Optics and photonics - Lasers and laser-related equipment - Test methods for laser beam power, energy and temporal characteristics (ISO 11554:2017)

This document specifies test methods for determining the power and energy of continuous wave and
pulsed laser beams, as well as their temporal characteristics of pulse shape, pulse duration and pulse
repetition rate. Test and evaluation methods are also given for the power stability of cw-lasers, energy
stability of pulsed lasers and pulse duration stability.
The test methods given in this document are used for the testing and characterization of lasers.

Optik und Photonik - Laser und Laseranlagen - Prüfverfahren für Leistung, Energie und Kenngrößen des Zeitverhaltens von Laserstrahlen (ISO 11554:2017)

Diese Internationale Norm legt Prüfverfahren zur Bestimmung der Leistung und Energie von Dauerstrich- und Pulslasern sowie für die Kenngrößen für das Zeitverhalten fest: Pulsform, Pulsdauer und Pulsfolgefrequenz. Prüf- und Auswerteverfahren für die Leistungsstabilität von Dauerstrichlasern, Energiestabilität von Pulslasern und Pulsdauerstabilität werden ebenfalls angegeben.
Die Prüfverfahren, die in dieser Internationalen Norm angegeben werden, dienen zur Prüfung und Charakterisierung von Lasern.

Optique et photonique - Lasers et équipements associés aux lasers - Méthodes d'essai de la puissance et de l'énergie des faisceaux lasers et de leurs caractéristiques temporelles (ISO 11554:2017)

L'ISO 11554:2017 spécifie des méthodes d'essai pour la détermination de la puissance et de l'énergie des faisceaux lasers continus et impulsionnels ainsi que leurs caractéristiques temporelles de forme d'impulsion, de durée d'impulsion et du taux de répétition d'impulsion. Elle indique, en outre, des méthodes d'essai et d'évaluation de la stabilité de la puissance des lasers continus, de la stabilité de l'énergie des lasers impulsionnels et de la stabilité de la durée d'impulsion.
Les méthodes d'essai données dans l'ISO 11554:2017 sont destinées à être utilisées pour les essais et la détermination des caractéristiques des lasers.

Optika in fotonska tehnologija - Laserji in laserska oprema - Preskusne metode za moč žarka, energijo in časovne karakteristike (ISO 11554:2017)

Ta dokument določa preskusne metode za določanje moči in energije laserskih žarkov s trajnim in pulznim valovanjem ter njihovih časovnih karakteristik za obliko, trajanje in hitrost ponavljanja impulza. Podane so tudi preskusne metode in metode ocenjevanja za energetsko stabilnost laserjev s trajnim valovanjem, energetsko stabilnost laserjev s pulznim valovanjem ter stabilnost trajanja impulza.
Preskusne metode, navedene v tem dokumentu, se uporabljajo za preskušanje in karakterizacijo laserjev.

General Information

Status
Published
Public Enquiry End Date
29-Jul-2016
Publication Date
17-Oct-2017
Technical Committee
Current Stage
6060 - National Implementation/Publication (Adopted Project)
Start Date
05-Oct-2017
Due Date
10-Dec-2017
Completion Date
18-Oct-2017

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SLOVENSKI STANDARD
SIST EN ISO 11554:2017
01-november-2017
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SIST EN ISO 11554:2008

2SWLNDLQIRWRQVNDWHKQRORJLMD/DVHUMLLQODVHUVNDRSUHPD3UHVNXVQHPHWRGH]D

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Optics and photonics - Lasers and laser-related equipment - Test methods for laser

beam power, energy and temporal characteristics (ISO 11554:2017)

Optik und Photonik - Laser und Laseranlagen - Prüfverfahren für Leistung, Energie und

Kenngrößen des Zeitverhaltens von Laserstrahlen (ISO 11554:2017)

Optique et photonique - Lasers et équipements associés aux lasers - Méthodes d'essai

de la puissance et de l'énergie des faisceaux lasers et de leurs caractéristiques

temporelles (ISO 11554:2017)
Ta slovenski standard je istoveten z: EN ISO 11554:2017
ICS:
31.260 Optoelektronika, laserska Optoelectronics. Laser
oprema equipment
SIST EN ISO 11554:2017 en

