ASTM F816-83(2003)

Standard Test Method for Combined Fine and Gross Leaks for Large Hybrid Microcircuit Packages (Withdrawn 2009)

SIGNIFICANCE AND USE
This test method provides an evaluation of the quality of an in-line sealing process on a real time basis for sealed packages. It eliminates the need to expose the specimen to long exposures of high pressure to drive the helium gas into the package to later be detected by the same method herein used. Previously, separate test methods were required to detect large or small leaks. This method provides only one test to accomplish all test levels without potential for specimens with leaks to escape detection within the range of detection being employed (see Practices F 98).
Both development and research, along with manufacturing control, may be served by using this test method. Current gross leak test methods and fine leak test methods may be combined into one using this method. No exposure to high pressure processing hazards is involved and safety of operation in production environment is enhanced.
SCOPE
1.1 This test method applies to hermetic package leak testing to detect leaks of a broad spectrum in size with a minimum detection level equal to the sensitivity of the helium mass spectrometer equipment used in the test.
1.2 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
WITHDRAWN RATIONALE
This test method applies to hermetic package leak testing to detect leaks of a broad spectrum in size with a minimum detection level equal to the sensitivity of the helium mass spectrometer equipment used in the test.
Formerly under the jurisdiction of Committee F01 on Electronics and Subcommittee F01.03 on Metallic Materials, this practice was withdrawn in May 2009 with no replacement because the committee is not aware of the need to maintain the standard. Reference to the standard will remain available, but at this time, the committee does not wish to actively maintain the standard.

General Information

• Status: Withdrawn
• Publication Date: 09-May-1998
• Withdrawal Date: 30-Apr-2009
• Technical Committee: F01 - Electronics
• Drafting Committee: F01.03 - Metallic Materials, Wire Bonding, and Flip Chip

Relations

• Replaces: ASTM F816-83(1998)e1 - Standard Test Method for Combined Fine and Gross Leaks for Large Hybrid Microcircuit Packages
• Effective Date: 10-May-1998

Standards Content (Sample)

NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation:F 816–83(Reapproved2003)
Standard Test Method for
Combined Fine and Gross Leaks for Large Hybrid
Microcircuit Packages
This standard is issued under the fixed designation F 816; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (e) indicates an editorial change since the last revision or reapproval.
1. Scope into the lid of the package.After sealing the lid on the package,
the vent hole in the lid is presented to a port in the inlet of the
1.1 This test method applies to hermetic package leak
helium leak detector using an interface seal (See Fig. 2).After
testing to detect leaks of a broad spectrum in size with a
the internal volume is evacuated, a cloud of helium gas is
minimum detection level equal to the sensitivity of the helium
brought into close proximity to the entire outer surface of the
mass spectrometer equipment used in the test.
package. Helium passing into the inner volume of the package
1.2 This standard does not purport to address all of the
through any leak orifice in an amount greater than the
safety concerns, if any, associated with its use. It is the
minimum sensitivity of the leak detector will be detected
responsibility of the user of this standard to establish appro-
within a few seconds. The successfully sealed product is then
priate safety and health practices and determine the applica-
placed into a controlled atmosphere dry box for vacuum
bility of regulatory limitations prior to use.
purging and back filling the internal volume of the package
2. Referenced Documents through the vent hole with an inert gas having some detectable
partial pressure level of helium gas. While under this latter
2.1 ASTM Standards:
condition, the vent hole is sealed off by a suitable manner. The
E691 Practice for Conducting an Interlaboratory Study to
specimen is then immediately retested by the above method to
Determine the Precision of a Test Method
detect successful sealing of the vent hole.
F78 Test Method for Calibration of Helium Leak Detectors
by Use of Secondary Standards
4. Significance and Use
F98 Practices for Determining Hermeticity of Electron
4.1 Thistestmethodprovidesanevaluationofthequalityof
Devices by a Bubble Test
an in-line sealing process on a real time basis for sealed
F134 Test Methods for Determining Hermeticity of Elec-
packages.Iteliminatestheneedtoexposethespecimentolong
tron Devices with a Helium Mass Spectrometer Leak
4 exposures of high pressure to drive the helium gas into the
Detector
package to later be detected by the same method herein used.
2.2 Federal Standard:
Previously, separate test methods were required to detect large
Federal Standard 209B Clean Room and Work Station Re-
or small leaks. This method provides only one test to accom-
quirements, Controlled Environment
plish all test levels without potential for specimens with leaks
3. Summary of Method
to escape detection within the range of detection being em-
ployed (see Practices F 98).
3.1 This test method for the hermeticity of packages used
4.2 Both development and research, along with manufactur-
for housing multichip and hybrid microcircuits is to be applied
2 2
ing control, may be served by using this test method. Current
generally to those equal to or greater than 1 in. (645 mm)in
gross leak test methods and fine leak test methods may be
areaor0.60cm involume.Aventhole(SeeFig.1)isdesigned
combined into one using this method. No exposure to high
pressure processing hazards is involved and safety of operation
This test method is under the jurisdiction of ASTM Committee F01 on
in production environment is enhanced.
Electronics and is the direct responsibility of Subcommittee F01.03 on Metallic
Materials.
5. Interferences
Current edition approved May 27, 1983. Published July 1983.
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
5.1 The use of the helium leak detector requires a specific
contact ASTM Customer Service at [e-mail]. For Annual Book of ASTM
gas transit time for the helium to pass through a leak orifice in
Standards volume information, refer to the standard’s Document Summary page on
the specimen and travel into the mass spectrometer sensing
the ASTM website.
elementfordetection.Thevalueofthistimeconstantshouldbe
Discontinued; see 1990 Annual Book of ASTM Standards, Vol 10.04.
Discontinued; see 1996 Annual Book of ASTM Standards, Vol 10.04.
exceeded for all test conditions to be considered valid. For
AvailablefromStandardizationDocumentsOrderDesk,Bldg.4SectionD,700
small leaks, the time constant will be maximum. Allowing the
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Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.
F 816–83 (2003)
FIG. 1 Lid Vent Hole Design Option
helium gas to bathe the specimen for a time in excess of this 7.3 Cleaning Solutions/Solvents.
time constant will suffice. This time constant should normally 7.4 Soft Solder and Soldering Iron.
be no longer than 5 s.
8. Sampling
5.2 Any contaminating films or seal defects in the interface
8.1 No specific sampling plan is to be implied by the use of
between the apparatus port and the vent hole in the lid of the
this test method. The user is encouraged to adopt this method
package may indicate a false leak. Adequate handling, clean-
for 100 % testing of production product.
liness, and operator performance to ensure the integrity of this
interface seal is necessary.
9. Preparation of Apparatus
5.3 When a large leak is encountered that allows a large
9.1 Prepare apparatus in accordance with Test Methods
charge of helium gas to enter the mass spectrometer, it may be
F 134.
necessary to allow the system to regain a normal (unsaturated)
condition before proceeding.
10. Calibration of Apparatus
6. Apparatus 10.1 Calibrate apparatus in accordance with Test Method
F 78.
6.1 See Test Methods F 134 for helium leak detector test
apparatus.
11. Procedure
6.2 See Fed. Std. No. 209B.
11.1 Place each specimen to be tested on the test port (Note
6.3 See Fig. 2 for a sketch of manifold for specimen
1), one to each port for multiport manifold apparatus designs,
interface with leak detector and helium cup enclosure. The
with the vent hole centered on the interface seal surface
elastomersealmaterialmaybemadeofbutylrubber,neoprene,
location.
or fluorocarbon rubber (Viton) depending on the desired
compression force being used. The O-ring squeeze should be
NOTE 1—Abackground or tare reading may be taken for each package
about 0.2 mm to assure a tight seal on a dry surface. style (plating) by rotating it 180° so the seal surface location is covered by
aportionofthepackagelidthatdoesnothaveaventhole.Thisestablishes
6.4 The dry box in which the vent hole is sealed may either
a measurement threshold value for each package style and lid plating
be provided with a soldering iron or a spot welding head
material.
depending upon which method of seal is selected. The dry box
11.2 Vent the leak test apparatus to evacuation mode by
shall also be provided with an adequate flow of dry nitrogen or
opening Valve A (See Fig. 2).
some other inert gas to which can be added up to 10 % by
11.3 Place a helium cloud chamber shroud over the speci-
volume of helium gas. A tube connected to a vacuum source
men(s) (common or singular units
...