SIST EN ISO 25178-605:2014
(Main)Geometrical product specifications (GPS) - Surface texture: Areal - Part 605: Nominal characteristics of non-contact (point autofocus probe) instruments (ISO 25178-605:2014)
Geometrical product specifications (GPS) - Surface texture: Areal - Part 605: Nominal characteristics of non-contact (point autofocus probe) instruments (ISO 25178-605:2014)
EN ISO 25178-605 describes the metrological characteristics of a non-contact instrument for measuring surface texture using point autofocus probing.
Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Flächenhaft - Teil 605: Merkmale von berührungslos messenden Geräten (Punkt-Autofokus-Sensor) (ISO 25178-605:2014)
Dieser Teil der ISO 25178 beschreibt die messtechnischen Merkmale eines berührungslos messenden Mess-geräts zur flächenhaften Messung der Oberflächenbeschaffenheit, das einen Punkt-Autofokus-Sensor verwendet.
Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 605: Caractéristiques nominales des instruments sans contact (à capteur autofocus à point) (ISO 25178-605:2014)
l'ISO 25178-605:2014 décrit les caractéristiques métrologiques d'un instrument sans contact pour le mesurage de l'état de surface à l'aide d'un capteur autofocus à point.
Specifikacija geometrijskih veličin izdelka (GPS) - Tekstura površine: ploskovna - 605. del: Imenske značilnosti brezkontaktnih (točka avtofokusne sonde) instrumentov (ISO 25178-605:2014)
EN ISO 25178-605 opisuje meroslovne značilnosti brezkontaktnih instrumentov za merjenje teksture površine z avtofokusno sondo.
General Information
Standards Content (Sample)
SLOVENSKI STANDARD
SIST EN ISO 25178-605:2014
01-julij-2014
6SHFLILNDFLMDJHRPHWULMVNLKYHOLþLQL]GHOND *36 7HNVWXUDSRYUãLQH SORVNRYQD
GHO ,PHQVNH]QDþLOQRVWLEUH]NRQWDNWQLK WRþNDDYWRIRNXVQHVRQGH
LQVWUXPHQWRY ,62
Geometrical product specifications (GPS) - Surface texture: Areal - Part 605: Nominal
characteristics of non-contact (point autofocus probe) instruments (ISO 25178-605:2014)
Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Flächenhaft -
Teil 605: Merkmale von berührungslos messenden Geräten (Punkt-Autofokus-Sensor)
(ISO 25178-605:2014)
Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 605:
Caractéristiques nominales des instruments sans contact (à capteur autofocus à point)
(ISO 25178-605:2014)
Ta slovenski standard je istoveten z: EN ISO 25178-605:2014
ICS:
17.040.20 Lastnosti površin Properties of surfaces
SIST EN ISO 25178-605:2014 en
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.
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SIST EN ISO 25178-605:2014
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SIST EN ISO 25178-605:2014
EUROPEAN STANDARD
EN ISO 25178-605
NORME EUROPÉENNE
EUROPÄISCHE NORM
January 2014
ICS 17.040.20
English Version
Geometrical product specifications (GPS) - Surface texture:
Areal - Part 605: Nominal characteristics of non-contact (point
autofocus probe) instruments (ISO 25178-605:2014)
Spécification géométrique des produits (GPS) - État de Geometrische Produktspezifikation (GPS) -
surface: Surfacique - Partie 605: Caractéristiques Oberflächenbeschaffenheit: Flächenhaft - Teil 605:
nominales des instruments sans contact (capteur autofocus Merkmale von berührungslos messenden Geräten (Punkt-
à point) (ISO 25178-605:2014) Autofokus-Sensor) (ISO 25178-605:2014)
This European Standard was approved by CEN on 13 January 2014.
CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European
Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national
standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN member.
This European Standard exists in three official versions (English, French, German). A version in any other language made by translation
under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management Centre has the same
status as the official versions.
CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania,
Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and United
Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION
EUROPÄISCHES KOMITEE FÜR NORMUNG
CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels
© 2014 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 25178-605:2014 E
worldwide for CEN national Members.
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SIST EN ISO 25178-605:2014
EN ISO 25178-605:2014 (E)
Contents Page
Foreword .3
2
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SIST EN ISO 25178-605:2014
EN ISO 25178-605:2014 (E)
Foreword
This document (EN ISO 25178-605:2014) has been prepared by Technical Committee ISO/TC 213
“Dimensional and geometrical product specifications and verification” in collaboration with Technical
Committee CEN/TC 290 “Dimensional and geometrical product specification and verification” the secretariat of
which is held by AFNOR.
