Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination (ISO 14644-10:2022)

This document establishes appropriate testing processes to determine the cleanliness of surfaces in
cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions,
atoms and particles). This document is applicable to all solid surfaces in cleanrooms and associated
controlled environments such as walls, ceilings, floors, worksurfaces, tools, equipment and devices.
NOTE 1 For the purpose of this document, consideration is only given to the chemical characteristics of
a particle. The physical properties of the particle are not considered and this document does not cover the
interaction between the contamination and the surface.
NOTE 2 This document does not include the contamination generation process or any time-dependent
influences (e.g. deposition, sedimentation, ageing) or process-dependent activities such as transportation and
handling. Neither does it include guidance on statistical quality-control techniques to ensure compliance.

Reinräume und zugehörige Reinraumbereiche - Teil 10: Bewertung der chemischen Oberflächenreinheit (ISO 14644‑10:2022)

Dieses Dokument legt geeignete Prüfverfahren zur Bestimmung der Oberflächenreinheit in Reinräumen hinsichtlich vorhandener chemischer Verbindungen oder Elemente (einschließlich Molekülen, Ionen, Atomen und Partikeln) fest. Dieses Dokument ist auf alle festen Oberflächen in Reinräumen und zugehörigen Reinraumbereichen anwendbar, wie z. B. Wände, Decken, Fußböden, Arbeitsflächen, Werkzeuge, Ausrüstungsgegenstände und Geräte.
ANMERKUNG 1 Für die Anwendung dieses Dokuments werden nur die chemischen Eigenschaften eines Partikels in Betracht gezogen. Die physikalischen Eigenschaften des Partikels werden nicht berücksichtigt, und dieses Dokument behandelt nicht die Wechselwirkung zwischen der Kontamination und der Oberfläche.
ANMERKUNG 2 Dieses Dokument behandelt weder den Entstehungsprozess der Kontamination noch zeitabhängige Einflüsse (z. B. Ablagerung, Sedimentation, Alterung) oder prozessabhängige Tätigkeiten wie z. B. Transport und Handhabung. Auch enthält es keine Leitlinien zu statistischen Qualitätskontrollverfahren zur Sicherstellung der Übereinstimmung.

Salles propres et environnements maîtrisés apparentés - Partie 10: Évaluation de la propreté chimique des surfaces (ISO 14644-10:2022)

Le présent document définit les procédés d’essai appropriés afin de déterminer la propreté des surfaces dans les salles propres en fonction de la présence de composés ou éléments chimiques (molécules, ions, atomes et particules). Il s’applique à toute surface solide dans une salle propre ou un environnement maîtrisé apparenté, telle que les murs, plafonds, sols, surfaces de travail, outils, équipements et dispositifs.
NOTE 1        Il n’est tenu compte que des caractéristiques chimiques des particules aux fins du présent document. Leurs propriétés physiques sont ignorées et le présent document ne traite pas non plus les interactions entre la contamination et la surface.
NOTE 2        Le présent document n’inclut pas la génération de contamination ni aucune influence dépendant du temps (dépôt, sédimentation, vieillissement, etc.) ni aucune activité dépendant des procédés telle que le transport et la manipulation. Il ne comporte pas non plus de recommandations relatives aux techniques statistiques de maîtrise de la qualité permettant d’assurer la conformité.

Čiste sobe in podobna nadzorovana okolja - 10. del: Ocenjevanje čistosti površine na osnovi koncentracije onesnaževal (ISO 14644-10:2022)

General Information

Status
Published
Public Enquiry End Date
20-Mar-2022
Publication Date
07-Jun-2022
Technical Committee
Current Stage
6060 - National Implementation/Publication (Adopted Project)
Start Date
25-May-2022
Due Date
30-Jul-2022
Completion Date
08-Jun-2022

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Standards Content (sample)

SLOVENSKI STANDARD
SIST EN ISO 14644-10:2022
01-julij-2022
Nadomešča:
SIST EN ISO 14644-10:2013

Čiste sobe in podobna nadzorovana okolja - 10. del: Ocenjevanje čistosti površine

na osnovi koncentracije onesnaževal (ISO 14644-10:2022)

Cleanrooms and associated controlled environments - Part 10: Assessment of surface

cleanliness for chemical contamination (ISO 14644-10:2022)
Reinräume und zugehörige Reinraumbereiche - Teil 10: Bewertung der chemischen
Oberflächenreinheit (ISO 14644‑10:2022)

Salles propres et environnements maîtrisés apparentés - Partie 10: Évaluation de la

propreté chimique des surfaces (ISO 14644-10:2022)
Ta slovenski standard je istoveten z: EN ISO 14644-10:2022
ICS:
13.040.35 Brezprašni prostori in Cleanrooms and associated
povezana nadzorovana controlled environments
okolja
SIST EN ISO 14644-10:2022 en,fr,de

2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

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SIST EN ISO 14644-10:2022
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SIST EN ISO 14644-10:2022
EN ISO 14644-10
EUROPEAN STANDARD
NORME EUROPÉENNE
May 2022
EUROPÄISCHE NORM
ICS 13.040.35 Supersedes EN ISO 14644-10:2013
English Version
Cleanrooms and associated controlled environments - Part
10: Assessment of surface cleanliness for chemical
contamination (ISO 14644-10:2022)

Salles propres et environnements maîtrisés apparentés Reinräume und zugehörige Reinraumbereiche - Teil

- Partie 10: Évaluation de la propreté chimique des 10: Bewertung der chemischen Oberflächenreinheit

surfaces (ISO 14644-10:2022) (ISO 14644-10:2022)
This European Standard was approved by CEN on 1 May 2022.

CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this

European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references

concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN

member.

This European Standard exists in three official versions (English, French, German). A version in any other language made by

translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management

Centre has the same status as the official versions.

CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,

Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway,

Poland, Portugal, Republic of North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and

United Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION
EUROPÄISCHES KOMITEE FÜR NORMUNG
CEN-CENELEC Management Centre: Rue de la Science 23, B-1040 Brussels

© 2022 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 14644-10:2022 E

worldwide for CEN national Members.
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SIST EN ISO 14644-10:2022
EN ISO 14644-10:2022 (E)
Contents Page

European foreword ....................................................................................................................................................... 3

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SIST EN ISO 14644-10:2022
EN ISO 14644-10:2022 (E)
European foreword

This document (EN ISO 14644-10:2022) has been prepared by Technical Committee ISO/TC 209

"Cleanrooms and associated controlled environments" in collaboration with Technical Committee

CEN/TC 243 “Cleanroom technology” the secretariat of which is held by BSI.

