F01.10 - Contamination Control

SIGNIFICANCE AND USE
4.1 The purpose of this test method is to define a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for purposes of qualification for this installation.
SCOPE
1.1 This test method establishes a procedure for comparing the elemental composition of normal surfaces with any defects found on the surfaces of metal tubing, fittings, valves, or any metal component.  
1.2 This test method applies to all steel surfaces of components such as tubings, connectors, regulators, and valves, regardless of size, style, or type.  
1.3 Limitations:  
1.3.1 This test method is intended for use by scanning electron microscope/energy dispersive x-ray spectrometer (SEM/EDX) operators with skill level typically achieved over a twelve-month period.  
1.3.2 SEM used for this study should conform to those limitations outlined in Test Method F1372 and should have a minimum point-to-point resolution of 30 nm.  
1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.  
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 6.

SIGNIFICANCE AND USE
3.1 The purpose of this test method is to define a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for the purposes of qualification for this installation.
SCOPE
1.1 This test method covers testing components for total moisture contribution to a gas distribution system at ambient temperature. In addition, the test method allows testing at elevated ambient temperatures as high as 70°C and of the component moisture capacity and recovery.  
1.2 This test method applies to in-line components containing electronics grade materials such as those used in semiconductor gas distribution systems.  
1.3 Limitations:  
1.3.1 This test method is limited by the sensitivity of current instrumentation, as well as by the response time of the instrumentation. This test method is not intended to be used for test components larger than 12.7-mm (1/2-in.) outside diameter nominal size. This test method could be applied to larger components; however, the stated volumetric flow rate may not provide adequate mixing to ensure a representative sample. Higher flow rates may improve the mixing but excessively dilute the sample.  
1.3.2 This test method is written with the assumption that the operator understands the use of the apparatus at a level equivalent to six months of experience.  
1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.  
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 5.

SIGNIFICANCE AND USE
4.1 This guide defines a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this guide is expected to yield comparable data among components tested for purposes of qualification for this installation.  
4.2 This guide establishes a procedure for determining the elemental composition and metallurgical characteristics of metal used to fabricate components for high purity gas distribution systems in the semiconductor industry. The composition and metallurgy of stainless steel may be expected to affect properties of importance to this application, including surface roughness, incidence of surface defects, passivation, corrosion resistance, and welding.
SCOPE
1.1 This guide covers corrosion resistant metallic alloys of the general class stainless steel, containing chromium, nickel, manganese, and silicon as major alloying additions and possibly molybdenum, that are qualified or specified for the materials of components used in high-purity gas supply systems for the semiconductor industry. This guide is primarily intended for testing to determine conformance to applicable composition and metallurgical specifications as stated in supplier product specifications or customer purchase specifications, or both.  
1.2 Elements analyzed and reported in this guide are as follows:  
1.2.1 The alloying additions chromium, nickel, and molybdenum (if specified in alloy, as in type 316L),  
1.2.2 The minor elements and residuals manganese, silicon, copper, cobalt, and stabilizers such as titanium and columbium (niobium), if present,  
1.2.3 Carbon, sulfur and phosphorus,  
1.2.4 Nitrogen and oxygen gases,  
1.2.5 Any additional minor element additions that may be made as part of the melting and casting practice, such as aluminum and calcium,  
1.2.6 Available standard analytical and reporting techniques are described for these elements.  
1.3 Metallurgical characteristics to be analyzed and reported are inclusion contents, grain structure, mechanical properties, and intergranular corrosion susceptibility.  
1.4 Limitations:  
1.4.1 This guide is limited to corrosion resistant metal alloys of the general class stated in the Scope.  
1.4.2 The test methods cited in this guide are not intended to preclude the use of other generally accepted techniques of demonstrated equivalent or superior precision and bias.  
1.4.3 Inclusion of testing and analysis procedures for any given element or metallurgical characteristic in this guide is not to be construed as being a requirement for incorporation of that element or metallurgical characteristic into any specifications.  
1.5 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.  
1.6 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

SIGNIFICANCE AND USE
3.1 This test method defines a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for purposes of qualification for this installation.
SCOPE
1.1 This test method covers a procedure for testing components for oxygen contribution to ultra-high purity gas distribution systems at ambient temperature. In addition, this test method allows testing of the component at elevated ambient temperatures as high as 70°C.  
1.2 This test method applies to in-line components containing electronics grade materials such as those used in a semiconductor gas distribution system.  
1.3 Limitations:  
1.3.1 This test method is limited by the sensitivity of current instrumentation, as well as the response time of the instrumentation. This test method is not intended to be used for test components larger than 12.7-mm (1/2-in.) outside diameter nominal size. This test method could be applied to larger components; however, the stated volumetric flow rate may not provide adequate mixing to ensure a representative sample. Higher flow rates may improve the mixing but excessively dilute the sample.  
1.3.2 This test method is written with the assumption that the operator understands the use of the apparatus at a level equivalent to six months of experience.  
1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.  
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 6.

SIGNIFICANCE AND USE
4.1 The purpose of this test method is to define a procedure for testing electropolished stainless steel components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for the purposes of qualification for this installation.  
FIG. 1 Ionic/Organic Contribution Data Table Illustration
FIG. 2 Ionic/Organic Contribution Data Table Illustration
SCOPE
1.1 This test method establishes a procedure for testing components used in ultra-high-purity gas distribution systems for ionic and organic surface residues.  
1.2 This test method applies to in-line components containing electronics grade materials in the gaseous form.  
1.3 Limitations:  
1.3.1 This test method is limited by the sensitivity of the detection instruments and by the available levels of purity in extracting solvents. While the ion and gas chromatographic methods are quantitative, the Fourier transform infrared spectroscopy (FTIR) method can be used as either a qualitative or a quantitative tool. In addition, the gas chromatography (GC) and FTIR methods are used to detect hydrocarbons and halogenated substances that remain as residues on component internal surfaces. This eliminates those materials with high vapor pressures, which are analyzed per the total hydrocarbons test, from this test method.  
1.3.2 This test method is intended for use by operators who understand the use of the apparatus at a level equivalent to twelve months of experience.  
1.4 The values stated in SI units are to be regarded as the standards. The inch-pound units given in parentheses are for information only.  
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 6.

SIGNIFICANCE AND USE
4.1 The purpose of this test method is to define a procedure for testing components intended for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for the purposes of qualification for this installation.  
4.2 Background Testing—This test method uses background testing to ensure that the system is not contributing particles above a low, acceptable level. This ensures that counts seen are from the test device, not from a contaminated system. The techniques used to obtain background counts do not produce conditions identical to the conditions existing when a test device is in place. It is recommended that the control products be run periodically to see that they give consistent results. These control products should be the lowest particle release products. They will be additional proof that the system is not contributing excess particles during the static, dynamic, or impact portions of the test.  
4.3 This test method can be used for testing lengths of tubing. The flow criteria will be identical to that indicated for valves. A tubing test would only include the static background, the impact background, and the static and impact portions of the method. A dynamic portion could be added by actuating the upstream pneumatic valve (PV1), thus creating a flow surge to the test length of tubing.
SCOPE
1.1 This test method covers gas distribution system components intended for installation into a high-purity gas distribution system.  
1.1.1 This test method describes a procedure designed to draw statistically significant comparisons of particulate generation performance of valves tested under aggressive conditions.  
1.1.2 This test method is not intended as a methodology for monitoring on-going particle performance once a particular valve has been tested.  
1.2 This test method utilizes a condensation nucleus counter (CNC) applied to in-line gas valves typically used in semiconductor applications. It applies to automatic and manual valves of various types (such as diaphragms or bellows), 6.3 through 12.7-mm (1/4 through 1/2-in.) size. For applications of this test method to larger valves, see the table in the appendix.  
1.2.1 Valves larger than 12.7 mm (1/2 in.) can be tested by this methodology. The test stand must be sized accordingly. Components larger than 12.7 mm (1/2 in.) should be tested while maintaining a Reynolds number of 20 000 to 21 000. This is the Reynolds number for 12.7-mm (1/2-in.) components tested at a velocity of 30.5 m/s (100 ft/s).  
1.3 Limitations:  
1.3.1 This test method is applicable to total particle count greater than the minimum detection limit (MDL) of the condensation nucleus particle counter and does not consider classifying data into various size ranges.
1.3.1.1 It is questionable whether significant data can be generated from nondynamic components (such as fittings and short lengths of tubing) to compare, with statistical significance, to the data generated from the spool piece. For this reason, this test method cannot reliably support comparisons between these types of components.
1.3.1.2 If detection or classification of particles, or both, in the size range of laser particle counter (LPC) technology is of interest, an LPC can be utilized for testing components. Flow rates, test times, sampling apparatus, and data analysis outlined in this test method do not apply for use with an LPC. Because of these variations, data from CNCs are not comparable to data from LPCs.  
1.3.2 This test method specifies flow and mechanical stress conditions in excess of those considered typical. These conditions should not exceed those recommended by the manufacturer. Actual performance under normal operating conditions may vary.  
1.3.3 The test method is limited to nitrogen or clean dry air. Performance with other gases may vary.  
1.3.4 This test method is intended ...

