Cavity resonator method to measure the complex permittivity of low-loss dielectric plates

IEC 62562:2010 describes a measurement method of dielectric properties in the planar direction of dielectric plate at microwave frequency, called a cavity resonator method. It has been created in order to develop new materials and to design microwave active and passive devices for which standardization of measurement methods of material properties is more and more important. This first edition cancels and replaces the PAS published in 2008. This bilingual version, published in 2010-05, corresponds to the English version.
This publication contains colours which are considered to be useful for the correct understanding of its contents.

Méthode de la cavité résonante pour mesurer la permittivité complexe des plaques diélectriques à faibles pertes

IEC 62562:2010 décrit une méthode de mesure des propriétés diélectriques en hyperfréquence dans la direction du plan d'une plaque diélectrique. Cette méthode est appelée méthode de la cavité résonante. Elle a été créée pour élaborer de nouveaux matériaux et pour concevoir des dispositifs micro-ondes actifs et passifs pour lesquels la normalisation des méthodes de mesure des propriétés des matériaux est de plus en plus importante. La présente version bilingue, publiée en 2010-05, correspond à la version anglaise.
Cette publication indique qu'elle contient des couleurs qui sont considérées comme utiles à une bonne compréhension de son contenu.

General Information

Status
Published
Publication Date
17-Feb-2010
Current Stage
PPUB - Publication issued
Start Date
31-Mar-2010
Completion Date
18-Feb-2010
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IEC 62562 ®
Edition 1.0 2010-02
INTERNATIONAL
STANDARD
colour
inside
Cavity resonator method to measure the complex permittivity of low-loss
dielectric plates
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form
or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from
either IEC or IEC's member National Committee in the country of the requester.
If you have any questions about IEC copyright or have an enquiry about obtaining additional rights to this publication,
please contact the address below or your local IEC member National Committee for further information.

IEC Central Office
3, rue de Varembé
CH-1211 Geneva 20
Switzerland
Email: inmail@iec.ch
Web: www.iec.ch
About the IEC
The International Electrotechnical Commission (IEC) is the leading global organization that prepares and publishes
International Standards for all electrical, electronic and related technologies.

About IEC publications
The technical content of IEC publications is kept under constant review by the IEC. Please make sure that you have the
latest edition, a corrigenda or an amendment might have been published.
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IEC 62562 ®
Edition 1.0 2010-02
INTERNATIONAL
STANDARD
colour
inside
Cavity resonator method to measure the complex permittivity of low-loss
dielectric plates
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
PRICE CODE
R
ICS 17.220 ISBN 978-2-88910-763-6
– 2 – 62562 © IEC:2010(E)
CONTENTS
FOREWORD.3
1 Scope.5
2 Measurement parameters .5
3 Theory and calculation equations .6
3.1 Relative permittivity and loss tangent .6

3.2 Temperature dependence of ε and tanδ .9
3.3 Cavity parameters .10
4 Measurement equipment and apparatus .11
4.1 Measurement equipment .11
4.2 Measurement apparatus for complex permittivity .11
5 Measurement procedure.12
5.1 Preparation of measurement apparatus .12
5.2 Measurement of reference level .12
5.3 Measurement of cavity parameters: D , H , σ , α , TCρ .12
r c
5.4 Measurement of complex permittivity of test specimen: ε ' , tanδ .14
5.5 Temperature dependence of ε ' and tanδ .15
Annex A (informative) Example of measured result and accuracy .16
Bibliography.20

Figure 1 – Resonator structures of two types .6
Figure 2 – Correction term Δε’/ε’ .9
a
Figure 3 – Correction terms ΔA/A and ΔB/B .9
Figure 4 – Schematic diagram of measurement equipments.11
Figure 5 – Cavity resonator used for measurement .12
Figure 6 – Photograph of cavity resonator for measurement around 10 GHz .12
Figure 7 – Mode chart of cavity resonator .13
Figure 8 – Resonance peaks of cavity resonator.13
Figure 9 – Resonance frequency f , insertion attenuation IA and half-power band
0 0
width f .14
BW
Figure 10 – Resonance frequency f of TE mode of cavity resonator with dielectric
0 011
plate (D = 35 mm, H = 25 mm) .15
Figure A.1 – Measured temperature dependence of f and Q .17
1 uc
Figure A.2 – Resonance peaks of cavity resonator clamping sapphire plate.18
Figure A.3 – Measured results of temperature dependence of f , Q , ε ' and tanδ for
0 u
sapphire plate.19

Table A.1 – Measured results of cavity parameters.16
Table A.2 – Measured results of of ε ' and tanδ for sapphire plate .18

62562 © IEC:2010(E) – 3 –
INTERNATIONAL ELECTROTECHNICAL COMMISION
____________
CAVITY RESONATOR METHOD TO MEASURE THE COMPLEX
PERMITTIVITY OF LOW-LOSS DIELECTRIC PLATES