This European Standard shall be given the status of a national standard, either by publication of an

identical text or by endorsement, at the latest by November 2022, and conflicting national standards

shall be withdrawn at the latest by November 2022.

Attention is drawn to the possibility that some of the elements of this document may be the subject of

patent rights. CEN shall not be held responsible for identifying any or all such patent rights.

This document supersedes EN ISO 14644-10:2013.

Any feedback and questions on this document should be directed to the users’ national standards

body/national committee. A complete listing of these bodies can be found on the CEN website.

According to the CEN-CENELEC Internal Regulations, the national standards organizations of the

following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria,

Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland,

Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Republic of

North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the

United Kingdom.
Endorsement notice

The text of ISO 14644-10:2022 has been approved by CEN as EN ISO 14644-10:2022 without any

modification.
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SIST EN ISO 14644-10:2022
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SIST EN ISO 14644-10:2022
INTERNATIONAL ISO
STANDARD 14644-10
Second edition
2022-05
Cleanrooms and associated controlled
environments —
Part 10:
Assessment of surface cleanliness for
chemical contamination
Salles propres et environnements maîtrisés apparentés —
Partie 10: Évaluation de la propreté chimique des surfaces
Reference number
ISO 14644-10:2022(E)
© ISO 2022
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SIST EN ISO 14644-10:2022
ISO 14644-10:2022(E)
COPYRIGHT PROTECTED DOCUMENT
© ISO 2022

All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may

be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on

the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below

or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: +41 22 749 01 11
Email: copyright@iso.org
Website: www.iso.org
Published in Switzerland
© ISO 2022 – All rights reserved
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SIST EN ISO 14644-10:2022
ISO 14644-10:2022(E)
Contents Page

Foreword ........................................................................................................................................................................................................................................iv

1 Scope ................................................................................................................................................................................................................................. 1

2 Normative references ..................................................................................................................................................................................... 1

3 Terms and definitions .................................................................................................................................................................................... 1

4 Testing and grading surface chemical levels ......................................................................................................................... 2

4.1 Principles for testing the surface chemical contamination levels of clean surfaces

in cleanrooms and controlled environments .............................................................................................................. 2

4.2 ISO SCC descriptor format ............................................................................................................................................................ 2

4.3 ISO-SCC grade level ............................................................................................................................................................................. 4

4.4 Converter for substances into surface atomic concentration ....................................................................... 4

5 Measuring the cleanliness of surfaces for chemical contamination and

demonstration of grade level compliance ................................................................................................................................. 5

5.1 Criteria for good cleanliness assessment ........................................................................................................................ 5

5.2 Documentation and reporting .................................................................................................................................................. 6

5.2.1 Principle ..................................................................................................................................................................................... 6

5.2.2 Testing ......................................................................................................................................................................................... 6

5.2.3 Test report ................................................................................................................................................................................ 6

Annex A (informative) Conversion between different unit expressions of surface

concentration for chemical substances ....................................................................................................................................... 8

Annex B (informative) Parameters influencing testing and interpretation of results ..............................15

Annex C (informative) Essential considerations for a good cleanliness assessment....................................16

Annex D (informative) Methods for testing surface cleanliness for chemical concentration .............17

Annex E (informative) Test record documentation ..........................................................................................................................29

Bibliography .............................................................................................................................................................................................................................30

iii
© ISO 2022 – All rights reserved
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SIST EN ISO 14644-10:2022
ISO 14644-10:2022(E)
Foreword

ISO (the International Organization for Standardization) is a worldwide federation of national standards

bodies (ISO member bodies). The work of preparing International Standards is normally carried out

through ISO technical committees. Each member body interested in a subject for which a technical

committee has been established has the right to be represented on that committee. International

organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.

ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of

electrotechnical standardization.

The procedures used to develop this document and those intended for its further maintenance are

described in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the

different types of ISO documents should be noted. This document was drafted in accordance with the

editorial rules of the ISO/IEC Directives, Part 2 (see www.iso.org/directives).

Attention is drawn to the possibility that some of the elements of this document may be the subject of

patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of

any patent rights identified during the development of the document will be in the Introduction and/or

on the ISO list of patent declarations received (see www.iso.org/patents).

Any trade name used in this document is information given for the convenience of users and does not

constitute an endorsement.

For an explanation of the voluntary nature of standards, the meaning of ISO specific terms and

expressions related to conformity assessment, as well as information about ISO's adherence to

the World Trade Organization (WTO) principles in the Technical Barriers to Trade (TBT), see

www.iso.org/iso/foreword.html.

This document was prepared by Technical Committee ISO/TC 209, Cleanrooms and associated controlled

environments, in collaboration with the European Committee for Standardization (CEN) Technical

Committee CEN/TC 243, Cleanroom technology, in accordance with the Agreement on technical

cooperation between ISO and CEN (Vienna Agreement).

This second edition cancels and replaces the first edition (ISO 14644-10:2013), of which it constitutes a

minor revision. The changes are as follows:

— the term class (classification, classified) changed to grade or assessment where appropriate;

— ISO 14644-1 moved from Clause 2 to the Bibliography and ISO 14644-6 removed (document

withdrawn);
— minor editorial changes.
A list of all parts in the ISO 14644 series can be found on the ISO website.

Any feedback or questions on this document should be directed to the user’s national standards body. A

complete listing of these bodies can be found at www.iso.org/members.html.
© ISO 2022 – All rights reserved
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SIST EN ISO 14644-10:2022
INTERNATIONAL STANDARD ISO 14644-10:2022(E)
Cleanrooms and associated controlled environments —
Part 10:
Assessment of surface cleanliness for chemical
contamination
1 Scope

This document establishes appropriate testing processes to determine the cleanliness of surfaces in

cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions,

atoms and particles). This document is applicable to all solid surfaces in cleanrooms and associated

controlled environments such as walls, ceilings, floors, worksurfaces, tools, equipment and devices.

NOTE 1 For the purpose of this document, consideration is only given to the chemical characteristics of

a particle. The physical properties of the particle are not considered and this document does not cover the

interaction between the contamination and the surface.

NOTE 2 This document does not include the contamination generation process or any time-dependent

influences (e.g. deposition, sedimentation, ageing) or process-dependent activities such as transportation and

handling. Neither does it include guidance on statistical quality-control techniques to ensure compliance.

2 Normative references
There are no normative references in this document.
3 Terms and definitions
For the purposes of this document, the following terms and definitions apply.

