ASTM F1396-93(2020)
(Test Method)Standard Test Method for Determination of Oxygen Contribution by Gas Distribution System Components (Withdrawn 2023)
Standard Test Method for Determination of Oxygen Contribution by Gas Distribution System Components (Withdrawn 2023)
SIGNIFICANCE AND USE
3.1 This test method defines a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for purposes of qualification for this installation.
SCOPE
1.1 This test method covers a procedure for testing components for oxygen contribution to ultra-high purity gas distribution systems at ambient temperature. In addition, this test method allows testing of the component at elevated ambient temperatures as high as 70°C.
1.2 This test method applies to in-line components containing electronics grade materials such as those used in a semiconductor gas distribution system.
1.3 Limitations:
1.3.1 This test method is limited by the sensitivity of current instrumentation, as well as the response time of the instrumentation. This test method is not intended to be used for test components larger than 12.7-mm (1/2-in.) outside diameter nominal size. This test method could be applied to larger components; however, the stated volumetric flow rate may not provide adequate mixing to ensure a representative sample. Higher flow rates may improve the mixing but excessively dilute the sample.
1.3.2 This test method is written with the assumption that the operator understands the use of the apparatus at a level equivalent to six months of experience.
1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 5.
1.6 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
WITHDRAWN RATIONALE
This test method covers a procedure for testing components for oxygen contribution to ultra-high purity gas distribution systems at ambient temperature. In addition, this test method allows testing of the component at elevated ambient temperatures as high as 70°C.
Formerly under the jurisdiction of Committee F01 on Electronics, this test method was withdrawn in November 2023. This standard is being withdrawn without replacement because Committee F01 was disbanded.
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Standards Content (Sample)
This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the
Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
Designation: F1396 − 93 (Reapproved 2020)
Standard Test Method for
Determination of Oxygen Contribution by Gas Distribution
1
System Components
This standard is issued under the fixed designation F1396; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
INTRODUCTION
Semiconductor clean rooms are serviced by high-purity gas distribution systems. This test method
presents a procedure that may be applied for the evaluation of one or more components considered for
use in such systems.
1. Scope mine the applicability of regulatory limitations prior to use.
Specific hazard statements are given in Section 5.
1.1 This test method covers a procedure for testing compo-
1.6 This international standard was developed in accor-
nents for oxygen contribution to ultra-high purity gas distribu-
dance with internationally recognized principles on standard-
tion systems at ambient temperature. In addition, this test
ization established in the Decision on Principles for the
method allows testing of the component at elevated ambient
Development of International Standards, Guides and Recom-
temperatures as high as 70°C.
mendations issued by the World Trade Organization Technical
1.2 This test method applies to in-line components contain-
Barriers to Trade (TBT) Committee.
ing electronics grade materials such as those used in a
semiconductor gas distribution system.
2. Terminology
1.3 Limitations:
2.1 Definitions:
1.3.1 Thistestmethodislimitedbythesensitivityofcurrent
2.1.1 baseline—the instrument response under steady state
instrumentation, as well as the response time of the instrumen-
conditions.
tation. This test method is not intended to be used for test
1
components larger than 12.7-mm ( ⁄2-in.) outside diameter
2.1.2 glove bag—an enclosure that contains a controlled
nominal size. This test method could be applied to larger atmosphere. A glove box could also be used for this test
components; however, the stated volumetric flow rate may not
method.
provide adequate mixing to ensure a representative sample.
2.1.3 heat trace— heating of a component, spool piece, or
Higher flow rates may improve the mixing but excessively
teststandbyauniformandcompletewrappingoftheitemwith
dilute the sample.
resistant heat tape.
1.3.2 This test method is written with the assumption that
2.1.4 minimum detection limit (MDL) of the instrument—the
the operator understands the use of the apparatus at a level
lowest instrument response detectable and readable by the
equivalent to six months of experience.
instrument, and at least two times the amplitude of the noise.
1.4 The values stated in SI units are to be regarded as the
2.1.5 response time—the time required for the system to
standard. The inch-pound units given in parentheses are for
information only. reach steady state after a change in concentration.
1.5 This standard does not purport to address all of the
2.1.6 spool piece—a null component, consisting of a
safety concerns, if any, associated with its use. It is the
straightpieceofelectropolishedtubingandappropriatefittings,
responsibility of the user of this standard to establish appro-
used in place of the test component to establish the baseline.
priate safety, health, and environmental practices and deter-
2.1.7 standard conditions—101.3 kPa, 0.0°C (14.73 psia,
32°F).
1
This test method is under the jurisdiction of ASTM Committee F01 on
2.1.8 test component—any device being tested, such as a
Electronicsand is the direct responsibility of Subcommittee F01.10 on Contamina-
valve, regulator, or filter.
tion Control.