SIGNIFICANCE AND USE
4.1 The purpose of this test method is to define a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for purposes of qualification for this installation.
SCOPE
1.1 This test method covers the testing of interior surfaces of components such as tubing, fittings, and valves for surface morphology.  
1.2 This test method applies to all surfaces of tubing, connectors, regulators, valves, and any metal component, regardless of size.  
1.3 Limitations:  
1.3.1 This methodology assumes a SEM operator skill level typically achieved over a 12-month period.  
1.3.2 This test method shall be limited to the assessment of pits, stringer, tears, grooves, scratches, inclusions, stepped grain boundaries, and other surface anomalies. However, stains and particles that may be produced during specimen preparation should be excluded in the assessment of anomalies.  
1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.  
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 6.

SIGNIFICANCE AND USE
4.1 The purpose of this test method is to define a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for the purposes of qualification for this installation.
SCOPE
1.1 This test method covers the testing of automatic valves for cycle life utilizing static, no-flow conditions. This no-flow condition is felt to be a realistic test to determine the valve's cycle life.  
1.2 This test method applies to automatically operated valves. It is intended to measure the cycle life of the valve itself including the seat and body sealing. It does not include cycle testing of the actuator. Testing must include both pressure testing and helium leak testing and must include vacuum test conditions when appropriate. This test method may be applied to a broad range of valve sizes.  
1.3 Limitations:  
1.3.1 This test is not designed to evaluate the performance of the actuator. This test method addresses the gas system contamination aspects of the valve performance, that is, seat and body leakage and diaphragm or bellows failure. If the actuator fails during the evaluation, the valve is deemed as a failure.  
1.3.2 While the requirements of a valve's performance might include items such as particulate generation levels, this test method only attempts to evaluate cycle life and performance degradation as they relate to the ability of the valve to operate and shut off flow.  
1.3.3 This test method is written with the assumption that the operator understands the use of the apparatus at a level equivalent to six months of experience.  
1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.  
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 7.

SIGNIFICANCE AND USE
5.1 These test methods provide a field technique for the bacteriological analysis of electronic process waters. The sampling of these waters and subsequent bacteriological analysis may be critical to electronic product yields. Bacteria can be the prime source of harmful contamination which can significantly reduce the yield of satisfactory microelectronic device production.  
5.2 The test methods described here may be used both to monitor the bacteriological quality of water used in microelectronic product processing, and to locate the source of bacterial contamination in a water purification system.  
5.3 These test methods are simple field methods, combining sampling and bacteriological analysis techniques that do not require bacteriological laboratory facilities.  
5.4 The test methods described employ culture techniques for bacteriological analysis. The user should be aware that such techniques cannot provide a complete count of the total viable bacteria present, since clumps and clusters of bacteria will appear as one single colony when cultured, and since some viable bacteria will not grow under the test conditions used. However, a meaningful comparative bacteria count will be achieved by this method if the culturing of the sample is always done at the same temperature, and for the same period of time. The temperature of incubation should always be at 28 ± 2°C, and the period of incubation should be 48 h (or 72 h if time permits). The period of incubation and temperature should be the same for all comparative studies.
SCOPE
1.1 These test methods cover sampling and analysis of high purity water from water purification systems and water transmission systems by the direct sampling tap and filtration of the sample collected in the bag. These test methods cover both the sampling of water lines and the subsequent microbiological analysis of the sample by the culture technique. The microorganisms recovered from the water samples and counted on the filters include both aerobes and facultative anaerobes.  
1.2 Three methods are described as follows:    
Sections  
Test Method A—Sample Tap—Direct Filtration  
6 to 8  
Test Method B—Presterilized Plastic Bag Technique  
9 to 12  
Test Method B2 —Dip Strip Technique2/Presterilized Plastic Bag  
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use 2.

SIGNIFICANCE AND USE
3.1 The purpose of this test method is to define a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for purposes of qualification for this installation.
SCOPE
1.1 This test method covers the testing of components for total hydrocarbons (THC) contribution to a gas distribution system at ambient temperature. In addition, this test method allows testing of the component at elevated ambient temperatures as high as 70°C.  
1.2 This test method applies to in-line components containing electronics grade materials in the gaseous form, such as those used in semiconductor gas distribution systems.  
1.3 Limitations:  
1.3.1 This test method is limited by the sensitivity of current instrumentation, as well as by the response time of the instrumentation. This test method is not intended to be used for components larger than 12.7-mm (1/2-in.) outside diameter nominal size. This test method could be applied to larger components; however, the stated volumetric flow rate may not provide adequate mixing to ensure a representative sample. Higher flow rates may improve the mixing but excessively dilute the sample.  
1.3.2 Different instrumental methods (such as flame ionization detector (FID), mass spectrometer (MS)) will yield total hydrocarbon (THC) levels that are not comparable due to different sensitivities to different molecular species. Hydrocarbon contaminants of high-purity gas distribution systems can be subdivided into two general categories: ( 1) noncondensable hydrocarbons (4), that are present due to difficulty of removal and relative atmospheric abundance, and (2) condensable hydrocarbons, that are often left behind on component surfaces as residues. Condensable hydrocarbons include pump oils, degreasing agents, and polishing compound vehicles.  
1.3.3 Because of the tremendous disparity of hydrocarbon species, it is suggested that direct comparisons be made only among data gathered using the same detection method.  
1.3.4 This test method is intended for use by operators who understand the use of the apparatus at a level equivalent to six months of experience.  
1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.  
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 5.

SIGNIFICANCE AND USE
5.1 The use of STM images and data is for purposes of textural quality assessment and calculation of figures of merit, and for high purity gas system clean room components.  
5.2 This test method defines a standard data presentation format and suggests figures of merit that utilize STM's ability to analyze three-dimensional surface features.
SCOPE
1.1 The purpose of this test method is to define a method for analyzing the surface texture of the above-mentioned components using a scanning tunneling microscope (STM). STM is a noncontact method of surface profiling that can measure three-dimensional surface features in the nanometer size range, which can then be used to represent the surface texture or to provide figures of merit. Application of this test method, where surface texture is used as a selection criterion, is expected to yield comparable data among different components tested.  
1.2 Limitations:  
1.2.1 This test method is limited to characterization of stainless steel surfaces that are smoother than R a = 0.25 μm, as determined by a contact-stylus profilometer and defined by ANSI B46.1. The magnifications and height scales used in this test method were chosen with this smoothness in mind.  
1.2.2 Intentional etching or conductive coating of the surface are considered modifications of the gas-wetted surface and are not covered by this test method.  
1.2.3 This test method does not cover steels that have an oxide layer too thick to permit tunneling under the test conditions outlined in 11.3.  
1.3 This technique is written with the assumption that the STM operator understands the use of the instrument, its governing principles, and any artifacts that can arise. Discussion of these points is beyond the scope of this test method.  
1.4 The values stated in SI units are to be regarded as the standard.  
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

