ISO 21360-1:2020
(Main)Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 1: General description
Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 1: General description
This document specifies three methods for measuring the volume flow rate and one method each for measuring the base pressure, the compression ratio, and the critical backing pressure of a vacuum pump. The first method for measuring the volume flow rate (the throughput method) is the basic concept, in which a steady gas flow is injected into the pump while the inlet pressure is measured. In practice, the measurement of gas throughput may be complicated or inexact. For this reason, two other methods are specified which avoid the direct measurement of throughput. The second method for measuring the volume flow rate (the orifice method) is used when there is very small throughput at very small inlet pressures (under a high or ultra-high vacuum). It is based on measuring the ratio of pressures in a two-chamber test dome in which the two chambers are separated by a wall with a circular orifice. The third method for measuring the volume flow rate (the pump-down method) is well suited for automated measurement. It is based on the evacuation of a large vessel. The volume flow rate is calculated from two pressures, before and after a pumping interval, and from the volume of the test dome. Different effects, such as leak and desorption rates, gas cooling by nearly isentropic expansion during the pumping interval, and increasing flow resistance in the connection line between test dome and pump caused by molecular flow at low pressures, influence the results of the pressure measurement and the resulting volume flow rate. The choice of the required measurement methods depends on the properties of the specific kinds of vacuum pump, e.g. the measurement of the critical backing pressure is only necessary for vacuum pumps which need a backing pump. All data that are measured on a vacuum pump, but not specified in this document (e.g. measurement of power consumption), are defined in the specific pump standard.
Technique du vide — Méthodes normalisées pour mesurer les performances des pompes à vide — Partie 1: Description générale
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INTERNATIONAL ISO
STANDARD 21360-1
Second edition
2020-06
Vacuum technology — Standard
methods for measuring vacuum-pump
performance —
Part 1:
General description
Technique du vide — Méthodes normalisées pour mesurer les
performances des pompes à vide —
Partie 1: Description générale
Reference number
ISO 21360-1:2020(E)
©
ISO 2020
---------------------- Page: 1 ----------------------
ISO 21360-1:2020(E)
COPYRIGHT PROTECTED DOCUMENT
© ISO 2020
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting
on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address
below or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: +41 22 749 01 11
Email: copyright@iso.org
Website: www.iso.org
Published in Switzerland
ii © ISO 2020 – All rights reserved
---------------------- Page: 2 ----------------------
ISO 21360-1:2020(E)
Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Symbols and abbreviated terms . 3
5 Test methods . 4
5.1 Volume flow rate (pumping speed) measurement by the throughput method . 4
5.1.1 General. 4
5.1.2 Test dome for the throughput method . 5
5.1.3 Experimental setup . 6
5.1.4 Determination of the volume flow rate . 7
5.1.5 Measuring procedure . 8
5.1.6 Measuring uncertainties . 8
5.1.7 Evaluation of the measurement . 8
5.2 Volume flow rate (pumping speed) measurement by the orifice method . 9
5.2.1 General. 9
5.2.2 Test dome for the orifice method . 9
5.2.3 Experimental setup .10
5.2.4 Determination of the volume flow rate .11
5.2.5 Measuring procedure for the orifice method .12
5.2.6 Adjustment of the pressure-measuring gauges .12
5.2.7 Measurement of the volume flow rate .12
5.2.8 Measuring uncertainties .12
5.2.9 Evaluation of the measurement .13
5.3 Volume flow rate (pumping speed) measurement by the pump-down method .14
5.3.1 General.14
5.3.2 Test dome for the pump-down method .14
5.3.3 Quick-acting valve .15
5.3.4 Experimental setup .15
5.3.5 Determination of the volume flow rate .16
5.3.6 Measuring procedure .17
5.3.7 Limits of applicability .18
5.3.8 Evaluation of the measurement .18
5.3.9 Measurement uncertainty .18
5.4 Measurement of the base pressure .18
5.4.1 Operating conditions .18
−4
5.4.2 Test procedure for pumps with a base pressure >10 Pa .19
−4
5.4.3 Test procedure for pumps with a base pressure <10 Pa .19
5.4.4 Evaluation of the measurement .19
5.5 Measurement of the compression ratio and the critical backing pressure .19
5.5.1 Experimental setup .20
5.5.2 Determination of the compression ratio and the critical backing pressure .20
5.5.3 Measurement procedure .21
5.5.4 Measurement uncertainty .22
5.5.5 Evaluation of the measurements .22
5.5.6 Specific recommendations for extremely high compression ratio
measurements.22
Annex A (informative) Mean free path of some important gases .24
Annex B (informative) Measuring uncertainties .25
Bibliography .28
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ISO 21360-1:2020(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2 (see www .iso .org/ directives).
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of
any patent rights identified during the development of the document will be in the Introduction and/or
on the ISO list of patent declarations received (see www .iso .org/ patents).
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation of the voluntary nature of standards, the meaning of ISO specific terms and
expressions related to conformity assessment, as well as information about ISO's adherence to the
World Trade Organization (WTO) principles in the Technical Barriers to Trade (TBT), see www .iso .org/
iso/ foreword .html.
This document was prepared by Technical Committee ISO/TC 112, Vacuum technology.
