FprEN ISO 25178-604
(Main)Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments (ISO/FDIS 25178-604:2024)
Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments (ISO/FDIS 25178-604:2024)
This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurements.
Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Flächenhaft - Teil 604: Aufbau und Merkmale von berührungslos messenden Geräten (Weißlicht-Interferometrie) (ISO/FDIS 25178-604:2024)
Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 604: Conception et caractéristiques des instruments sans contact (à interférométrie par balayage à cohérence) (ISO/FDIS 25178-604:2024)
Le présent document spécifie la conception et les caractéristiques métrologiques des instruments d'interférométrie par balayage à cohérence (CSI) pour le mesurage surfacique de la topographie de surface. Puisque les profils de surface peuvent être extraits des données de topographie de surface, les méthodes décrites dans le présent document s'appliquent également aux mesurages de profil.
Specifikacija geometrijskih veličin izdelka - Tekstura površine: ploskovna - 604. del: Konstrukcije in značilnosti nekontaktnih instrumentov (interferometrija s koherentnim optičnim čitalnikom) (ISO/FDIS 25178-604:2024)
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Standards Content (Sample)
SLOVENSKI STANDARD
oSIST prEN ISO 25178-604:2023
01-december-2023
Specifikacija geometrijskih veličin izdelka - Tekstura površine: ploskovna - 604.
del: Konstrukcije in značilnosti nekontaktnih instrumentov (interferometrija s
koherentnim optičnim čitalnikom) (ISO/DIS 25178-604:2023)
Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Design and
characteristics of non-contact (coherence scanning interferometry) instruments (ISO/DIS
25178-604:2023)
Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Flächenhaft -
Teil 604: Aufbau und Merkmale von berührungslos messenden Geräten (Weißlicht-
Interferometrie) (ISO/DIS 25178-604:2023)
Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 604:
Conception et caractéristiques des instruments sans contact (à interférométrie par
balayage à cohérence) (ISO/DIS 25178-604:2023)
Ta slovenski standard je istoveten z: prEN ISO 25178-604
ICS:
17.040.20 Lastnosti površin Properties of surfaces
17.040.40 Specifikacija geometrijskih Geometrical Product
veličin izdelka (GPS) Specification (GPS)
oSIST prEN ISO 25178-604:2023 en,fr,de
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.
oSIST prEN ISO 25178-604:2023
oSIST prEN ISO 25178-604:2023
DRAFT INTERNATIONAL STANDARD
ISO/DIS 25178-604
ISO/TC 213 Secretariat: BSI
Voting begins on: Voting terminates on:
2023-10-05 2023-12-28
Geometrical product specifications (GPS) — Surface
texture: Areal —
Part 604:
Design and characteristics of non-contact (coherence
scanning interferometry) instruments
ICS: 17.040.20
This document is circulated as received from the committee secretariat.
THIS DOCUMENT IS A DRAFT CIRCULATED
FOR COMMENT AND APPROVAL. IT IS
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NATIONAL REGULATIONS.
ISO/DIS 25178-604:2023(E)
RECIPIENTS OF THIS DRAFT ARE INVITED
TO SUBMIT, WITH THEIR COMMENTS,
NOTIFICATION OF ANY RELEVANT PATENT
RIGHTS OF WHICH THEY ARE AWARE AND TO
PROVIDE SUPPORTING DOCUMENTATION. © ISO 2023
oSIST prEN ISO 25178-604:2023
ISO/DIS 25178-604:2023(E)
DRAFT INTERNATIONAL STANDARD
ISO/DIS 25178-604
ISO/TC 213 Secretariat: BSI
Voting begins on: Voting terminates on:
Geometrical product specifications (GPS) — Surface
texture: Areal —
Part 604:
Design and characteristics of non-contact (coherence
scanning interferometry) instruments
ICS: 17.040.20
This document is circulated as received from the committee secretariat.
THIS DOCUMENT IS A DRAFT CIRCULATED
FOR COMMENT AND APPROVAL. IT IS
© ISO 2023
ISO/CEN PARALLEL PROCESSING
THEREFORE SUBJECT TO CHANGE AND MAY
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
NOT BE REFERRED TO AS AN INTERNATIONAL
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IN ADDITION TO THEIR EVALUATION AS
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NATIONAL REGULATIONS.
Website: www.iso.org ISO/DIS 25178-604:2023(E)
RECIPIENTS OF THIS DRAFT ARE INVITED
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TO SUBMIT, WITH THEIR COMMENTS,
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ii
PROVIDE SUPPORTING DOCUMENTATION. © ISO 2023
oSIST prEN ISO 25178-604:2023
ISO/DIS 25178-604:2023(E)
Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Instrument requirements .5
5 Metrological characteristics . 6
6 Design features .7
7 General information . 7
Annex A (informative) Principles of CSI for areal surface topography measurement.8
Annex B (informative) Sources of measurement error for CSI .13
Annex C (informative) Relationship to the GPS matrix model .18
Bibliography .19
iii
oSIST prEN ISO 25178-604:2023
ISO/DIS 25178-604:2023(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of
any patent rights identified during the development of the document will be in the Introduction and/or
on the ISO list of patent declarations received (see www.iso.org/patents).
