the fine ceramic film.
5 Test environment
The test shall be carried out in an environment free from mechanical vibrations that may affect the
measurement.
©
ISO 2005 – All rights reserved 1
ISO 18452:2005(E)
Key
1 contact probe
2film
3 level difference
4 substrate
t film thickness
Figure 1 — Principle of measurement using the contact-probe profilometer
6 Apparatus
6.1 Contact-probe profilometer
The contact-probe profilometer shall be in accordance with ISO 3274. The instrument shall be calibrated by
using step-height calibration standards in accordance with the limits given in Clause 10.
In metrology, it is always very important to have calibration and checking conditions corresponding to the
measurement conditions. Therefore, the calibration or certified reference materials should be as similar as
possible to the step height to be measured.
6.2 Contact probe
The stylus chip of a contact probe is made of diamond, and has a conical shape. The vertical angle of the chip
◦ ◦
is or . The radius of the chip is any of , 5µm, , and .
60 90 2µm 10µm 12,5µm
NOTE The effect of the stylus-tip radius on the lateral profile resolution, i. e. the step-edge broadening due to the bluntness
of the tip (see Figure 2), should be considered. However, due to the horizontal compression of the displayed picture (far
greater vertical than horizontal magnification), this effect can be neglected for routine coating thickness measurements
where definitive horizontal resolution is unimportant.
©
2 ISO 2005 – All rights reserved
ISO 18452:2005(E)
Key
1 substrate
2step
Figure 2 — Broading of the step “B” due to the bluntness (radius r) of the stylus tip
7 Test pieces
7.1 General consideration
The test pieces shall comprise a fine ceramic thin film coated onto the surface of a substrate such as glass, or
a piece cut from such an item.
The test pieces shall have dimensions sufficient to ensure stability on the test piece support of the profilometer.
Select a representative test specimen from the coating to be tested. Clean the specimen, using an appropriate
method for the coating, so that it is free from dust, oil, moisture and any other surface films. The test-pieces may
be produced by machining from a larger board on which the fine ceramic thin film was formed to the appropriate
size.
NOTE 1 The level difference is formed by taking away part of the film by chemical etching, or by depositing the film through
a mask.
NOTE 2 When covering part of the substrate durin
...
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