EN ISO 25178-603:2013
(Main)Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments (ISO 25178-603:2013)
Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments (ISO 25178-603:2013)
ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.
Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Flächenhaft - Teil 603: Merkmale von berührungslos messenden Geräten (phasenschiebende interferometrische Mikroskopie) (ISO 25178-603:2013)
Dieser Teil der ISO 25178 legt die messtechnischen Eigenschaften von Messgeräten der phasenschiebenden interferometrischen (PSI ) Mikroskopie zur Messung von Oberflächenprofilen und zur flächenhaften Messung der Oberflächenbeschaffenheit fest.
Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 603: Caractéristiques nominales des instruments sans contact (microscopes interférométriques à glissement de franges) (ISO 25178-603:2013)
L'ISO 25178-603:2013 décrit les caractéristiques métrologiques des microscopes de mesure de profil et d'état de surface surfacique par interférométrie à glissement de franges (PSI).
Specifikacija geometrijskih veličin izdelka (GPS) - Tekstura površine: ravna - 603. del: Imenske značilnosti nekontaktnih instrumentov (interferometrijska mikroskopija s faznim zamikom) (ISO 25178-603:2013)
Та del standarda ISO 25178 opisuje meroslovne značilnosti interferometrijskih mikroskopov s faznim zamikom in mikroskopov za merjenje površinske teksture.
General Information
Relations
Standards Content (Sample)
SLOVENSKI STANDARD
01-julij-2014
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GHO ,PHQVNH]QDþLOQRVWLQHNRQWDNWQLKLQVWUXPHQWRY LQWHUIHURPHWULMVND
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Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal
characteristics of non-contact (phase-shifting interferometric microscopy) instruments
(ISO 25178-603:2013)
Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Flächenhaft -
Teil 603: Merkmale von berührungslos messenden Geräten (der phasenverschiebenden
interferometrischen Mikroskopie) (ISO 25178-603:2013)
Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 603:
Caractéristiques nominales des instruments sans contact (microscopes
interférométriques à glissement de franges) (ISO 25178-603:2013)
Ta slovenski standard je istoveten z: EN ISO 25178-603:2013
ICS:
17.040.20 Lastnosti površin Properties of surfaces
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.
EUROPEAN STANDARD
EN ISO 25178-603
NORME EUROPÉENNE
EUROPÄISCHE NORM
October 2013
ICS 17.040.20
English Version
Geometrical product specifications (GPS) - Surface texture:
Areal - Part 603: Nominal characteristics of non-contact (phase-
shifting interferometric microscopy) instruments (ISO 25178-
603:2013)
Spécification géométrique des produits (GPS) - État de Geometrische Produktspezifikation (GPS) -
surface: Surfacique - Partie 603: Caractéristiques Oberflächenbeschaffenheit: Flächenhaft - Teil 603:
nominales des instruments sans contact (microscopes Merkmale von berührungslos messenden Geräten
interférométriques à glissement de franges) (ISO 25178- (phasenschiebende interferometrische Mikroskopie) (ISO
603:2013) 25178-603:2013)
This European Standard was approved by CEN on 19 August 2013.
CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European
Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national
standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN member.
This European Standard exists in three official versions (English, French, German). A version in any other language made by translation
under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management Centre has the same
status as the official versions.
CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania,
Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and United
Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION
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CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels
© 2013 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 25178-603:2013: E
worldwide for CEN national Members.
Contents Page
Foreword .3
Foreword
This document (EN ISO 25178-603:2013) has been prepared by Technical Committee ISO/TC 213
"Dimensional and geometrical product specifications and verification" in collaboration with Technical
Committee CEN/TC 290 “Dimensional and geometrical product specification and verification” the secretariat of
which is held by AFNOR.
This European Standard shall be given the status of a national standard, either by publication of an identical
text or by endorsement, at the latest by April 2014, and conflicting national standards shall be withdrawn at the
latest by April 2014.
Attention is drawn to the possibility that some of the elements of this document may be the subject of patent
rights. CEN [and/or CENELEC] shall not be held responsible for identifying any or all such patent rights.
According to the CEN-CENELEC Internal Regulations, the national standards organizations of the following
countries are bound to implement this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech
Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece,
Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal,
Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the United Kingdom.
Endorsement notice
The text of ISO 25178-603:2013 has been approved by CEN as EN ISO 25178-603:2013 without any
modification.