ISO and IEC maintain terminology databases for use in standardization at the following addresses:

— ISO Online browsing platform: available at https:// www .iso .org/ obp
— IEC Electropedia: available at https:// www .electropedia .org/
3.1
air cleanliness by chemical concentration
ACC

level, expressed as an ISO grade level N, which represents the maximum allowable concentration of a

given chemical species or group of chemical species, expressed in grams per cubic metre (g/m )

Note 1 to entry: This definition does not include macromolecules of biological origin, which are judged to be

particles.
3.2
contaminant category

common name for a group of compounds with a specific and similar deleterious effect when deposited

on the surface of interest
3.3
chemical contamination

chemical (non-particulate) substances that can have a deleterious effect on the product, process or

equipment
© ISO 2022 – All rights reserved
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SIST EN ISO 14644-10:2022
ISO 14644-10:2022(E)
3.4
solid surface
boundary between the solid phase and a second phase
3.5
surface
boundary between two phases

Note 1 to entry: One of the phases is normally a solid phase and the other a gas, a liquid or another solid.

3.6
surface cleanliness by chemical concentration
SCC
condition of a surface with respect to its chemical concentration
3.7
surface cleanliness by chemical concentration
SCC

common logarithm (to the base of 10) of the chemical concentration on a surface in

grams per square metre (g/m )
4 Testing and grading surface chemical levels

4.1 Principles for testing the surface chemical contamination levels of clean surfaces in

cleanrooms and controlled environments

The testing and grading levels shall be determined by the use of a descriptor designated “ISO-SCC”. This

is used to indicate the amount of total chemical concentration measured on a surface for an individual

chemical substance or group of substances. The SCC level is based upon the concentration of chemicals

on a surface as calculated using Formula (1) (given in 4.2) and expressed in g/m . For this calculation

all other units shall be converted to g/m . In specific cases where low concentrations need to be

determined, the concentration level of chemical on a surface may be expressed in atoms per square

centimetre, ISO-SCC , using Formula (2) in 4.4.
_atomic
4.2 ISO SCC descriptor format

The SCC level shall be designated by a grading number N , where N is the common logarithm index

SCC SCC

of concentration C , expressed in g/m . The SCC grade level statement shall always be connected with

SCC

a chemical substance or group of substances to which it is related. Thirteen distinct grading levels are

used from 0 to −12, where level 0 is most contaminated. Intermediate concentrations may be specified,

with 0,1 being the smallest permitted increment of N . C is determined from Formula (1), in terms

SCC SCC
of N :
SCC
SCC
C =10 (1)
SCC
Therefore, NC=log .
SCCS10 CC

C , the concentration of the specified chemical substance or group of substances, is expressed in g/

SCC

m . The measured chemical concentration on a surface shall not exceed the level of SCC, C to satisfy

SCC
the predetermined SCC that is agreed between the customer and the supplier.
In all cases, N grade level numbers shall include the negative sign.
SCC

NOTE 1 An SCC grade level number is only valid in connection with a descriptor (see 4.3).

NOTE 2 For converting from gravimetric concentration (g/m ) to numeric concentration (number of atoms,

molecules or ions per unit area), see 4.4.
© ISO 2022 – All rights reserved
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SIST EN ISO 14644-10:2022
ISO 14644-10:2022(E)

Table 1 and Figure 1 further illustrate the ISO-SCC designation as a function of chemical concentration

on a surface.

Note also the parameters listed in Annex B that influence measured chemical levels.

Table 1 — ISO-SCC grading levels
ISO-SCC level Concentration Concentration Concentration
2 2 2
g/m μg/m ng/m
0 6 9
0 10 10 10
−1 5 8
−1 10 10 10
−2 4 7
−2 10 10 10
−3 3 6
−3 10 10 10
−4 2 5
−4 10 10 10
−5 1 4
−5 10 10 10
−6 0 3
−6 10 10 10
−7 −1 2
−7 10 10 10
−8 −2 1
−8 10 10 10
−9 −3 0
−9 10 10 10
−10 −4 −1
−10 10 10 10
−11 −5 −2
−11 10 10 10
−12 −6 −3
−12 10 10 10
© ISO 2022 – All rights reserved
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SIST EN ISO 14644-10:2022
ISO 14644-10:2022(E)
Key
X surface mass concentration (g/m )
X surface mass concentration (μg/m )
X surface mass concentration (ng/m )
Y ISO-SCC grade level
Figure 1 — ISO-SCC grade levels as a function of concentration
4.3 ISO-SCC grade level

An SCC grade level is only valid in connection with a descriptor that includes the chemical substance

or group of substances for which this level number is valid. The ISO-SCC descriptor is expressed in the

format ISO-SCC Level N (X), where X is a chemical substance or group of chemical substances.

EXAMPLE 1 With an N-Methyl-2-pyrrolidone (NMP) sample, the measured value of chemical contamination

2 2

on a surface was 9,8E-7 g/m . This is within the grade level limit of 1E-6 g/m for Level −6. The designation

would be: “ISO-SCC Level −6 (NMP).”

EXAMPLE 2 With an organic compound sample, the measured value was 6E-5 g/m of total organic

compounds (TOC). This is within the grade level limit of 1E-4 g/m for Level −4. The designation would be: “ISO-

SCC Level −4 (TOC).”
4.4 Converter for substances into surface atomic concentration

Very low concentrations are usually measured in surface number concentrations in the units of number

of molecules, atoms or ions per surface area (1/m ). For grade level determination purposes, these

© ISO 2022 – All rights reserved
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SIST EN ISO 14644-10:2022
ISO 14644-10:2022(E)

should be converted into surface mass concentrations in the unit mass per surface area (g/m ). This

conversion is made using Formula (2):
MC()
SCC_number
C = (2)
SCC
where

C is the surface number concentration = number of molecules, atoms or ions per surface

SCC_number
area (1/m );
C is the surface mass concentration (g/m );
SCC
N is Avogadro’s number (6,02 × 10 /mol);
M is the molar mass of atomic, molecular or ionic species (g/mol).

For information purposes, Figure A.4 in Annex A illustrates the relationship between chemical

concentration on a surface (expressed in g/m ) and the atomic concentration on a surface (expressed in

atoms/m ) for typical substances.
5 Measuring the cleanliness of surfaces for chemical contamination and
demonstration of grade level compliance
5.1 Criteria for good cleanliness assessment

Figure D.2 in Annex D illustrates how to measure different types of contamination, showing differing

sampling and measuring methods.

