ISO/CD 15338

Surface chemical analysis — Glow-discharge mass spectrometry (GD-MS) — Introduction to use

Analyse chimique des surfaces — Spectrométrie de masse à décharge luminescente (GD-MS) — Introduction à l'utilisation

General Information

• Status: Withdrawn
• ICS: 71.040.40 - Chemical analysis
• Technical Committee: ISO/TC 201/SC 8 - Glow discharge spectroscopy
• Drafting Committee: ISO/TC 201/SC 8 - Glow discharge spectroscopy
• Current Stage: 3098 - Project deleted
• Completion Date: 04-Jul-2007

Standards Content (Sample)

DRAFT INTERNATIONAL STANDARD ISO/DIS 15338
ISO/TC 201/SC 8 Secretariat: JISC
Voting begins on: Voting terminates on:
2005-04-11 2005-09-12
INTERNATIONAL ORGANIZATION FOR STANDARDIZATION • МЕЖДУНАРОДНАЯ ОРГАНИЗАЦИЯ ПО СТАНДАРТИЗАЦИИ • ORGANISATION INTERNATIONALE DE NORMALISATION
Surface chemical analysis — Glow-discharge mass
spectrometry (GD-MS) — Introduction to use
Analyse chimique des surfaces — Spectromètrie de masse à décharge luminescente (GD-MS) — Introduction
à l'utilisation
ICS 71.040.40
In accordance with the provisions of Council Resolution 15/1993 this document is circulated in
the English language only.
Conformément aux dispositions de la Résolution du Conseil 15/1993, ce document est distribué
en version anglaise seulement.
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ISO Central Secretariat work of editing and text composition will be undertaken at publication
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Secrétariat central de l'ISO au stade de publication.
THIS DOCUMENT IS A DRAFT CIRCULATED FOR COMMENT AND APPROVAL. IT IS THEREFORE SUBJECT TO CHANGE AND MAY NOT BE
REFERRED TO AS AN INTERNATIONAL STANDARD UNTIL PUBLISHED AS SUCH.
IN ADDITION TO THEIR EVALUATION AS BEING ACCEPTABLE FOR INDUSTRIAL, TECHNOLOGICAL, COMMERCIAL AND USER PURPOSES, DRAFT
INTERNATIONAL STANDARDS MAY ON OCCASION HAVE TO BE CONSIDERED IN THE LIGHT OF THEIR POTENTIAL TO BECOME STANDARDS TO
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© International Organization for Standardization, 2005

ISO/DIS 15338
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ii ISO 2005 – All rights reserved

Contents Page
Foreword.v
Introduction.vi
1 Scope .1
2 Normative references.1
3 Safety .1
3.1 General.1
3.2 Use of high voltage power supply and connection of the instrument.1
3.3 Use and storage of compressed gas cylinders.2
4 Principle.2
5 Terms and definitions .2
6 Materials (Reagents).4
7 Apparatus .5
7.1 General.5
7.2 Ion source.5
7.2.1 General.5
7.2.2 Source parameters .6
7.2.3 Operational modes .6
7.3 Ion source.7
7.4 Detector system.9
7.5 Vacuum system .9
7.6 Data acquisition and control.9
8 Samples and sample preparation .10
8.1 General.10
8.2 Sample type.10
8.3 Sample geometry.10
8.4 Sample preparation .10
8.4.1 General.10
8.4.2 Metals, alloys and semi-conductors.11
8.4.3 Powders.11
8.4.4 Non-conducting samples.11
8.4.5 Depth profiling samples.11
9 Procedures of measurements .11
9.1 System precautions.11
9.1.1 General.11
9.1.2 Interferences .12
9.2 Obtaining a discharge.12
9.2.1 Uncharacterized samples .12
9.2.2 Characterized samples.12
9.3 Presputtering .12
9.4 Optimizing the ion current.13
9.5 Analysis set-up .13
9.6 Data analysis.13
9.7 Depth profile analysis .14
9.8 Instrument performance .14
9.9 Calibration and analysis-General.14
9.9.1 General.15

DRAFT 2005
9.9.2 Measurement using relative sensitive factor.15
9.9.3 Measurement using a matrix corrected relative sensitivity factors.18
9.10 Calibration and analysis criteria .19
9.10.1 Number of determinations.19
9.10.2 Calibration standard samples .19
9.10.3 Calibration verification.21
9.10.4 Acceptance of results .21
10 Test report.21

iv © ISO 2004 – All rights reserved

DRAFT 2005
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies
(ISO member bodies). The work of preparing International Standards is normally carried out through ISO
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Attention is drawn to the possibility that some of the elements of this document may be the subject of patent
rights. ISO shall not be held responsible for identifying any or all such patent rights.
ISO 15338 was prepared by Technical Committee ISO/TC 201, Surface Chemical analysis, Subcommittee
SC 8, Glow discharge spectroscopy.

DRAFT 2005
COMMITTEE DRAFT ISO/CD 15338
Surface chemical analysis — Glow-discharge mass
spectrometry (GD-MS) — Introduction to use
1 Scope
This Standard is a guide to the operation and recommendations for the use of glow discharge mass
spectrometry (GD-MS).
Note: This Standard should be read in conjunction with the instrument manufacturer’s manuals and recommendations.
2 Normative references
The following referenced documents are indispensable for the application of this document. For dated
references, only the edition cited applies. For undated references, the latest edition of the referenced
document (including any amendments) applies.
ISO 18115:2001/PDAM 1, Surface chemical analysis — Vocabulary — Supplement
ISO 5725-1:1994, Accuracy (trueness and precision) of measurement methods and results — Part 1: General
principles and definitions.
ISO 5725-2:1994, Accuracy (trueness and precision) of measurement methods and results — Part 2: Basic
method for the determination of repeatability and reproducibility of a standard measurement method.
ISO 5725-6:1994, Accuracy (trueness and precision) of measurement methods and results — Part 6: Use in
practice of accuracy values.
ISO/DIS 18115, Surface chemical analysis — Vocabulary
1 Safety
3.1 General
The following precautions should be taken to ensure the safety of operators and their
...