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ISO 14644-12:2018

(Main)

Cleanrooms and associated controlled environments — Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration

Cleanrooms and associated controlled environments — Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration

This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles. For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less ? "nanoscale" ? are considered. The monitoring given in this document is for use mainly in "operational" states. NOTE 1 For the purposes of this document, reference is made to "nanoscale particles", which means all nano-objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale. NOTE 2 As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc. NOTE 3 Health and safety considerations are excluded from this document.

Salles propres et environnements maîtrisés apparentés — Partie 12: Spécification de la propreté de l'air en fonction de la concentration des nanoparticules

General Information

Status
Published
Publication Date
29-Aug-2018
ICS
13.040.35 - Cleanrooms and associated controlled environments
Technical Committee
ISO/TC 209 - Cleanrooms and associated controlled environments
Drafting Committee
ISO/TC 209 - Cleanrooms and associated controlled environments
Current Stage
9060 - Close of review
Start Date
04-Mar-2029
Ref Project

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ISO 14644-12:2018 - Cleanrooms and associated controlled environmentsISO 14644-12:2018 - Cleanrooms and associated controlled environments
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ISO 14644-12:2018 - Cleanrooms and associated controlled environments
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INTERNATIONAL ISO
STANDARD 14644-12
First edition
2018-08
Cleanrooms and associated controlled
environments —
Part 12:
Specifications for monitoring air
cleanliness by nanoscale particle
concentration
Salles propres et environnements maîtrisés apparentés —
Partie 12: Spécification de la propreté de l'air en fonction de la
concentration des nanoparticules
Reference number
ISO 14644-12:2018(E)
©
ISO 2018

---------------------- Page: 1 ----------------------
ISO 14644-12:2018(E)

COPYRIGHT PROTECTED DOCUMENT
© ISO 2018
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting
on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address
below or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: +41 22 749 01 11
Fax: +41 22 749 09 47
Email: copyright@iso.org
Website: www.iso.org
Published in Switzerland
ii © ISO 2018 – All rights reserved

---------------------- Page: 2 ----------------------
ISO 14644-12:2018(E)

Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
3.1 General . 1
3.2 Size . 2
3.3 Airborne particles . 2
3.4 Occupancy states . 3
3.5 Measuring apparatus . 3
4 Monitoring . 3
4.1 General . 3
4.2 Principle . 3
4.3 Methods . 3
5 Test report . 4
Annex A (informative) Reference method for monitoring by condensation particle counting.5
Annex B (informative) Particle counting efficiency and particle size cutoff .8
Bibliography .
...

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