Tests performed to demonstrate compliance shall be conducted in a laboratory environment where

the airborne chemical contaminant and the airborne particle contaminant levels do not negatively

influence the grade determination. Suitable measurement methods and calibrated instruments shall

be used for all tests. The environment, measurement methods and instruments shall be agreed upon

between customer and supplier.

Additional test essentials are discussed in Annex C, while Annex D details measurement methods for

demonstrating compliance.

The list of typical measurement methods is not exhaustive. Alternative methods that produce results

with comparable accuracy may be specified by agreement between customer and supplier.

Measurement by different methods, even when those methods are correctly applied, may produce

different results of equal validity.
Repeated measurements are recommended as part of the statistical approach.

Specific problems, such as concentration spikes, may occur when measuring high levels of cleanliness.

Special quality-control techniques will then be required, as explained in Figure D.4 in Annex D.

Precautions should be taken to reduce electrostatic charge around the test zone, as electrostatic charge

enhances chemical deposition onto surfaces. If the surface is neither conductive nor grounded or

charge-neutralized, electrostatic charges can occur. Therefore, test results can vary.

For typical methods of measurement for testing surface cleanliness by chemical concentration, refer to

Annex D.
© ISO 2022 – All rights reserved
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SIST EN ISO 14644-10:2022
ISO 14644-10:2022(E)
5.2 Documentation and reporting
5.2.1 Principle

Compliance with surface cleanliness chemical concentration (SCC) grade level requirement, as

specified by the customer, is verified by performing measurements and by providing documentation of

the results and conditions of measurement. Details for demonstrating compliance shall be agreed upon

between customer and supplier in advance.
5.2.2 Testing

Tests performed to demonstrate compliance shall be conducted using suitable measurement methods

together with calibrated instruments whenever possible.

Measurement methods for demonstrating compliance are described in Annex D. The list of typical

methods described is not exhaustive. The testing environment shall be agreed between customer and

supplier. Alternative methods of comparable accuracy also may be specified by agreement between

customer and supplier.

Measurement by different methods, even when correctly applied, may produce different results of

equal validity.
Repeated measurements are recommended.
The testing environment should be agreed between customer and supplier.
5.2.3 Test report

The results from testing each surface shall be recorded and submitted as a comprehensive report,

together with a statement of compliance or non-compliance to the required SCC grade level. The test

report shall include as a minimum the following:
a) name and address of the testing organization;
b) name of the person performing the test;
c) measurement environment;
d) date, time and duration of sampling;
e) time of measurement;
f) a reference to this document, i.e. ISO 14644-10:2022;

g) clear identification of the location of the surface measured and specific designations for coordinates

of the surface, if applicable;

h) surface cleanliness by chemical concentration level with designation expressed as SCC grade level

i) acceptance criteria for the clean surface if agreed between customer and supplier;

j) specified measurement method(s), equipment resolution and detection limits;

k) details of the test procedure used, with any available data describing deviations from the test

procedure (if agreed);

l) identification of the instrument(s) used and current calibration certificate(s);

m) number of measurements performed;
© ISO 2022 – All rights reserved
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SIST EN ISO 14644-10:2022
ISO 14644-10:2022(E)

n) test results, including chemical concentration(s) data for given substances, for all measurements

performed;

o) surface condition, i.e. after final cleaning, before or after packaging, with agreement on type and

quality of packaging required.

An example of how this test report may be constructed can be found in Annex E. Other variations of the

test report which are agreeable to both the customer and supplier may be used.
© ISO 2022 – All rights reserved
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SIST EN ISO 14644-10:2022
ISO 14644-10:2022(E)
Annex A
(informative)
Conversion between different unit expressions of surface
concentration for chemical substances
A.1 Principle

In addition to the unit of surface mass concentration of g/m , there exist several different units

to express surface number concentration of an organic compound or a group of organics such as

2 2

molecules/m , based on a number of organic molecules, and atoms C/m , based on a number of atoms of

carbon composing organic compound(s) under consideration for each contaminant category.

A.2 Examples

For information purposes, Tables A.1 to A.3 illustrate how the different units of surface number

2 2

concentrations (molecules/m or atoms C/m ) can be converted into surface mass concentrations in

2 2

terms of carbon (g C/m ) or whole compound (g/m ), respectively, using the examples of heptane,

hexadecane and di (2-ethylhexyl) phthalate.

Table A.1 — Illustration of the relationship between unit of surface concentration [g/m ] and

2 2

surface number concentration [molecules/m , atoms C/m ] for heptane (C H ), CAS No. 142–

7 16
82–5
Symbol Unit M = 100,2, N = 7
Example 1 Example 2 Example 3 Example 4
Surface number mo-
C [molecules/m ] 1,00E+19 1,42E+18 7,16E+16 6,01E+16
molecule
lecular concentration
Surface number con-
centration in terms C [atoms C/m ] 7,00E+19 1,00E+19 5,00E+17 4,19E+17
carbon_number
of carbon
Surface mass concen-
tration in terms of C [g C/m ] 1,39E-3 1,98E-4 1,00E-4 8,39E-6
carbon_mass
carbon
Surface mass concen-
C [g/m ] 1,66E-3 2,36E-4 1,19E-4 1,00E-6
SCC
tration
© ISO 2022 – All rights reserved
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SIST EN ISO 14644-10:2022
ISO 14644-10:2022(E)

Table A.2 — Illustration of the relationship between unit of surface concentration [g/m ] and

2 2

surface number concentration [molecules/m , atoms C/m ] for hexadecane (C H ), CAS No.

17 34
544–76–3
Symbol Unit M = 226,4, N = 17
Example 1 Example 2 Example 3 Example 4
Surface number mo-
C [molecules/m ] 1,00E+19 6,20E+18 3,12E+16 2,60E+16
molecule
lecular concentration
Surface number con-
centration in terms C [atoms C/m ] 1,59E+20 1,00E+19 5,00E+17 4,20E+17
carbon_atom
of carbon
Surface mass concen-
tration in terms of C [g C/m ] 3,19E-3 2,00E-4 1,00E-4 8,49E-6
carbon_mass
carbon
Surface mass concen-
C [g/m ] 3,77E-3 2,35E-4 1,17E-4 1,00E-4
SCC
tration

Table A.3 — Illustration of the relationship between unit of surface concentration [g/m ] and

2 2

surface number concentration [molecules/m , atoms C/m ] for di (2-ethylhexyl) phthalate

(C H O ), CAS No. 117–817–7
24 38 4
Symbol Unit M = 390,6, N = 24
Example 1 Example 2 Example 3 Example 4
Surface number molecular
C [molecules/m ] 1,00E+19 4,20E+18 2,00E+16 1,50E+16
molecule
concentration
Surface number concentration C
carbon_ 2
[atoms C/m ] 2,39E+20 1,00E+19 4,89E+17 3,60E+17
in terms of carbon
atom
Surface mass concentration in C
carbon_ 2
[g C/m ] 4,89E-3 2,04E-4 1,00E-4 7,37E-6
terms of carbon
mass
Surface mass concentration C [g/m ] 6,62E-3 2,76E-4 1,35E-4 1,00E-4
SCC

Each surface number concentration can be converted to the original surface concentration from

Formulae (A.1) to (A.3):
M[]gm/ ol
   
CCgm//= moleculesm × (A.1)
SCCmolecule
   
N molecules//mol
 
C atoms Cm/
...

