EN ISO 18452:2016

Fine ceramics (advanced ceramics, advanced technical ceramics) - Determination of thickness of ceramic films by contact-probe profilometer (ISO 18452:2005)

ISO 18452:2005 specifies a method for the determination of the film thickness of a fine ceramic film and ceramic coatings by a contact-probe profilometer. The method is suitable for film thicknesses in the range of 10 nm to 10 000 nm.

Hochleistungskeramik - Bestimmung der Dicke keramischer Schichten mit einem Kontaktprofilometer (ISO 18452:2005)

Diese Internationale Norm legt ein Verfahren zur Bestimmung der Schichtdicke feinkeramischer Schichten und keramischer Beschichtungen mit einem Kontaktprofilometer fest. Das Verfahren ist für Schichtdicken im Bereich von 10 nm bis 10 000 nm geeignet.
ANMERKUNG   Das Verfahren erfordert eine ausgeprägte und deutlich geformte Grenze zwischen beschichtetem und unbeschichtetem Bereich des Grundwerkstoffes (Substrat).

Céramiques techniques - Détermination de l'épaisseur des films céramiques avec un profilomètre à contact (ISO 18452:2005)

L'ISO 18452 :2005 spécifie une méthode permettant de déterminer l'épaisseur d'un film céramique technique et de revêtements céramiques à l'aide d'un profilomètre à contact. La méthode est adaptée à des épaisseurs de film comprises entre 10 nm et 10 000 nm.
NOTE          La méthode nécessite une frontière distincte et clairement formée entre les parties revêtue et non revêtue du substrat.

Fina keramika (sodobna keramika, sodobna tehnična keramika) - Ugotavljanje debeline keramične plasti z merilnikom profilov (ISO 18452:2005)

Ta mednarodni standard podaja metodo za ugotavljanje debeline fine keramične plasti in keramičnih prevlek z merilnikom profilov. Metoda je primerna za debelino plasti v razponu od 10 nm do 10.000 nm.

General Information

• Status: Published
• Publication Date: 19-Apr-2016
• Withdrawal Date: 30-Oct-2016
• ICS: 81.060.30 - Advanced ceramics
• Technical Committee: CEN/TC 184 - Advanced technical ceramics
• Drafting Committee: CEN/TC 184 - Advanced technical ceramics
• Current Stage: 6060 - Definitive text made available (DAV) - Publishing
• Start Date: 20-Apr-2016
• Due Date: 22-Nov-2016
• Completion Date: 20-Apr-2016
• Ref Project: SIST EN ISO 18452:2016 - Fine ceramics (advanced ceramics, advanced technical ceramics) - Determination of thickness of ceramic films by contact-probe profilometer (ISO 18452:2005)

Relations

• Replaces: EN 1071-1:2003 - Advanced technical ceramics - Methods of test for ceramic coatings - Part 1: Determination of coating thickness by contact probe filometer
• Effective Date: 17-Dec-2014

Overview

EN ISO 18452:2016 (ISO 18452:2005 adopted by CEN) defines a standardized method for measuring the thickness of fine ceramic films and ceramic coatings using a contact‑probe (stylus) profilometer. The procedure is intended for film thicknesses in the range 10 nm to 10 000 nm and is widely used for advanced/technical ceramics where a clear boundary between coated and uncoated substrate areas exists.