This second edition cancels and replaces the first edition (ISO 21360-1:2012), of which it constitutes a
minor revision. The changes compared to the previous edition are as follows:
— Note in 3.3 has been deleted;
— K in 3.7 has been corrected;
0
— 3.9 the definition of the volume has been changed to "is the volume of transported gas";
— Figure 1 has been corrected;
— Figure 2 has been corrected;
— 5.2.7: change to "for at least 60s" instead of " for the following minute".
A list of all parts in the ISO 21360 series can be found on the ISO website.
Any feedback or questions on this document should be directed to the user’s national standards body. A
complete listing of these bodies can be found at www .iso .org/ members .html.
iv © ISO 2020 – All rights reserved
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ISO 21360-1:2020(E)
Introduction
This document is a basic standard for measuring the performance data of vacuum pumps. The methods
specified here are well known from existing national and International Standards. In developing this
document, the aim has been to provide a single document containing the measurements of performance
data of vacuum pumps and to simplify the future development of specific vacuum pump standards.
Specific vacuum pump standards will contain a suitable selection of measurement methods from
this document in order to determine the performance data, limiting values and specific operational
conditions on the basis of the specific properties of the particular kind of pump. Whenever a discrepancy
exists between this document and the specific standard, it is the specific standard which is valid.
© ISO 2020 – All rights reserved v
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INTERNATIONAL STANDARD ISO 21360-1:2020(E)
Vacuum technology — Standard methods for measuring
vacuum-pump performance —
Part 1:
General description
1 Scope
This document specifies three methods for measuring the volume flow rate and one method each for
measuring the base pressure, the compression ratio, and the critical backing pressure of a vacuum pump.
The first method for measuring the volume flow rate (the throughput method) is the basic concept, in
which a steady gas flow is injected into the pump while the inlet pressure is measured. In practice, the
measurement of gas throughput may be complicated or inexact. For this reason, two other methods are
specified which avoid the direct measurement of throughput.
The second method for measuring the volume flow rate (the orifice method) is used when there is
very small throughput at very small inlet pressures (under a high or ultra-high vacuum). It is based on
measuring the ratio of pressures in a two-chamber test dome in which the two chambers are separated
by a wall with a circular orifice.
The third method for measuring the volume flow rate (the pump-down method) is well suited for
automated measurement. It is based on the evacuation of a large vessel. The volume flow rate is
calculated from two pressures, before and after a pumping interval, and from the volume of the test
dome. Different effects, such as leak and desorption rates, gas cooling by nearly isentropic expansion
during the pumping interval, and increasing flow resistance in the connection line between test dome
and pump caused by molecular flow at low pressures, influence the results of the pressure measurement
and the resulting volume flow rate.
The choice of the required measurement methods depends on the properties of the specific kinds of
vacuum pump, e.g. the measurement of the critical backing pressure is only necessary for vacuum
pumps which need a backing pump. All data that are measured on a vacuum pump, but not specified
in this document (e.g. measurement of power consumption), are defined in the specific pump standard.
2 Normative references
The following documents are referred to in the text in such a way that some or all of their content
constitutes requirements of this document. For dated references, only the edition cited applies. For
undated references, the latest edition of the referenced document (including any amendments) applies.
ISO 3529-2, Vacuum technology — Vocabulary — Part 2: Vacuum pumps and related terms
3 Terms and definitions
For the purposes of this document, the terms and definitions given in ISO 3529-2 and the following apply.
ISO and IEC maintain terminological databases for use in standardization at the following addresses:
— ISO Online browsing platform: available at https:// www .iso .org/ obp
— IEC Electropedia: available at http:// www .electropedia .org/
© ISO 2020 – All rights reserved 1
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ISO 21360-1:2020(E)
3.1
volume flow rate
q
V
dV
q = where
V
dt
V is volume;
t is time
[4]
[SOURCE: ISO 80000-4:2006 , 4-30]
EXAMPLE In the context of this document, the volume flow rate is the volume of gas which, under ideal
conditions, flows from the test dome through the pump inlet per time.
Note 1 to entry: For practical reasons, the volume flow rate of a given pump and for a given gas is conventionally
considered to be equal to the quotient of the throughput of this gas and of the equilibrium pressure at a given
location. The volume flow rate is expressed in cubic metres per hour or litres per second.
Note 2 to entry: The term “pumping speed” and symbol “S” are often used instead of “volume flow rate”.
3.2
inlet pressure
p , p , p
1 d e
pressure at the inlet of the pump, measured at a defined location in the test dome
3.3
base pressure
p
b
pressure obtained in the test dome after conditioning the vacuum pump and the test dome
Note 1 to entry: See 5.4.