SLOVENSKI STANDARD
oSIST prEN ISO 14644-10:2022
01-marec-2022

Čiste sobe in podobna nadzorovana okolja - 10. del: Ocenjevanje čistosti površine

zaradi koncentracije onesnaževal (ISO/FDIS 14644-10:2021)

Cleanrooms and associated controlled environments - Part 10: Assessment of surface

cleanliness for chemical contamination (ISO/FDIS 14644-10:2021)

Reinräume und zugehörige Reinraumbereiche - Teil 10: Klassifizierung der chemischen

Oberflächenreinheit (ISO/FDIS 14644-10:2021)

Salles propres et environnements maîtrisés apparentés - Partie 10: Évaluation de la

propreté des surfaces en matière de contamination chimique (ISO/FDIS 14644-10:2021)

Ta slovenski standard je istoveten z: prEN ISO 14644-10
ICS:
13.040.35 Brezprašni prostori in Cleanrooms and associated
povezana nadzorovana controlled environments
okolja
oSIST prEN ISO 14644-10:2022 en,fr,de

2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

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oSIST prEN ISO 14644-10:2022
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oSIST prEN ISO 14644-10:2022
FINAL
INTERNATIONAL ISO/FDIS
DRAFT
STANDARD 14644-10
ISO/TC 209
Cleanrooms and associated controlled
Secretariat: ANSI
environments —
Voting begins on:
2021-12-27
Part 10:
Voting terminates on:
Assessment of surface cleanliness for
2022-03-21
chemical contamination
ISO/CEN PARALLEL PROCESSING
RECIPIENTS OF THIS DRAFT ARE INVITED TO
SUBMIT, WITH THEIR COMMENTS, NOTIFICATION
OF ANY RELEVANT PATENT RIGHTS OF WHICH
THEY ARE AWARE AND TO PROVIDE SUPPOR TING
DOCUMENTATION.
IN ADDITION TO THEIR EVALUATION AS
Reference number
BEING ACCEPTABLE FOR INDUSTRIAL, TECHNO-
ISO/FDIS 14644-10:2021(E)
LOGICAL, COMMERCIAL AND USER PURPOSES,
DRAFT INTERNATIONAL STANDARDS MAY ON
OCCASION HAVE TO BE CONSIDERED IN THE
LIGHT OF THEIR POTENTIAL TO BECOME STAN-
DARDS TO WHICH REFERENCE MAY BE MADE IN
NATIONAL REGULATIONS. © ISO 2021
---------------------- Page: 3 ----------------------
oSIST prEN ISO 14644-10:2022
ISO/FDIS 14644-10:2021(E)
COPYRIGHT PROTECTED DOCUMENT
© ISO 2021

All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may

be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on

the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below

or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: +41 22 749 01 11
Email: copyright@iso.org
Website: www.iso.org
Published in Switzerland
© ISO 2021 – All rights reserved
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oSIST prEN ISO 14644-10:2022
ISO/FDIS 14644-10:2021(E)
Contents Page

Foreword ........................................................................................................................................................................................................................................iv

1 Scope ................................................................................................................................................................................................................................. 1

2 Normative references ..................................................................................................................................................................................... 1

3 Terms and definitions .................................................................................................................................................................................... 1

4 Testing and grading surface chemical levels ......................................................................................................................... 2

4.1 Principles for testing the surface chemical contamination levels of clean surfaces

in cleanrooms and controlled environments .............................................................................................................. 2

4.2 ISO SCC descriptor format ............................................................................................................................................................ 2

4.3 ISO-SCC grade level ............................................................................................................................................................................. 4

4.4 Converter for substances into surface atomic concentration ....................................................................... 4

5 Measuring the cleanliness of surfaces for chemical contamination and

demonstration of grade level compliance ................................................................................................................................. 5

5.1 Criteria for good cleanliness assessment ........................................................................................................................ 5

5.2 Documentation and reporting .................................................................................................................................................. 6

5.2.1 Principle ..................................................................................................................................................................................... 6

5.2.2 Testing ......................................................................................................................................................................................... 6

5.2.3 Test report ................................................................................................................................................................................ 6

Annex A (informative) Conversion between different unit expressions of surface

concentration for chemical substances ....................................................................................................................................... 8

Annex B (informative) Parameters influencing testing and interpretation of results ..............................15

Annex C (informative) Essential considerations for a good cleanliness assessment....................................16

Annex D (informative) Methods for testing surface cleanliness for chemical concentration .............17

Annex E (informative) Test record documentation ..........................................................................................................................29

Bibliography .............................................................................................................................................................................................................................30

iii
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oSIST prEN ISO 14644-10:2022
ISO/FDIS 14644-10:2021(E)
Foreword

ISO (the International Organization for Standardization) is a worldwide federation of national standards

bodies (ISO member bodies). The work of preparing International Standards is normally carried out

through ISO technical committees. Each member body interested in a subject for which a technical

committee has been established has the right to be represented on that committee. International

organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.

ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of

electrotechnical standardization.

The procedures used to develop this document and those intended for its further maintenance are

described in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the

different types of ISO documents should be noted. This document was drafted in accordance with the

editorial rules of the ISO/IEC Directives, Part 2 (see www.iso.org/directives).

Attention is drawn to the possibility that some of the elements of this document may be the subject of

patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of

any patent rights identified during the development of the document will be in the Introduction and/or

on the ISO list of patent declarations received (see www.iso.org/patents).

Any trade name used in this document is information given for the convenience of users and does not

constitute an endorsement.

For an explanation of the voluntary nature of standards, the meaning of ISO specific terms and

expressions related to conformity assessment, as well as information about ISO's adherence to

the World Trade Organization (WTO) principles in the Technical Barriers to Trade (TBT), see

www.iso.org/iso/foreword.html.

