SIST EN ISO 25178-603:2014

Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments (ISO 25178-603:2013)

This part of ISO 25178 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.

Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Flächenhaft - Teil 603: Merkmale von berührungslos messenden Geräten (der phasenverschiebenden interferometrischen Mikroskopie) (ISO 25178-603:2013)

Die vorliegende Norm beschreibt die metrologischen Eigenschaften von Messgeräten der phasenschie-benden interferometrischen (PSI) Mikroskopie zur Messung von Oberflächenprofilen und zur flächenhaften Messung der Oberflächenbeschaffenheit.

Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 603: Caractéristiques nominales des instruments sans contact (microscopes interférométriques à glissement de franges) (ISO 25178-603:2013)

L'ISO 25178-603:2013 décrit les caractéristiques métrologiques des microscopes de mesure de profil et d'état de surface surfacique par interférométrie à glissement de franges (PSI).

Specifikacija geometrijskih veličin izdelka (GPS) - Tekstura površine: ravna - 603. del: Imenske značilnosti nekontaktnih instrumentov (interferometrijska mikroskopija s faznim zamikom) (ISO 25178-603:2013)

Та del standarda ISO 25178 opisuje meroslovne značilnosti interferometrijskih mikroskopov s faznim zamikom in mikroskopov za merjenje površinske teksture.

General Information

• Status: Published
• Public Enquiry End Date: 24-Nov-2009
• Publication Date: 26-May-2014
• ICS: 17.040.20 - Properties of surfaces
• ICS: 17.040.40 - Geometrical Product Specification (GPS)
• Technical Committee: ISEL - Mechanical elements
• Current Stage: 6060 - National Implementation/Publication (Adopted Project)
• Start Date: 14-May-2014
• Due Date: 19-Jul-2014
• Completion Date: 27-May-2014
• Ref Project: EN ISO 25178-603:2013 - Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments (ISO 25178-603:2013)

Standards Content (Sample)

SLOVENSKI STANDARD
SIST EN ISO 25178-603:2014
01-julij-2014
6SHFLILNDFLMDJHRPHWULMVNLKYHOLþLQL]GHOND*367HNVWXUDSRYUãLQHUDYQD
GHO,PHQVNH]QDþLOQRVWLQHNRQWDNWQLKLQVWUXPHQWRYLQWHUIHURPHWULMVND
PLNURVNRSLMDVID]QLP]DPLNRP,62
Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal
characteristics of non-contact (phase-shifting interferometric microscopy) instruments
(ISO 25178-603:2013)
Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Flächenhaft -
Teil 603: Merkmale von berührungslos messenden Geräten (der phasenverschiebenden
interferometrischen Mikroskopie) (ISO 25178-603:2013)
Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 603:
Caractéristiques nominales des instruments sans contact (microscopes
interférométriques à glissement de franges) (ISO 25178-603:2013)
Ta slovenski standard je istoveten z: EN ISO 25178-603:2013
ICS:
17.040.20 Lastnosti površin Properties of surfaces
SIST EN ISO 25178-603:2014 en
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

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SIST EN ISO 25178-603:2014

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SIST EN ISO 25178-603:2014


EUROPEAN STANDARD
EN ISO 25178-603

NORME EUROPÉENNE

EUROPÄISCHE NORM
October 2013
ICS 17.040.20
English Version
Geometrical product specifications (GPS) - Surface texture:
Areal - Part 603: Nominal characteristics of non-contact (phase-
shifting interferometric microscopy) instruments (ISO 25178-
603:2013)
Spécification géométrique des produits (GPS) - État de Geometrische Produktspezifikation (GPS) -
surface: Surfacique - Partie 603: Caractéristiques Oberflächenbeschaffenheit: Flächenhaft - Teil 603:
nominales des instruments sans contact (microscopes Merkmale von berührungslos messenden Geräten
interférométriques à glissement de franges) (ISO 25178- (phasenschiebende interferometrische Mikroskopie) (ISO
603:2013) 25178-603:2013)
This European Standard was approved by CEN on 19 August 2013.

CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European
Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national
standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN member.

This European Standard exists in three official versions (English, French, German). A version in any other language made by translation
under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management Centre has the same
status as the official versions.

CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania,
Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and United
Kingdom.





EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION

EUROPÄISCHES KOMITEE FÜR NORMUNG

CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels
© 2013 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 25178-603:2013: E
worldwide for CEN national Members.