3.4
maximum working pressure
p
1max
highest pressure on the inlet side that the vacuum pump and the driving device can withstand for a
prolonged period of operation time without being damaged
3.5
backing pressure
p
3
pressure at the outlet of a vacuum pump
3.6
critical backing pressure
p
c
maximum backing pressure for which the conditions are defined in the instruction manual or in a
specific standard for the particular vacuum pump
3.7
compression ratio
K
0
compression ratio without gas load, wherein p is the base pressure of the backing pump and p is the
b3 b1
base pressure of the test pump
pp−
33b
K =
0
pp−
11b
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ISO 21360-1:2020(E)
3.8
test dome
special vacuum vessel with precisely defined size, diameter and connection flanges on specified
locations, used for standard performance data measurements on vacuum pumps
3.9
throughput
Q
amount of gas flowing through a duct, expressed by the formula:
pV
1
Q==pq
1 V
t
where
p is the (high) vacuum pressure on the inlet;
1
q is the volume flow rate of the test pump;
V
t is time;
V is the volume of transported gas
3.10
standard gas flow rate
q
Vstd
volume flow rate at standard reference conditions, i.e. 0 °C and 101 325 Pa
4 Symbols and abbreviated terms
Symbol Designation Unit
a inner diameter of the connection pipe between test pump m
and quick-acting valve (items 3 and 5 in Figure 6)
2
A cross-section of the connection pipe between test pump and m
quick-acting valve (items 3 and 5 in Figure 6)
3 3
C conductance m /s (= 10 l/s)
d diameter of orifice m
D inner diameter of test dome m
D diameter of the inlet pipe m
i
D nominal diameter of test dome m
N
K compression ratio of vacuum pump with zero throughput —
0
l length of the connection pipe between test pump and m
quick-acting valve (items 3 and 5 in Figure 6)
mean free path m
l
M molar mass of gas kg/mol
p standard atmospheric pressure — 101 325 Pa Pa
0
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ISO 21360-1:2020(E)
p (high) vacuum pressure on inlet Pa (or mbar)
1
p maximum working pressure on inlet Pa (or mbar)
1max
p vacuum pressure in backing line Pa (or mbar)
3
p , p ,p pressures in the test dome for the pump-down method, Pa (or mbar)
t t t
1 2 3
measured before and after time intervals Δt , Δt , Δt
1 2 3
p , p , p base pressures Pa (or mbar)
b1 b2 b3
p critical backing pressure Pa (or mbar)
c
p , p pressures in the test dome for the orifice method Pa (or mbar)
d e
Q gas throughput of vacuum pump Pa·l/s (or mbar·l/s)
Q test gas load Pa·l/s (or mbar·l/s)
r
3
q volume flow rate of test pump l/s (or m /h)
V
3
q volume flow rate of backing pump l/s (or m /h)
VBP
3
q volume flow rate at standard reference conditions for gases, sccm (or cm /min)
Vsccm
i.e. 0 °C and 101 325 Pa
3
q volume flow rate at standard reference conditions for gases, l/s (or m /h)
Vstd
i.e. 0 °C and 101 325 Pa
Q maximum gas throughput of vacuum pump which the pump Pa⋅l/s (or mbar·l/s)
max
can withstand without damage
R ideal gas constant 8,314 J/(mol·K)
T thermodynamic temperature K
T 273,15 K (defined as 0 °C) K
0
T temperature of the test dome K
D
T temperature of the flow meter K
f
u measurement uncertainty —
3
V volume of the test dome l, m
3
V volume of connection pipe between test pump and quick-act- l, m
i
ing valve (items 3 and 5 in Figure 6)
δ thickness of the orifice wall at the orifice diameter m
5 Test methods
5.1 Volume flow rate (pumping speed) measurement by the throughput method
5.1.1 General
The throughput method is the one most used for vacuum pumps and is applicable to all pressure ranges
and pump sizes where flow meters for gas throughput measurements are available with sufficient
4 © ISO 2020 – All rights reserved
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ISO 21360-1:2020(E)
accuracy. The gas flow measuring ranges shall be chosen by multiplying the expected volume flow rate
by the maximum and minimum working pressure of the test pump.
All measuring devices shall be calibrated either:
a) in a traceable way to a vacuum primary or to a national standard, or
b) by means of instruments of absolute measure which are traceable to the SI units and to which
measurement uncertainties can be attributed.
In the case of calibrated measuring instruments, there should exist a calibration certificate in
[3]
accordance with ISO/IEC 17025 .
5.1.2 Test dome for the throughput method
For these measurements, use a test dome as shown in Figure 1 with the same nominal diameter, D ,
N
as that of the pump inlet. The face of the dome opposite the inlet flange may be flat, conical or slightly
curved, with the same average height above the flange as the flat face. Three flanges are preferable for
pressure measurement at a height of D/2 above the bottom flange if more than one pressure gauge is
used. The diameter of these flanges should be greater than or equal to the flanges of the gauges used,
and their mounting dimensions shall be noted. No measuring port shall be located in the angle range
±45° next to a gas inlet port. The connection pipes between flange and dome shall not protrude beyond
the dome wall on the inside, with the exception of the gas inlet pipe.
If necessary for the test pump, the test dome shall be fitted with a device for bake-out that ensures
uniform heating of the dome to achieve the base pressure.
The volume of the test dome may depend on the pump type. Refer to the specific pump standard for
details.
For pumps with an inlet flange diameter of less than D = 100 mm, the diameter of the dome shall
N
correspond to D = 100 mm. The transition to the pump inlet flange shall be made through a 45° conical
N
adaptor, as shown in Figure 1.
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ISO 21360-1:2020(E)
Key
1 gas inlet pipe and temperature measuring point for T
D
2 vacuum gauge and mass spectrometer connections
D diameter of the inlet pipe
i
D inner diameter of test dome, in metres
NOTE D should be big enough to allow homogenous gas conditions at the pump flange. A diameter of 0,1D is
i
generally appropriate.
Figure 1 — Test dome for the throughput method
5.1.3 Experimental setup
See Figure 2.