FOREWORD
1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising
all national electrotechnical committees (IEC National Committees). The object of IEC is to promote
international co-operation on all questions concerning standardization in the electrical and electronic fields. To
this end and in addition to other activities, IEC publishes International Standards, Technical Specifications,
Technical Reports, Publicly Available Specifications (PAS) and Guides (hereafter referred to as “IEC
Publication(s)”). Their preparation is entrusted to technical committees; any IEC National Committee interested
in the subject dealt with may participate in this preparatory work. International, governmental and non-
governmental organizations liaising with the IEC also participate in this preparation. IEC collaborates closely
with the International Organization for Standardization (ISO) in accordance with conditions determined by
agreement between the two organizations.
2) The formal decisions or agreements of IEC on technical matters express, as nearly as possible, an international
consensus of opinion on the relevant subjects since each technical committee has representation from all
interested IEC National Committees.
3) IEC Publications have the form of recommendations for international use and are accepted by IEC National
Committees in that sense. While all reasonable efforts are made to ensure that the technical content of IEC
Publications is accurate, IEC cannot be held responsible for the way in which they are used or for any
misinterpretation by any end user.
4) In order to promote international uniformity, IEC National Committees undertake to apply IEC Publications
transparently to the maximum extent possible in their national and regional publications. Any divergence
between any IEC Publication and the corresponding national or regional publication shall be clearly indicated in
the latter.
5) IEC itself does not provide any attestation of conformity. Independent certification bodies provide conformity
assessment services and, in some areas, access to IEC marks of conformity. IEC is not responsible for any
services carried out by independent certification bodies.
6) All users should ensure that they have the latest edition of this publication.
7) No liability shall attach to IEC or its directors, employees, servants or agents including individual experts and
members of its technical committees and IEC National Committees for any personal injury, property damage or
other damage of any nature whatsoever, whether direct or indirect, or for costs (including legal fees) and
expenses arising out of the publication, use of, or reliance upon, this IEC Publication or any other IEC
Publications.
8) Attention is drawn to the Normative references cited in this publication. Use of the referenced publications is
indispensable for the correct application of this publication.
9) Attention is drawn to the possibility that some of the elements of this IEC Publication may be the subject of
patent rights. IEC shall not be held responsible for identifying any or all such patent rights.
International Standard IEC 62562 has been prepared by subcommittee 46F: R.F. and
microwave passive components, of IEC technical committee 46: Cables, wires, waveguides,
R.F. connectors, R.F. and microwave passive components and accessories.
This first edition cancels and replaces the PAS published in 2008.
The text of this standard is based on the following documents:
CDV Report on voting
46F/118/CDV 46F/143/RVC
Full information on the voting for the approval of this standard can be found in the report on
voting indicated in the above table.
This publication has been drafted in accordance with the ISO/IEC Directives, Part 2.

– 4 – 62562 © IEC:2010(E)
The committee has decided that the contents of this publication will remain unchanged until
the stability date indicated on the IEC web site under "http://webstore.iec.ch" in the data
related to the specific publication. At this date, the publication will be
• reconfirmed,
• withdrawn,
• replaced by a revised edition, or
• amended.
A bilingual version of this publication may be issued at a later date.

IMPORTANT – The 'colour inside' logo on the cover page of this publication indicates
that it contains colours which are considered to be useful for the correct
understanding of its contents. Users should therefore print this document using a
colour printer.
62562 © IEC:2010(E) – 5 –
CAVITY RESONATOR METHOD TO MEASURE THE COMPLEX
PERMITTIVITY OF LOW-LOSS DIELECTRIC PLATES

