EN ISO 15367-2:2005

Lasers and laser-related equipment - Test methods for determination of the shape of a laser beam wavefront - Part 2: Shack-Hartmann sensors (ISO 15367-2:2005)

ISO 15367-2:2005 specifies methods for measurement and evaluation of the wavefront distribution function in a transverse plane of a laser beam utilizing Hartmann or Shack-Hartmann wavefront sensors. ISO 15367-2:2005 is applicable to fully coherent, partially coherent and general astigmatic laser beams, both for pulsed and continuous operation.
Furthermore, reliable numerical methods for both zonal and modal reconstruction of the two-dimensional wavefront distribution together with their uncertainty are described. The knowledge of the wavefront distribution enables the determination of several wavefront parameters that are defined in ISO 15367-1.

Laser und Laseranlagen - Prüfverfahren für die Bestimmung der Wellenfrontform von Laserstrahlen - Teil 2: Shack-Hartmann-Sensoren (ISO 15367-2:2005)

Dieser Teil der ISO 15367 legt die Verfahren für die Messung und Auswertung der Wellenfrontverteilungsfunktion in einer transversalen Ebene eines Laserstrahls unter Verwendung von Hartmann- oder Shack-Hartmann-Wellenfrontsensoren fest. Dieser Teil der ISO 15367 ist für vollständig kohärente, teilweise kohärente und allgemein astigmatische Laserstrahlen sowohl bei Dauerstrichbetrieb als auch bei gepulstem Betrieb anwendbar.
Des Weiteren werden sowohl für die zonale als auch die modale Rekonstruktion der zweidimensionalen Wellenfrontverteilung zuverlässige numerische Verfahren zusammen mit deren Messunsicherheit beschrieben. Die Kenntnis der Wellenfrontverteilung ermöglicht die Bestimmung einer Reihe von Wellenfrontparametern, die in ISO 15367-1 definiert sind.

Lasers et équipements associés aux lasers - Méthodes d'essai pour la détermination de la forme du front d'onde du faisceau laser - Partie 2: Senseurs Shack-Hartmann (ISO 15367-2:2005)

L'ISO 15367-2:2005 spécifie les méthodes pour le mesurage et l'évaluation de la fonction de distribution du front d'onde, dans un plan transversal, d'un faisceau laser par l'utilisation de senseurs de front d'onde Hartmann ou Shack-Hartmann. Elle s'applique aux lasers totalement cohérents, partiellement cohérents et astigmatiques généraux, aussi bien impulsionnels que continus.
En outre, sont décrites des méthodes numériques raccordables pour une reconstruction par mode ou par zone de la distribution bidimensionnelle du front d'onde, en même temps que leur incertitude. La connaissance de la distribution du front d'onde permet la détermination de plusieurs paramètres de front d'onde définis dans l'ISO 15367-1.

Laserji in laserska oprema – Preskusne metode za ugotavljanje oblike valovne fronte laserskega žarka – 2. del: Shack-Hartmannovi senzorji (ISO 15367-2:2005)

General Information

• Status: Published
• Publication Date: 14-Mar-2005
• Withdrawal Date: 29-Sep-2005
• ICS: 31.260 - Optoelectronics. Laser equipment
• Technical Committee: CEN/TC 123 - Lasers and photonics
• Drafting Committee: CEN/TC 123 - Lasers and photonics
• Current Stage: 9092 - Decision on results of review/2YR ENQ - revise - Review Enquiry
• Start Date: 17-Dec-2008
• Completion Date: 17-Dec-2008
• Ref Project: SIST EN ISO 15367-2:2005 - Lasers and laser-related equipment - Test methods for determination of the shape of a laser beam wavefront - Part 2: Shack-Hartmann sensors (ISO 15367-2:2005)

Standards Content (Sample)

SLOVENSKI STANDARD
01-junij-2005
Laserji in laserska oprema – Preskusne metode za ugotavljanje oblike valovne
fronte laserskega žarka – 2. del: Shack-Hartmannovi senzorji (ISO 15367-2:2005)
Lasers and laser-related equipment - Test methods for determination of the shape of a
laser beam wavefront - Part 2: Shack-Hartmann sensors (ISO 15367-2:2005)
Laser und Laseranlagen - Prüfverfahren für die Bestimmung der Wellenfrontform von
Laserstrahlen - Teil 2: Shack-Hartmann-Sensoren (ISO 15367-2:2005)
Lasers et équipements associés aux lasers - Méthodes d'essai pour la détermination de
la forme du front d'onde du faisceau laser - Partie 2: Senseurs Shack-Hartmann (ISO
15367-2:2005)
Ta slovenski standard je istoveten z: EN ISO 15367-2:2005
ICS:
31.260 Optoelektronika, laserska Optoelectronics. Laser
oprema equipment
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

EUROPEAN STANDARD
EN ISO 15367-2
NORME EUROPÉENNE
EUROPÄISCHE NORM
March 2005
ICS 31.260
English version
Lasers and laser-related equipment - Test methods for
determination of the shape of a laser beam wavefront - Part 2:
Shack-Hartmann sensors (ISO 15367-2:2005)
Lasers et équipements associés aux lasers - Méthodes Laser und Laseranlagen - Prüfverfahren für die
d'essai pour la détermination de la forme du front d'onde du Bestimmung der Wellenfrontform von Laserstrahlen - Teil
faisceau laser - Partie 2: Senseurs Shack-Hartmann (ISO 2: Shack-Hartmann-Sensoren (ISO 15367-2:2005)
15367-2:2005)
This European Standard was approved by CEN on 21 February 2005.
CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European
Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national
standards may be obtained on application to the Central Secretariat or to any CEN member.
This European Standard exists in three official versions (English, French, German). A version in any other language made by translation
under the responsibility of a CEN member into its own language and notified to the Central Secretariat has the same status as the official
versions.
CEN members are the national standards bodies of Austria, Belgium, Cyprus, Czech Republic, Denmark, Estonia, Finland, France,
Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Slovakia,
Slovenia, Spain, Sweden, Switzerland and United Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION
EUROPÄISCHES KOMITEE FÜR NORMUNG
Management Centre: rue de Stassart, 36  B-1050 Brussels
© 2005 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 15367-2:2005: E
worldwide for CEN national Members.