The test dome shall be clean and dry. The cleanness of the pump, seals and other components shall
be appropriate for the expected base pressure. All components are mounted together under clean
conditions in accordance with Figure 2. Because of the narrow measuring range, flow meters with
different ranges may be switched in series. If flow is restricted by a small flow meter, they may be used
in parallel with a manifold, adding a valve between every flow meter and the manifold. Instead of the
flow meter and the gas inlet valve, mass flow controllers with programmable throughputs may be used.
They shall be combined in parallel on a manifold.
The leak-tightness of large mass flow controllers is not sufficient in many cases. In such cases, it is
advisable that valves be used between the flow controller and the manifold.
Ionization gauges and mass spectrometers shall be installed in such a way that there is no direct
geometrical path between them.
CAUTION — Observe the safety instructions of the vacuum pump manufacturer.
6 © ISO 2020 – All rights reserved
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ISO 21360-1:2020(E)
Key
1 test dome 4 gas inlet valve 7 heating jacket (optional)
2 backing pump 5 flow meters to measure Q 8 vacuum gauge to measure p
3
3 test pump 6 vacuum gauge to measure p 9 temperature measuring point for T
1 D
NOTE Items 2 and 8 are only used in connection with high-vacuum test pumps.
Figure 2 — Arrangement for measuring volume flow rate (pumping speed) with throughput
method
5.1.4 Determination of the volume flow rate
The method adopted for the measurement of the volume flow rate, q , is the throughput method for
V
which the gas throughput, Q, is measured outside the dome. If the pressure, p , in the test dome,
1
measured by a vacuum gauge at the specified height above the bottom flange (see Figure 1), is held
constant, the volume flow rate, q , is obtained by the relationship
V
Q
q = (1)
V
pp−
1b
where p is the base pressure in the test dome (see 5.4).
b
An analogue equation is valid for the volume flow rate of the backing pump, q .
VBP
Q
q = (2)
VBP
pp−
33b
The gas throughput can be measured volumetrically (gas burettes, gas counters) by means of viscous
flow effects (rotameter, capillaries) or, in most cases, by means of thermoelectric mass flow meters (see
Reference [6] pp. 109–113).
Because of the dependence of the temperature on the gas volume, for all volumetric measurements,
corrections by a factor of T /T are necessary if the temperature, T , of the flow meter and T of the test
D f f D
dome are different.
NOTE Thermoelectric mass flow meters do not measure the throughput, but the volume flow rate, q , at
Vstd
standard reference conditions for gases (i.e. p = 101 325 Pa and T = 273,15 K, see 3.10). To obtain the throughput,
0 0
q is multiplied by the factor T p /T . Consequently, q is given by:
Vstd D 0 0 V
© ISO 2020 – All rights reserved 7
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ISO 21360-1:2020(E)
qp T
Vstd0 D
q = (3)
V
Tp()−p
01 b
The unit “sccm” (standard cubic centimetre per minute) is frequently used for q . If so, one obtains q ,
Vstd V
−3
in litres per second, by inserting [q = (q /sccm) ⋅ 10 l/60 s], [p = 101 325 Pa] and [T = 273,15 K]
Vstd Vsccm 0 0
in Formula (4), as follows:
31−−3
qT/mcm in ××10 lP101325 a×
()
Vsccm D
q = l//s (4)
V
60sK××273,(15 pp− )
1b
5.1.5 Measuring procedure
The arrangement of the measuring equipment with the test dome from Figure 1 is given in Figure 2.
At the start, when the gas inlet valve is closed, the base pressure shall prevail in the test dome (see
5.4). Then gas is admitted to the test dome through the adjustable valve. Measurements are made with
increasing pressure from a threshold value, allowing the correct use of the flow meter. During this
period of time, the ambient temperature shall be constant within ±2 °C.
When the required pressure, p , is obtained, within a variation of 3 %/min, measure the pressures, p
1 1
and p , the ambient temperature and the test dome temperature, T , as well as the admitted throughput,
3 D
Q. If the throughput remains steady to within ±3 %, the measurement at this point may be regarded as
valid. If the throughput is unsteady due to a transient condition, wait until it stabilizes. If the throughput
measurement lasts for more than 60 s, the pressure, p , in the dome shall be noted at least every minute. In
1
this case, the pressure is the average of the measured values. If during a measurement, the pressure or the
throughput varies by more than ±3 %, the measurement shall be repeated until the readings are stable.
Measurements shall be made at a minimum of three points per pressure decade of p . If the throughput
1
is increased to the maximum allowed value, Q , the maximum inlet pressure is obtained whose values
max
may be limited by the manufacturer.
NOTE Volume flow rate measurements can be made with different gases. When the gas is changed, all pipes
connected to the gas inlet valve are purged with the new gas before the beginning of the new measurement.
5.1.6 Measuring uncertainties
The gas flow should be measured with a standard uncertainty of ±2,5 % and the pressure with a
standard uncertainty of less than ±3 %. For the exact calculation, see Annex B. The total uncertainty of
the volume flow rate shall be <10 %.
5.1.7 Evaluation of the measurement
Plot on a semi-logarithmic graph (similar to Figure 5) the volume flow rate, q , of the test pump,
V
calculated by means of Formula (1), with respect to the inlet pressure, and plot on the same graph the
volume flow rate, q , of the backing pump (if used), calculated from Q and p , with respect to p , so
VBP std 3 3
as to show the size of the backing pump. The range of abscissa shall cover the whole range of pressures
p and p . The base pressures of the vacuum pump, p , and of the backing pump, p , shall be indicated.
