IEC 60747-14-3:2001

Semiconductor devices - Part 14-3: Semiconductor sensors - Pressure sensors

Specifies requirements for semiconductor pressure sensors measuring absolute, gauge or differential pressures.

General Information

• Status: Published
• Publication Date: 26-Jun-2001
• ICS: 31.080.99 - Other semiconductor devices
• Technical Committee: SC 47E - Discrete semiconductor devices
• Drafting Committee: WG 1 - TC 47/SC 47E/WG 1
• Current Stage: DELPUB - Deleted Publication
• Completion Date: 29-Apr-2009

Relations

• Revised: IEC 60747-14-3:2009 - Semiconductor devices - Part 14-3: Semiconductor sensors - Pressure sensors
• Effective Date: 05-Sep-2023

Standards Content (Sample)

INTERNATIONAL IEC
STANDARD
60747-14-3
First edition
2001-06
Semiconductor devices –
Part 14-3:
Semiconductor sensors –
Pressure sensors
Dispositifs à semiconducteurs –
Partie 14-3:
Capteurs à semiconducteurs –
Capteurs de pression
Reference number
Publication numbering
As from 1 January 1997 all IEC publications are issued with a designation in the
60000 series. For example, IEC 34-1 is now referred to as IEC 60034-1.

Consolidated editions
The IEC is now publishing consolidated versions of its publications. For example,

edition numbers 1.0, 1.1 and 1.2 refer, respectively, to the base publication, the
base publication incorporating amendment 1 and the base publication incorporating
amendments 1 and 2.
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INTERNATIONAL IEC
STANDARD
60747-14-3
First edition
2001-06
Semiconductor devices –
Part 14-3:
Semiconductor sensors –
Pressure sensors
Dispositifs à semiconducteurs –
Partie 14-3:
Capteurs à semiconducteurs –
Capteurs de pression
 IEC 2001  Copyright - all rights reserved
No part of this publication may be reproduced or utilized in any form or by any means, electronic or
mechanical, including photocopying and microfilm, without permission in writing from the publisher.
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International Electrotechnical Commission
For price, see current catalogue

– 2 – 60747-14-3 © IEC:2001(E)

CONTENTS
FOREWORD.4

INTRODUCTION.5

1 Scope.6

2 Normative references .6

3 Terminology and letter symbols .6

3.1 General terms .6
3.1.1 Semiconductor pressure sensors.6
3.1.2 Sensing methods.6
3.2 Definitions .8
3.3 Letter symbols.11
3.3.1 General .11
3.3.2 List of letter symbols.11
4 Essential ratings and characteristics.12
4.1 General .12
4.1.1 Sensor materials – for piezoelectrical sensors .12
4.1.2 Handling precautions.12
4.1.3 Types .12
4.2 Ratings (limiting values) .12
4.2.1 Pressures .12
4.2.2 Temperatures .12
4.2.3 Voltage.12
4.3 Characteristics .12
4.3.1 Full-scale span (V ) .12
FSS
4.3.2 Full-scale output (V ).13
FSO
4.3.3 Sensitivity (S).13
4.3.4 Temperature coefficient of full-scale sensitivity (α ).13
s
4.3.5 Offset voltage (V ).13
os
4.3.6 Temperature coefficient of offset voltage (α ) .13
vos
4.3.7 Pressure hysteresis of output voltage (H ).13
ohp
4.3.8 Temperature hysteresis of output voltage (H ).13
ohT
4.3.9 Response time .13

4.3.10 Warm-up .13
4.3.11 Dimensions.13
4.3.12 Mechanical characteristics.13
5 Measuring methods .14
5.1 General .14
5.1.1 General precautions .14
5.1.2 Measuring conditions.14
5.2 Output voltage measurements .14
5.2.1 Purpose.14
5.2.2 Principles of measurements.14

