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ASTM E1504-92(2001)

(Practice)

Standard Practice for Reporting Mass Spectral Data in Secondary Ion Mass Spectrometry (SIMS)

Standard Practice for Reporting Mass Spectral Data in Secondary Ion Mass Spectrometry (SIMS)

SCOPE
1.1 This practice provides the minimum information necessary to describe the instrumental, experimental, and data reduction procedures used in acquiring and reporting secondary ion mass spectrometry (SIMS) mass spectral data.
1.2 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

General Information

Status
Historical
Publication Date
14-Nov-1992
ICS
71.040.50 - Physicochemical methods of analysis
Technical Committee
E42 - Surface Analysis
Drafting Committee
E42.06 - SIMS
Current Stage
Ref Project

Relations

Replaces
ASTM E1504-92(1996) - Standard Practice for Reporting Mass Spectral Data in Secondary Ion Mass Spectrometry (SIMS)
Effective Date
15-Nov-1992
Replaced By
ASTM E1504-06 - Standard Practice for Reporting Mass Spectral Data in Secondary Ion Mass Spectrometry (SIMS)
Effective Date
01-Nov-2006
Referred By
ASTM E1635-06(2019) - Standard Practice for Reporting Imaging Data in Secondary Ion Mass Spectrometry (SIMS)
Effective Date
15-Nov-1992
Referred By
ASTM F2847-17 - Standard Practice for Reporting and Assessment of Residues on Single-Use Implants and Single-Use Sterile Instruments
Effective Date
15-Nov-1992

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ASTM E1504-92(2001) - Standard Practice for Reporting Mass Spectral Data in Secondary Ion Mass Spectrometry (SIMS)ASTM E1504-92(2001) - Standard Practice for Reporting Mass Spectral Data in Secondary Ion Mass Spectrometry (SIMS)
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ASTM E1504-92(2001) - Standard Practice for Reporting Mass Spectral Data in Secondary Ion Mass Spectrometry (SIMS)
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NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation: E 1504 – 92 (Reapproved 2001)
Standard Practice for
Reporting Mass Spectral Data in Secondary Ion Mass
Spectrometry (SIMS)
This standard is issued under the fixed designation E1504; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision.Anumber in parentheses indicates the year of last reapproval.A
superscript epsilon (e) indicates an editorial change since the last revision or reapproval.
1. Scope nonstandard modification has been made to the instrumenta-
tion, describe the modification in detail.
1.1 This practice provides the minimum information neces-
6.1.2 If a noncommercial SIMS system is used, specify the
sary to describe the instrumental, experimental, and data
components composing the system (for example, ion gun,
reduction procedures used in acquiring and reporting second-
pumping system, vacuum chamber, and mass filter). Specify
ary ion mass spectrometry (SIMS) mass spectral data.
the manufacturer and model number if the components are of
1.2 This standard does not purport to address all of the
commercial origin. If the components are home-built, specify
safety concerns, if any, associated with its use. It is the
them in such detail that their potential effect on the obtained
responsibility of the user of this standard to establish appro-
mass spectrum may be deduced by an individual experienced
priate safety and health practices and determine the applica-
in SIMS and vacuum technology.
bility of regulatory limitations prior to use.
6.2 Specimen:
2. Referenced Documents 6.2.1 Describe the specimen in as much detail as possible.
Such factors would include, but are not limited to, sample
2.1 ASTM Standards:
history, bulk and trace composition (especially electronic
E673 Terminology Relating to Surface Analysis
dopants), physical dimensions, sample homogeneity, crystal-
3. Terminology
linity, and any preanalysis cleaning procedure used.
6.2.2 State the method of sample mounting. When analyz-
3.1 Definitions—For definitions of terms used in this prac-
ing vacuum-compatible liquids, describe the substrate onto
tice, refer to Terminology E673.
which the sample was deposited. In the case of particulate
4. Summary of Practice
samples pressed into metal foils, state the nature and purity of
thefoil.Describeanyconductivecoatingorgridsplacedonthe
4.1 Experimental conditions and reporting procedures that
sample for charge compensation.
affect SIMS mass spectral data are presented in order to
6.3 Experimental Conditions:
standardize the reporting of such data to facilitate comparisons
6.3.1 Primary Ion Source—If a mass-filtered primary ion
with other laboratories and analytical techniques.
beam is used, specify the isotope and charge state of the
5. Significance and Use
primary ion species. If not mass-filtered, state the nature and
purity of the source material used for ion production. State the
5.1 This practice is intended for use in reporting the
impact energy, the angle of incidence (relative to the sample
experimental and data reduction procedures described in other
normal), the ion current (also the manner of current determi-
publications.
nation), whether the primary ion beam was rastered, the
6. Information to be Reported
unrasteredbeamdiameter,andthetotalirradiatedarea.Specify
−2
6.1 Instrumentation: the primary ion dose, in ions-cm , that was used to acquire
that mass spectrum.
6.1.1 If a standard commercial SIMS instrument is used,
specify the manufacturer and model number. Specify the 6.3.2 Secondary Ion Mass Spectrometer—Specify the ana-
lyzed area, any electronic gating parameters used including,
manufacturer and model number of any accessory or auxiliary
equipmentthatwouldaffectthedatacontainedwithinthemass but not limited to, the size of the gated area, the size of any
apertures in the secondary ion optical column, the secondary
spectrum (for example, additional vacuum pumping attach-
ments,primaryionmassfilter,electronfloodguns,etc
...