This European Standard shall be given the status of a national standard, either by publication of an identical
text or by endorsement, at the latest by July 2014, and conflicting national standards shall be withdrawn at the
latest by July 2014.
Attention is drawn to the possibility that some of the elements of this document may be the subject of patent
rights. CEN [and/or CENELEC] shall not be held responsible for identifying any or all such patent rights.
According to the CEN-CENELEC Internal Regulations, the national standards organizations of the following
countries are bound to implement this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech
Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece,
Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal,
Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the United Kingdom.
Endorsement notice
The text of ISO 25178-605:2014 has been approved by CEN as EN ISO 25178-605:2014 without any
modification.
3
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SIST EN ISO 25178-605:2014
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SIST EN ISO 25178-605:2014
INTERNATIONAL ISO
STANDARD 25178-605
First edition
2014-02-01
Geometrical product specifications
(GPS) — Surface texture: Areal —
Part 605:
Nominal characteristics of non-contact
(point autofocus probe) instruments
Spécification géométrique des produits (GPS) — État de surface:
Surfacique —
Partie 605: Caractéristiques nominales des instruments sans contact
(capteur autofocus à point)
Reference number
ISO 25178-605:2014(E)
©
ISO 2014
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SIST EN ISO 25178-605:2014
ISO 25178-605:2014(E)
COPYRIGHT PROTECTED DOCUMENT
© ISO 2014
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form
or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior
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Published in Switzerland
ii © ISO 2014 – All rights reserved
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SIST EN ISO 25178-605:2014
ISO 25178-605:2014(E)
Contents Page
Foreword .iv
Introduction .vi
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
3.1 Terms and definitions related to all areal surface texture measurement methods . 2
3.2 Terms and definitions related to x- and y-scanning systems . 9
3.3 Terms and definitions related to optical systems .11
3.4 Terms and definitions related to optical properties of workpiece .12
3.5 Terms and definitions specific to point autofocus profiling .13
4 Descriptions of the influence quantities .14
4.1 General .14
4.2 Influence quantities .14
Annex A (informative) General principles .16
Annex B (informative) Spot size and focal shift.20
Annex C (informative) Beam offset direction and maximum acceptable local slope .23
Annex D (informative) Features of an areal surface texture measuring instrument .26
Annex E (informative) Others: Non-measured point (autofocus error) .28
Annex F (informative) Relation to the GPS matrix .29
Bibliography .31
© ISO 2014 – All rights reserved iii
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SIST EN ISO 25178-605:2014
ISO 25178-605:2014(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2. www.iso.org/directives
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of any
patent rights identified during the development of the document will be in the Introduction and/or on
the ISO list of patent declarations received. www.iso.org/patents
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation on the meaning of ISO specific terms and expressions related to conformity
assessment, as well as information about ISO’s adherence to the WTO principles in the Technical
Barriers to Trade (TBT) see the following URL: Foreword - Supplementary information
The committee responsible for this document is ISO/TC 213, Dimensional and geometrical product
specifications and verification.
ISO 25178 consists of the following parts, under the general title Geometrical product specifications
(GPS) — Surface texture: Areal:
— Part 1: Indication of surface texture
— Part 2: Terms, definitions and surface texture parameters
— Part 3: Specification operators
— Part 6: Classification of methods for measuring surface texture
— Part 70: Material measures
— Part 71: Software measurement standards
— Part 601: Nominal characteristics of contact (stylus) instruments
— Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments
— Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy)
instruments
— Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments
— Part 605: Nominal characteristics of non-contact (point autofocus probe) instruments
— Part 606: Nominal characteristics of non-contact (focus variation) instruments
— Part 701: Calibration and measurement standards for contact (stylus) instruments
The following parts are under preparation:
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SIST EN ISO 25178-605:2014
ISO 25178-605:2014(E)
— Part 72: XML file format x3p
Calibration and measurement standards for non-contact (confocal chromatic probe) instruments and
calibration and measurement standards for non-contact (phase-shifting interferometric microscopy)
instruments are to form the subject of future parts 702 and 703.
A part 600 is planned which is intended to contain provisions common with the other 600-level parts of
ISO 25178. Once it has been submitted as a Final Draft International Standard, those provisions in the
other 600-level parts that are then redundant will be removed from them.
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SIST EN ISO 25178-605:2014
ISO 25178-605:2014(E)
Introduction
This part of ISO 25178 is a Geometrical Product Specification standard and is to be regarded as a General
GPS standard (see ISO/TR 14638). It influences the chain link 5 of the chains of standards on roughness
profile, waviness profile, primary profile, and areal surface texture.