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SIST EN ISO 25178-603:2014
EN ISO 25178-603:2013 (E)
Contents Page
Foreword .3

2

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SIST EN ISO 25178-603:2014
EN ISO 25178-603:2013 (E)
Foreword
This document (EN ISO 25178-603:2013) has been prepared by Technical Committee ISO/TC 213
"Dimensional and geometrical product specifications and verification" in collaboration with Technical
Committee CEN/TC 290 “Dimensional and geometrical product specification and verification” the secretariat of
which is held by AFNOR.
This European Standard shall be given the status of a national standard, either by publication of an identical
text or by endorsement, at the latest by April 2014, and conflicting national standards shall be withdrawn at the
latest by April 2014.
Attention is drawn to the possibility that some of the elements of this document may be the subject of patent
rights. CEN [and/or CENELEC] shall not be held responsible for identifying any or all such patent rights.
According to the CEN-CENELEC Internal Regulations, the national standards organizations of the following
countries are bound to implement this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech
Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece,
Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal,
Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the United Kingdom.
Endorsement notice
The text of ISO 25178-603:2013 has been approved by CEN as EN ISO 25178-603:2013 without any
modification.

3

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SIST EN ISO 25178-603:2014

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SIST EN ISO 25178-603:2014
INTERNATIONAL ISO
STANDARD 25178-603
First edition
2013-10-01
Geometrical product specifications
(GPS) — Surface texture: Areal —
Part 603:
Nominal characteristics of non-contact
(phase-shifting interferometric
microscopy) instruments
Spécification géométrique des produits (GPS) — État de surface:
Surfacique —
Partie 603: Caractéristiques nominales des instruments sans contact
(microscopes interférométriques à glissement de franges)
Reference number
ISO 25178-603:2013(E)
©
ISO 2013

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SIST EN ISO 25178-603:2014
ISO 25178-603:2013(E)

COPYRIGHT PROTECTED DOCUMENT
© ISO 2013
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form
or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior
written permission. Permission can be requested from either ISO at the address below or ISO’s member body in the country of
the requester.
ISO copyright office
Case postale 56 • CH-1211 Geneva 20
Tel. + 41 22 749 01 11
Fax + 41 22 749 09 47
E-mail [e-mail]
Web www.iso.org
Published in Switzerland
ii © ISO 2013 – All rights reserved

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SIST EN ISO 25178-603:2014
ISO 25178-603:2013(E)

Contents Page
Foreword .iv
Introduction .vi
1 Scope . 1
2 Terms and definitions . 1
2.1 Terms and definitions related to all areal surface texture measurement methods . 1
2.2 Terms and definitions related to x- and y-scanning systems . 8
2.3 Terms and definitions related to optical systems .10
2.4 Terms and definitions related to optical properties of the workpiece .12
2.5 Terms and definitions specific to phase-shifting interferometric microscopy .12
3 Descriptions of the influence quantities .13
3.1 General .13
3.2 Influence quantities .14
Annex A (informative) Components of a phase-shifting interferometric (PSI) microscope .16
Annex B (informative) Phase-shifting interferometric (PSI) microscope — Theory of operation .17
Annex C (informative) Errors and corrections for phase-shifting interferometric
(PSI) microscopes .22
Annex D (informative) Relation to the GPS matrix model .25
Bibliography .27
© ISO 2013 – All rights reserved iii

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SIST EN ISO 25178-603:2014
ISO 25178-603:2013(E)

Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2. www.iso.org/directives
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of
any patent rights identified during the development of the document will be in the Introduction and/or
on the ISO list of patent declarations received. www.iso.org/patents
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation on the meaning of ISO specific terms and expressions related to conformity
assessment, as well as information about ISO’s adherence to the WTO principles in the Technical Barriers
to Trade (TBT) see the following URL: Foreword - Supplementary information
The committee responsible for this document is ISO/TC 213, Dimensional and geometrical product
specifications and verification.
ISO 25178 consists of the following parts, under the general title Geometrical product specification (GPS)
— Surface texture: Areal:
— Part 1: Areal surface texture drawing indication
— Part 2: Terms, definitions and surface texture parameters
— Part 3: Specification operators
— Part 6: Classification of methods for measuring surface texture
— Part 70: Material measures
— Part 71: Software measurement standards
— Part 601: Nominal characteristics of contact (stylus) instruments
— Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments
— Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
— Part 604: Nominal characteristics of non-contact (coherence scanning interferometric microscopy)
instruments
— Part 605: Nominal characteristics of non-contact (point autofocus probe) instruments
— Part 606: Nominal characteristics of non-contact (focus variation microscopy) instruments
— Part 701: Calibration and measurement standards for contact (stylus) instruments
— Part 702 Calibration of non-contact (confocal chromatic probe) instruments
iv © ISO 2013 – All rights reserved

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SIST EN ISO 25178-603:2014
ISO 25178-603:2013(E)

— Part 703: Calibration and measurement standards for non-contact (interferometric) instruments
The following part is under preparation: Part 72: XML file format x3p
© ISO 2013 – All rights reserved v

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SIST EN ISO 25178-603:2014
ISO 25178-603:2013(E)