This document was prepared by Technical Committee ISO/TC 209, Cleanrooms and associated controlled

environments, in collaboration with the European Committee for Standardization (CEN) Technical

Committee CEN/TC 243, Cleanroom technology, in accordance with the Agreement on technical

cooperation between ISO and CEN (Vienna Agreement).

This second edition cancels and replaces the first edition (ISO 14644-10:2013), of which it constitutes a

minor revision. The changes are as follows:

— the term class (classification, classified) changed to grade or assessment where appropriate;

— ISO 14644-1 moved from Clause 2 to the Bibliography and ISO 14644-6 removed (document

withdrawn);
— minor editorial changes.
A list of all parts in the ISO 14644 series can be found on the ISO website.

Any feedback or questions on this document should be directed to the user’s national standards body. A

complete listing of these bodies can be found at www.iso.org/members.html.
© ISO 2021 – All rights reserved
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oSIST prEN ISO 14644-10:2022
FINAL DRAFT INTERNATIONAL STANDARD ISO/FDIS 14644-10:2021(E)
Cleanrooms and associated controlled environments —
Part 10:
Assessment of surface cleanliness for chemical
contamination
1 Scope

This document establishes appropriate testing processes to determine the cleanliness of surfaces in

cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions,

atoms and particles). This document is applicable to all solid surfaces in cleanrooms and associated

controlled environments such as walls, ceilings, floors, worksurfaces, tools, equipment and devices.

NOTE 1 For the purpose of this document, consideration is only given to the chemical characteristics of

a particle. The physical properties of the particle are not considered and this document does not cover the

interaction between the contamination and the surface.

NOTE 2 This document does not include the contamination generation process or any time-dependent

influences (e.g. deposition, sedimentation, ageing) or process-dependent activities such as transportation and

handling. Neither does it include guidance on statistical quality-control techniques to ensure compliance.

2 Normative references
There are no normative references in this document.
3 Terms and definitions
For the purposes of this document, the following terms and definitions apply.

ISO and IEC maintain terminology databases for use in standardization at the following addresses:

— ISO Online browsing platform: available at https:// www .iso .org/ obp
— IEC Electropedia: available at https:// www .electropedia .org/
3.1
air cleanliness by chemical concentration
ACC

level, expressed as an ISO grade level N, which represents the maximum allowable concentration of a

given chemical species or group of chemical species, expressed in grams per cubic metre (g/m )

Note 1 to entry: This definition does not include macromolecules of biological origin, which are judged to be

particles.
3.2
contaminant category

common name for a group of compounds with a specific and similar deleterious effect when deposited

on the surface of interest
3.3
chemical contamination

chemical (non-particulate) substances that can have a deleterious effect on the product, process or

equipment
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oSIST prEN ISO 14644-10:2022
ISO/FDIS 14644-10:2021(E)
3.4
solid surface
boundary between the solid phase and a second phase
3.5
surface
boundary between two phases

Note 1 to entry: One of the phases is normally a solid phase and the other a gas, a liquid or another solid.

3.6
surface cleanliness by chemical concentration
SCC
condition of a surface with respect to its chemical concentration
3.7
surface cleanliness by chemical concentration
SCC

common logarithm (to the base of 10) of the chemical concentration on a surface in

grams per square metre (g/m )
4 Testing and grading surface chemical levels

4.1 Principles for testing the surface chemical contamination levels of clean surfaces in

cleanrooms and controlled environments

The testing and grading levels shall be determined by the use of a descriptor designated “ISO-SCC”. This

is used to indicate the amount of total chemical concentration measured on a surface for an individual

chemical substance or group of substances. The SCC level is based upon the concentration of chemicals

on a surface as calculated using Formula (1) (given in 4.2) and expressed in g/m . For this calculation

all other units shall be converted to g/m . In specific cases where low concentrations need to be

determined, the concentration level of chemical on a surface may be expressed in atoms per square

centimetre, ISO-SCC , using Formula (2) in 4.4.
_atomic
4.2 ISO SCC descriptor format

The SCC level shall be designated by a grading number N , where N is the common logarithm index

SCC SCC

of concentration C , expressed in g/m . The SCC grade level statement shall always be connected with

SCC

a chemical substance or group of substances to which it is related. Nine distinct grading levels are used

from zero to −8 where level 0 is most contaminated. Intermediate concentrations may be specified,

with 0,1 being the smallest permitted increment of N . C is determined from Formula (1), in terms

SCC SCC
of N :
SCC
SCC
C =10 (1)
SCC
Therefore, NC=log .
SCCS10 CC

C , the concentration of the specified chemical substance or group of substances, is expressed in g/

SCC

m . The measured chemical concentration on a surface shall not exceed the level of SCC, C to satisfy

SCC
the predetermined SCC that is agreed between the customer and the supplier.
In all cases, N grade level numbers shall include the negative sign.
SCC

NOTE 1 An SCC grade level number is only valid in connection with a descriptor (see 4.3).

NOTE 2 For converting from gravimetric concentration (g/m ) to numeric concentration (number of atoms,

molecules or ions per unit area), see 4.4.
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oSIST prEN ISO 14644-10:2022
ISO/FDIS 14644-10:2021(E)

Table 1 and Figure 1 further illustrate the ISO-SCC designation as a function of chemical concentration

on a surface.

Note also the parameters listed in Annex B that influence measured chemical levels.

Table 1 — ISO-SCC grading levels
ISO-SCC level Concentration Concentration Concentration
2 2 2
g/m μg/cm ng/cm
0 6 9
0 10 10 10
−1 5 8
−1 10 10 10
−2 4 7
−2 10 10 10
−3 3 6
−3 10 10 10
−4 2 5
−4 10 10 10
−5 1 4
−5 10 10 10
−6 0 3
−6 10 10 10
−7 −1 2
−7 10 10 10
−8 −2 1
−8 10 10 10
−9 −3 0
−9 10 10 10
−10 −4 −1
−10 10 10 10
−11 −5 −2
−11 10 10 10
−12 −6 −3
−12 10 10 10
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oSIST prEN ISO 14644-10:2022
ISO/FDIS 14644-10:2021(E)
Key
X surface mass concentration (g/m )
X surface mass concentration (μg/cm )
X surface mass concentration (ng/cm )
Y ISO-SCC grade level
Figure 1 — ISO-SCC grade levels as a function of concentration
4.3 ISO-SCC grade level

An SCC grade level is only valid in connection with a descriptor that includes the chemical substance

or group of substances for which this level number is valid. The ISO-SCC descriptor is expressed in the

format ISO-SCC Level N (X), where X is a chemical substance or group of chemical substances.