SIGNIFICANCE AND USE
The purpose of this test method is to define a procedure for testing components intended for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for the purposes of qualification for this installation.
Background Testing—This test method uses background testing to ensure that the system is not contributing particles above a low, acceptable level. This ensures that counts seen are from the test device, not from a contaminated system. The techniques used to obtain background counts do not produce conditions identical to the conditions existing when a test device is in place. It is recommended that the control products be run periodically to see that they give consistent results. These control products should be the lowest particle release products. They will be additional proof that the system is not contributing excess particles during the static, dynamic, or impact portions of the test.
This test method can be used for testing lengths of tubing. The flow criteria will be identical to that indicated for valves. A tubing test would only include the static background, the impact background, and the static and impact portions of the method. A dynamic portion could be added by actuating the upstream pneumatic valve (PV1), thus creating a flow surge to the test length of tubing.
SCOPE
1.1 This test method covers gas distribution system components intended for installation into a high-purity gas distribution system.
1.1.2 This test method describes a procedure designed to draw statistically significant comparisons of particulate generation performance of valves tested under aggressive conditions.
1.1.3 This test method is not intended as a methodology for monitoring on-going particle performance once a particular valve has been tested.
1.2 This test method utilizes a condensation nucleus counter (CNC) applied to in-line gas valves typically used in semiconductor applications. It applies to automatic and manual valves of various types (such as diaphragms or bellows), 6.3 through 12.7-mm ( 1/4 through 1/2-in.) size. For applications of this test method to larger valves, see the table in the appendix.
1.2.1 Valves larger than 12.7 mm ( 1/2 in.) can be tested by this methodology. The test stand must be sized accordingly. Components larger than 12.7 mm ( 1/2 in.) should be tested while maintaining a Reynolds number of 20000 to 21000. This is the Reynolds number for 12.7-mm ( 1/2-in.) components tested at a velocity of 30.5 m/s (100 ft/s).
1.3 Limitations:  
1.3.1 This test method is applicable to total particle count greater than the minimum detection limit (MDL) of the condensation nucleus particle counter and does not consider classifying data into various size ranges.
1.3.1.1 It is questionable whether significant data can be generated from nondynamic components (such as fittings and short lengths of tubing) to compare, with statistical significance, to the data generated from the spool piece. For this reason, this test method cannot reliably support comparisons between these types of components.
1.3.1.2 If detection or classification of particles, or both, in the size range of laser particle counter (LPC) technology is of interest, an LPC can be utilized for testing components. Flow rates, test times, sampling apparatus, and data analysis outlined in this test method do not apply for use with an LPC. Because of these variations, data from CNCs are not comparable to data from LPCs.
1.3.2 This test method specifies flow and mechanical stress conditions in excess of those considered typical. These conditions should not exceed those recommended by the manufacturer. Actual performance under normal operating conditions may vary.
1.3.3 The test method is limited to nitrogen or clean dry air. Performance with other gases may vary.
1.3.4 This test method is intended for use by operators ...

SIGNIFICANCE AND USE
The purpose of this test method is to define a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for purposes of qualification for this installation.
SCOPE
1.1 This test method covers the testing of components for total hydrocarbons (THC) contribution to a gas distribution system at ambient temperature. In addition, this test method allows testing of the component at elevated ambient temperatures as high as 70°C.
1.2 This test method applies to in-line components containing electronics grade materials in the gaseous form, such as those used in semiconductor gas distribution systems.
1.3 Limitations:  
1.3.1 This test method is limited by the sensitivity of current instrumentation, as well as by the response time of the instrumentation. This test method is not intended to be used for components larger than 12.7-mm ( 1/2-in.) outside diameter nominal size. This test method could be applied to larger components; however, the stated volumetric flow rate may not provide adequate mixing to ensure a representative sample. Higher flow rates may improve the mixing but excessively dilute the sample.
1.3.2 Different instrumental methods (such as flame ionization detector (FID), mass spectrometer (MS)) will yield total hydrocarbon (THC) levels that are not comparable due to different sensitivities to different molecular species. Hydrocarbon contaminants of high-purity gas distribution systems can be subdivided into two general categories: (1) noncondensable hydrocarbons (
1.3.3 Because of the tremendous disparity of hydrocarbon species, it is suggested that direct comparisons be made only among data gathered using the same detection method.
1.3.4 This test method is intended for use by operators who understand the use of the apparatus at a level equivalent to six months of experience.
1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.
1.5 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 6.

SIGNIFICANCE AND USE
This test method defines a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for purposes of qualification for this installation.
SCOPE
1.1 This test method covers a procedure for testing components for oxygen contribution to ultra-high purity gas distribution systems at ambient temperature. In addition, this test method allows testing of the component at elevated ambient temperatures as high as 70°C.
1.2 This test method applies to in-line components containing electronics grade materials such as those used in a semiconductor gas distribution system.
1.3 Limitations:  
1.3.1 This test method is limited by the sensitivity of current instrumentation, as well as the response time of the instrumentation. This test method is not intended to be used for test components larger than 12.7-mm ( 1/2-in.) outside diameter nominal size. This test method could be applied to larger components; however, the stated volumetric flow rate may not provide adequate mixing to ensure a representative sample. Higher flow rates may improve the mixing but excessively dilute the sample.
1.3.2 This test method is written with the assumption that the operator understands the use of the apparatus at a level equivalent to six months of experience.
1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.
1.5 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 6.

SIGNIFICANCE AND USE
This guide defines a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this guide is expected to yield comparable data among components tested for purposes of qualification for this installation.
This guide establishes a procedure for determining the elemental composition and metallurgical characteristics of metal used to fabricate components for high purity gas distribution systems in the semiconductor industry. The composition and metallurgy of stainless steel may be expected to affect properties of importance to this application, including surface roughness, incidence of surface defects, passivation, corrosion resistance, and welding.
SCOPE
1.1 This guide covers corrosion resistant metallic alloys of the general class stainless steel, containing chromium, nickel, manganese, and silicon as major alloying additions and possibly molybdenum, that are qualified or specified for the materials of components used in high-purity gas supply systems for the semiconductor industry. This guide is primarily intended for testing to determine conformance to applicable composition and metallurgical specifications as stated in supplier product specifications or customer purchase specifications, or both.
1.2 Elements analyzed and reported in this guide are as follows:
1.2.1 The alloying additions chromium, nickel, and molybdenum (if specified in alloy, as in type 316L),
1.2.2 The minor elements and residuals manganese, silicon, copper, cobalt, and stabilizers such as titanium and columbium (niobium), if present,
1.2.3 Carbon, sulfur and phosphorus,
1.2.4 Nitrogen and oxygen gases,
1.2.5 Any additional minor element additions that may be made as part of the melting and casting practice, such as aluminum and calcium, and
1.2.6 Available standard analytical and reporting techniques are described for these elements.
1.3 Metallurgical characteristics to be analyzed and reported are inclusion contents, grain structure, mechanical properties, and intergranular corrosion susceptibility.
1.4 Limitations:  
1.4.1 This guide is limited to corrosion resistant metal alloys of the general class stated in the Scope.
1.4.2 The test methods cited in this guide are not intended to preclude the use of other generally accepted techniques of demonstrated equivalent or superior precision and bias.
1.4.3 Inclusion of testing and analysis procedures for any given element or metallurgical characteristic in this guide is not to be construed as being a requirement for incorporation of that element or metallurgical characteristic into any specifications.
1.5 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.
1.6 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

SCOPE
1.1 This guide covers corrosion resistant metallic alloys of the general class stainless steel, containing chromium, nickel, manganese, and silicon as major alloying additions and possibly molybdenum, that are qualified or specified for the materials of components used in high-purity gas supply systems for the semiconductor industry. This guide is primarily intended for testing to determine conformance to applicable composition and metallurgical specifications as stated in supplier product specifications or customer purchase specifications, or both.
1.2 Elements analyzed and reported in this guide are as follows:
1.2.1 The alloying additions chromium, nickel, and molybdenum (if specified in alloy, as in type 316L),
1.2.2 The minor elements and residuals manganese, silicon, copper, cobalt, and stabilizers such as titanium and columbium (niobium), if present,
1.2.3 Carbon, sulfur and phosphorus,
1.2.4 Nitrogen and oxygen gases,
1.2.5 Any additional minor element additions that may be made as part of the melting and casting practice, such as aluminum and calcium, and
1.2.6 Available standard analytical and reporting techniques are described for these elements.
1.3 Metallurgical characteristics to be analyzed and reported are inclusion contents, grain structure, mechanical properties, and intergranular corrosion susceptibility.
1.4 Limitations:  
1.4.1 This guide is limited to corrosion resistant metal alloys of the general class stated in the Scope.
1.4.2 The test methods cited in this guide are not intended to preclude the use of other generally accepted techniques of demonstrated equivalent or superior precision and bias.
1.4.3 Inclusion of testing and analysis procedures for any given element or metallurgical characteristic in this guide is not to be construed as being a requirement for incorporation of that element or metallurgical characteristic into any specifications.
1.5 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.
1.6 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

SIGNIFICANCE AND USE
The purpose of this test method is to define a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for purposes of qualification for this installation.
SCOPE
1.1 This test method covers the testing of interior surfaces of components such as tubing, fittings, and valves for surface morphology.
1.2 This test method applies to all surfaces of tubing, connectors, regulators, valves, and any metal component, regardless of size.
1.3 Limitations:  
1.3.1 This methodology assumes a SEM operator skill level typically achieved over a 12-month period.
1.3.2 This test method shall be limited to the assessment of pits, stringer, tears, grooves, scratches, inclusions, stepped grain boundaries, and other surface anomalies. However, stains and particles that may be produced during specimen preparation should be excluded in the assessment of anomalies.
1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.
1.5 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 6.