1 3 b1 b3
The test report shall include as a minimum:
a) type, serial number, measuring uncertainty and operational conditions of all vacuum gauges and
flow meters used;
b) type and serial number of the test pump;
c) rotational frequency ("speed") and/or other operating conditio
...
FINAL
INTERNATIONAL ISO/FDIS
DRAFT
STANDARD 21360-1
ISO/TC 112
Vacuum technology — Standard
Secretariat: DIN
methods for measuring vacuum-pump
Voting begins on:
2020-02-25 performance —
Voting terminates on:
Part 1:
2020-04-21
General description
Technique du vide — Méthodes normalisées pour mesurer les
performances des pompes à vide —
Partie 1: Description générale
RECIPIENTS OF THIS DRAFT ARE INVITED TO
SUBMIT, WITH THEIR COMMENTS, NOTIFICATION
OF ANY RELEVANT PATENT RIGHTS OF WHICH
THEY ARE AWARE AND TO PROVIDE SUPPOR TING
DOCUMENTATION.
IN ADDITION TO THEIR EVALUATION AS
Reference number
BEING ACCEPTABLE FOR INDUSTRIAL, TECHNO-
ISO/FDIS 21360-1:2020(E)
LOGICAL, COMMERCIAL AND USER PURPOSES,
DRAFT INTERNATIONAL STANDARDS MAY ON
OCCASION HAVE TO BE CONSIDERED IN THE
LIGHT OF THEIR POTENTIAL TO BECOME STAN-
DARDS TO WHICH REFERENCE MAY BE MADE IN
©
NATIONAL REGULATIONS. ISO 2020
---------------------- Page: 1 ----------------------
ISO/FDIS 21360-1:2020(E)
COPYRIGHT PROTECTED DOCUMENT
© ISO 2020
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting
on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address
below or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: +41 22 749 01 11
Fax: +41 22 749 09 47
Email: copyright@iso.org
Website: www.iso.org
Published in Switzerland
ii © ISO 2020 – All rights reserved
---------------------- Page: 2 ----------------------
ISO/FDIS 21360-1:2020(E)
Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Symbols and abbreviated terms . 3
5 Test methods . 4
5.1 Volume flow rate (pumping speed) measurement by the throughput method . 4
5.1.1 General. 4
5.1.2 Test dome for the throughput method . 5
5.1.3 Experimental setup . 6
5.1.4 Determination of the volume flow rate . 6
5.1.5 Measuring procedure . 7
5.1.6 Measuring uncertainties . 8
5.1.7 Evaluation of the measurement . 8
5.2 Volume flow rate (pumping speed) measurement by the orifice method . 8
5.2.1 General. 8
5.2.2 Test dome for the orifice method . 8
5.2.3 Experimental setup . 9
5.2.4 Determination of the volume flow rate .10
5.2.5 Measuring procedure for the orifice method .11
5.2.6 Adjustment of the pressure-measuring gauges .11
5.2.7 Measurement of the volume flow rate .11
5.2.8 Measuring uncertainties .11
5.2.9 Evaluation of the measurement .12
5.3 Volume flow rate (pumping speed) measurement by the pump-down method .13
5.3.1 General.13
5.3.2 Test dome for the pump-down method .13
5.3.3 Quick-acting valve .14
5.3.4 Experimental setup .14
5.3.5 Determination of the volume flow rate .15
5.3.6 Measuring procedure .16
5.3.7 Limits of applicability .17
5.3.8 Evaluation of the measurement .17
5.3.9 Measurement uncertainty .17
5.4 Measurement of the base pressure .17
5.4.1 Operating conditions .17
−4
5.4.2 Test procedure for pumps with a base pressure >10 Pa .18
−4
5.4.3 Test procedure for pumps with a base pressure <10 Pa .18
5.4.4 Evaluation of the measurement .18
5.5 Measurement of the compression ratio and the critical backing pressure .18
5.5.1 Experimental setup .19
5.5.2 Determination of the compression ratio and the critical backing pressure .19
5.5.3 Measurement procedure .20
5.5.4 Measurement uncertainty .21
5.5.5 Evaluation of the measurements .21
5.5.6 Specific recommendations for extremely high compression ratio
measurements.21
Annex A (informative) Mean free path of some important gases .23
Annex B (informative) Measuring uncertainties .24
Bibliography .27
© ISO 2020 – All rights reserved iii
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ISO/FDIS 21360-1:2020(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2.
The main task of technical committees is to prepare International Standards. Draft International
Standards adopted by the technical committees are circulated to the member bodies for voting.
Publication as an International Standard requires approval by at least 75 % of the member bodies
casting a vote.
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights.
ISO 21360-1 was prepared by Technical Committee ISO/TC 112, Vacuum technology.
This second edition cancels and replaces the first edition ISO 21360-1:2012, of which it constitutes a
minor revision. The changes compared to the previous edition are as follows:
— Note in 3.3 has been deleted
— K in 3.7 has been corrected
0
— 3.9 the definition of the volume has been changed to "is the volume of transported gas"
— Figure 1 has been corrected
— Figure 2 has been corrected
— 5.2.7: change to "for at least 60s" instead of " for the following minute".