2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

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SIST EN ISO 11554:2017
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SIST EN ISO 11554:2017
EN ISO 11554
EUROPEAN STANDARD
NORME EUROPÉENNE
September 2017
EUROPÄISCHE NORM
ICS 31.260 Supersedes EN ISO 11554:2008
English Version
Optics and photonics - Lasers and laser-related equipment
- Test methods for laser beam power, energy and temporal
characteristics (ISO 11554:2017)

Optique et photonique - Lasers et équipements Optik und Photonik - Laser und Laseranlagen -

associés aux lasers - Méthodes d'essai de la puissance Prüfverfahren für Leistung, Energie und Kenngrößen

et de l'énergie des faisceaux lasers et de leurs des Zeitverhaltens von Laserstrahlen (ISO

caractéristiques temporelles (ISO 11554:2017) 11554:2017)
This European Standard was approved by CEN on 5 September 2017.

CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this

European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references

concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN

member.

This European Standard exists in three official versions (English, French, German). A version in any other language made by

translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management

Centre has the same status as the official versions.

CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,

Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania,

Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland,

Turkey and United Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION
EUROPÄISCHES KOMITEE FÜR NORMUNG
CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels

© 2017 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 11554:2017 E

worldwide for CEN national Members.
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SIST EN ISO 11554:2017
EN ISO 11554:2017 (E)
Contents Page

European Foreword ...................................................................................................................................................... 3

Annex ZA (informative) Relationship between this European Standard and the Essential

Requirements of EU Directive 2006/42/EC aimed to be covered ................................................. 4

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SIST EN ISO 11554:2017
EN ISO 11554:2017 (E)
European Foreword

This document (EN ISO 11554:2017) has been prepared by Technical Committee ISO/TC 172 "Optics

and photonics" in collaboration with Technical Committee CEN/TC 123 “Lasers and photonics” the

secretariat of which is held by DIN.

This European Standard shall be given the status of a national standard, either by publication of an

identical text or by endorsement, at the latest by March 2018 and conflicting national standards shall be

withdrawn at the latest by March 2018.

Attention is drawn to the possibility that some of the elements of this document may be the subject of

patent rights. CEN shall not be held responsible for identifying any or all such patent rights.

This document supersedes EN ISO 11554:2008.

This document has been prepared under a mandate given to CEN by the European Commission and the

European Free Trade Association, and supports essential requirements of EU Directive(s).

For relationship with EU Directive, see informative Annex ZA, which is an integral part of this

document.

According to the CEN-CENELEC Internal Regulations, the national standards organizations of the

following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria,

Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia,

France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta,

Netherlands, Norway, Poland, Portugal, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland,

Turkey and the United Kingdom.
Endorsement notice

The text of ISO 11554:2017 has been approved by CEN as EN ISO 11554:2017 without any modification.

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SIST EN ISO 11554:2017
EN ISO 11554:2017 (E)
ANNEX ZA
(informative)
Relationship between this European Standard and the Essential
Requirements of EU Directive 2006/42/EC aimed to be covered

This European Standard has been prepared under a Commission’s standardization request M/396

Mandate to CEN and CENELEC for standardisation in the field of machinery to provide one voluntary

means of conforming to essential requirements of EU Directive 2006/42/EC on machinery.

Once this standard is cited in the Official Journal of the European Union under that Directive,

compliance with the normative clauses of this standard given in Table Z.A.1 confers, within the limits of

the scope of this standard, a presumption of conformity with the corresponding essential requirements

of that EU Directive 2006/42/EC, and associated EFTA regulations.

Table ZA.1 — Correspondence between this European Standard and EU Directive 2006/42/EC

Essential Requirements of Clause(s)/sub-clause(s) of Remarks/Notes
EU Directive 2006/42/EC this EN
1.5.10 radiation Entire standard
1.5.12 laser radiation Entire standard

WARNING 1 — Presumption of conformity stays valid only as long as a reference to this European

Standard is maintained in the list published in the Official Journal of the European Union. Users of this

standard should consult frequently the latest list published in the Official Journal of the European

Union.