EXAMPLE 1 With an N-Methyl-2-pyrrolidone (NMP) sample, the measured value of chemical contamination

2 2

on a surface was 9,8E-7 g/m . This is within the grade level limit of 1E-6 g/m for Level −6. The designation

would be: “ISO-SCC Level −6 (NMP).”

EXAMPLE 2 With an organic compound sample, the measured value was 6E-5 g/m of total organic

compounds (TOC). This is within the grade level limit of 1E-4 g/m for Level −4. The designation would be: “ISO-

SCC Level −4 (TOC).”
4.4 Converter for substances into surface atomic concentration

Very low concentrations are usually measured in surface number concentrations in the units of number

of molecules, atoms or ions per surface area (1/m ). For grade level determination purposes, these

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oSIST prEN ISO 14644-10:2022
ISO/FDIS 14644-10:2021(E)

should be converted into surface mass concentrations in the unit mass per surface area (g/m ). This

conversion is made using Formula (2):
MC()
SCC_number
C = (2)
SCC
where

C is the surface number concentration = number of molecules, atoms or ions per surface

SCC_number
area (1/m );
C is the surface mass concentration (g/m );
SCC
N is Avogadro’s number (6,02 × 10 /mol);
M is the molar mass of atomic, molecular or ionic species (g/mol).

For information purposes, Figure A.4 in Annex A illustrates the relationship between chemical

concentration on a surface (expressed in g/m ) and the atomic concentration on a surface (expressed in

atoms/m ) for typical substances.
5 Measuring the cleanliness of surfaces for chemical contamination and
demonstration of grade level compliance
5.1 Criteria for good cleanliness assessment

Figure D.2 in Annex D illustrates how to measure different types of contamination, showing differing

sampling and measuring methods.

Tests performed to demonstrate compliance shall be conducted in a laboratory environment where

the airborne chemical contaminant and the airborne particle contaminant levels do not negatively

influence the grade determination. Suitable measurement methods and calibrated instruments shall

be used for all tests. The environment, measurement methods and instruments shall be agreed upon

between customer and supplier.

Additional test essentials are discussed in Annex C, while Annex D details measurement methods for

demonstrating compliance.

The list of typical measurement methods is not exhaustive. Alternative methods that produce results

with comparable accuracy may be specified by agreement between customer and supplier.

Measurement by different methods, even when those methods are correctly applied, may produce

different results of equal validity.
Repeated measurements are recommended as part of the statistical approach.

Specific problems, such as concentration spikes, may occur when measuring high levels of cleanliness.

Special quality-control techniques will then be required, as explained in Figure D.4 in Annex D.

Precautions should be taken to reduce electrostatic charge around the test zone, as electrostatic charge

enhances chemical deposition onto surfaces. If the surface is neither conductive nor grounded or

charge-neutralized, electrostatic charges can occur. Therefore, test results can vary.

For typical methods of measurement for testing surface cleanliness by chemical concentration, refer to

Annex D.
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oSIST prEN ISO 14644-10:2022
ISO/FDIS 14644-10:2021(E)
5.2 Documentation and reporting
5.2.1 Principle

Compliance with surface cleanliness chemical concentration (SCC) grade level requirement, as

specified by the customer, is verified by performing measurements and by providing documentation of

the results and conditions of measurement. Details for demonstrating compliance shall be agreed upon

between customer and supplier in advance.
5.2.2 Testing

Tests performed to demonstrate compliance shall be conducted using suitable measurement methods

together with calibrated instruments whenever possible.

Measurement methods for demonstrating compliance are described in Annex D. The list of typical

methods described is not exhaustive. The testing environment shall be agreed between customer and

supplier. Alternative methods of comparable accuracy also may be specified by agreement between

customer and supplier.

Measurement by different methods, even when correctly applied, may produce different results of

equal validity.
Repeated measurements are recommended.
The testing environment should be agreed between customer and supplier.
5.2.3 Test report

The results from testing each surface shall be recorded and submitted as a comprehensive report,

together with a statement of compliance or non-compliance to the required SCC grade level. The test

report shall include as a minimum the following:
a) name and address of the testing organization;
b) name of the person performing the test;
c) measurement environment;
d) date, time and duration of sampling;
e) time of measurement;
f) a reference to this document, i.e. ISO 14644-10:—;

g) clear identification of the location of the surface measured and specific designations for coordinates

of the surface, if applicable;

h) surface cleanliness by chemical concentration level with designation expressed as SCC grade level

i) acceptance criteria for the clean surface if agreed between customer and supplier;

j) specified measurement method(s), equipment resolution and detection limits;

k) details of the test procedure used, with any available data describing deviations from the test

procedure (if agreed);

l) identification of the instrument(s) used and current calibration certificate(s);

m) number of measurements performed;
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oSIST prEN ISO 14644-10:2022
ISO/FDIS 14644-10:2021(E)

n) test results, including chemical concentration(s) data for given substances, for all measurements

performed;

o) surface condition, i.e. after final cleaning, before or after packaging, with agreement on type and

quality of packaging required.

An example of how this test report may be constructed can be found in Annex E. Other variations of the

test report which are agreeable to both the customer and supplier may be used.
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oSIST prEN ISO 14644-10:2022
ISO/FDIS 14644-10:2021(E)
Annex A
(informative)
Conversion between different unit expressions of surface
concentration for chemical substances
A.1 Principle

In addition to the unit of surface mass concentration of g/m , there exist several different units

to express surface number concentration of an organic compound or a group of organics such as

2 2

molecules/m , based on a number of organic molecules, and atoms C/m , based on a number of atoms of

carbon composing organic compound(s) under consideration for each contaminant category.

A.2 Examples

For information purposes, Tables A.1 to A.3 illustrate how the different units of surface number

2 2

concentrations (molecules/m or atoms C/m ) can be converted into surface mass concentrations in

2 2

terms of carbon (g C/m ) or whole compound (g/m ), respectively, using the examples of heptane,

hexadecane and di (2-ethylhexyl) phthalate.