A list of all parts in the ISO 21360 series can be found on the ISO website.
Any feedback or questions on this document should be directed to the user’s national standards body. A
complete listing of these bodies can be found at www .iso .org/ members .html.
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ISO/FDIS 21360-1:2020(E)
Introduction
This part of ISO 21360 is a basic standard for measuring the performance data of vacuum pumps.
The methods specified here are well known from existing national and International Standards.
In developing this part of ISO 21360, the aim has been to provide a single document containing the
measurements of performance data of vacuum pumps and to simplify the future development of specific
vacuum pump standards.
Specific vacuum pump standards will contain a suitable selection of measurement methods from this
part of ISO 21360 in order to determine the performance data, limiting values and specific operational
conditions on the basis of the specific properties of the particular kind of pump. Whenever a discrepancy
exists between this part of ISO 21360 and the specific standard, it is the specific standard which is valid.
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FINAL DRAFT INTERNATIONAL STANDARD ISO/FDIS 21360-1:2020(E)
Vacuum technology — Standard methods for measuring
vacuum-pump performance —
Part 1:
General description
1 Scope
This part of ISO 21360 specifies three methods for measuring the volume flow rate and one method
each for measuring the base pressure, the compression ratio, and the critical backing pressure of a
vacuum pump.
The first method for measuring the volume flow rate (the throughput method) is the basic concept, in
which a steady gas flow is injected into the pump while the inlet pressure is measured. In practice, the
measurement of gas throughput may be complicated or inexact. For this reason, two other methods are
specified which avoid the direct measurement of throughput.
The second method for measuring the volume flow rate (the orifice method) is used when there is
very small throughput at very small inlet pressures (under a high or ultra-high vacuum). It is based on
measuring the ratio of pressures in a two-chamber test dome in which the two chambers are separated
by a wall with a circular orifice.
The third method for measuring the volume flow rate (the pump-down method) is well suited for
automated measurement. It is based on the evacuation of a large vessel. The volume flow rate is
calculated from two pressures, before and after a pumping interval, and from the volume of the test
dome. Different effects, such as leak and desorption rates, gas cooling by nearly isentropic expansion
during the pumping interval, and increasing flow resistance in the connection line between test dome
and pump caused by molecular flow at low pressures, influence the results of the pressure measurement
and the resulting volume flow rate.
The choice of the required measurement methods depends on the properties of the specific kinds of
vacuum pump, e.g. the measurement of the critical backing pressure is only necessary for vacuum
pumps which need a backing pump. All data that are measured on a vacuum pump, but not specified
in this part of ISO 21360 (e.g. measurement of power consumption), are defined in the specific pump
standard.
2 Normative references
The following referenced documents are indispensable for the application of this document. For dated
references, only the edition cited applies. For undated references, the latest edition of the referenced
document (including any amendments) applies.
ISO 3529-2, Vacuum technology — Vocabulary — Part 2: Vacuum pumps and related terms
3 Terms and definitions
For the purposes of this document, the terms and definitions given in ISO 3529-2 and the following apply.
3.1
volume flow rate
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ISO/FDIS 21360-1:2020(E)
q
V
dV
q = where
V
dt
V is volume;
t is time
[4]
[SOURCE: ISO 80000-4:2006 , 4-30]
EXAMPLE In the context of this part of ISO 21360, the volume flow rate is the volume of gas which, under
ideal conditions, flows from the test dome through the pump inlet per time.
Note 1 to entry: For practical reasons, the volume flow rate of a given pump and for a given gas is conventionally
considered to be equal to the quotient of the throughput of this gas and of the equilibrium pressure at a given
location. The volume flow rate is expressed in cubic metres per hour or litres per second.
Note 2 to entry: The term “pumping speed” and symbol “S” are often used instead of “volume flow rate”.
3.2
inlet pressure
p , p , p
1 d e
pressure at the inlet of the pump, measured at a defined location in the test dome
3.3
base pressure
p
b
pressure obtained in the test dome after conditioning the vacuum pump and the test dome
Note 1 to entry: See 5.4.