WARNING 2 — Other Union legislation may be applicable to the product(s) falling within the scope of

this standard.
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SIST EN ISO 11554:2017
INTERNATIONAL ISO
STANDARD 11554
Fourth edition
2017-07
Optics and photonics — Lasers and
laser-related equipment — Test
methods for laser beam power, energy
and temporal characteristics
Optique et photonique — Lasers et équipements associés aux lasers
— Méthodes d’essai de la puissance et de l’énergie des faisceaux lasers
et de leurs caractéristiques temporelles
Reference number
ISO 11554:2017(E)
ISO 2017
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SIST EN ISO 11554:2017
ISO 11554:2017(E)
COPYRIGHT PROTECTED DOCUMENT
© ISO 2017, Published in Switzerland

All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form

or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior

written permission. Permission can be requested from either ISO at the address below or ISO’s member body in the country of

the requester.
ISO copyright office
Ch. de Blandonnet 8 • CP 401
CH-1214 Vernier, Geneva, Switzerland
Tel. +41 22 749 01 11
Fax +41 22 749 09 47
copyright@iso.org
www.iso.org
ii © ISO 2017 – All rights reserved
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SIST EN ISO 11554:2017
ISO 11554:2017(E)
Contents Page

Foreword ........................................................................................................................................................................................................................................iv

Introduction ..................................................................................................................................................................................................................................v

1 Scope ................................................................................................................................................................................................................................. 1

2 Normative references ...................................................................................................................................................................................... 1

3 Terms and definitions ..................................................................................................................................................................................... 1

4 Symbols and units of measurement ................................................................................................................................................. 2

5 Measurement principles .............................................................................................................................................................................. 3

6 Measurement configuration, test equipment and auxiliary devices ..............................................................3

6.1 Preparation ................................................................................................................................................................................................ 3

6.1.1 Sources with small divergence angles ........................................................................................................... 3

6.1.2 Sources with large divergence angles ............................................................................................................ 3

6.1.3 RIN measurement ........................................................................................................................................................... 4

6.1.4 Measurement of small signal cut off frequency .................................................................................... 5

6.2 Control of environmental impacts ......................................................................................................................................... 5

6.3 Detectors ...................................................................................................................................................................................................... 6

6.4 Beam-forming optics ......................................................................................................................................................................... 7

6.5 Optical attenuators .............................................................................................................................................................................. 7

7 Measurements ......................................................................................................................................................................................................... 7

7.1 General ........................................................................................................................................................................................................... 7

7.2 Power of cw lasers ............................................................................................................................................................................... 7

7.3 Power stability of cw lasers ......................................................................................................................................................... 8

7.4 Pulse energy of pulsed lasers ..................................................................................................................................................... 8

7.5 Energy stability of pulsed lasers .............................................................................................................................................. 8

7.6 Temporal pulse shape, pulse duration, rise time, fall time and peak power ..................................... 8

7.7 Pulse duration stability .................................................................................................................................................................... 8

7.8 Pulse repetition rate ........................................................................................................................................................................... 8

7.9 Relative intensity noise, RIN ....................................................................................................................................................... 9

7.10 Small signal cut-off frequency ................................................................................................................................................... 9

8 Evaluation .................................................................................................................................................................................................................... 9

8.1 General ........................................................................................................................................................................................................... 9

8.2 Power of cw lasers ............................................................................................................................................................................10

8.3 Power stability of cw lasers ......................................................................................................................................................10

8.4 Pulse energy of pulsed lasers ..................................................................................................................................................10

8.5 Energy stability of pulsed lasers ...........................................................................................................................................10

8.6 Temporal pulse shape, pulse duration, rise time, fall time and peak power ..................................11

8.7 Pulse duration stability .................................................................................................................................................................12

8.8 Pulse repetition rate ........................................................................................................................................................................13

8.9 Relative intensity noise, RIN ....................................................................................................................................................13

8.10 Small signal cut-off frequency ................................................................................................................................................13

9 Test report ................................................................................................................................................................................................................13

Annex A (informative) Relative intensity noise (RIN) .....................................................................................................................16

Bibliography .............................................................................................................................................................................................................................18

© ISO 2017 – All rights reserved iii
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SIST EN ISO 11554:2017
ISO 11554:2017(E)
Foreword

ISO (the International Organization for Standardization) is a worldwide federation of national standards

bodies (ISO member bodies). The work of preparing International Standards is normally carried out

through ISO technical committees. Each member body interested in a subject for which a technical

committee has been established has the right to be represented on that committee. International

organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.

ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of

electrotechnical standardization.