Introduction
This part of ISO 25178 is a Geometrical Product Specification standard and is to be regarded as a
general GPS standard (see ISO/TR 14638). It influences the chain link 5 of the chain of standards on
areal surface texture.
This part of ISO 25178 describes the metrological characteristics of phase-shifting interferometric (PSI)
profile and areal surface texture measuring microscopes, designed for the measurement of surface
topography maps. For more detailed information on the phase-shifting interferometry technique, see
Annex A and Annex B.
The ISO/GPS Masterplan given in ISO /TR 14638 gives an overview of the ISO/GPS system of which this
document is a part. The fundamental rules of ISO/GPS given in ISO 8015 apply to this document and
the default decision rules given in ISO 14253-1 apply to specifications made in accordance with this
document, unless otherwise indicated.
NOTE Portions of this document, particularly the informative clauses, may describe patented systems and
methods. This information is provided only to assist users in understanding the operating principles of phase-
shifting interferometry. This document is not intended to establish priority for any intellectual property, nor
does it imply a license to any proprietary technologies that may be described herein.
vi © ISO 2013 – All rights reserved

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SIST EN ISO 25178-603:2014
INTERNATIONAL STANDARD ISO 25178-603:2013(E)
Geometrical product specifications (GPS) — Surface
texture: Areal —
Part 603:
Nominal characteristics of non-contact (phase-shifting
interferometric microscopy) instruments
1 Scope
This part of ISO 25178 describes the metrological characteristics of phase-shifting interferometric (PSI)
profile and areal surface texture measuring microscopes.
2 Terms and definitions
For the purposes of this document, the following terms and definitions apply.
2.1 Terms and definitions related to all areal surface texture measurement methods
2.1.1
areal reference
component of the instrument that generates a reference surface with respect to which the surface
topography is measured
2.1.2
coordinate system of the instrument
right hand orthonormal system of axes (x, y, z) where
— (x, y) is the plane established by the areal reference of the instrument (note that there are optical
instruments that do not possess a physical areal guide);
— z-axis is mounted parallel to the optical axis and is perpendicular to the (x, y) plane for an optical
instrument; the z-axis is in the plane of the stylus trajectory and is perpendicular to the (x, y) plane for
a stylus instrument
Note 1 to entry: Normally, the x-axis is the tracing axis and the y-axis is the stepping axis. (This note is valid for
instruments that scan in the horizontal plane.)
Note 2 to entry: See also “specification coordinate system” [ISO 25178-2:2012, 3.1.2] and “measurement coordinate
system” [ISO 25178-6:2010, 3.1.1].
SEE: Figure 1.
© ISO 2013 – All rights reserved 1

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SIST EN ISO 25178-603:2014
ISO 25178-603:2013(E)

2
1
Key
1 coordinate system of the instrument
2 measurement loop
Figure 1 — Coordinate system and measurement loop of the instrument
2.1.3
measurement loop
closed chain which comprises all components connecting the workpiece and the probe, e.g. the means of
positioning, the work holding fixture, the measuring stand, the drive unit, the probing system
Note 1 to entry: The measurement loop will be subjected to external and internal disturbances that influence the
measurement uncertainty.
SEE: Figure 1.
2.1.4
real surface of a workpiece
set of features which physically exist and separate the entire workpiece from the surrounding medium
Note 1 to entry: The real surface is a mathematical representation of the surface that is independent of the
measurement process.
Note 2 to entry: See also “mechanical surface” [ISO 25178-2:2012, 3.1.1.1 or ISO 14406:2010, 3.1.1] and
“electromagnetic surface” [ISO 25178-2:2012, 3.1.1.2 or ISO 14406:2010, 3.1.2].
Note 3 to entry: The electromagnetic surface considered for one type of optical instrument may be different from
the electromagnetic surface for other types of optical instruments.
2.1.5
surface probe
device that converts the surface height into a signal during measurement
Note 1 to entry: In earlier standards, this was termed “transducer”.
2 © ISO 2013 – All rights reserved

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SIST EN ISO 25178-603:2014
ISO 25178-603:2013(E)

2.1.6
measuring volume
range of the instrument stated in terms of the limits on all three coordinates measured by the instrument
Note 1 to entry: For areal surface texture measuring instruments, the measuring volume is defined by the
measuring range of the x- and y- drive units, and the measuring range of the z-probing system.
[SOURCE: ISO 25178-601:2010, 3.4.1]
2.1.7
response curve
F , F , F
x y z
graphical representation of the function that describes the relation between the actual quantity and the
measured quantity
Note 1 to entry: An actual quantity in x (respectively y or z) corresponds to a measured quantity x
M
(respectively y or z ).
M M
Note 2 to entry: The response curve can be used for adjustments and error corrections.
SEE: Figure 2
3
2
1
4
Key
1 response curve 3 measured quantities
2 assessment of the linearity deviation by polynomial 4 input quantities
approximation
Figure 2 — Example of a nonlinear response curve
[ISO 25178-601:2010, 3.4.2]
2.1.8
amplification coefficient
α , α , α
x y z
slope of the linear regression curve obtained from the response curve (2.1.7)
Note 1 to entry: There will be amplification coefficients applicable to the x, y and z quantities.
Note 2 to entry: The ideal response is a straight line with a slope equal to 1 which means that the values of the
measurand are equal to the values of the input quantities.
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SIST EN ISO 25178-603:2014
ISO 25178-603:2013(E)