3.4
maximum working pressure
p
1max
highest pressure on the inlet side that the vacuum pump and the driving device can withstand for a
prolonged period of operation time without being damaged
3.5
backing pressure
p
3
pressure at the outlet of a vacuum pump
3.6
critical backing pressure
p
c
maximum backing pressure for which the conditions are defined in the instruction manual or in a
specific standard for the particular vacuum pump
3.7
compression ratio
K
0
compression ratio without gas load, wherein p is the base pressure of the backing pump and p is the
b3 b1
base pressure of the test pump
pp−
33b
K =
0
pp−
11b
3.8
test dome
special vacuum vessel with precisely defined size, diameter and connection flanges on specified
locations, used for standard performance data measurements on vacuum pumps
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ISO/FDIS 21360-1:2020(E)
3.9
throughput
Q
amount of gas flowing through a duct, expressed by the formula:
pV
1
Q==pq
1 V
t
where
p is the (high) vacuum pressure on the inlet;
1
q is the volume flow rate of the test pump;
V
t is time;
V is the volume of transported gas
3.10
standard gas flow rate
q
Vstd
volume flow rate at standard reference conditions, i.e. 0 °C and 101 325 Pa
4 Symbols and abbreviated terms
Symbol Designation Unit
a inner diameter of the connection pipe between test pump m
and quick-acting valve (items 3 and 5 in Figure 6)
2
A cross-section of the connection pipe between test pump and m
quick-acting valve (items 3 and 5 in Figure 6)
3 3
C conductance m /s (= 10 l/s)
d diameter of orifice m
D inner diameter of test dome m
D diameter of the inlet pipe m
i
D nominal diameter of test dome m
N
K compression ratio of vacuum pump with zero throughput —
0
l length of the connection pipe between test pump and m
quick-acting valve (items 3 and 5 in Figure 6)
mean free path m
l
M molar mass of gas kg/mol
p standard atmospheric pressure — 101 325 Pa Pa
0
p (high) vacuum pressure on inlet Pa (or mbar)
1
p maximum working pressure on inlet Pa (or mbar)
1max
p vacuum pressure in backing line Pa (or mbar)
3
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ISO/FDIS 21360-1:2020(E)
p , p ,p pressures in the test dome for the pump-down method, Pa (or mbar)
t t t
1 2 3
measured before and after time intervals Δt , Δt , Δt
1 2 3
p , p , p base pressures Pa (or mbar)
b1 b2 b3
p critical backing pressure Pa (or mbar)
c
p , p pressures in the test dome for the orifice method Pa (or mbar)
d e
Q gas throughput of vacuum pump Pa·l/s (or mbar·l/s)
Q test gas load Pa·l/s (or mbar·l/s)
r
3
q volume flow rate of test pump l/s (or m /h)
V
3
q volume flow rate of backing pump l/s (or m /h)
VBP
3
q volume flow rate at standard reference conditions for gases, sccm (or cm /min)
Vsccm
i.e. 0 °C and 101 325 Pa
3
q volume flow rate at standard reference conditions for gases, l/s (or m /h)
Vstd
i.e. 0 °C and 101 325 Pa
Q maximum gas throughput of vacuum pump which the pump Pa⋅l/s (or mbar·l/s)
max
can withstand without damage
R ideal gas constant 8,314 J/(mol·K)
T thermodynamic temperature K
T 273,15 K (defined as 0 °C) K
0
T temperature of the test dome K
D
T temperature of the flow meter K
f
u measurement uncertainty —
3
V volume of the test dome l, m
3
V volume of connection pipe between test pump and quick-act- l, m
i
ing valve (items 3 and 5 in Figure 6)
δ thickness of the orifice wall at the orifice diameter m
5 Test methods
5.1 Volume flow rate (pumping speed) measurement by the throughput method
5.1.1 General
The throughput method is the one most used for vacuum pumps and is applicable to all pressure ranges
and pump sizes where flow meters for gas throughput measurements are available with sufficient
accuracy. The gas flow measuring ranges shall be chosen by multiplying the expected volume flow rate
by the maximum and minimum working pressure of the test pump.
All measuring devices shall be calibrated either:
a) in a traceable way to a vacuum primary or to a national standard, or
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ISO/FDIS 21360-1:2020(E)
b) by means of instruments of absolute measure which are traceable to the SI units and to which
measurement uncertainties can be attributed.
In the case of calibrated measuring instruments, there should exist a calibration certificate in
[3]
accordance with ISO/IEC 17025 .
5.1.2 Test dome for the throughput method
For these measurements, use a test dome as shown in Figure 1 with the same nominal diameter, D ,
N
as that of the pump inlet. The face of the dome opposite the inlet flange may be flat, conical or slightly
curved, with the same average height above the flange as the flat face. Three flanges are preferable for
pressure measurement at a height of D/2 above the bottom flange if more than one pressure gauge is
used. The diameter of these flanges should be greater than or equal to the flanges of the gauges used,
and their mounting dimensions shall be noted. No measuring port shall be located in the angle range
±45° next to a gas inlet port. The connection pipes between flange and dome shall not protrude beyond
the dome wall on the inside, with the exception of the gas inlet pipe.
If necessary for the test pump, the test dome shall be fitted with a device for bake-out that ensures
uniform heating of the dome to achieve the base pressure.
The volume of the test dome may depend on the pump type. Refer to the specific pump standard for
details.
For pumps with an inlet flange diameter of less than D = 100 mm, the diameter of the dome shall
N
correspond to D = 100 mm. The transition to the pump inlet flange shall be made through a 45° conical
N
adaptor, as shown in Figure 1.
Key
1 gas inlet pipe and temperature measuring point for T
D
2 vacuum gauge and mass spectrometer connections
D diameter of the inlet pipe
i
D inner diameter of test dome, in metres
NOTE D should be big enough to allow homogenous gas conditions at the pump flange. A diameter of 0,1D is
i
generally appropriate.
Figure 1 — Test dome for the throughput method
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ISO/FDIS 21360-1:2020(E)
5.1.3 Experimental setup
See Figure 2.
The test dome shall be clean and dry. The cleanness of the pump, seals and other components shall
be appropriate for the expected base pressure. All components are mounted together under clean
conditions in accordance with Figure 2. Because of the narrow measuring range, flow meters with
different ranges may be switched in series. If flow is restricted by a small flow meter, they may be used
in parallel with a manifold, adding a valve between every flow meter and the manifold. Instead of the
flow meter and the gas inlet valve, mass flow controllers with programmable throughputs may be used.
They shall be combined in parallel on a manifold.
The leak-tightness of large mass flow controllers is not sufficient in many cases. In such cases, it is
advisable that valves be used between the flow controller and the manifold.