1 Scope
The object of this International Standard is to describe a measurement method of dielectric
properties in the planar direction of dielectric plate at microwave frequency. This method is
called a cavity resonator method. It has been created in order to develop new materials and to
design microwave active and passive devices for which standardization of measurement
methods of material properties is more and more important.
This method has the following characteristics:
• the relative permittivity ε ' and loss tangent tanδ values of a dielectric plate sample can be
measured accurately and non-destructively;
• temperature dependence of complex permittivity can be measured;
–6
• the measurement accuracy is within 0,3 % for ε ' and within 5×10 for tanδ ;
• fringing effect is corrected using correction charts calculated on the basis of rigorous
analysis.
This method is applicable for the measurements on the following condition:
– frequency    : 2 GHz < f  < 40 GHz;
– relative permittivity: 2  < ε '  < 100;
–6 -2
– loss tangent    : 10 < tanδ < 10 .
2 Measurement parameters
The measurement parameters are defined as follows:
ε = ε '− jε"= D /(ε E) (1)
r 0
'tanδ = ε" / ε (2)
-
ε ε
T ref 6
–6
TC = ×10     (1×10 /K) (3)
ε
T − T
ε
ref
ref
where
D is the electric flux density;
E is the electric field strength;
ε is the permittivity in a vacuum;
ε ' and ε '' are the real and imaginary components of the complex relative permittivity ε ;
r
TCε is the temperature coefficient of relative permittivity;
ε and ε are the real parts of the complex relative permittivity at temperature T and
T ref
reference temperature T (= 20 °C to 25 °C), respectively.
ref
– 6 – 62562 © IEC:2010(E)
3 Theory and calculation equations
3.1 Relative permittivity and loss tangent
A resonator structure used in the nondestructive measurement of the complex permittivity is
shown in Figure 1a.
A cavity having diameter D and length H = 2M is cut into two halves in the middle of its
length.
A dielectric plate sample having ε ' , tanδ and thickness t is placed between these two halves.
The TE mode, having only the electric field component tangential to the plane of the
sample, is used for the measurement, since air gaps at the plate-cavity interfaces do not
affect the electromagnetic field. Taking account of the fringing field in the plate region outside
diameter of the cavity on the basis of the rigorous mode matching analysis, we determine ε '
and tanδ from the measured values of the resonant frequency f and the unloaded Q-factor
Q . This numerical calculation, however, is rather tedious.
u
Therefore,
a) approximated values ε' and tanδ from the f and Q values by using simple formula for
a a 0
...


IEC 62562 ®
Edition 1.0 2010-02
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
colour
inside
Cavity resonator method to measure the complex permittivity of low-loss
dielectric plates
Méthode de la cavité résonante pour mesurer la permittivité complexe des
plaques diélectriques à faibles pertes

All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by
any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from either IEC or
IEC's member National Committee in the country of the requester.
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IEC Central Office
3, rue de Varembé
CH-1211 Geneva 20
Switzerland
Email: inmail@iec.ch
Web: www.iec.ch
About the IEC
The International Electrotechnical Commission (IEC) is the leading global organization that prepares and publishes
International Standards for all electrical, electronic and related technologies.

About IEC publications
The technical content of IEC publications is kept under constant review by the IEC. Please make sure that you have the
latest edition, a corrigenda or an amendment might have been published.
ƒ Catalogue of IEC publications: www.iec.ch/searchpub
The IEC on-line Catalogue enables you to search by a variety of criteria (reference number, text, technical committee,…).
It also gives information on projects, withdrawn and replaced publications.
ƒ IEC Just Published: www.iec.ch/online_news/justpub
Stay up to date on all new IEC publications. Just Published details twice a month all new publications released. Available
on-line and also by email.
ƒ Electropedia: www.electropedia.org
The world's leading online dictionary of electronic and electrical terms containing more than 20 000 terms and definitions
in English and French, with equivalent terms in additional languages. Also known as the International Electrotechnical
Vocabulary online.
ƒ Customer Service Centre: www.iec.ch/webstore/custserv
If you wish to give us your feedback on this publication or need further assistance, please visit the Customer Service
Centre FAQ or contact us:
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IEC 62562 ®
Edition 1.0 2010-02
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
colour
inside
Cavity resonator method to measure the complex permittivity of low-loss
dielectric plates
Méthode de la cavité résonante pour mesurer la permittivité complexe des
plaques diélectriques à faibles pertes

INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
COMMISSION
ELECTROTECHNIQUE
PRICE CODE
INTERNATIONALE
R
CODE PRIX
ICS 17.220 ISBN 978-2-88910-931-9
– 2 – 62562 © IEC:2010
CONTENTS
FOREWORD.3
1 Scope.5
2 Measurement parameters .5
3 Theory and calculation equations .6
3.1 Relative permittivity and loss tangent .6

3.2 Temperature dependence of ε and tanδ .9
3.3 Cavity parameters .9
4 Measurement equipment and apparatus .10
4.1 Measurement equipment .10
4.2 Measurement apparatus for complex permittivity .11
5 Measurement procedure.12
5.1 Preparation of measurement apparatus .12
5.2 Measurement of reference level .12
5.3 Measurement of cavity parameters: D , H , σ , α , TCρ .12
r c
5.4 Measurement of complex permittivity of test specimen: ε ' , tanδ .14
5.5 Temperature dependence of ε ' and tanδ .14
Annex A (informative) Example of measured result and accuracy .15
Bibliography.18