[1]
Note 3 to entry: See also “sensitivity of a measuring system” (ISO/IEC Guide 99:2007, 4.12) .
SEE: Figure 3
1
6
3
4
5
2
Key
1 measured quantities 4 linearization of the response curve of Figure 2
2 input quantities 5 line from which the amplification coefficient α is
derived
3 ideal response curve 6 local residual correction error before adjustment
Figure 3 — Example of the linearization of a response curve
[ISO 25178-601:2010, 3.4.3, modified — Note 3 to entry has been added.]
2.1.9
instrument noise
N
I
internal noise added to the output signal caused by the instrument if ideally placed in a noise-free environment
Note 1 to entry: Internal noise can be due to electronic noise, as e.g. amplifiers, or to optical noise, as e.g. stray light.
Note 2 to entry: This noise typically has high frequencies and it limits the ability of the instrument to detect small
scale spatial wavelengths of the surface texture.
Note 3 to entry: The S-filter according ISO 25178-3 may reduce this noise.
Note 4 to entry: For some instruments, instrument noise cannot be estimated because the instrument only takes
data while moving.
2.1.10
measurement noise
N
M
noise added to the output signal occurring during the normal use of the instrument
Note 1 to entry: Notes 2 and 3 of 2.1.9 apply as well to this definition.
Note 2 to entry: Measurement noise includes instrument noise (2.1.9).
4 © ISO 2013 – All rights reserved

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SIST EN ISO 25178-603:2014
ISO 25178-603:2013(E)

2.1.11
surface topography repeatability
repeatability of topography map in successive measurements of the same surface under the same
conditions of measurement
Note 1 to entry: Surface topography repeatability provides a measure of the likely agreement between repeated
measurements normally expressed as a standard deviation.
[1]
Note 2 to entry: See ISO/IEC Guide 99:2007 , 2.15 and 2.21, for a general discussion of repeatability and
related concepts.
Note 3 to entry: Evaluation of surface topography repeatability is a common method for determining the
measurement noise.
2.1.12
sampling interval in x
D
x
distance between two adjacent measured points along the x-axis
Note 1 to entry: In many microscopy systems, the sampling interval is determined by the distance between
sensor elements in a camera, called pixels. For such systems, the terms pixel pitch and pixel spacing are often
used interchangeably with the term sampling interval. Another term, pixel width, indicates a length associated
with one side (x or y) of the sensitive area of a single pixel and is always smaller than the pixel spacing. Yet another
term, sampling zone, may be used to indicate the length or region over which a height sample is determined. This
quantity could either be larger or smaller than the sampling interval. See also A.3.
2.1.13
sampling interval in y
D
y
distance between two adjacent measured points along the y-axis
Note 1 to entry: In many microscopy systems the sampling interval is determined by the distance between sensor
elements in a camera, called pixels. For such systems, the terms pixel pitch and pixel spacing are often used
interchangeably with the term sampling interval. Another term, pixel width, indicates a length associated with
one side (x or y) of the sensitive area of a single pixel and is always smaller than the pixel spacing. Yet another
term, sampling zone, may be used to indicate the length or region over which a height sample is determined. This
quantity could either be larger or smaller than the sampling interval. See also A.3.
2.1.14
digitization step in z
D
Z
smallest height variation along the z-axis between two ordinates of the extracted surface
2.1.15
lateral resolution
R
l
smallest distance between two features which can be detected
[SOURCE: ISO 25178-601:2010, 3.4.10, modified — The word “separation” has been removed before
“distance”.]
2.1.16
width limit for full height transmission
W
l
width of the narrowest rectangular groove whose measured height remains unchanged by the measurement
Note 1 to entry: Instrument properties (such as the sampling interval in x and y, the digitization step in z, and the
short wavelength cutoff filter) should be chosen so that they do not influence the lateral resolution and the width
limit for full height transmission.
Note 2 to entry: When determining this parameter by measurement, the depth of the rectangular groove should
be close to that of the surface to be measured.
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SIST EN ISO 25178-603:2014
ISO 25178-603:2013(E)

t ≥ W
l
a) Grid with horizontal spacing where t is greater than or equal to W
l
t
b) Measurement of the grid in a) — The spacing and depth of the grid are measured correctly
t’ < W
l
c) Grid with horizontal spacing t’ smaller than W
l
t’
d) Measurement of the grid in c) — The spacing is measured correctly but the depth is smaller
(d’ < d)
Figure 4 — Examples of grids and their measurements
EXAMPLE 1 Measuring a grid for which the grooves are wider than the width limit for full height transmission
leads to a correct measurement of the groove depth [see Figure 4 a) and b)].
EXAMPLE 2 Measuring a grid for which the grooves are narrower than the width limit for full height transmission
leads to an incorrect groove depth [see Figure 4 c) and d)]. In this situation, the signal is generally disturbed and
may contain non-measured points.
[SOURCE: ISO 25178-601:2010, 3.4.11, modified — The definition is identical. The notes, examples and
figures are different.]
6 © ISO 2013 – All rights reserved
d d
d
d’

