Cleanrooms and associated controlled environments — Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration

This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles. For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less ? "nanoscale" ? are considered. The monitoring given in this document is for use mainly in "operational" states. NOTE 1 For the purposes of this document, reference is made to "nanoscale particles", which means all nano-objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale. NOTE 2 As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc. NOTE 3 Health and safety considerations are excluded from this document.

Salles propres et environnements maîtrisés apparentés — Partie 12: Spécification de la propreté de l'air en fonction de la concentration des nanoparticules

General Information

Status
Published
Publication Date
29-Aug-2018
Current Stage
9060 - Close of review
Start Date
04-Mar-2029
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ISO 14644-12:2018 - Cleanrooms and associated controlled environments
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INTERNATIONAL ISO
STANDARD 14644-12
First edition
2018-08
Cleanrooms and associated controlled
environments —
Part 12:
Specifications for monitoring air
cleanliness by nanoscale particle
concentration
Salles propres et environnements maîtrisés apparentés —
Partie 12: Spécification de la propreté de l'air en fonction de la
concentration des nanoparticules
Reference number
ISO 14644-12:2018(E)
©
ISO 2018

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ISO 14644-12:2018(E)

COPYRIGHT PROTECTED DOCUMENT
© ISO 2018
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
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Published in Switzerland
ii © ISO 2018 – All rights reserved

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ISO 14644-12:2018(E)

Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
3.1 General . 1
3.2 Size . 2
3.3 Airborne particles . 2
3.4 Occupancy states . 3
3.5 Measuring apparatus . 3
4 Monitoring . 3
4.1 General . 3
4.2 Principle . 3
4.3 Methods . 3
5 Test report . 4
Annex A (informative) Reference method for monitoring by condensation particle counting.5
Annex B (informative) Particle counting efficiency and particle size cutoff .8
Bibliography .
...

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