SCOPE
1.1 This test method covers a procedure for testing components for oxygen contribution to ultra-high purity gas distribution systems at ambient temperature. In addition, this test method allows testing of the component at elevated ambient temperatures as high as 70°C.
1.2 This test method applies to in-line components containing electronics grade materials such as those used in a semiconductor gas distribution system.
1.3 Limitations:  
1.3.1 This test method is limited by the sensitivity of current instrumentation, as well as the response time of the instrumentation. This test method is not intended to be used for test components larger than 12.7-mm ( 1/2-in.) outside diameter nominal size. This test method could be applied to larger components; however, the stated volumetric flow rate may not provide adequate mixing to ensure a representative sample. Higher flow rates may improve the mixing but excessively dilute the sample.
1.3.2 This test method is written with the assumption that the operator understands the use of the apparatus at a level equivalent to six months of experience.
1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.
1.5 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 6.

SIGNIFICANCE AND USE
The purpose of this test method is to define a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for purposes of qualification for this installation.
SCOPE
1.1 This test method establishes a procedure for comparing the elemental composition of normal surfaces with any defects found on the surfaces of metal tubing, fittings, valves, or any metal component.
1.2 This test method applies to all steel surfaces of components such as tubing, connectors, regulators, and valves, regardless of size, style, or type.
1.3 Limitations:  
1.3.1 This test method is intended for use by scanning electron microscope/energy dispersive x-ray spectrometer (SEM/EDX) operators with skill level typically achieved over a twelve-month period.
1.3.2 SEM used for this study should conform to those limitations outlined in Test Method F1372 and should have a minimum point-to-point resolution of 30 nm.
1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.
1.5 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 6.

SCOPE
1.1 This test method establishes a procedure for testing components used in ultra-high-purity gas distribution systems for ionic and organic surface residues.
1.2 This test method applies to in-line components containing electronics grade materials in the gaseous form.
1.3 Limitations:  
1.3.1 This test method is limited by the sensitivity of the detection instruments and by the available levels of purity in extracting solvents. While the ion and gas chromatographic methods are quantitative, the Fourier transform infrared spectroscopy (FTIR) method can be used as either a qualitative or a quantitative tool. In addition, the gas chromatography (GC) and FTIR methods are used to detect hydrocarbons and halogenated substances that remain as residues on component internal surfaces. This eliminates those materials with high vapor pressures, which are analyzed per the total hydrocarbons test, from this test method.
1.3.2 This test method is intended for use by operators who understand the use of the apparatus at a level equivalent to twelve months of experience.
1.4 The values stated in SI units are to be regarded as the standards. The inch-pound units given in parentheses are for information only.
1.5 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 6.

SIGNIFICANCE AND USE
The purpose of this test method is to define a procedure for testing electropolished stainless steel components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for the purposes of qualification for this installation.
FIG. 1 Ionic/Organic Contribution Data Table Illustration
FIG. 2 Ionic/Organic Contribution Data Table Illustration
SCOPE
1.1 This test method establishes a procedure for testing components used in ultra-high-purity gas distribution systems for ionic and organic surface residues.
1.2 This test method applies to in-line components containing electronics grade materials in the gaseous form.
1.3 Limitations:  
1.3.1 This test method is limited by the sensitivity of the detection instruments and by the available levels of purity in extracting solvents. While the ion and gas chromatographic methods are quantitative, the Fourier transform infrared spectroscopy (FTIR) method can be used as either a qualitative or a quantitative tool. In addition, the gas chromatography (GC) and FTIR methods are used to detect hydrocarbons and halogenated substances that remain as residues on component internal surfaces. This eliminates those materials with high vapor pressures, which are analyzed per the total hydrocarbons test, from this test method.
1.3.2 This test method is intended for use by operators who understand the use of the apparatus at a level equivalent to twelve months of experience.
1.4 The values stated in SI units are to be regarded as the standards. The inch-pound units given in parentheses are for information only.
1.5 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 6.

SIGNIFICANCE AND USE
The purpose of this test method is to define a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for the purposes of qualification for this installation.
SCOPE
1.1 This test method covers testing components for total moisture contribution to a gas distribution system at ambient temperature. In addition, the test method allows testing at elevated ambient temperatures as high as 70°C and of the component moisture capacity and recovery.
1.2 This test method applies to in-line components containing electronics grade materials such as those used in semiconductor gas distribution systems.
1.3 Limitations:  
1.3.1 This test method is limited by the sensitivity of current instrumentation, as well as by the response time of the instrumentation. This test method is not intended to be used for test components larger than 12.7-mm ( 1/2-in.) outside diameter nominal size. This test method could be applied to larger components; however, the stated volumetric flow rate may not provide adequate mixing to ensure a representative sample. Higher flow rates may improve the mixing but excessively dilute the sample.
1.3.2 This test method is written with the assumption that the operator understands the use of the apparatus at a level equivalent to six months of experience.
1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.
1.5 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 5.

SCOPE
1.1 This test method covers the testing of components for total hydrocarbons (THC) contribution to a gas distribution system at ambient temperature. In addition, this test method allows testing of the component at elevated ambient temperatures as high as 70°C.
1.2 This test method applies to in-line components containing electronics grade materials in the gaseous form, such as those used in semiconductor gas distribution systems.
1.3 Limitations:  
1.3.1 This test method is limited by the sensitivity of current instrumentation, as well as by the response time of the instrumentation. This test method is not intended to be used for components larger than 12.7-mm ( 1/2-in.) outside diameter nominal size. This test method could be applied to larger components; however, the stated volumetric flow rate may not provide adequate mixing to ensure a representative sample. Higher flow rates may improve the mixing but excessively dilute the sample.
1.3.2 Different instrumental methods (such as flame ionization detector (FID), mass spectrometer (MS)) will yield total hydrocarbon (THC) levels that are not comparable due to different sensitivities to different molecular species. Hydrocarbon contaminants of high-purity gas distribution systems can be subdivided into two general categories: (1) noncondensable hydrocarbons (
1.3.3 Because of the tremendous disparity of hydrocarbon species, it is suggested that direct comparisons be made only among data gathered using the same detection method.
1.3.4 This test method is intended for use by operators who understand the use of the apparatus at a level equivalent to six months of experience.
1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.
1.5 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 6.

SIGNIFICANCE AND USE
These test methods provide a field technique for the bacteriological analysis of electronic process waters. The sampling of these waters and subsequent bacteriological analysis may be critical to electronic product yields. Bacteria can be the prime source of harmful contamination which can significantly reduce the yield of satisfactory microelectronic device production.
The test methods described here may be used both to monitor the bacteriological quality of water used in microelectronic product processing, and to locate the source of bacterial contamination in a water purification system.
These test methods are simple field methods, combining sampling and bacteriological analysis techniques that do not require bacteriological laboratory facilities.
The test methods described employ culture techniques for bacteriological analysis. The user should be aware that such techniques cannot provide a complete count of the total viable bacteria present, since clumps and clusters of bacteria will appear as one single colony when cultured, and since some viable bacteria will not grow under the test conditions used. However, a meaningful comparative bacteria count will be achieved by this method if the culturing of the sample is always done at the same temperature, and for the same period of time. The temperature of incubation should always be at 28 ± 2°C, and the period of incubation should be 48 h (or 72 h if time permits). The period of incubation and temperature should be the same for all comparative studies.
SCOPE
1.1 These test methods cover sampling and analysis of high purity water from water purification systems and water transmission systems by the direct sampling tap and filtration of the sample collected in the bag. These test methods cover both the sampling of water lines and the subsequent microbiological analysis of the sample by the culture technique. The microorganisms recovered from the water samples and counted on the filters include both aerobes and facultative anaerobes.
1.2 Three methods are described as follows: SectionsTest Method A--Sample Tap-Direct Filtration6 to 8Test Method B--Presterilized Plastic Bag Technique9 to 12Test Method B2--Dip Strip Technique2/Presterilized Plastic Bag
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use .