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SIST EN ISO 25178-603:2014
ISO 25178-603:2013(E)

2.1.17
lateral period limit
D
LIM
spatial period of a sinusoidal profile at which the height response of an instrument falls to 50 %
Note 1 to entry: The lateral period limit is one metric for describing spatial or lateral resolution of a surface
topography measuring instrument and its ability to distinguish and measure closely spaced surface features. Its
value depends on the heights of surface features and on the method used to probe the surface. Maximum values
for this parameter are listed in ISO 25178-3: 2012, Table 3, in comparison with recommended values for short
wavelength (s-) filters and sampling intervals.
Note 2 to entry: Spatial period is the same concept as spatial wavelength and is the inverse of spatial frequency.
Note 3 to entry: One factor related to the value of D for optical tools is the Rayleigh criterion (2.3.7). Another
LIM
is the degree of focus of the objective on the surface.
Note 4 to entry: One factor related to the value of D for contact tools is the stylus tip radius, r (see 25178–601).
LIM TIP
Note 5 to entry: Other terms related to lateral period limit are structural resolution and topographic spatial resolution
2.1.18
maximum local slope
greatest local slope of a surface feature that can be assessed by the probing system
Note 1 to entry: The term “local slope” is defined in ISO 4287:1997, 3.2.9.
2.1.19
instrument transfer function
ITF
f
ITF
function of spatial frequency describing how a surface topography measuring instrument responds to
an object surface topography having a specific spatial frequency
Note 1 to entry: Ideally, the ITF tells us what the measured amplitude of a sinusoidal grating of a specified spatial
frequency ν would be relative to the true amplitude of the grating.
Note 2 to entry: For several types of optical instruments, the ITF may be a nonlinear function of height except for
heights much smaller than the optical wavelength.
2.1.20
hysteresis
x , y , z
HYS HYS HYS
property of measuring equipment or characteristic whereby the indication of the equipment or value of
the characteristic depends on the orientation of the preceding stimuli
Note 1 to entry: Hysteresis can also depend, for example, on the distance travelled after the orientation of
stimuli has changed.
Note 2 to entry: For lateral scanning systems, the hysteresis is mainly a repositioning error.
[SOURCE: ISO 14978:2006, 3.24, modified — Note 2 to entry and the symbols have been added.]
2.1.21
metrological characteristic
metrological characteristic of a measuring instrument
characteristic of measuring equipment, which may influence the results of
measurement
Note 1 to entry: Calibration of metrological characteristics may be necessary.
Note 2 to entry: The metrological characteristics have an immediate contribution to measurement uncertainty.
Note 3 to entry: Metrological characteristics for areal surface texture measuring instruments are given in Table 1.
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ISO 25178-603:2013(E)

Table 1 — List of metrological characteristics for surface texture measurement methods
Metrological characteristic Symbol Definition Main potential
error along
Amplification coefficient α , α , α 2.1.8 (see Figure 3) x, y, z
X Y Z
Linearity deviation l , l , l Maximum local difference between x, y, z
X Y Z
the line from which the amplifi-
cation coefficient is derived (see
Figure 3 – Key 5) and the response
curve (see Figure 3 – Key 4)
Residual flatness z Flatness of the areal reference z
FLT
Measurement noise N 2.1.10 z
M
Lateral period limit D 2.1.17 z
LIM
Perpendicularity Δ Deviation from 90° of the angle x, y
PERxy
between the x- and y-axes
[SOURCE: ISO 14978:2006, 3.12, modified — The notes are different and the table has been added.]
2.2 Terms and definitions related to x- and y-scanning systems
2.2.1
areal reference guide
component(s) of the instrument that generate(s) the reference surface, in which the probing system
moves relative to the surface being measured according to a theoretically exact trajectory
Note 1 to entry: In the case of x- and y-scanning areal surface texture measuring instruments, the areal reference
guide establishes a reference surface [ISO 25178-2:2012, 3.1.8]. It can be achieved throug
...

