ASTM E1504-92(1996)

Standard Practice for Reporting Mass Spectral Data in Secondary Ion Mass Spectrometry (SIMS)

SCOPE
1.1 This practice provides the minimum information necessary to describe the instrumental, experimental, and data reduction procedures used in acquiring and reporting secondary ion mass spectrometry (SIMS) mass spectral data.
1.2 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

General Information

• Status: Historical
• Publication Date: 14-Nov-1992
• Technical Committee: E42 - Surface Analysis
• Drafting Committee: E42.06 - SIMS

Relations

• Replaced By: ASTM E1504-92(2001) - Standard Practice for Reporting Mass Spectral Data in Secondary Ion Mass Spectrometry (SIMS)
• Effective Date: 15-Nov-1992
• Referred By: ASTM E1635-06(2019) - Standard Practice for Reporting Imaging Data in Secondary Ion Mass Spectrometry (SIMS)
• Effective Date: 15-Nov-1992
• Referred By: ASTM F2847-17 - Standard Practice for Reporting and Assessment of Residues on Single-Use Implants and Single-Use Sterile Instruments
• Effective Date: 15-Nov-1992

Standards Content (Sample)

NOTICE: This standard has either been superseded and replaced by a new version or discontinued.
Contact ASTM International (www.astm.org) for the latest information.
Designation: E 1504 – 92 (Reapproved 1996)
Standard Practice for
Reporting Mass Spectral Data in Secondary Ion Mass
Spectrometry (SIMS)
This standard is issued under the fixed designation E 1504; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (e) indicates an editorial change since the last revision or reapproval.
1. Scope 6.1.2 If a noncommercial SIMS system is used, specify the
components composing the system (for example, ion gun,
1.1 This practice provides the minimum information neces-
pumping system, vacuum chamber, and mass filter). Specify
sary to describe the instrumental, experimental, and data
the manufacturer and model number if the components are of
reduction procedures used in acquiring and reporting second-
commercial origin. If the components are home-built, specify
ary ion mass spectrometry (SIMS) mass spectral data.
them in such detail that their potential effect on the obtained
1.2 This standard does not purport to address all of the
mass spectrum may be deduced by an individual experienced
safety concerns, if any, associated with its use. It is the
in SIMS and vacuum technology.
responsibility of the user of this standard to establish appro-
6.2 Specimen:
priate safety and health practices and determine the applica-
6.2.1 Describe the specimen in as much detail as possible.
bility of regulatory limitations prior to use.
Such factors would include, but are not limited to, sample
2. Referenced Documents history, bulk and trace composition (especially electronic
dopants), physical dimensions, sample homogeneity, crystal-
2.1 ASTM Standards:
linity, and any preanalysis cleaning procedure used.
E 673 Terminology Relating to Surface Analysis
6.2.2 State the method of sample mounting. When analyz-
3. Terminology
ing vacuum-compatible liquids, describe the substrate onto
which the sample was deposited. In the case of particulate
3.1 Definitions—For definitions of terms used in this prac-
samples pressed into metal foils, state the nature and purity of
tice, refer to Terminology E 673.
the foil. Describe any conductive coating or grids placed on the
4. Summary of Practice
sample for charge compensation.
6.3 Experimental Conditions:
4.1 Experimental conditions and reporting procedures that
6.3.1 Primary Ion Source—If a mass-filtered primary ion
affect SIMS mass spectral data are presented in order to
beam is used, specify the isotope and charge state of the
standardize the reporting of such data to facilitate comparisons
primary ion species. If not mass-filtered, state the nature and
with other laboratories and analytical techniques.
purity of the source material used for ion production. State the
5. Significance and Use
impact energy, the angle of incidence (relative to the sample
normal), the ion current (also the manner of current determi-
5.1 This practice is intended for use in reporting the
nation), whether the primary ion beam was rastered, the
experimental and data reduction procedures described in other
unrastered beam diameter, and the total irradiated area. Specify
publications.
−2
the primary ion dose, in ions-cm , that was used to acquire
6. Information to be Reported
that mass spectrum.
6.1 Instrumentation: 6.3.2 Secondary Ion Mass Spectrometer—Specify the ana-
lyzed area, any electronic gating parameters used including,
6.1.1 If a standard commercial SIMS instrument is used,
specify the manufacturer and model number. Specify the but not limited to, the size of the gated area, the size of any
apertures in the secondary ion optical column, the secondary
manufacturer and model number of any accessory or auxiliary
equipment that would affect the data contained within the mass ion collection angle, the energy bandpass of the secondary ion
mass spectrometer (note particularly whether any energy dis-
spectrum (for example, additional vacuum pumping attach-
ments, primary ion mass filter, electron fl
...