SCOPE
1.1 This test method covers the testing of automatic valves for cycle life utilizing static, no-flow conditions. This no-flow condition is felt to be a realistic test to determine the valve's cycle life.
1.2 This test method applies to automatically operated valves. It is intended to measure the cycle life of the valve itself including the seat and body sealing. It does not include cycle testing of the actuator. Testing must include both pressure testing and helium leak testing and must include vacuum test conditions when appropriate. This test method may be applied to a broad range of valve sizes.
1.3 Limitations:  
1.3.1 This test is not designed to evaluate the performance of the actuator. This test method addresses the gas system contamination aspects of the valve performance, that is, seat and body leakage and diaphragm or bellows failure. If the actuator fails during the evaluation, the valve is deemed as a failure.
1.3.2 While the requirements of a valve's performance might include items such as particulate generation levels, this test method only attempts to evaluate cycle life and performance degradation as they relate to the ability of the valve to operate and shut off flow.
1.3.3 This test method is written with the assumption that the operator understands the use of the apparatus at a level equivalent to six months of experience.
1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.
1.5 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 7.

SIGNIFICANCE AND USE
The use of STM images and data is for purposes of textural quality assessment and calculation of figures of merit, and for high purity gas system clean room components.
This test method defines a standard data presentation format and suggests figures of merit that utilize STM’ability to analyze three-dimensional surface features.
SCOPE
1.1 The purpose of this test method is to define a method for analyzing the surface texture of the above-mentioned components using a scanning tunneling microscope (STM). STM is a noncontact method of surface profiling that can measure three-dimensional surface features in the nanometer size range, which can then be used to represent the surface texture or to provide figures of merit. Application of this test method, where surface texture is used as a selection criterion, is expected to yield comparable data among different components tested.
1.2 Limitations:  
1.2.1 This test method is limited to characterization of stainless steel surfaces that are smoother than Ra = 0.25 [mu]m, as determined by a contact-stylus profilometer and defined by ANSI B46.1. The magnifications and height scales used in this test method were chosen with this smoothness in mind.
1.2.2 Intentional etching or conductive coating of the surface are considered modifications of the gas-wetted surface and are not covered by this test method.
1.2.3 This test method does not cover steels that have an oxide layer too thick to permit tunneling under the test conditions outlined in 11.3.
1.3 This technique is written with the assumption that the STM operator understands the use of the instrument, its governing principles, and any artifacts that can arise. Discussion of these points is beyond the scope of this test method.
1.4 The values stated in SI units are to be regarded as the standard.
1.5 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

SCOPE
1.1 This test method establishes a procedure for comparing the elemental composition of normal surfaces with any defects found on the surfaces of metal tubing, fittings, valves, or any metal component.
1.2 This test method applies to all steel surfaces of components such as tubing, connectors, regulators, and valves, regardless of size, style, or type.
1.3 Limitations:  
1.3.1 This test method is intended for use by scanning electron microscope/energy dispersive x-ray spectrometer (SEM/EDX) operators with skill level typically achieved over a twelve-month period.
1.3.2 SEM used for this study should conform to those limitations outlined in Test Method F1372 and should have a minimum point-to-point resolution of 30 nm.
1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.
1.5 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 6.

SCOPE
1.1 This test method covers gas distribution system components intended for installation into a high-purity gas distribution system.
1.1.2 This test method describes a procedure designed to draw statistically significant comparisons of particulate generation performance of valves tested under aggressive conditions.
1.1.3 This test method is not intended as a methodology for monitoring on-going particle performance once a particular valve has been tested.
1.2 This test method utilizes a condensation nucleus counter (CNC) applied to in-line gas valves typically used in semiconductor applications. It applies to automatic and manual valves of various types (such as diaphragms or bellows), 6.3 through 12.7-mm ( 1/4 through 1/2-in.) size. For applications of this test method to larger valves, see the table in the appendix.
1.2.1 Valves larger than 12.7 mm ( 1/2 in.) can be tested by this methodology. The test stand must be sized accordingly. Components larger than 12.7 mm ( 1/2 in.) should be tested while maintaining a Reynolds number of 20000 to 21000. This is the Reynolds number for 12.7-mm ( 1/2-in.) components tested at a velocity of 30.5 m/s (100 ft/s).
1.3 Limitations:  
1.3.1 This test method is applicable to total particle count greater than the minimum detection limit (MDL) of the condensation nucleus particle counter and does not consider classifying data into various size ranges.
1.3.1.1 It is questionable whether significant data can be generated from nondynamic components (such as fittings and short lengths of tubing) to compare, with statistical significance, to the data generated from the spool piece. For this reason, this test method cannot reliably support comparisons between these types of components.
1.3.1.2 If detection or classification of particles, or both, in the size range of laser particle counter (LPC) technology is of interest, an LPC can be utilized for testing components. Flow rates, test times, sampling apparatus, and data analysis outlined in this test method do not apply for use with an LPC. Because of these variations, data from CNCs are not comparable to data from LPCs.
1.3.2 This test method specifies flow and mechanical stress conditions in excess of those considered typical. These conditions should not exceed those recommended by the manufacturer. Actual performance under normal operating conditions may vary.
1.3.3 The test method is limited to nitrogen or clean dry air. Performance with other gases may vary.
1.3.4 This test method is intended for use by operators who understand the use of the apparatus at a level equivalent to six months of experience.
1.3.5 The appropriate particle counter manufacturer's operating and maintenance manuals should be consulted when using this test method.
1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.
1.5 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 6, Hazards.

SIGNIFICANCE AND USE
The purpose of this test method is to define a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for the purposes of qualification for this installation.
SCOPE
1.1 This test method covers the testing of automatic valves for cycle life utilizing static, no-flow conditions. This no-flow condition is felt to be a realistic test to determine the valve's cycle life.
1.2 This test method applies to automatically operated valves. It is intended to measure the cycle life of the valve itself including the seat and body sealing. It does not include cycle testing of the actuator. Testing must include both pressure testing and helium leak testing and must include vacuum test conditions when appropriate. This test method may be applied to a broad range of valve sizes.
1.3 Limitations:  
1.3.1 This test is not designed to evaluate the performance of the actuator. This test method addresses the gas system contamination aspects of the valve performance, that is, seat and body leakage and diaphragm or bellows failure. If the actuator fails during the evaluation, the valve is deemed as a failure.
1.3.2 While the requirements of a valve's performance might include items such as particulate generation levels, this test method only attempts to evaluate cycle life and performance degradation as they relate to the ability of the valve to operate and shut off flow.
1.3.3 This test method is written with the assumption that the operator understands the use of the apparatus at a level equivalent to six months of experience.
1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.
1.5 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 7.

SCOPE
1.1 These test methods cover sampling and analysis of high purity water from water purification systems and water transmission systems by the direct sampling tap and filtration of the sample collected in the bag. These test methods cover both the sampling of water lines and the subsequent microbiological analysis of the sample by the culture technique. The microorganisms recovered from the water samples and counted on the filters include both aerobes and facultative anaerobes.
1.2 Three methods are described as follows: SectionsTest Method A--Sample Tap-Direct Filtration6 to 8Test Method B--Presterilized Plastic Bag Technique9 to 12Test Method B2--Dip Strip Technique2/Presterilized Plastic Bag
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use .

SCOPE
1.1 This test method covers the testing of interior surfaces of components such as tubing, fittings, and valves for surface morphology.
1.2 This test method applies to all surfaces of tubing, connectors, regulators, valves, and any metal component, regardless of size.
1.3 Limitations:  
1.3.1 This methodology assumes a SEM operator skill level typically achieved over a 12-month period.
1.3.2 This test method shall be limited to the assessment of pits, stringer, tears, grooves, scratches, inclusions, stepped grain boundaries, and other surface anomalies. However, stains and particles that may be produced during specimen preparation should be excluded in the assessment of anomalies.
1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.
1.5 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 6.