Current edition approved April 15, 2020. Published May 2020. Originally
2.1.9 test stand—the physical test system used to measure
approved in 1992. Last previous edition approved in 2012 as F1396 – 93(2012).
DOI: 10.1520/F1396-93R20. impurity levels.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
1
---------------------- Page: 1 ----------------------
F1396 − 93 (2020)
2.1.10 zero gas—a purified gas that has an impurity concen- around each component for the duration of the test. In the case
tration below the MDLof the analytical instrument.This gas is of long pieces of electropolished tubing, use two glove bags,
to be used for both instrument calibration and component one at each end.
testing.
4.1.3 Tubing, used downstream of the test component shall
be 316L electropolished stainless steel seamless tubing
...
NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation: F1396 − 93 (Reapproved 2020)
Standard Test Method for
Determination of Oxygen Contribution by Gas Distribution
1
System Components
This standard is issued under the fixed designation F1396; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
INTRODUCTION
Semiconductor clean rooms are serviced by high-purity gas distribution systems. This test method
presents a procedure that may be applied for the evaluation of one or more components considered for
use in such systems.
1. Scope mine the applicability of regulatory limitations prior to use.
Specific hazard statements are given in Section 5.
1.1 This test method covers a procedure for testing compo-
1.6 This international standard was developed in accor-
nents for oxygen contribution to ultra-high purity gas distribu-
dance with internationally recognized principles on standard-
tion systems at ambient temperature. In addition, this test
ization established in the Decision on Principles for the
method allows testing of the component at elevated ambient
Development of International Standards, Guides and Recom-
temperatures as high as 70°C.
mendations issued by the World Trade Organization Technical
1.2 This test method applies to in-line components contain-
Barriers to Trade (TBT) Committee.
ing electronics grade materials such as those used in a
semiconductor gas distribution system.
2. Terminology
1.3 Limitations:
2.1 Definitions:
1.3.1 This test method is limited by the sensitivity of current
2.1.1 baseline—the instrument response under steady state
instrumentation, as well as the response time of the instrumen-
conditions.
tation. This test method is not intended to be used for test
1
components larger than 12.7-mm ( ⁄2-in.) outside diameter 2.1.2 glove bag—an enclosure that contains a controlled
nominal size. This test method could be applied to larger
atmosphere. A glove box could also be used for this test
components; however, the stated volumetric flow rate may not method.
provide adequate mixing to ensure a representative sample.
2.1.3 heat trace— heating of a component, spool piece, or
Higher flow rates may improve the mixing but excessively
test stand by a uniform and complete wrapping of the item with
dilute the sample.
resistant heat tape.
1.3.2 This test method is written with the assumption that
2.1.4 minimum detection limit (MDL) of the instrument—the
the operator understands the use of the apparatus at a level
lowest instrument response detectable and readable by the
equivalent to six months of experience.
instrument, and at least two times the amplitude of the noise.
1.4 The values stated in SI units are to be regarded as the
standard. The inch-pound units given in parentheses are for 2.1.5 response time—the time required for the system to
reach steady state after a change in concentration.
information only.
1.5 This standard does not purport to address all of the
2.1.6 spool piece—a null component, consisting of a
safety concerns, if any, associated with its use. It is the
straight piece of electropolished tubing and appropriate fittings,
responsibility of the user of this standard to establish appro-
used in place of the test component to establish the baseline.
priate safety, health, and environmental practices and deter-
2.1.7 standard conditions—101.3 kPa, 0.0°C (14.73 psia,
32°F).
1
This test method is under the jurisdiction of ASTM Committee F01 on
2.1.8 test component—any device being tested, such as a
Electronicsand is the direct responsibility of Subcommittee F01.10 on Contamina-
valve, regulator, or filter.
tion Control.
Current edition approved April 15, 2020. Published May 2020. Originally
2.1.9 test stand—the physical test system used to measure
approved in 1992. Last previous edition approved in 2012 as F1396 – 93(2012).
DOI: 10.1520/F1396-93R20. impurity levels.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
1
---------------------- Page: 1 ----------------------
F1396 − 93 (2020)
2.1.10 zero gas—a purified gas that has an impurity concen- around each component for the duration of the test. In the case
tration below the MDL of the analytical instrument. This gas is of long pieces of electropolished tubing, use two glove bags,
to be used for both instrument calibration and component one at each end.
testing.
4.1.3 Tubing, used downstream of the test component shall
be 316L electropolished stainless steel seamless tubing. The
2.2 Symbols:
diameter of the sample line to the analyzer shall not be larger
2.2.1 P —The inlet pressure measured
...
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