Ionization gauges and mass spectrometers shall be installed in such a way that there is no direct
geometrical path between them.
CAUTION — Observe the safety instructions of the vacuum pump manufacturer.
Key
1 test dome 4 gas inlet valve 7 heating jacket (optional)
2 backing pump 5 flow meters to measure Q 8 vacuum gauge to measure p
3
3 test pump 6 vacuum gauge to measure p 9 temperature measuring point for T
1 D
NOTE Items 2 and 8 are only used in connection with high-vacuum test pumps.
Figure 2 — Arrangement for measuring volume flow rate (pumping speed) with throughput
method
5.1.4 Determination of the volume flow rate
The method adopted for the measurement of the volume flow rate, q , is the throughput method for
V
which the gas throughput, Q, is measured outside the dome. If the pressure, p , in the test dome,
1
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ISO/FDIS 21360-1:2020(E)
measured by a vacuum gauge at the specified height above the bottom flange (see Figure 1), is held
constant, the volume flow rate, q , is obtained by the relationship
V
Q
q = (1)
V
pp−
1b
where p is the base pressure in the test dome (see 5.4).
b
An analogue equation is valid for the volume flow rate of the backing pump, q .
VBP
Q
q = (2)
VBP
pp−
33b
The gas throughput can be measured volumetrically (gas burettes, gas counters) by means of viscous
flow effects (rotameter, capillaries) or, in most cases, by means of thermoelectric mass flow meters (see
Reference [6] pp. 109–113).
Because of the dependence of the temperature on the gas volume, for all volumetric measurements,
corrections by a factor of T /T are necessary if the temperature, T , of the flow meter and T of the test
D f f D
dome are different.
NOTE Thermoelectric mass flow meters do not measure the throughput, but the volume flow rate, q , at
Vstd
standard reference conditions for gases (i.e. p = 101 325 Pa and T = 273,15 K, see 3.10). To obtain the throughput,
0 0
q is multiplied by the factor T p /T . Consequently, q is given by:
Vstd D 0 0 V
qp T
Vstd0 D
q = (3)
V
Tp()−p
01 b
The unit “sccm” (standard cubic centimetre per minute) is frequently used for q . If so, one obtains q ,
Vstd V
−3
in litres per second, by inserting [q = (q /sccm) ⋅ 10 l/60 s], [p = 101 325 Pa] and [T = 273,15 K]
Vstd Vsccm 0 0
in Formula (4), as follows:
31−−3
qT/mcm in ××10 lP101325 a×
()
Vsccm D
q = l//s (4)
V
60sK××273,(15 pp− )
1b
5.1.5 Measuring procedure
The arrangement of the measuring equipment with the test dome from Figure 1 is given in Figure 2.
At the start, when the gas inlet valve is closed, the base pressure shall prevail in the test dome (see
5.4). Then gas is admitted to the test dome through the adjustable valve. Measurements are made with
increasing pressure from a threshold value, allowing the correct use of the flow meter. During this
period of time, the ambient temperature shall be constant within ±2 °C.
When the required pressure, p , is obtained, within a variation of 3 %/min, measure the pressures, p
1 1
and p , the ambient temperature and the test dome temperature, T , as well as the admitted throughput,
3 D
Q. If the throughput remains steady to within ±3 %, the measurement at this point may be regarded as
valid. If the throughput is unsteady due to a transient condition, wait until it stabilizes. If the throughput
measurement lasts for more than 60 s, the pressure, p , in the dome shall be noted at least every minute. In
1
this case, the pressure is the average of the measured values. If during a measurement, the pressure or the
throughput varies by more than ±3 %, the measurement shall be repeated until the readings are stable.
Measurements shall be made at a minimum of three points per pressure decade of p . If the throughput
1
is increased to the maximum allowed value, Q , the maximum inlet pressure is obtained whose values
max
may be limited by the manufacturer.
NOTE Volume flow rate measurements can be made with different gases. When the gas is changed, all pipes
connected to the gas inlet valve are purged with the new gas before the beginning of the new measurement.
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ISO/FDIS 21360-1:2020(E)
5.1.6 Measuring uncertainties
The gas flow should be measured with a standard uncertainty of ±2,5 % and the pressure with a
standard uncertainty of less than ±3 %. For the exact calculation, see Annex B. The total uncertainty of
the volume flow rate shall be <10 %.
5.1.7 Evaluation of the measurement
Plot on a semi-logarithmic graph (similar to Figure 5) the volume flow rate, q , of the test pump,
V
calculated by means of Formula (1), with respect to the inlet pressure, and plot on the same graph the
volume flow rate, q , of the backing pump (if used), calculated from Q and p , with respect to p , so
VBP std 3 3
as to show the size of the backing pump. The range of abscissa shall cover the whole range of pressures
p and p . The base pressures of the vacuum pump, p , and of the backing pump, p , shall be indicated.
1 3 b1 b3
The test report shall include as a minimum:
a) type, serial number, measuring uncertainty and operational conditions of all vacuum gauges and
flow meters used;
b) type and serial number of the test pump;
c) rotational frequency ("speed") and/or other operating conditions of the test pump;
d) fluids and their vapour pressures at 20 °C used in the test pump;
e) D (nominal diameter of the test dome and flange type);
N
f) type and volume flow rate of the
...
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