Surface chemical analysis — Scanning-probe microscopy — Definition and calibration of the lateral resolution of a near-field optical microscope

ISO 27911:2011 describes a method for determining the spatial (lateral) resolution of an apertured near-field scanning optical microscope (NSOM) by imaging an object with a size much smaller than the expected resolution. It is applicable to aperture-type NSOMs operated in the transmission, reflection, collection or illumination/collection mode.

Analyse chimique des surfaces — Microscopie à sonde à balayage — Définition et étalonnage de la résolution latérale d'un microscope optique en champ proche

General Information

Status
Published
Publication Date
20-Jul-2011
Current Stage
9060 - Close of review
Start Date
04-Mar-2029
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ISO 27911:2011 - Surface chemical analysis -- Scanning-probe microscopy -- Definition and calibration of the lateral resolution of a near-field optical microscope
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Standards Content (Sample)

INTERNATIONAL ISO
STANDARD 27911
First edition
2011-08-01

Surface chemical analysis — Scanning-
probe microscopy — Definition and
calibration of the lateral resolution of a
near-field optical microscope
Analyse chimique des surfaces — Microscopie à sonde à balayage —
Définition et étalonnage de la résolution latérale d'un microscope
optique en champ proche




Reference number
ISO 27911:2011(E)
©
ISO 2011

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ISO 27911:2011(E)

COPYRIGHT PROTECTED DOCUMENT


©  ISO 2011
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means,
electronic or mechanical, including photocopying and microfilm, without permission in writing from either ISO at the address below or
ISO's member body in the country of the requester.
ISO copyright office
Case postale 56 • CH-1211 Geneva 20
Tel. + 41 22 749 01 11
Fax + 41 22 749 09 47
E-mail copyright@iso.org
Web www.iso.org
Published in Switzerland

ii © ISO 2011 – All rights reserved

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ISO 27911:2011(E)
Contents Page
Foreword .iv
Introduction.v
1 Scope.1
2 Normative references.1
3 Terms and definitions .1
4 Symbols and abbreviated terms .1
5 General information .2
5.1 Background information.2
5.2 Types of NSOM operation.2
5.3 Methods of measuring the lateral resolution of an NSOM .3
5.4 Parameters that affect the lateral resolution .3
6 Measurement of lateral resolution by imaging a very small object .5
6.1 Background information.5
6.2 Selection of the specimen and specimen requirements.6
6.3 Setting the parameters before the operation of the instrument.7
6.4 Data collection and analysis .7
6.5 Recording of data .8
Annex A (informative) Examples using a line-profile and a CdSe/ZnS quantum dot as specimen.9
Annex B (informative) Example of a procedure for preparing standard NSOM specimens .15
Bibliography.17

© ISO 2011 – All rights reserved iii

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ISO 27911:2011(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies
(ISO member bodies). The work of preparing International Standards is normally carried out through ISO
technical committees. Each member body interested in a subject for which a technical committee has been
established has the right to be represented on that committee. International organizations, governmental and
non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the
International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.
International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2.
The main task of technical committees is to prepare International Standards. Draft International Stand
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