SCOPE
1.1 The purpose of this test method is to define a method for analyzing the surface texture of the above-mentioned components using a scanning tunneling microscope (STM). STM is a noncontact method of surface profiling that can measure three-dimensional surface features in the nanometer size range, which can then be used to represent the surface texture or to provide figures of merit. Application of this test method, where surface texture is used as a selection criterion, is expected to yield comparable data among different components tested.
1.2 Limitations:  
1.2.1 This test method is limited to characterization of stainless steel surfaces that are smoother than Ra = 0.25 [mu]m, as determined by a contact-stylus profilometer and defined by ANSI B46.1. The magnifications and height scales used in this test method were chosen with this smoothness in mind.
1.2.2 Intentional etching or conductive coating of the surface are considered modifications of the gas-wetted surface and are not covered by this test method.
1.2.3 This test method does not cover steels that have an oxide layer too thick to permit tunneling under the test conditions outlined in 11.3.
1.3 This technique is written with the assumption that the STM operator understands the use of the instrument, its governing principles, and any artifacts that can arise. Discussion of these points is beyond the scope of this test method.
1.4 The values stated in SI units are to be regarded as the standard.
1.5 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

SCOPE
1.1 This test method covers testing components for total moisture contribution to a gas distribution system at ambient temperature. In addition, the test method allows testing at elevated ambient temperatures as high as 70°C and of the component moisture capacity and recovery.
1.2 This test method applies to in-line components containing electronics grade materials such as those used in semiconductor gas distribution systems.
1.3 Limitations:  
1.3.1 This test method is limited by the sensitivity of current instrumentation, as well as by the response time of the instrumentation. This test method is not intended to be used for test components larger than 12.7-mm ( 1/2-in.) outside diameter nominal size. This test method could be applied to larger components; however, the stated volumetric flow rate may not provide adequate mixing to ensure a representative sample. Higher flow rates may improve the mixing but excessively dilute the sample.
1.3.2 This test method is written with the assumption that the operator understands the use of the apparatus at a level equivalent to six months of experience.
1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.
1.5 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 5.

SIGNIFICANCE AND USE
4.1 The purpose of this test method is to define a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for the purposes of qualification for this installation.
SCOPE
1.1 This test method covers the testing of automatic valves for cycle life utilizing static, no-flow conditions. This no-flow condition is felt to be a realistic test to determine the valve's cycle life.  
1.2 This test method applies to automatically operated valves. It is intended to measure the cycle life of the valve itself including the seat and body sealing. It does not include cycle testing of the actuator. Testing must include both pressure testing and helium leak testing and must include vacuum test conditions when appropriate. This test method may be applied to a broad range of valve sizes.  
1.3 Limitations:  
1.3.1 This test is not designed to evaluate the performance of the actuator. This test method addresses the gas system contamination aspects of the valve performance, that is, seat and body leakage and diaphragm or bellows failure. If the actuator fails during the evaluation, the valve is deemed as a failure.  
1.3.2 While the requirements of a valve's performance might include items such as particulate generation levels, this test method only attempts to evaluate cycle life and performance degradation as they relate to the ability of the valve to operate and shut off flow.  
1.3.3 This test method is written with the assumption that the operator understands the use of the apparatus at a level equivalent to six months of experience.  
1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.  
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 7.  
1.6 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
WITHDRAWN RATIONALE
This test method covers the testing of automatic valves for cycle life utilizing static, no-flow conditions. This no-flow condition is felt to be a realistic test to determine the valve's cycle life.
Formerly under the jurisdiction of Committee F01 on Electronics, this test method was withdrawn in November 2023. This standard is being withdrawn without replacement because Committee F01 was disbanded.

SIGNIFICANCE AND USE
4.1 The purpose of this test method is to define a procedure for testing electropolished stainless steel components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for the purposes of qualification for this installation.  
FIG. 1 Ionic/Organic Contribution Data Table Illustration  
FIG. 2 Ionic/Organic Contribution Data Table Illustration
SCOPE
1.1 This test method establishes a procedure for testing components used in ultra-high-purity gas distribution systems for ionic and organic surface residues.  
1.2 This test method applies to in-line components containing electronics grade materials in the gaseous form.  
1.3 Limitations:  
1.3.1 This test method is limited by the sensitivity of the detection instruments and by the available levels of purity in extracting solvents. While the ion and gas chromatographic methods are quantitative, the Fourier transform infrared spectroscopy (FTIR) method can be used as either a qualitative or a quantitative tool. In addition, the gas chromatography (GC) and FTIR methods are used to detect hydrocarbons and halogenated substances that remain as residues on component internal surfaces. This eliminates those materials with high vapor pressures, which are analyzed per the total hydrocarbons test, from this test method.  
1.3.2 This test method is intended for use by operators who understand the use of the apparatus at a level equivalent to twelve months of experience.  
1.4 The values stated in SI units are to be regarded as the standards. The inch-pound units given in parentheses are for information only.  
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 6.  
1.6 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
WITHDRAWN RATIONALE
This test method establishes a procedure for testing components used in ultra-high-purity gas distribution systems for ionic and organic surface residues.
Formerly under the jurisdiction of Committee F01 on Electronics, this test method was withdrawn in November 2023. This standard is being withdrawn without replacement because Committee F01 was disbanded.

SIGNIFICANCE AND USE
4.1 The purpose of this test method is to define a procedure for testing components intended for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for the purposes of qualification for this installation.  
4.2 Background Testing—This test method uses background testing to ensure that the system is not contributing particles above a low, acceptable level. This ensures that counts seen are from the test device, not from a contaminated system. The techniques used to obtain background counts do not produce conditions identical to the conditions existing when a test device is in place. It is recommended that the control products be run periodically to see that they give consistent results. These control products should be the lowest particle release products. They will be additional proof that the system is not contributing excess particles during the static, dynamic, or impact portions of the test.  
4.3 This test method can be used for testing lengths of tubing. The flow criteria will be identical to that indicated for valves. A tubing test would only include the static background, the impact background, and the static and impact portions of the method. A dynamic portion could be added by actuating the upstream pneumatic valve (PV1), thus creating a flow surge to the test length of tubing.
SCOPE
1.1 This test method covers gas distribution system components intended for installation into a high-purity gas distribution system.  
1.1.1 This test method describes a procedure designed to draw statistically significant comparisons of particulate generation performance of valves tested under aggressive conditions.  
1.1.2 This test method is not intended as a methodology for monitoring on-going particle performance once a particular valve has been tested.  
1.2 This test method utilizes a condensation nucleus counter (CNC) applied to in-line gas valves typically used in semiconductor applications. It applies to automatic and manual valves of various types (such as diaphragms or bellows), 6.3 through 12.7-mm (1/4 through 1/2-in.) size. For applications of this test method to larger valves, see the table in the appendix.  
1.2.1 Valves larger than 12.7 mm (1/2 in.) can be tested by this methodology. The test stand must be sized accordingly. Components larger than 12.7 mm (1/2 in.) should be tested while maintaining a Reynolds number of 20 000 to 21 000. This is the Reynolds number for 12.7-mm (1/2-in.) components tested at a velocity of 30.5 m/s (100 ft/s).  
1.3 Limitations:  
1.3.1 This test method is applicable to total particle count greater than the minimum detection limit (MDL) of the condensation nucleus particle counter and does not consider classifying data into various size ranges.
1.3.1.1 It is questionable whether significant data can be generated from nondynamic components (such as fittings and short lengths of tubing) to compare, with statistical significance, to the data generated from the spool piece. For this reason, this test method cannot reliably support comparisons between these types of components.
1.3.1.2 If detection or classification of particles, or both, in the size range of laser particle counter (LPC) technology is of interest, an LPC can be utilized for testing components. Flow rates, test times, sampling apparatus, and data analysis outlined in this test method do not apply for use with an LPC. Because of these variations, data from CNCs are not comparable to data from LPCs.  
1.3.2 This test method specifies flow and mechanical stress conditions in excess of those considered typical. These conditions should not exceed those recommended by the manufacturer. Actual performance under normal operating conditions may vary.  
1.3.3 The test method is limited to nitrogen or clean dry air. Performance with other gases may vary.  
1.3.4 This test method is intended...