INTERNATIONAL ISO
STANDARD 25178-603
First edition
2013-10-01
Geometrical product specifications
(GPS) — Surface texture: Areal —
Part 603:
Nominal characteristics of non-contact
(phase-shifting interferometric
microscopy) instruments
Spécification géométrique des produits (GPS) — État de surface:
Surfacique —
Partie 603: Caractéristiques nominales des instruments sans contact
(microscopes interférométriques à glissement de franges)
Reference number
ISO 25178-603:2013(E)
©
ISO 2013
ISO 25178-603:2013(E)
© ISO 2013
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form
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Published in Switzerland
ii © ISO 2013 – All rights reserved
ISO 25178-603:2013(E)
Contents Page
Foreword .iv
Introduction .vi
1 Scope . 1
2 Terms and definitions . 1
2.1 Terms and definitions related to all areal surface texture measurement methods . 1
2.2 Terms and definitions related to x- and y-scanning systems . 8
2.3 Terms and definitions related to optical systems .10
2.4 Terms and definitions related to optical properties of the workpiece .12
2.5 Terms and definitions specific to phase-shifting interferometric microscopy .12
3 Descriptions of the influence quantities .13
3.1 General .13
3.2 Influence quantities .14
Annex A (informative) Components of a phase-shifting interferometric (PSI) microscope .16
Annex B (informative) Phase-shifting interferometric (PSI) microscope — Theory of operation .17
Annex C (informative) Errors and corrections for phase-shifting interferometric
(PSI) microscopes .22
Annex D (informative) Relation to the GPS matrix model .25
Bibliography .27
ISO 25178-603:2013(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2. www.iso.org/directives
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of
any patent rights identified during the development of the document will be in the Introduction and/or
on the ISO list of patent declarations received. www.iso.org/patents
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation on the meaning of ISO specific terms and expressions related to conformity
assessment, as well as information about ISO’s adherence to the WTO principles in the Technical Barriers
to Trade (TBT) see the following URL: Foreword - Supplementary information
The committee responsible for this document is ISO/TC 213, Dimensional and geometrical product
specifications and verification.
ISO 25178 consists of the following parts, under the general title Geometrical product specification (GPS)
— Surface texture: Areal:
— Part 1: Areal surface texture drawing indication
— Part 2: Terms, definitions and surface texture parameters
— Part 3: Specification operators
— Part 6: Classification of methods for measuring surface texture
— Part 70: Material measures
— Part 71: Software measurement standards
— Part 601: Nominal characteristics of contact (stylus) instruments
— Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments
— Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
— Part 604: Nominal characteristics of non-contact (coherence scanning interferometric microscopy)
instruments
— Part 605: Nominal characteristics of non-contact (point autofocus probe) instruments
— Part 606: Nominal characteristics of non-contact (focus variation microscopy) instruments
— Part 701: Calibration and measurement standards for contact (stylus) instruments
— Part 702 Calibration of non-contact (confocal chromatic probe) instruments
iv © ISO 2013 – All rights reserved
ISO 25178-603:2013(E)
— Part 703: Calibration and measurement standards for non-contact (interferometric) instruments
The following part is under preparation: Part 72: XML file format x3p
ISO 25178-603:2013(E)
Introduction
This part of ISO 25178 is a Geometrical Product Specification standard and is to be regarded as a
general GPS standard (see ISO/TR 14638). It influences the chain link 5 of the chain of standards on
areal surface texture.
This part of ISO 25178 describes the metrological characteristics of phase-shifting interferometric (PSI)
profile and areal surface texture measuring microscopes, designed for the measurement of surface
topography maps. For more detailed information on the phase-shifting interferometry technique, see
Annex A and Annex B.
The ISO/GPS Masterplan given in ISO /TR 14638 gives an overview of the ISO/GPS system of which this
document is a part. The fundamental rules of ISO/GPS given in ISO 8015 apply to this document and
the default decision rules given in ISO 14253-1 apply to specifications made in accordance with this
document, unless otherwise indicated.
NOTE Portions of this document, particularly the informative clauses, may describe patented systems and
methods. This information is provided only to assist users in understanding the operating principles of phase-
shifting interferometry. This document is not intended to establish priority for any intellectual property, nor
does it imply a lic
...
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