ISO/TC 206/WG 12 - Engineering applications

This document specifies a method for measuring the thermal resistance between a heater chip and a cold plate with the heater chip mounted on a metalized ceramic substrate, imitating a silicon carbide (SiC) high-output power module. This measurement represents an index of the heat dissipation characteristics of a metallized ceramic substrate used in a high-output power module.

This document specifies a test method for plasma resistance of ceramic components in semiconductor manufacturing equipment. It is applicable to ceramic components of plasma-resistant components in dry etching chambers used in semiconductor manufacturing.

ISO 26602:2017 specifies the requirements for preprocessed silicon nitride materials for rolling bearing balls and rollers. ISO 26602:2017 provides a classification defining physical and mechanical properties of silicon nitride preprocessed bearing rolling element materials. The materials are classified in three categories by the specification of characteristics and microstructures. Methods for sample preparation and observation of microstructures are provided in Annex A. NOTE 1 The silicon nitride product means the sintered body of which the main component is silicon nitride material. NOTE 2 ISO 26602:2017 can be used for processed rolling bearing balls and rollers upon consultation between the parties concerned.

ISO 17841:2015 describes the test methods for determining thermal fatigue property of fine ceramic substrates applied to power modules, electronic control unit and similar devices.

ISO 14628:2012 specifies a test method for rolling contact fatigue of silicon nitride ceramics under stepwise loading that is carried out at room temperature. This test may be used as follows: relative comparison of the rolling contact fatigue performance, a pass/fail test for material qualification of rolling elements or choosing an appropriate load level for RCF testing under constant load.

This International Standard describes a test method that covers the determination of fracture resistance of silicon nitride bearing balls at room temperature by the indentation fracture (IF) method, as specified in ISO 26602. This International Standard is intended for use with monolithic silicon nitride ceramics for bearing balls. It does not include other ceramic materials. This International Standard is for material comparison and quality assurance. Indentation fracture resistance, KI, IFR as defined in this International Standard is not to be equated to fracture toughness determined using other test methods such as KIsc and KIpb. NOTE: KI, IFR is an estimate of a material’s resistance to cracking as introduced by an indenter and has correlations with wear resistance and rolling contact fatigue performance as well as machining processes used for silicon nitride materials since these properties are governed by the resistance to crack extension in localized damage areas. By contrast, fracture toughness, KIsc andKIpb are intrinsic properties of a material and are relevant to macroscopic and catastrophic fracture events with long cracks, rather than those phenomena caused by microscopic and successive damage accumulation associated with short cracks.

ISO 26602:2009 specifies the requirements for preprocessed silicon nitride materials for rolling bearing balls. ISO 26602:2009 provides a classification defining physical and mechanical properties of silicon nitride preprocessed bearing ball materials. The materials are classified in three categories by the specification of characteristics and microstructures.