SLOVENSKI STANDARD
oSIST prEN ISO 25178-603:2009
01-november-2009
6SHFLILNDFLMDJHRPHWULMVNLKYHOLþLQL]GHOND7HNVWXUDSRYUãLQHUDYQDGHO
,PHQVNH]QDþLOQRVWLQHNRQWDNWQLKLQVWUXPHQWRYLQWHUIHURPHWULMVNDPLNURVNRSLMDV
ID]QLPSUHPLNRP,62',6
Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal
characteristics of non-contact (phase-shifting interferometric microscopy) instruments
(ISO/DIS 25178-603:2009)
Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Flächenhaft -
Teil 603: Merkmale von berührungslos messenden Geräten (der phasenverschiebenden
interferometrischen Mikroskopie) (ISO/DIS 25178-603:2009)
Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 603:
Caractéristiques nominales des instruments sans contact (microscopes
interférométriques à glissement de franges) (ISO/DIS 25178-603:2009)
Ta slovenski standard je istoveten z: prEN ISO 25178-603
ICS:
17.040.20 Lastnosti površin Properties of surfaces
oSIST prEN ISO 25178-603:2009 en,fr,de
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

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oSIST prEN ISO 25178-603:2009

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oSIST prEN ISO 25178-603:2009


EUROPEAN STANDARD
DRAFT
prEN ISO 25178-603
NORME EUROPÉENNE

EUROPÄISCHE NORM

August 2009
ICS 17.040.20
English Version
Geometrical product specifications (GPS) - Surface texture:
Areal - Part 603: Nominal characteristics of non-contact (phase-
shifting interferometric microscopy) instruments (ISO/DIS 25178-
603:2009)
Spécification géométrique des produits (GPS) - État de Geometrische Produktspezifikation (GPS) -
surface: Surfacique - Partie 603: Caractéristiques Oberflächenbeschaffenheit: Flächenhaft - Teil 603:
nominales des instruments sans contact (microscopes Merkmale von berührungslos messenden Geräten (der
interférométriques à glissement de franges) (ISO/DIS phasenverschiebenden interferometrischen Mikroskopie)
25178-603:2009) (ISO/DIS 25178-603:2009)
This draft European Standard is submitted to CEN members for parallel enquiry. It has been drawn up by the Technical Committee
CEN/TC 290.

If this draft becomes a European Standard, CEN members are bound to comply with the CEN/CENELEC Internal Regulations which
stipulate the conditions for giving this European Standard the status of a national standard without any alteration.

This draft European Standard was established by CEN in three official versions (English, French, German). A version in any other language
made by translation under the responsibility of a CEN member into its own language and notified to the CEN Management Centre has the
same status as the official versions.

CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Cyprus, Czech Republic, Denmark, Estonia, Finland,
France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal,
Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland and United Kingdom.

Recipients of this draft are invited to submit, with their comments, notification of any relevant patent rights of which they are aware and to
provide supporting documentation.

Warning : This document is not a European Standard. It is distributed for review and comments. It is subject to change without notice and
shall not be referred to as a European Standard.


EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION

EUROPÄISCHES KOMITEE FÜR NORMUNG

Management Centre: Avenue Marnix 17, B-1000 Brussels
© 2009 CEN All rights of exploitation in any form and by any means reserved Ref. No. prEN ISO 25178-603:2009: E
worldwide for CEN national Members.

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oSIST prEN ISO 25178-603:2009
prEN ISO 25178-603:2009 (E)
Contents Page
Foreword .3

2

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oSIST prEN ISO 25178-603:2009
prEN ISO 25178-603:2009 (E)
Foreword
This document (prEN ISO 25178-603:2009) has been prepared by Technical Committee ISO/TC 213
"Dimensional and geometrical product specifications and verification" in collaboration with Technical
Committee CEN/TC 290 “Dimensional and geometrical product specification and verification” the secretariat of
which is held by AFNOR.
This document is currently submitted to the parallel Enquiry.
Endorsement notice
The text of ISO/DIS 25178-603:2009 has been approved by CEN as a prEN ISO 25178-603:2009 without any
modification.

3

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oSIST prEN ISO 25178-603:2009

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oSIST prEN ISO 25178-603:2009
DRAFT INTERNATIONAL STANDARD ISO/DIS 25178-603
ISO/TC 213 Secretariat: DS
Voting begins on: Voting terminates on:
2009-08-20 2010-01-20
INTERNATIONAL ORGANIZATION FOR STANDARDIZATION • МЕЖДУНАРОДНАЯ ОРГАНИЗАЦИЯ ПО СТАНДАРТИЗАЦИИ • ORGANISATION INTERNATIONALE DE NORMALISATION
Geometrical product specifications (GPS) — Surface texture:
Areal —
Part 603:
Nominal characteristics of non-contact (phase-shifting
interferometric microscopy) instruments
Spécification géométrique des produits (GPS) — État de surface: Surfacique —
Partie 603: Caractéristiques nominales des instruments sans contact (microscopes interférométriques à
glissement de franges)
ICS 17.040.20