For more detailed information on the relationship of this standard to the GPS matrix model, see Annex G.
The ISO/GPS Masterplan given in ISO/TR 14638 gives an overview of the ISO/GPS system of which
this standard is a part. The fundamental rules of ISO/GPS given in ISO 8015 apply to this standard and
the default decision rules given in ISO 14253-1 apply to specifications made in accordance with this
standard, unless otherwise indicated.
The point autofocus optical principle can be implemented in various set-ups. The configuration described
in this document comprises three basic elements: an autofocus optical system, an autofocus mechanism,
and an electronic controller.
This type of instrument is mainly designed for areal measurements, but it is also able to perform profile
measurements.
This part of ISO 25178 describes the metrological characteristics of an optical profiler using a point
autofocus probe for the measurement of areal surface texture.
For more detailed information on the point autofocus method, see Annex A. Reading this annex before
the main body may lead to a better understanding of this standard.
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SIST EN ISO 25178-605:2014
INTERNATIONAL STANDARD ISO 25178-605:2014(E)
Geometrical product specifications (GPS) — Surface
texture: Areal —
Part 605:
Nominal characteristics of non-contact (point autofocus
probe) instruments
1 Scope
This part of ISO 25178 describes the metrological characteristics of a non-contact instrument for
measuring surface texture using point autofocus probing.
2 Normative references
The following documents, in whole or in part, are normatively referenced in this document and are
indispensable for its application. For dated references, only the edition cited applies. For undated
references, the latest edition of the referenced document (including any amendments) applies.
ISO 4287:1997, Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms,
definitions and surface texture parameters
ISO 10360-1, Geometrical Product Specifications (GPS) — Acceptance and reverification tests for coordinate
measuring machines (CMM) — Part 1: Vocabulary
ISO 14406:2010, Geometrical product specifications (GPS) — Extraction
ISO 14978:2006, Geometrical product specifications (GPS) — General concepts and requirements for GPS
measuring equipment
ISO 25178-2:2012, Geometrical product specifications (GPS) — Surface texture: Areal — Part 2: Terms,
definitions and surface texture parameters
ISO 25178-3:2012, Geometrical product specifications (GPS) — Surface texture: Areal — Part 3: Specification
operators
ISO 25178-6:2010, Geometrical product specifications (GPS) — Surface texture: Areal — Part 6: Classification
of methods for measuring surface texture
ISO 25178-601:2010, Geometrical product specifications (GPS) — Surface texture: Areal — Part 601:
Nominal characteristics of contact (stylus) instruments
ISO 25178-602:2010, Geometrical product specifications (GPS) — Surface texture: Areal — Part 602:
Nominal characteristics of non-contact (confocal chromatic probe) instruments
3 Terms and definitions
For the purposes of this document, the terms and definitions given in ISO 4287, ISO 10360-1, ISO 14406,
ISO 14978, ISO 25178-2, ISO 25178-3, ISO 25178-6, ISO 25178-601, ISO 25178-602 and the following
apply.
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SIST EN ISO 25178-605:2014
ISO 25178-605:2014(E)
3.1 Terms and definitions related to all areal surface texture measurement methods
3.1.1
areal reference
component of the instrument that generates a reference surface with respect to which the surface
topography is measured
3.1.2
coordinate system of the instrument
right hand orthonormal system of axes (x,y,z)
Note 1 to entry: In this system (x,y) is the plane established by the areal reference of the instrument (Note that
there are optical instruments that do not posses a physical areal guide).
Note 2 to entry: In this system, z-axis is mounted parallel to the optical axis and is perpendicular to the (x,y) plane
for an optical instrument. The z-axis is in the plane of the stylus trajectory and is perpendicular to the (x,y) plane
for a stylus instrument (see Figure 1)
Note 3 to entry: Normally, the x-axis is the tracing axis and the y-axis is the stepping axis. (This note is valid for
instruments that scan in the horizontal plane.)
Note 4 to entry: See also specification coordinate system and measurement coordinate system, as defined in
ISO 25178-2:2012, 3.1.2 and ISO 25178-6:2010, 3.1.1, respectively.
3.1.3
measurement loop
closed chain which comprises all components connecting the workpiece and the probe, e.g. the means of
positioning, the work holding fixture, the measuring stand, the drive unit, the probing system
Note 1 to entry: See Figure 1. The measurement loop will be subjected to external and internal disturbances that
influence the measurement uncertainty.