Foreword
This document (EN ISO 15367-2:2005) has been prepared by Technical Committee ISO/TC 172
"Optics and optical instruments" in collaboration with Technical Committee CEN/TC 123 "Lasers
and laser-related equipment", the secretariat of which is held by DIN.

This European Standard shall be given the status of a national standard, either by publication of
an identical text or by endorsement, at the latest by September 2005, and conflicting national
standards shall be withdrawn at the latest by September 2005.

According to the CEN/CENELEC Internal Regulations, the national standards organizations of
the following countries are bound to implement this European Standard: Austria, Belgium,
Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary,
Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland,
Portugal, Slovakia, Slovenia, Spain, Sweden, Switzerland and United Kingdom.

Endorsement notice
The text of ISO 15367-2:2005 has been approved by CEN as EN ISO 15367-2:2005 without any
modifications.
INTERNATIONAL ISO
STANDARD 15367-2
First edition
2005-03-15
Lasers and laser-related equipment —
Test methods for determination of the
shape of a laser beam wavefront —
Part 2:
Shack-Hartmann sensors
Lasers et équipements associés aux lasers — Méthodes d'essai pour la
détermination de la forme du front d'onde du faisceau laser —
Partie 2: Senseurs Shack-Hartmann

Reference number
ISO 15367-2:2005(E)
©
ISO 2005
ISO 15367-2:2005(E)
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ii © ISO 2005 – All rights reserved

ISO 15367-2:2005(E)
Contents Page
Foreword. iv
Introduction . v
1 Scope. 1
2 Normative references . 1
3 Terms and definitions. 1
4 Symbols and units . 3
5 Test principle of Hartmann and Shack-Hartmann wavefront sensors . 4
6 Measurement arrangement and test procedure. 4
6.1 General. 4
6.2 Detector system . 4
6.3 Measurement . 7
6.4 Calibration. 8
7 Evaluation of wavefront gradients . 9
7.1 Background subtraction. 9
7.2 Evaluation . 9
8 Wavefront reconstruction . 9
8.1 General. 9
8.2 Direct numerical integration (zonal method). 10
8.3 Modal wavefront reconstruction . 10
9 Wavefront representation. 11
10 Uncertainty. 11
10.1 General. 11
10.2 Statistical measurement errors . 11
10.3 Environmental effects. 12
10.4 Deficiencies in data acquisition . 12
10.5 Uncertainties due to geometrical misalignment. 13
11 Test report. 13
Annex A (informative) Wavefront reconstruction. 17
Annex B (informative) Zernike polynomials for representation of wavefronts. 19
Bibliography . 20

ISO 15367-2:2005(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies
(ISO member bodies). The work of preparing International Standards is normally carried out through ISO
technical committees. Each member body interested in a subject for which a technical committee has been
established has the right to be represented on that committee. International organizations, governmental and
non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the
International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.
International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2.
The main task of technical committees is to prepare International Standards. Draft International Standards
adopted by the technical committees are circulated to the member bodies for voting. Publication as an
International Standard requires approval by at least 75 % of the member bodies casting a vote.
Attention is drawn to the possibility that some of the elements of this document may be the subject of patent
rights. ISO shall not be held responsible for identifying any or all such patent rights.
ISO 15367-2 was prepared by Technical Committee ISO/TC 172, Optics and photonics, Subcommittee SC 9,
Electro-optical systems.
ISO 15367 consists of the following parts, under the general title Lasers and laser-related equipment — Test
methods for determination of the shape of a laser beam wavefront:
 Part 1: Terminology and fundamental aspects
 Part 2: Shack-Hartmann sensors
iv © ISO 2005 – All rights reserved

ISO 15367-2:2005(E)
Introduction
Characterization of the beam propagation behaviour is necessary in many areas of both laser system
development and industrial laser applications. For example, the design of resonator or beam delivery optics
strongly relies on detailed and quantitative information over the directional distribution of the emitted radiation.
On-line recording of the laser beam wavefront can also accomplish an optimization of the beam focusability in
combination with adaptive optics. Other relevant areas are the monitoring and possible reduction of thermal
lensing effects, on-line resonator adjustment, laser safety considerations, or “at wavelength” testing of optics
including Zernike analysis.
There are four sets of parameters that are relevant for the laser beam propagation:
 power (energy) density distribution (ISO 13694);
 beam widths, divergence angles and beam propagation ratios (ISO 11146-1 and ISO 11146-2);
 wavefront (phase) distribution (ISO 15367-1 and this part of ISO 15367);
 spatial beam coherence (no current standard available).
In general, a complete characterization requires the knowledge of the mutual coherence function or spectral
density function, at least in one transverse plane. Although the determination of those distributions is possible,
the experimental effort is large and commercial instruments capable of measuring these quantities are still not
available. Hence, the scope of this standard does not extend to such a universal beam description but is
limited to the measurement of the wavefront, which is equivalent to the phase distribution in case of spatially
coherent beams. As a consequence, an exact prediction of beam propagation is achievable only in the limiting
case of high lateral coherence.
A number of phase or wavefront gradient measuring instruments are capable of determining the wavefront or
phase distribution. These include, but are not limited to, the lateral shearing interferometer, the Hartmann and
Shack-Hartmann wavefront sensor, and the
...