Key topics and technical requirements

• Measurement principle: film thickness is obtained from the profilometer trace across a step between coated and uncoated regions - scan direction C → B → A (down the step) and the thickness is the vertical difference at the inflection point.
• Instrument and calibration:
  • Use a contact‑probe profilometer compliant with ISO 3274.
  • Calibrate with step‑height calibration standards; calibration conditions should match measurement conditions.
• Contact probe (stylus):
  • Diamond tip, conical shape; vertical angle typically 60° or 90°.
  • Typical tip radii: 2 µm, 5 µm, 10 µm, 12.5 µm. Consider lateral broadening of step due to tip radius.
• Test pieces and preparation:
  • Substrate with representative ceramic coating; clean (free of dust, oil, moisture).
  • Step can be formed by masking during deposition or by etching away part of the film. Avoid masking artifacts near the step.
• Surface and roughness requirements:
  • Ra of substrate and coating should be ≤ 1/5 of the step height.
  • Average roughness wavelength should be < 10% of AB (substrate) or CD (coating) used in the analysis.
• Measurement procedure and reproducibility:
  • Level sample to avoid levelling errors (see Annex A for error dependence).
  • Stylus load: 0.05 mN to 0.3 mN (lowest practical value to avoid damage).
  • Travel over uncoated and coated portions (AB and CD) each ≥ 10 × BC (step width) to accurately identify edges.
  • Perform at least three test pieces, with five scans per piece (15 values total); report the mean (to three significant figures) and standard deviation if required.
• Data analysis:
  • Determine inflection point, fit least‑squares lines to representative regions on both sides, and compute difference in y at the inflection point as the film thickness.

Applications and users

• Quality control and process monitoring in advanced ceramics manufacturing, sputtering/CVD/PVD coating lines.
• R&D and failure analysis in materials science, microelectronics, wear‑resistant coatings.
• Calibration and metrology laboratories performing traceable thickness measurements of ceramic films.
• Users search terms: EN ISO 18452:2016, fine ceramics film thickness, contact‑probe profilometry, ceramic coatings measurement.

Related standards

• ISO 3274 - Geometrical Product Specifications (GPS) - surface texture: profile method - characteristics of contact (stylus) instruments.
• EN ISO 18452 supersedes EN 1071‑1:2003 (adopted unchanged in 2016).

This standard provides a repeatable, instrument‑based method for reliable thickness measurement of fine ceramic films where profilometry is appropriate and surface/step preparation is controlled.

Standards Content (Sample)

SLOVENSKI STANDARD
01-junij-2016
1DGRPHãþD
SIST EN 1071-1:2004
)LQDNHUDPLNDVRGREQDNHUDPLNDVRGREQDWHKQLþQDNHUDPLND8JRWDYOMDQMH
GHEHOLQHNHUDPLþQHSODVWL]PHULOQLNRPSURILORY,62
Fine ceramics (advanced ceramics, advanced technical ceramics) - Determination of
thickness of ceramic films by contact-probe profilometer (ISO 18452:2005)
Hochleistungskeramik - Bestimmung der Dicke keramischer Schichten mit einem
Kontaktprofilometer (ISO 18452:2005)
Céramiques techniques - Détermination de l'épaisseur des films céramiques avec un
profilomètre à contact (ISO 18452:2005)
Ta slovenski standard je istoveten z: EN ISO 18452:2016
ICS:
25.220.99 Druge obdelave in prevleke Other treatments and
coatings
81.060.30 Sodobna keramika Advanced ceramics
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

EN ISO 18452
EUROPEAN STANDARD
NORME EUROPÉENNE
April 2016
EUROPÄISCHE NORM
ICS 81.060.30 Supersedes EN 1071-1:2003
English Version
Fine ceramics (advanced ceramics, advanced technical
ceramics) - Determination of thickness of ceramic films by
contact-probe profilometer (ISO 18452:2005)
Céramiques techniques - Détermination de l'épaisseur Hochleistungskeramik - Bestimmung der Dicke
des films céramiques avec un profilomètre à contact keramischer Schichten mit einem Kontaktprofilometer
(ISO 18452:2005) (ISO 18452:2005)
This European Standard was approved by CEN on 25 March 2016.

CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this
European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references
concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN
member.
This European Standard exists in three official versions (English, French, German). A version in any other language made by
translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management
Centre has the same status as the official versions.

CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania,
Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and
United Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION

EUROPÄISCHES KOMITEE FÜR NORMUNG

CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels
© 2016 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 18452:2016 E
worldwide for CEN national Members.