SIGNIFICANCE AND USE
3.1 The purpose of this test method is to define a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for purposes of qualification for this installation.
SCOPE
1.1 This test method covers the testing of components for total hydrocarbons (THC) contribution to a gas distribution system at ambient temperature. In addition, this test method allows testing of the component at elevated ambient temperatures as high as 70°C.  
1.2 This test method applies to in-line components containing electronics grade materials in the gaseous form, such as those used in semiconductor gas distribution systems.  
1.3 Limitations:  
1.3.1 This test method is limited by the sensitivity of current instrumentation, as well as by the response time of the instrumentation. This test method is not intended to be used for components larger than 12.7-mm (1/2-in.) outside diameter nominal size. This test method could be applied to larger components; however, the stated volumetric flow rate may not provide adequate mixing to ensure a representative sample. Higher flow rates may improve the mixing but excessively dilute the sample.  
1.3.2 Different instrumental methods (such as flame ionization detector (FID), mass spectrometer (MS)) will yield total hydrocarbon (THC) levels that are not comparable due to different sensitivities to different molecular species. Hydrocarbon contaminants of high-purity gas distribution systems can be subdivided into two general categories: (1) noncondensable hydrocarbons (4), that are present due to difficulty of removal and relative atmospheric abundance, and (2) condensable hydrocarbons, that are often left behind on component surfaces as residues. Condensable hydrocarbons include pump oils, degreasing agents, and polishing compound vehicles.  
1.3.3 Because of the tremendous disparity of hydrocarbon species, it is suggested that direct comparisons be made only among data gathered using the same detection method.  
1.3.4 This test method is intended for use by operators who understand the use of the apparatus at a level equivalent to six months of experience.  
1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.  
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 5.  
1.6 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
WITHDRAWN RATIONALE
This test method covers the testing of components for total hydrocarbons (THC) contribution to a gas distribution system at ambient temperature. In addition, this test method allows testing of the component at elevated ambient temperatures as high as 70°C.
Formerly under the jurisdiction of Committee F01 on Electronics, this test method was withdrawn in November 2023. This standard is being withdrawn without replacement because Committee F01 was disbanded.

SIGNIFICANCE AND USE
5.1 The use of STM images and data is for purposes of textural quality assessment and calculation of figures of merit, and for high purity gas system clean room components.  
5.2 This test method defines a standard data presentation format and suggests figures of merit that utilize STM's ability to analyze three-dimensional surface features.
SCOPE
1.1 The purpose of this test method is to define a method for analyzing the surface texture of the above-mentioned components using a scanning tunneling microscope (STM). STM is a noncontact method of surface profiling that can measure three-dimensional surface features in the nanometer size range, which can then be used to represent the surface texture or to provide figures of merit. Application of this test method, where surface texture is used as a selection criterion, is expected to yield comparable data among different components tested.  
1.2 Limitations:  
1.2.1 This test method is limited to characterization of stainless steel surfaces that are smoother than Ra = 0.25 μm, as determined by a contact-stylus profilometer and defined by ANSI B46.1. The magnifications and height scales used in this test method were chosen with this smoothness in mind.  
1.2.2 Intentional etching or conductive coating of the surface are considered modifications of the gas-wetted surface and are not covered by this test method.  
1.2.3 This test method does not cover steels that have an oxide layer too thick to permit tunneling under the test conditions outlined in 11.3.  
1.3 This technique is written with the assumption that the STM operator understands the use of the instrument, its governing principles, and any artifacts that can arise. Discussion of these points is beyond the scope of this test method.  
1.4 The values stated in SI units are to be regarded as the standard.  
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.  
1.6 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
WITHDRAWN RATIONALE
The purpose of this test method is to define a method for analyzing the surface texture of the above-mentioned components using a scanning tunneling microscope (STM). STM is a noncontact method of surface profiling that can measure three-dimensional surface features in the nanometer size range, which can then be used to represent the surface texture or to provide figures of merit. Application of this test method, where surface texture is used as a selection criterion, is expected to yield comparable data among different components tested.
Formerly under the jurisdiction of Committee F01 on Electronics, this test method was withdrawn in November 2023. This standard is being withdrawn without replacement because Committee F01 was disbanded.

SIGNIFICANCE AND USE
4.1 The purpose of this test method is to define a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for purposes of qualification for this installation.
SCOPE
1.1 This test method establishes a procedure for comparing the elemental composition of normal surfaces with any defects found on the surfaces of metal tubing, fittings, valves, or any metal component.  
1.2 This test method applies to all steel surfaces of components such as tubings, connectors, regulators, and valves, regardless of size, style, or type.  
1.3 Limitations:  
1.3.1 This test method is intended for use by scanning electron microscope/energy dispersive x-ray spectrometer (SEM/EDX) operators with skill level typically achieved over a twelve-month period.  
1.3.2 SEM used for this study should conform to those limitations outlined in Test Method F1372 and should have a minimum point-to-point resolution of 30 nm.  
1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.  
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 6.  
1.6 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
WITHDRAWN RATIONALE
This test method establishes a procedure for comparing the elemental composition of normal surfaces with any defects found on the surfaces of metal tubing, fittings, valves, or any metal component.
Formerly under the jurisdiction of Committee F01 on Electronics, this test method was withdrawn in November 2023. This standard is being withdrawn without replacement because Committee F01 was disbanded.

SIGNIFICANCE AND USE
4.1 This guide defines a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this guide is expected to yield comparable data among components tested for purposes of qualification for this installation.  
4.2 This guide establishes a procedure for determining the elemental composition and metallurgical characteristics of metal used to fabricate components for high purity gas distribution systems in the semiconductor industry. The composition and metallurgy of stainless steel may be expected to affect properties of importance to this application, including surface roughness, incidence of surface defects, passivation, corrosion resistance, and welding.
SCOPE
1.1 This guide covers corrosion resistant metallic alloys of the general class stainless steel, containing chromium, nickel, manganese, and silicon as major alloying additions and possibly molybdenum, that are qualified or specified for the materials of components used in high-purity gas supply systems for the semiconductor industry. This guide is primarily intended for testing to determine conformance to applicable composition and metallurgical specifications as stated in supplier product specifications or customer purchase specifications, or both.  
1.2 Elements analyzed and reported in this guide are as follows:  
1.2.1 The alloying additions chromium, nickel, and molybdenum (if specified in alloy, as in type 316L),  
1.2.2 The minor elements and residuals manganese, silicon, copper, cobalt, and stabilizers such as titanium and columbium (niobium), if present,  
1.2.3 Carbon, sulfur and phosphorus,  
1.2.4 Nitrogen and oxygen gases,  
1.2.5 Any additional minor element additions that may be made as part of the melting and casting practice, such as aluminum and calcium,  
1.2.6 Available standard analytical and reporting techniques are described for these elements.  
1.3 Metallurgical characteristics to be analyzed and reported are inclusion contents, grain structure, mechanical properties, and intergranular corrosion susceptibility.  
1.4 Limitations:  
1.4.1 This guide is limited to corrosion resistant metal alloys of the general class stated in the Scope.  
1.4.2 The test methods cited in this guide are not intended to preclude the use of other generally accepted techniques of demonstrated equivalent or superior precision and bias.  
1.4.3 Inclusion of testing and analysis procedures for any given element or metallurgical characteristic in this guide is not to be construed as being a requirement for incorporation of that element or metallurgical characteristic into any specifications.  
1.5 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.  
1.6 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.  
1.7 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
WITHDRAWN RATIONALE
This guide covers corrosion resistant metallic alloys of the general class stainless steel, containing chromium, nickel, manganese, and silicon as major alloying additions and possibly molybdenum, that are qualified or specified for the materials of components used in high-purity gas supply systems for the semiconductor industry. This guide is primarily intended for testing to determine conformance to applicable composition and metallurgical specifications as stated in supplier product sp...