Figure 1 – Resonator structures of two types .6
Figure 2 – Correction term Δε’/ε’ .8
a
Figure 3 – Correction terms ΔA/A and ΔB/B .8
Figure 4 – Schematic diagram of measurement equipments.10
Figure 5 – Cavity resonator used for measurement .11
Figure 6 – Photograph of cavity resonator for measurement around 10 GHz .11
Figure 7 – Mode chart of cavity resonator .12
Figure 8 – Resonance peaks of cavity resonator.13
Figure 9 – Resonance frequency f , insertion attenuation IA and half-power band
0 0
width f .13
BW
Figure 10 – Resonance frequency f of TE mode of cavity resonator with dielectric
0 011
plate (D = 35 mm, H = 25 mm) .14
Figure A.1 – Measured temperature dependence of f and Q .16
1 uc
Figure A.2 – Resonance peaks of cavity resonator clamping sapphire plate.16
Figure A.3 – Measured results of temperature dependence of f , Q , ε′ and tan δ for
0 u
sapphire plate.17

Table A.1 – Measured results of cavity parameters.15
Table A.2 – Measured results of of ε ' and tanδ for sapphire plate .17

62562 © IEC:2010 – 3 –
INTERNATIONAL ELECTROTECHNICAL COMMISION
____________
CAVITY RESONATOR METHOD TO MEASURE THE COMPLEX
PERMITTIVITY OF LOW-LOSS DIELECTRIC PLATES

FOREWORD
1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising
all national electrotechnical committees (IEC National Committees). The object of IEC is to promote
international co-operation on all questions concerning standardization in the electrical and electronic fields. To
this end and in addition to other activities, IEC publishes International Standards, Technical Specifications,
Technical Reports, Publicly Available Specifications (PAS) and Guides (hereafter referred to as “IEC
Publication(s)”). Their preparation is entrusted to technical committees; any IEC National Committee interested
in the subject dealt with may participate in this preparatory work. International, governmental and non-
governmental organizations liaising with the IEC also participate in this preparation. IEC collaborates closely
with the International Organization for Standardization (ISO) in accordance with conditions determined by
agreement between the two organizations.
2) The formal decisions or agreements of IEC on technical matters express, as nearly as possible, an international
consensus of opinion on the relevant subjects since each technical committee has representation from all
interested IEC National Committees.
3) IEC Publications have the form of recommendations for international use and are accepted by IEC National
Committees in that sense. While all reasonable efforts are made to ensure that the technical content of IEC
Publications is accurate, IEC cannot be held responsible for the way in which they are used or for any
misinterpretation by any end user.
4) In order to promote international uniformity, IEC National Committees undertake to apply IEC Publications
transparently to the maximum extent possible in their national and regional publications. Any divergence
between any IEC Publication and the corresponding national or regional publication shall be clearly indicated in
the latter.
5) IEC itself does not provide any attestation of conformity. Independent certification bodies provide conformity
assessment services and, in some areas, access to IEC marks of conformity. IEC is not responsible for any
services carried out by independent certification bodies.
6) All users should ensure that they have the latest edition of this publication.
7) No liability shall attach to IEC or its directors, employees, servants or agents including individual experts and
members of its technical committees and IEC National Committees for any personal injury, property damage or
other damage of any nature whatsoever, whether direct or indirect, or for costs (including legal fees) and
expenses arising out of the publication, use of, or reliance upon, this IEC Publication or any other IEC
Publications.
8) Attention is drawn to the Normative references cited in this publication. Use of the referenced publications is
indispensable for the correct application of this publication.
9) Attention is drawn to the possibility that some of the elements of this IEC Publication may be the subject of
patent rights. IEC shall not be held responsible for identifying any or all such patent rights.
International Standard IEC 62562 has been prepared by subcommittee 46F: R.F. and
microwave passive components, of IEC technical committee 46: Cables, wires, waveguides,
R.F. connectors, R.F. and microwave passive components and accessories.
This first edition cancels and replaces the PAS published in 2008.
This bilingual version, published in 2010-02, corresponds to the English version.
The text of this standard is based on the following documents:
CDV Report on voting
46F/118/CDV 46F/143/RVC
Full information on the voting for the approval of this standard can be found in the report on
voting indicated in the above table.
The French version of this standard has not been voted upon.

– 4 – 62562 © IEC:2010
This publication has been drafted in accordance with the ISO/IEC Directives, Part 2.
The committee has decided that the contents of this publication will remain unchanged until
the stability date indicated on the IEC web site under "http://webstore.iec.ch" in the data
related to the specific publication. At this date, the publication will be
• reconfirmed,
• withdrawn,
• replaced by a revised edition, or
• amended.
IMPORTANT – The 'colour inside' logo on the cover page of this publication indicates
that it contains colours which are considered to be useful for the correct
understanding of its contents. Users should therefore print this document using a
colour printer.
62562 © IEC:2010 – 5 –
CAVITY RESONATOR METHOD TO MEASURE THE COMPLEX
PERMITTIVITY OF LOW-LOSS DIELECTRIC PLATES

1 Scope
The object of this International Standard is to describe a measurement method of dielectric
properties in the planar direction of dielectric pl
...

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