2
1
Z
Y
X
Key
1 coordinate system of the instrument
2 measurement loop
Figure 1 — Coordinate system and measurement loop of instrument
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SIST EN ISO 25178-605:2014
ISO 25178-605:2014(E)
3.1.4
real surface of a workpiece
set of features which physically exist and separate the entire workpiece from the surrounding medium
[SOURCE: ISO 14660-1:1999, 2.4]
Note 1 to entry: The real surface is a mathematical representation of the surface that is independent of the
measurement process.
Note 2 to entry: See also mechanical surface, as defined in ISO 25178-2:2012, 3.1.1.1 or ISO 14406:2010, 3.1.1, and
electromagnetic surface, as defined in ISO 25178-2:2012, 3.1.1.2 or ISO 14406:2010, 3.1.2.
Note 3 to entry: The electromagnetic surface considered for one type of optical instrument may be different from
the electromagnetic surface for other types of optical instruments.
3.1.5
surface probe
device that converts the surface height into a signal during measurement
Note 1 to entry: In earlier standards this was termed transducer.
3.1.6
measuring volume
range of the instrument stated in terms of the limits on all three coordinates measured by the instrument
Note 1 to entry: For areal surface texture measuring instruments, the measuring volume is defined by:
— the measuring range of the x- and y- drive units,
— the measuring range of the z-probing system.
[SOURCE: ISO 25178-601:2010, 3.4.1]
3.1.7
response curve
F , F , F
x y z
graphical representation of the function that describes the relation between the actual quantity and the
measured quantity
Note 1 to entry: See Figure 2.
Note 2 to entry: An actual quantity in x (respectively y or z) corresponds to a measured quantity x (respectively
M
y or z ).
M M
Note 3 to entry: The response curve can be used for adjustments and error corrections.
[SOURCE: ISO 25178-601:2010, 3.4.2]
3.1.8
amplification coefficient
α , α , α
x y z
slope of the linear regression curve obtained from the response curve
Note 1 to entry: See Figure 3.
Note 2 to entry: There will be amplification coefficients applicable to the x, y and z quantities.
Note 3 to entry: The ideal response is a straight line with a slope equal to 1 which means that the values of the
measurand are equal to the values of the input quantities.
[1]
Note 4 to entry: See also sensitivity of a measuring system (VIM, 4.12)
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SIST EN ISO 25178-605:2014
ISO 25178-605:2014(E)
[ISO 25178-601:2010, 3.4.3, modified — Note 4 has been added.]
3
2
1
4
Key
1 response curve
2 assessment of the linearity deviation by polynomial approximation
3 measured quantities
4 input quantities
Figure 2 — Example of nonlinear response curve
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SIST EN ISO 25178-605:2014
ISO 25178-605:2014(E)
1
6
3
4
5
2
Key
1 measured quantities
2 input quantities
3 ideal response curve
4
linearization of the response curve of Figure 2
5 line from which the amplification coefficient α (slope) is derived
6 local residual correction error
Figure 3 — Example of linearization of response curve
3.1.9
instrument noise
N
I
internal noise added to the output signal caused by the instrument if ideally placed in a noise-free
environment
Note 1 to entry: Internal noise can be due to electronic noise, as e.g. amplifiers, or to optical noise, as e.g. stray
light.
Note 2 to entry: This noise typically has high frequencies and it limits the ability of the instrument to detect small
scale spatial wavelengths of the surface texture.
Note 3 to entry: The S-filter according ISO 25178-3 may reduce this noise.
Note 4 to entry: For some instruments, instrument noise cannot be estimated because the instrument only takes
data while moving.
3.1.10
measurement noise
N
M
noise added to the output signal occurring during the normal use of the instrument
Note 1 to entry: Notes 2 and 3 of 3.1.9 apply as well to this definition.
Note 2 to entry: Measurement noise includes the instrument noise.
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SIST EN ISO 25178-605:2014
ISO 25178-605:2014(E)
3.1.11
surface topography repeatability
repeatability of topography map in successive measurements of the same surface under the same
conditions of measurement
Note 1 to entry: Surface topography repeatability provides a measure of the likely agreement between repeated
measurements normally expressed as a standard deviation
[1]
Note 2 to entry: See VIM, 2.15 and 2.21, for a general discussion of repeatability and related concepts.
Note 3 to entry: Evaluation of surface topography repeatability is a common method for determining the
measurement noise.