Table A.1 — Illustration of the relationship between unit of surface concentration [g/m ] and

2 2

surface number concentration [molecules/m , atoms C/m ] for heptane (C H ), CAS No. 142–

7 16
82–5
Symbol Unit M = 100,2, N = 7
Example 1 Example 2 Example 3 Example 4
Surface number mo-
C [molecules/m ] 1,00E+19 1,42E+18 7,16E+16 6,01E+16
molecule
lecular concentration
Surface number con-
centration in terms C [atoms C/m ] 7,00E+19 1,00E+19 5,00E+17 4,19E+17
carbon_number
of carbon
Surface mass concen-
tration in terms of C [g C/m ] 1,39E-3 1,98E-4 1,00E-4 8,39E-6
carbon_mass
carbon
Surface mass concen-
C [g/m ] 1,66E-3 2,36E-4 1,19E-4 1,00E-6
SCC
tration

Table A.2 — Illustration of the relationship between unit of surface concentration [g/m ] and

2 2

surface number concentration [molecules/m , atoms C/m ] for hexadecane (C H ), CAS No.

17 34
544–76–3
Symbol Unit M = 226,4, N = 17
Example 1 Example 2 Example 3 Example 4
Surface number mo-
C [molecules/m ] 1,00E+19 6,20E+18 3,12E+16 2,60E+16
molecule
lecular concentration
Surface number con-
centration in terms C [atoms C/m ] 1,59E+20 1,00E+19 5,00E+17 4,20E+17
carbon_atom
of carbon
Surface mass concen-
tration in terms of C [g C/m ] 3,19E-3 2,00E-4 1,00E-4 8,49E-6
carbon_mass
carbon
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oSIST prEN ISO 14644-10:2022
ISO/FDIS 14644-10:2021(E)
Table A.2 (continued)
Symbol Unit M = 226,4, N = 17
Example 1 Example 2 Example 3 Example 4
Surface mass concen-
C [g/m ] 3,77E-3 2,35E-4 1,17E-4 1,00E-4
SCC
tration

Table A.3 — Illustration of the relationship between unit of surface concentration [g/m ] and

2 2

surface number concentration [molecules/m , atoms C/m ] for di (2-ethylhexyl) phthalate

(C H O ), CAS No. 117–817–7
24 38 4
Symbol Unit M = 390,6, N = 24
Example 1 Example 2 Example 3 Example 4
Surface number molecular
C [molecules/m ] 1,00E+19 4,20E+18 2,00E+16 1,50E+16
molecule
concentration
Surface number concentration C
carbon_ 2
[atoms C/m ] 2,39E+20 1,00E+19 4,89E+17 3,60E+17
in terms of carbon
atom
Surface mass concentration in C
carbon_ 2
[g C/m ] 4,89E-3 2,04E-4 1,00E-4 7,37E-6
terms of carbon
mass
Surface mass concentration C [g/m ] 6,62E-3 2,76E-4 1,35E-4 1,00E-4
SCC

Each surface number concentration can be converted to the original surface concentration from

Formulae (A.1) to (A.3):
M gm/ ol
   
CCgm//= moleculesm × (A.1)
SCCmolecule
   
N []molecules//mol
 
C atoms Cm/
carbon _ atom M[]gm/ ol
 
 
C gm/ = × (A.2)
SCC
 
N atoms Cm/ olecule N moleculesm/ ol
[ ]] []
c a
 
C [/g Cm ]
carbon _mass
 
M [g /mol]
 
2  c 
 
C gm/ = ×M [g /mol] (A.3)
SCC
 
N [atoms C/molecule]
where
N is the number of carbon composing organic compound(s) under consideration;
M is the molar mass of carbon.

Surface number concentration with different types of unit expression based on Langmuir–Blodgett (LB)

film for typical organics is also listed in Table A.4. The surface number concentration can be obtained

from Formula (A.4):
2 13//23
 
CMgm/(= /)Nd (A.4)
SCCL_ Ba
 
where d is the density of organic compound(s) in g/m .
Table A.4 — Monolayer concentration based on Langmuir–Blodgett film
Di (2-ethylhexyl)
Heptane (C H ), Hexadecane (C H ),
7 16 17 34
phthalate (C H O ),
24 38 4
CAS No. 142–82–5 CAS No. 544–76–3
CAS No. 117–817–7
Surface number molecular con-
2,55E+18 1,62E+18 1,34E+18
centration
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Table A.4 (continued)
Di (2-ethylhexyl)
Heptane (C H ), Hexadecane (C H ),
7 16 17 34
phthalate (C H O ),
24 38 4
CAS No. 142–82–5 CAS No. 544–76–3
CAS No. 117–817–7
Surface number concentration
1,79E+19 2,59E+19 3,21E+19
in terms of carbon
Surface mass concentration in
3,56E-4 5,18E-4 6,56E-4
terms of carbon
Surface mass concentration 4,24E-4 6,10E-4 8,88E-4

For information purposes, Figures A.1 to A.4 illustrate how the different units of surface number

2 2

concentrations (molecules/m or atoms C/m ) can be converted into surface mass concentrations in

2 2
terms of carbon (g C/m ) or whole compound (g/m ), respectively.
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oSIST prEN ISO 14644-10:2022
ISO/FDIS 14644-10:2021(E)
Key
2 2

X surface molecular concentration (molecules/m ) [surface molecular concentration (molecules/cm )]

2 2
Y surface mass concentration (g/m ) [surface mass concentration (g/cm )]
surface concentration corresponding to monolayer based on LB model
1 heptane (C H ), CAS No. 142-82-5
7 16
2 hexadecane (C H ), CAS No. 544-76-3
17 34
3 di (2-ethylhexyl) phthalate (C H O ), CAS No. 117-817-7
24 38 4

Figure A.1 — The relationship between the units of surface mass concentration (g/m ) and

surface molecular concentration (molecules/m ) for typical organics
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oSIST prEN ISO 14644-10:2022
ISO/FDIS 14644-10:2021(E)
Key

X surface atomic concentration in terms of mass of carbon (grams C/m ) [surface atomic concentration in

terms of mass of carbon (grams C/cm )]
2 2
Y surface concentration (g/m ) [surface concentration (g/cm )]
surface concentration corresponding to monolayer based on LB model
1 heptane (C H ), CAS No. 142-82-5
7 16
2 hexadecane (C H ), CAS No. 544-76-3
17 34
3 di (2-ethylhexyl) phthalate (C H O ), CAS No. 117-817-7
24 38 4

Figure A.2 — The relationship between the units of surface concentration (g/m ) and surface

atomic concentrations, in terms of mass of carbon (grams C/m ) for typical organics

© ISO 2021 – All rights reserved
---------------------- Page: 18 ----------------------
oSIST prEN ISO 14644-10:2022
ISO/FDIS 14644-10:2021(E)
Key

X surface atomic concentration in terms of numbers of carbon (atoms C/m ) [surface atomic concentration in

terms of numbers of carbon (atoms C/c
...

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