60747-14-3 © IEC:2001(E) – 3 –

5.3 Sensitivity (S) .15

5.3.1 Purpose.15

5.3.2 Measuring procedure.15

5.3.3 Specified conditions .15

5.4 Temperature coefficient of sensitivity (α ) .16
s
5.4.1 Purpose.16

5.4.2 Specified conditions .16

5.5 Temperature coefficient of full-scale span (αV ) and maximum
FSS
temperature deviation of full-scale span (ΔV ) .16
FSS
5.5.1 Purpose.16
5.5.2 Specified conditions .17
5.6 Temperature coefficient of offset voltage (α ) and (ΔV ) .17
Vos os
5.6.1 Purpose.17
5.6.2 Specified conditions .17
5.7 Pressure hysteresis of output voltage(H ) .17
ohp
5.7.1 Purpose.17
5.7.2 Circuit diagram and circuit description .17
5.7.3 Specified conditions .17
5.8 Temperature hysteresis of output voltage (H ) .18
ohT
5.8.1 Purpose.18
5.8.2 Measuring procedure.18
5.8.3 Specified conditions .18
Figure 1 – Basic circuit for measurement of output voltage .14

– 4 – 60747-14-3 © IEC:2001(E)

INTERNATIONAL ELECTROTECHNICAL COMMISSION

___________
SEMICONDUCTOR DEVICES –
Part 14-3: Semiconductor sensors –

Pressure sensors
FOREWORD
1) The IEC (International Electrotechnical Commission) is a worldwide organization for standardization comprising
all national electrotechnical committees (IEC National Committees). The object of the IEC is to promote
international co-operation on all questions concerning standardization in the electrical and electronic fields. To
this end and in addition to other activities, the IEC publishes International Standards. Their preparation is
entrusted to technical committees; any IEC National Committee interested in the subject dealt with may
participate in this preparatory work. International, governmental and non-governmental organizations liaising
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Organization for Standardization (ISO) in accordance with conditions determined by agreement between the
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2) The formal decisions or agreements of the IEC on technical matters express, as nearly as possible, an
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3) The documents produced have the form of recommendations for international use and are published in the form
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5) The IEC provides no marking procedure to indicate its approval and cannot be rendered responsible for any
equipment declared to be in conformity with one of its standards.
6) Attention is drawn to the possibility that some of the elements of this International Standard may be the subject
of patent rights. The IEC shall not be held responsible for identifying any or all such patent rights.
International Standard IEC 60747-14-3 has been prepared by subcommittee 47E: Discrete
semiconductor devices, of IEC technical committee 47: Semiconductor devices.
The text of this standard is based on the following documents:
FDIS Report on voting
47E/191/FDIS 47E/195/RVD
Full information on the voting for the approval of this standard can be found in the report on
voting indicated in the above table.
This publication has been drafted in accordance with the ISO/IEC Directives, Part 3.
A bilingual version of this standard may be issued at a later date.
The committee has decided that the contents of this publication will remain unchanged until
2006. At this date, the publication will be
• reconfirmed;
• withdrawn;
• replaced by a revised edition, or
• amended.
60747-14-3 © IEC:2001(E) – 5 –

INTRODUCTION
This part of IEC 60747 should be read in conjunction with IEC 60747-1. It provides basic

information on semiconductor
– terminology;
– letter symbols;
– essential ratings and characteristics;

– measuring methods;
– acceptance and reliability.
– 6 – 60747-14-3 © IEC:2001(E)

SEMICONDUCTOR DEVICES –
Part 14-3: Semiconductor sensors –

Pressure sensors
1 Scope
This part of IEC 60747-14 specifies requirements for semiconductor pressure sensors

measuring absolute, gauge or differential pressures.
2 Normative references
The following normative documents contain provisions which, through reference in this text,
constitute provisions of this part of IEC 60747-14. For dated references, subsequent
amendments to, or revisions of, any of these publications do not apply. However, parties to
agreements based on this part of IEC 60747-14 are encouraged to investigate the possibility
of applying the most recent editions of the normative documents indicated below. For undated
references, the latest edition of the normative
...