SIGNIFICANCE AND USE
5.1 These test methods provide a field technique for the bacteriological analysis of electronic process waters. The sampling of these waters and subsequent bacteriological analysis may be critical to electronic product yields. Bacteria can be the prime source of harmful contamination which can significantly reduce the yield of satisfactory microelectronic device production.  
5.2 The test methods described here may be used both to monitor the bacteriological quality of water used in microelectronic product processing, and to locate the source of bacterial contamination in a water purification system.  
5.3 These test methods are simple field methods, combining sampling and bacteriological analysis techniques that do not require bacteriological laboratory facilities.  
5.4 The test methods described employ culture techniques for bacteriological analysis. The user should be aware that such techniques cannot provide a complete count of the total viable bacteria present, since clumps and clusters of bacteria will appear as one single colony when cultured, and since some viable bacteria will not grow under the test conditions used. However, a meaningful comparative bacteria count will be achieved by this method if the culturing of the sample is always done at the same temperature, and for the same period of time. The temperature of incubation should always be at 28 ± 2°C, and the period of incubation should be 48 h (or 72 h if time permits). The period of incubation and temperature should be the same for all comparative studies.
SCOPE
1.1 These test methods cover sampling and analysis of high purity water from water purification systems and water transmission systems by the direct sampling tap and filtration of the sample collected in the bag. These test methods cover both the sampling of water lines and the subsequent microbiological analysis of the sample by the culture technique. The microorganisms recovered from the water samples and counted on the filters include both aerobes and facultative anaerobes.  
1.2 Three methods are described as follows:    
Sections  
Test Method A—Sample Tap—Direct Filtration  
6 to 8  
Test Method B—Presterilized Plastic Bag Technique  
9 to 12  
Test Method B2 —Dip Strip Technique2/Presterilized Plastic Bag  
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.  
1.4 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
WITHDRAWN RATIONALE
These test methods cover sampling and analysis of high purity water from water purification systems and water transmission systems by the direct sampling tap and filtration of the sample collected in the bag. These test methods cover both the sampling of water lines and the subsequent microbiological analysis of the sample by the culture technique. The microorganisms recovered from the water samples and counted on the filters include both aerobes and facultative anaerobes.
Formerly under the jurisdiction of F01 on Electronics, these test methods were withdrawn in November 2023. This standard is being withdrawn without replacement because Committee F01 was disbanded.

SIGNIFICANCE AND USE
4.1 The purpose of this test method is to define a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for purposes of qualification for this installation.
SCOPE
1.1 This test method covers the testing of interior surfaces of components such as tubing, fittings, and valves for surface morphology.  
1.2 This test method applies to all surfaces of tubing, connectors, regulators, valves, and any metal component, regardless of size.  
1.3 Limitations:  
1.3.1 This methodology assumes a SEM operator skill level typically achieved over a 12-month period.  
1.3.2 This test method shall be limited to the assessment of pits, stringer, tears, grooves, scratches, inclusions, stepped grain boundaries, and other surface anomalies. However, stains and particles that may be produced during specimen preparation should be excluded in the assessment of anomalies.  
1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.  
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.Specific hazard statements are given in Section 6.  
1.6 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
WITHDRAWN RATIONALE
This test method covered the testing of interior surfaces of components such as tubing, fittings, and valves for surface morphology.
Formerly under the jurisdiction of F01 on Electronics, this test method was withdrawn in November 2023. This standard is being withdrawn without replacement because Committee F01 was disbanded.

SIGNIFICANCE AND USE
3.1 This test method defines a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for purposes of qualification for this installation.
SCOPE
1.1 This test method covers a procedure for testing components for oxygen contribution to ultra-high purity gas distribution systems at ambient temperature. In addition, this test method allows testing of the component at elevated ambient temperatures as high as 70°C.  
1.2 This test method applies to in-line components containing electronics grade materials such as those used in a semiconductor gas distribution system.  
1.3 Limitations:  
1.3.1 This test method is limited by the sensitivity of current instrumentation, as well as the response time of the instrumentation. This test method is not intended to be used for test components larger than 12.7-mm (1/2-in.) outside diameter nominal size. This test method could be applied to larger components; however, the stated volumetric flow rate may not provide adequate mixing to ensure a representative sample. Higher flow rates may improve the mixing but excessively dilute the sample.  
1.3.2 This test method is written with the assumption that the operator understands the use of the apparatus at a level equivalent to six months of experience.  
1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.  
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 5.  
1.6 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
WITHDRAWN RATIONALE
This test method covers a procedure for testing components for oxygen contribution to ultra-high purity gas distribution systems at ambient temperature. In addition, this test method allows testing of the component at elevated ambient temperatures as high as 70°C.
Formerly under the jurisdiction of Committee F01 on Electronics, this test method was withdrawn in November 2023. This standard is being withdrawn without replacement because Committee F01 was disbanded.

SIGNIFICANCE AND USE
3.1 The purpose of this test method is to define a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for the purposes of qualification for this installation.
SCOPE
1.1 This test method covers testing components for total moisture contribution to a gas distribution system at ambient temperature. In addition, the test method allows testing at elevated ambient temperatures as high as 70°C and of the component moisture capacity and recovery.  
1.2 This test method applies to in-line components containing electronics grade materials such as those used in semiconductor gas distribution systems.  
1.3 Limitations:  
1.3.1 This test method is limited by the sensitivity of current instrumentation, as well as by the response time of the instrumentation. This test method is not intended to be used for test components larger than 12.7-mm (1/2-in.) outside diameter nominal size. This test method could be applied to larger components; however, the stated volumetric flow rate may not provide adequate mixing to ensure a representative sample. Higher flow rates may improve the mixing but excessively dilute the sample.  
1.3.2 This test method is written with the assumption that the operator understands the use of the apparatus at a level equivalent to six months of experience.  
1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.  
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 5.  
1.6 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
WITHDRAWN RATIONALE
This test method covers testing components for total moisture contribution to a gas distribution system at ambient temperature. In addition, the test method allows testing at elevated ambient temperatures as high as 70°C and of the component moisture capacity and recovery.
Formerly under the jurisdiction of Committee F01 on Electronics, this test method was withdrawn in November 2023. This standard is being withdrawn without replacement because Committee F01 was disbanded.

SCOPE
1.1 This test method describes a procedure for establishing the sizing accuracy of an automatic, optical liquid-borne single particle counter, using light scattering automatic particle counter (APC). This test method is directed at determining the sizing accuracy of the APC when it is used to measure a challenge suspension of precisely-sized spherical isotropic particles, particularly those sized at and below 1 [mu]m in diameter.
1.2 The particle size parameter that is reported is the equivalent diameter based on the projected area of an isotropic spherical particle of known composition suspended in a liquid that is optically different from the suspended particle. Particles in the size range of 0.1 [mu]m and 5 [mu]m are used for calibration in this procedure.
1.3 This test method does not provide a procedure for APC counting accuracy calibration, since that procedure is available in Practice F658. However, some knowledge of APC maximum concentration capability is necessary in order to avoid introduction of sizing errors as a result of excessive particle concentration during the sizing calibration procedure.
1.4 The values stated in SI units are to be regarded as the standard. The values given in parentheses are for information only.
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. For hazard statement, see Section 8.

SCOPE
1.1 This test method covers wafers composed of silicon and other materials used in the semiconductor industry.
1.2 The test method is used to determine the mass of organic (oxidizable) carbon deposited on all exposed wafer surfaces. It is not used to determine total carbon content of the wafer material.
1.3 This test method is limited to carbon determinations in the range from 0.1 to 50 [mu]g/sample. The detection limit is defined as 2 X standard deviation (2[sigma]).
1.4 Volatiles may be lost during storage or handling, or both, of wafers. This test method is not used to quantify volatile organic compounds.
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

SCOPE
1.1 This test method describes a procedure for counting total numbers of bacteria present in electronics-grade purified water systems. An on-line, large volume sampling technique is used with acridine orange epifluorescence microscopy. This procedure is applicable to industrial and environmental water systems with small amounts of detrital material.  
1.2 The analytical sensitivity associated with this method is dependent upon the sample volume. Sensitivities of ∧lt;20 cells/100 mL can be obtained on a routine basis (1).  A sample size of 5 L or more is required to obtain this sensitivity.  
1.3 The procedure is relatively rapid to perform: total bacteria counts can be obtained within 60 min from the start of sampling.  
1.4 Viable, nonviable, and nonculturable bacteria are stained by the acridine orange dye. This procedure does not, however, differentiate between these three groups of bacteria.  
1.5 Detrital material, algae, and fungi may also fluoresce when stained with the acridine orange.  
1.6 Performance of this procedure requires experience in light microscopy. The microscopist must be capable of distinguishing bacterial cells from other, fluorescing particulate matter. Refer to Mittelman et al. (1) for color photographs on cell morphology.  
1.7 This procedure is adaptable for use with image analysis equipment (2). The use of image analysis equipment will increase the rate at which the filter can be examined.  
1.8 The values stated in SI units are to be regarded as the standard. The values given in parentheses are for information only.  
1.9 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.