ISO/CEN PARALLEL PROCESSING
This draft has been developed within the International Organization for Standardization (ISO), and
processed under the ISO-lead mode of collaboration as defined in the Vienna Agreement.
This draft is hereby submitted to the ISO member bodies and to the CEN member bodies for a parallel
five-month enquiry.
Should this draft be accepted, a final draft, established on the basis of comments received, will be
submitted to a parallel two-month approval vote in ISO and formal vote in CEN.
To expedite distribution, this document is circulated as received from the committee secretariat.
ISO Central Secretariat work of editing and text composition will be undertaken at publication
stage.
Pour accélérer la distribution, le présent document est distribué tel qu'il est parvenu du
secrétariat du comité. Le travail de rédaction et de composition de texte sera effectué au
Secrétariat central de l'ISO au stade de publication.
THIS DOCUMENT IS A DRAFT CIRCULATED FOR COMMENT AND APPROVAL. IT IS THEREFORE SUBJECT TO CHANGE AND MAY NOT BE
REFERRED TO AS AN INTERNATIONAL STANDARD UNTIL PUBLISHED AS SUCH.
IN ADDITION TO THEIR EVALUATION AS BEING ACCEPTABLE FOR INDUSTRIAL, TECHNOLOGICAL, COMMERCIAL AND USER PURPOSES, DRAFT
INTERNATIONAL STANDARDS MAY ON OCCASION HAVE TO BE CONSIDERED IN THE LIGHT OF THEIR POTENTIAL TO BECOME STANDARDS TO
WHICH REFERENCE MAY BE MADE IN NATIONAL REGULATIONS.
RECIPIENTS OF THIS DRAFT ARE INVITED TO SUBMIT, WITH THEIR COMMENTS, NOTIFICATION OF ANY RELEVANT PATENT RIGHTS OF WHICH
THEY ARE AWARE AND TO PROVIDE SUPPORTING DOCUMENTATION.
©
International Organization for Standardization, 2009

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oSIST prEN ISO 25178-603:2009
ISO/DIS 25178-603
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Violators may be prosecuted.
©
ii ISO 2009 – All rights reserved

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oSIST prEN ISO 25178-603:2009
ISO/DIS 25178-603
Contents Page
Foreword .iv
Introduction.v
1 Scope.1
2 Normative references.1
3 Terms and definitions .1
3.1 General .1
3.2 Metrological characteristics of the instrument .2
4 Description of the metrological characteristics.4
4.1 General .4
4.2 Overview.4
4.3 Metrological characteristics.5
Annex A (informative) Components of a phase shifting interferometric (PSI) microscope.6
Annex B (informative) Phase shifting interferometric (PSI) microscope - Theory of operation.7
Annex C (informative) Errors and corrections for phase shifting interferometric (PSI) microscopes .11
Annex D (informative) Relation to the GPS matrix model.14
Bibliography.15

© ISO 2009 – All rights reserved iii

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oSIST prEN ISO 25178-603:2009
ISO/DIS 25178-603
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies
(ISO member bodies). The work of preparing International Standards is normally carried out through ISO
technical committees. Each member body interested in a subject for which a technical committee has been
established has the right to be represented on that committee. International organizations, governmental and
non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the
International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.
International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2.
The main task of technical committees is to prepare International Standards. Draft International Standards
adopted by the technical committees are circulated to the member bodies for voting. Publication as an
International Standard requires approval by at least 75 % of the member bodies casting a vote.
Attention is drawn to the possibility that some of the elements of this document may be the subject of patent
rights. ISO shall not be held responsible for identifying any or all such patent rights.
ISO 25178-603 was prepared by Technical Committee ISO/TC 213, Dimensional and geometrical product
specifications and verification.
ISO 25178 consists of the following parts, under the general title Geometrical product specification (GPS) —
Surface texture: Areal:
 Part 1: Areal Surface Texture Drawing Indication (proposed)
 Part 2: Terms, definitions and surface texture parameters
 Part 3: Specification operators
 Part 4: Comparison rules
 Part 5: Verification operators
 Part 6: Classification of methods for measuring surface texture
 Part 7: Software measurement standards
 Part 601: Nominal characteristics of contact (stylus) instruments
 Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments
 Part 603: Nominal characteristics of non-contact (phase shifting interferometric microscopy) instruments
 Part 701: Calibration and measurement standards for contact (stylus) instruments
 Part 702 Calibration of non-contact (confocal chromatic probe) instruments
 Part 703: Calibration and measurement standards for non-contact (interferometric) instruments
iv © ISO 2009 – All rights reserved

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oSIST prEN ISO 25178-603:2009
ISO/DIS 25178-603
Introduction
This part of ISO 25178 is a Geometrical Product Specification standard and is to be regarded as a general
GPS standard (see ISO/TR 14638). It influences the chain link 5 of the chain of standards on areal surface
texture.