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of
any patent rights identified during the development of the document will be in the Introduction and/or
on the ISO list of patent declarations received (see www.iso.org/patents).
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation on the meaning of ISO specific terms and expressions related to conformity assessment,
as well as information about ISO's adherence to the World Trade Organization (WTO) principles in the
Technical Barriers to Trade (TBT) see the following URL: www.iso.org/iso/foreword.html.
The committee responsible for this document is Technical Committee ISO/TC 213, Dimensional and
geometrical product specifications and verification.
This second edition cancels and replaces the first edition (ISO 25178-604:2013), which has been
technically revised.
A list of all parts in the ISO 25178 series can be found on the ISO website.
iv
oSIST prEN ISO 25178-604:2023
ISO/DIS 25178-604:2023(E)
Introduction
This document is a geometrical product specification (GPS) standard and is to be regarded as a general
GPS standard (see ISO 14638). It influences chain link F of the chains of standards on profile and areal
surface texture.
The ISO GPS matrix model given in ISO 14638 gives an overview of the ISO GPS system of which this
document is a part. The fundamental rules of ISO GPS given in ISO 8015 apply to this document and
the default decision rules given in ISO 14253-1 apply to the specifications made in accordance with this
document, unless otherwise indicated.
For more detailed information of the relation of this document to other standards and the GPS matrix
model, see Annex C.
This document includes normative terms and definitions relevant to the coherence scanning
interferometry (CSI) method for the measurement of areal surface topography. The informative
Annex A briefly summarizes CSI instruments and methods to clarify the normative definitions and to
provide a foundation for informative Annex B, which describes common sources of uncertainty and
their relation to the metrological characteristics of CSI.
NOTE Portions of this document, particularly the informative sections, describe patented systems and
methods. This information is provided only to assist users in understanding the operating principles of coherence
scanning interferometric microscopy. This document is not intended to establish priority for any intellectual
property, nor does it imply a license to proprietary technologies described herein.
v
oSIST prEN ISO 25178-604:2023
oSIST prEN ISO 25178-604:2023
DRAFT INTERNATIONAL STANDARD ISO/DIS 25178-604:2023(E)
Geometrical product specifications (GPS) — Surface
texture: Areal —
Part 604:
Design and characteristics of non-contact (coherence
scanning interferometry) instruments
1 Scope
This document describes the design and metrological characteristics of coherence scanning
interferometry systems for areal measurement of surface topography. Because surface profiles can be
extracted from surface topography data, the methods described in this document can be applied to
profiling measurements as well.
2 Normative references
The following documents are referred to in the text in such a way that some or all of their content
constitutes requirements of this document. For dated references, only the edition cited applies. For
undated references, the latest edition of the referenced document (including any amendments) applies.
ISO 25178-600:2019, Geometrical product specifications (GPS) — Surface texture: Areal — Part 600:
Metrological characteristics for areal topography measuring methods
3 Terms and definitions
For the purposes of this document, the terms and definitions given in ISO 25178-600 and the following
apply.
ISO and IEC maintain terminological databases for use in standardization at the following addresses:
— ISO Online browsing platform: available at https:// www .iso .org/ obp
— IEC Electropedia: available at https:// www .electropedia .org/
3.1
coherence scanning interferometry
CSI
surface topography measurement method wherein the localization of interference fringes during a scan
of optical path length provides a means to determine a surface topography map
[SOURCE: ISO 25178-6:2010, 3.3.5]
Note 1 to entry: The optical path length difference is the difference in optical path length, including the
effect of geometry and refractive index, between the measurement and reference paths of an interferometer
(ISO 10934-1:2020, 3.1.83).
Note 2 to entry: CSI uses a broad illumination spectral bandwidth, the illumination geometry, or both, to localize
the interference fringes.
Note 3 to entry: CSI uses either fringe localization alone or in combination with interference phase evaluation,
depending on the surface type, desired surface topography repeatability and software capabilities.
oSIST prEN ISO 25178-604:2023
ISO/DIS 25178-604:2023(E)
Note 4 to entry: Table 1 provides a list of alternative terms for CSI that are in part within the scope of this
document.
Table 1 — Summary of common alternative terms for CSI
Term Bibliography
Coherence probe microscopy
Coherence radar [9-14]
Coherence correlation interferometry
White light interferometry
White light scanning interferometry [15-17]
Scanning white light interferometry
Vertical scanning interferometry
[18,19]
Height scanning interferometry
Full-field optical coherence tomography [20]
3.2
coherence scanning interferometry scan
CSI scan
mechanical or optical scan which varies the optical length of either the reference path or measurement
path to vary the optical path difference.
Note 1 to entry: The imaging optics is nominally parallel to the axial scan axis of the microscope.
Note 2 to entry: A CSI signal can correspond to a sequence of electronic camera detections of intensity values
during a CSI scan (see Annex A).
Note 3 to entry: In CSI, the most common (but not exclusive) scanning means is a physical a
...
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