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4.1 Sputter crater depth measurements are performed in order to determine a sputter rate (depth/time) for each matrix sputtered during a sputter depth profile or similar in-depth type analyses. From sputter rate values, a linear depth scale can be calculated and displayed for the sputter depth profile.  
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1.2 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.  
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Standard Practice for Reporting Imaging Data in Secondary Ion Mass Spectrometry (SIMS)

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5.1 This practice is to be used for reporting the experimental and data reduction procedures to be described with the publication of the data.
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1.1 This practice lists the minimum information necessary to describe the instrumental, experimental, and data reduction procedures used in acquiring and reporting images generated by secondary ion mass spectrometry (SIMS).  
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1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.  
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ASTM E2426-10(2019)(Practice)
Standard Practice for Pulse Counting System Dead Time Determination by Measuring Isotopic Ratios with SIMS

SIGNIFICANCE AND USE
5.1 Electron multipliers are commonly used in pulse-counting mode to detect ions from magnetic sector mass spectrometers. The electronics used to amplify, detect and count pulses from the electron multipliers always have a characteristic time interval after the detection of a pulse, during which no other pulses can be counted. This characteristic time interval is known as the “dead time.” The dead time has the effect of reducing the measured count rate compared with the “true” count rate.  
5.2 In order to measure count rates accurately over the entire dynamic range of a pulse counting detector, such as an electron multiplier, the dead time of the entire pulse counting system must be well known. Accurate count rate measurement forms the basis of isotopic ratio measurements as well as elemental abundance determinations.  
5.3 The procedure described herein has been successfully used to determine the dead time of counting systems on SIMS instruments.6 The accurate determination of the dead time by this method has been a key component of precision isotopic ratio measurements made by SIMS.
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1.1 This practice provides the Secondary Ion Mass Spectrometry (SIMS) analyst with a method for determining the dead time of the pulse-counting detection systems on the instrument. This practice also allows the analyst to determine whether the apparent dead time is independent of count rate.  
1.2 This practice is applicable to most types of mass spectrometers that have pulse-counting detectors.  
1.3 This practice does not describe methods for precise or accurate isotopic ratio measurements.  
1.4 This practice does not describe methods for the proper operation of pulse counting systems and detectors for mass spectrometry.  
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.  
1.6 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.

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