3.1.12
sampling interval in x [y]
D [D ]
x y
distance between two adjacent measured points along the x- [y-] axis
Note 1 to entry: In many microscopy systems the sampling interval is determined by the distance between
sensor elements in a camera, called pixels. For such systems, the terms pixel pitch and pixel spacing are often used
interchangeably with the term sampling interval. Another term, pixel width, indicates a length associated with
one side (x or y) of the sensitive area of a single pixel and is always smaller than the pixel spacing. Yet another
term, sampling zone, may be used to indicate the length or region over which a height sample is determined. This
quantity could either be larger or smaller than the sampling interval.
3.1.13
digitisation step in z
D
Z
smallest height variation along the z-axis between two ordinates of the extracted surface
3.1.14
lateral resolution
R
l
smallest distance between two features which can be detected
[SOURCE: ISO 25178-601:2010, 3.4.10]
3.1.15
width limit for full height transmission
W
l
width of the narrowest rectangular groove whose measured height remains unchanged by the
measurement
Note 1 to entry: Instrument properties such as
— the sampling interval in x and y,
— the digitisation step in z, and
— the short wavelength cut-off filter
should be chosen so that they do not influence the lateral resolution and the width limit for full height transmission.
Note 2 to entry: When determining this parameter by measurement, the depth of the rectangular groove should
be close to that of the surface to be measured.
Note 3 to entry: An example is the measuring of a grid for which the grooves are wider than the width limit for full
height transmission. This leads to a correct measurement of the groove depth (see Figures 4 and 5).
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SIST EN ISO 25178-605:2014
ISO 25178-605:2014(E)
Note 4 to entry: Another example is the measuring of a grid for which the grooves are narrower than the width
limit for full height transmission. This leads to an incorrect groove depth (see Figures 6 and 7). In this situation, the
signal is generally disturbed and may contain non-measured points.
[ISO 25178-601:2010, 3.4.11, modified — The original notes have been replaced.]
Figure 4 — Grid with horizontal spacing and t greater than or equal to W
l
Figure 5 — Measurement of grid in Figure 4 — Spacing and depth of grid measured correctly
Figure 6 — Grid with horizontal spacing and t′ smaller than W
l
Figure 7 — Measurement of grid in Figure 6 — Spacing measured correctly but depth smaller
(d’ < d)
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SIST EN ISO 25178-605:2014
ISO 25178-605:2014(E)
3.1.16
lateral period limit
D
LIM
spatial period of a sinusoidal profile at which the height response of an instrument falls to 50 %
Note 1 to entry: The lateral period limit is one metric for describing spatial or lateral resolution of a surface
topography measuring instrument and its ability to distinguish and measure closely spaced surface features. Its
value depends on the heights of surface features and on the method used to probe the surface. Maximum values
for this parameter are listed in ISO 25178-3:2012, Table 3, in comparison with recommended values for short
wavelength (s-)filters and sampling intervals.
Note 2 to entry: Spatial period is the same concept as spatial wavelength and is the inverse of spatial frequency.
Note 3 to entry: One factor related to the value of D for optical tools is the Rayleigh criterion (3.3.7). Another is
LIM
the degree of focus of the objective on the surface.
Note 4 to entry: One factor related to the value of D for contact tools is the stylus tip radius, r (see
LIM TIP
ISO 25178-601).
Note 5 to entry: Other terms related to lateral period limit are structural resolution and topographic spatial
resolution
3.1.17
maximum local slope
greatest local slope of a surface feature that can be assessed by the probing system
Note 1 to entry: The term local slope is defined in ISO 4287:1997, 3.2.9.
3.1.18
instrument transfer function
ITF
f
ITF
function of spatial frequency describing how a surface topography measuring instrument responds to
an object surface topography having a specific spatial frequency
Note 1 to entry: Ideally, the ITF tells us what the measured amplitude of a sinusoidal grating of a specified spatial
frequency, ν, would be relative to the true amplitude of the grating.
Note 2 to entry: For several types of optical instruments, the ITF may be a nonlinear function of height except for
heights much smaller than the optical wavelength.
3.1.19
hysteresis
x , y , z
HYS HYS HYS
property of measuring equipment or characteristic whereby the indication of the equipment or value of
the characteristic depends on the orientation of the preceding stimuli
Note 1 to entry: Hysteresis can also depend, for example, on the distance travelled after the orientation of stimuli
has changed.
Note 2 to entry: For lateral scanning systems, the hysteresis is mainly a repositioning error.
[SOURCE: ISO 14978:2006, 3.24]
3.1.20
metrological characteristic
characteristic of measuring equipment, which may influence the results of
measurement
Note 1 to entry: Cali
...
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