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oSIST prEN ISO 25178-603:2009
DRAFT INTERNATIONAL STANDARD ISO/DIS 25178-603

Geometrical product specifications (GPS) — Surface texture:
Areal —
Part 603:
Nominal characteristics of non-contact (phase-shifting
interferometric microscopy) instruments
1 Scope
The present standard describes the metrological characteristics of phase shifting interferometric (PSI) profile
and areal surface texture measuring microscopes.
2 Normative references
The following normative documents contain provisions, which, through reference in this text, constitute
provisions of this part of ISO 25178. Subsequent amendments to or revisions of these dated references do not
apply. However, parties to agreements based on this part of ISO 25178 are encouraged to investigate the
possibility of applying the most recent editions of the normative documents indicated below.
ISO 25178-6: 200Y, Geometrical Product Specifications (GPS) — Surface texture: Areal — Part 6:
Classification of methods for measuring surface texture
3 Terms and definitions
For the purposes of this document, the following terms and definitions apply.
3.1 General
3.1.1
phase shifting interferometric microscopy
surface texture measurement method whereby an optical microscope with illumination of a known effective
wavelength is integrated with an interferometric attachment and produces multiple successive optical images
with interferometric fringes from which the profile or areal surface texture image is calculated
NOTE 1 Phase shifting interferometric (PSI) microscopes provide a non-contact measurement of surface texture for
which the average roughness (Ra or Sa) is typically less than λ/10, where λ is the wavelength of the nominally
monochromatic light used for measurement.
NOTE 2 Typical illumination sources include lasers, light emitting diodes (LED), narrow-band filtered white light
sources, or spectral lamps.
[ISO 25178-6]
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ISO/DIS 25178-603
3.1.2
coordinate system of the instrument
orthonomal system (X, Y, Z) defined as:
— (X, Y) is the plane perpendicular to the optical axis of the PSI system,
— Z is the axis parallel to the optical axis of the PSI system and is perpendicular to the (X,Y) plane
NOTE Occasionally other coordinate systems are used such as an (R, θ, Z) system for rotationally symmetric
surfaces.
3.2 Metrological characteristics of the instrument
3.2.1
metrological characteristics (of a measuring instrument)
characteristic of measuring instrument, which may influence the value and uncertainty of the measurement
NOTE 1 Calibration of metrological characteristics may be necessary.
NOTE 2 The metrological characteristics have an immediate contribution to measurement uncertainty.
[ISO 14978]
3.2.2
phase shifting measurement algorithm
algorithm that determines the number of phase shifted images to be acquired, the relative phase difference
between images and the measurement equations used to calculate the texture
3.2.3
phase unwrapping algorithm
algorithm used to construct the measured surface given that the measured height at each point is only known
within ± λ/4, where λ is the wavelength of the nominally monochromatic light used for measurement
NOTE Phase unwrapping algorithms typically assume that the height difference of adjacent measured point is less
than λ/4.
3.2.4
microscope numerical aperture
NA
specification designating the spread of angles over which light illuminates the sample and the spread of
angles over which light is accepted by the microscope which may affect the accuracy of the measured surface
heights (see Annex C and references contained therein)
NA=sin(α)
NOTE The numerical aperture is the sine of the half aperture angle multiplied by the refractive index of the
surrounding medium.
2 © ISO 2009 – All rights reserved

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oSIST prEN ISO 25178-603:2009
ISO/DIS 25178-603


Key
A Lens
B Sample
α Acceptance angle

Figure 1 — Illustration of the numerical aperture (NA) of a PSI microscope objective lens

3.2.5
sample tilt
angle between the surface normal and the optical axis of the system during measurement typically measured
by the number of fringes in view across an ideally flat sample (see Annex A)
3.2.6
instrument noise
internal noise added to the measurement caused by the instrument in an ideal environment
NOTE 1 Internal noise may be caused by electronic noise (e.g. amplifiers and detectors).
NOTE 2 For PSI instruments, noise may only be estimated by making a measurement of a surface (see 3.2.9).
3.2.7
environmental noise
noise caused by external sources (e.g. unwanted relative vibration between the sample and the optical
system) added to the measurement
NOTE Environmental noise may be caused by various sources (e.g. seismic, sonic and external electro-magnetic
disturbances).
3.2.8
dynamic noise
combination of the instrument noise and the environmental noise
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ISO/DIS 25178-603
3.2.9
reference root mean square (rms) variation
effective rms roughness measured by the system when an ideally flat and smooth surface is measured,
resulting from imperfections in the optical system including the reference mirror (see Annex A) comprising the
instrument
3.2.10
measurement optical wavelength
effective value of the wavelength λ of the light used to measure a surface (see Annex A)
NOTE The effective value of the wavelength used to measure a surface is affected by items such as the light source
spectrum, spectral transmission of the optical components, and spectral response of the image sensor array.
3.2.11
measurement optical bandwidth
spread in wavelengths of the light used to measure a surface (see Annex A)
NOTE Instruments may be constructed with light sources (e.g. LED) with a limited optical bandwidth and/or with
additional filter elements to further limit the optical bandwidth.
3.2.12
optically dissimilar materials
regions on the sample with different optical properties which may result in measured phase differences across
the field of view erroneously interpreted as different surface heights
3.2.13
thin films
semi-transparent films covering a reflecting layer on the surface of a sample
NOTE The thin films may cause an error in the measured relative heights of features on the sample.
4 Description of the metrological characteristics
4.1 General
Phase shifting interferometric instruments provide a measurement of lateral (X and Y) and height (Z) values
from which surface texture parameters are calculated.
4.2 Overview
P
...