Contents Page
European foreword . 3

European foreword
The text of ISO 18452:2005 has been prepared by Technical Committee ISO/TC 206 “Fine ceramics” of
the International Organization for Standardization (ISO) and has been taken over as EN ISO 18452:2016
by Technical Committee CEN/TC 184 “Advanced technical ceramics” the secretariat of which is held by
DIN.
This European Standard shall be given the status of a national standard, either by publication of an
identical text or by endorsement, at the latest by October 2016, and conflicting national standards shall
be withdrawn at the latest by October 2016.
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. CEN [and/or CENELEC] shall not be held responsible for identifying any or all such patent
rights.
This document supersedes EN 1071-1:2003.
According to the CEN-CENELEC Internal Regulations, the national standards organizations of the
following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria,
Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia,
France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta,
Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland,
Turkey and the United Kingdom.
Endorsement notice
The text of ISO 18452:2005 has been approved by CEN as EN ISO 18452:2016 without any modification.
INTERNATIONAL ISO
STANDARD 18452
First edition
2005-11-15
Fine ceramics (advanced ceramics,
advanced technical ceramics) —
Determination of thickness of ceramic
films by contact-probe profilometer
Céramiques techniques — Détermination de l'épaisseur des films
céramiques avec un profilomètre à contact

Reference number
ISO 18452:2005(E)
ISO 18452:2005(E)
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©
ii ISO 2005 – All rights reserved

ISO 18452:2005(E)
Contents Page
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Principle of measurement . 1
5 Test environment . 1
6 Apparatus . 2
7 Test pieces . 3
8 Procedure . 4
9 Calculation . 5
10 Limits to step height . 5
11 Test report . 6
Annex A (informative) Effect of amplification factor and levelling error on measured layer thickness 7
©
ISO 2005 – All rights reserved iii

ISO 18452:2005(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies
(ISO member bodies). The work of preparing International Standards is normally carried out through ISO
technical committees. Each member body interested in a subject for which a technical committee has been
established has the right to be represented on that committee. International organizations, governmental and
non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International
Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.
International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2.
The main task of technical committees is to prepare International Standards. Draft International Standards
adopted by the technical committees are circulated to the member bodies for voting. Publication as an
International Standard requires approval by at least 75 % of the member bodies casting a vote.
Attention is drawn to the possibility that some of the elements of this document may be the subject of patent
rights. ISO shall not be held responsible for identifying any or all such patent rights.
ISO 18452 was prepared by Technical Committee ISO/TC 206, Fine ceramics.
©
iv ISO 2005 – All rights reserved

INTERNATIONAL STANDARD ISO 18452:2005(E)
Fine ceramics (advanced ceramics, advanced technical
ceramics) — Determination of thickness of ceramic films by
contact-probe profilometer
1 Scope
This International Standard specifies a method for the determination of the film thickness of a fine ceramic film
and ceramic coatings by a contact-probe profilometer. The method is suitable for film thicknesses in the range
of 10 nmto 10 000 nm.
NOTE The method requires a distinct and clearly formed boundary between coated and uncoated parts of the substrate.
2 Normative references
The following referenced documents are indispensable for the application of this document. For dated
references, only the edition cited applies. For undated references, the latest edition of the referenced document
(including any amendments) applies.
ISO 3274, Geometrical Product Specifications (GPS)— Surface texture: Profile method— Nominal
characteristics of contact (stylus) instruments
3 Terms and definitions
For the purposes of this document, the following terms and definitions apply.
3.1
fine ceramic film
coating consisting of a fine ceramic material which thinly covers the substrate surface
EXAMPLE Typical materials are oxides, carbides, nitrides, etc., deposited by methods such as vacuum evaporating,
sputtering, chemical vapour deposition, etc.
4 Principle of measurement
This International Standard concerns the measurement of the film thickness of fine ceramic coatings on a
substrate using a contact-probe profilometer. The film thickness shall be calculated from the profile which is
obtained by scanning the contact probe in the direction C→ B→ A, as shown in Figure 1. The pro
...