The procedures used to develop this document and those intended for its further maintenance are

described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the

different types of ISO documents should be noted. This document was drafted in accordance with the

editorial rules of the ISO/IEC Directives, Part 2 (see www .iso .org/ directives).

Attention is drawn to the possibility that some of the elements of this document may be the subject of

patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of

any patent rights identified during the development of the document will be in the Introduction and/or

on the ISO list of patent declarations received (see www .iso .org/ patents).

Any trade name used in this document is information given for the convenience of users and does not

constitute an endorsement.

For an explanation on the voluntary nature of standards, the meaning of ISO specific terms and

expressions related to conformity assessment, as well as information about ISO’s adherence to the

World Trade Organization (WTO) principles in the Technical Barriers to Trade (TBT) see the following

URL: w w w . i s o .org/ iso/ foreword .html.

This document was prepared by Technical Committee ISO/TC 172, Optics and photonics, Subcommittee

SC 9, Electro-optical systems.

This fourth edition cancels and replaces the third edition (ISO 11554:2006) which has been technically

revised. The following changes were made:

a) Subclause 3.1: definition of RIN was changed in order to harmonize with ISO 11145:2016.

b) Clause 4, note 3: Expression for dB calculation was corrected.
c) Figure 3: Explanation of M was modified.

d) Subclause 7.9: Measurement of RIN was added, and former content of 7.9 was moved to 7.10.

e) Subclause 7.10: Explanation for the measurement of small signal cut-off frequency was modified.

f) Subclause 8.9: Explanation for RIN was added and former content of 8.9 was moved to 8.10.

g) Clause 9, item 8): Parameters for RIN were added, and former content of item 8) was moved to item 9).

h) Equation numbers were renumbered.
iv © ISO 2017 – All rights reserved
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SIST EN ISO 11554:2017
ISO 11554:2017(E)
Introduction

The measurement of laser power (energy for pulsed lasers) is a common type of measurement

performed by laser manufacturers and users. Power (energy) measurements are needed for laser safety

classification, stability specifications, maximum laser output specifications, damage avoidance, specific

application requirements, etc. This document provides guidance on performing laser power (energy)

measurements as applied to stability characterization. The stability criteria are described for various

temporal regions (e.g. short-term, medium term and long term) and provide methods to quantify

these specifications. This document also covers pulse measurements where detector response speed

can be critically important when analysing pulse shape or peak power of short pulses. To standardize

reporting of power (energy) measurement results, a report template is also included.

This document is a Type B standard as stated in ISO 12100.

The provisions of this document may be supplemented or modified by a Type C standard.

Note that for machines which are covered by the scope of a Type C standard and which have been

designed and built according to the provisions of that standard, the provisions of that Type C standard

take precedence over the provisions of this Type B standard.
© ISO 2017 – All rights reserved v
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SIST EN ISO 11554:2017
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SIST EN ISO 11554:2017
INTERNATIONAL STANDARD ISO 11554:2017(E)
Optics and photonics — Lasers and laser-related
equipment — Test methods for laser beam power, energy
and temporal characteristics
1 Scope

This document specifies test methods for determining the power and energy of continuous wave and

pulsed laser beams, as well as their temporal characteristics of pulse shape, pulse duration and pulse

repetition rate. Test and evaluation methods are also given for the power stability of cw-lasers, energy

stability of pulsed lasers and pulse duration stability.

The test methods given in this document are used for the testing and characterization of lasers.

2 Normative references

The following documents are referred to in the text in such a way that some or all of their content

constitutes requirements of this document. For dated references, only the edition cited applies. For

undated references, the latest edition of the referenced document (including any amendments) applies.

ISO 11145, Optics and photonics — Lasers and laser-related equipment — Vocabulary and symbols

ISO/IEC Guide 99, International vocabulary of metrology — Basic and general concepts and associated

terms (VIM)

IEC 61040:1990, Power and energy measuring detectors, instruments and equipment for laser radiation

3 Terms and definitions

For the purposes of this document, the terms and definitions given in ISO 11145, ISO/IEC Guide 99 and

the following apply.

ISO and IEC maintain terminological databases for use in standardization at the following addresses:

— ISO Online browsing platform: available at http:// www .iso .org/ obp
— IEC Electropedia: available at http:// www .electropedia .org/
3.1
relative intensity noise
RIN
R( f )

quotient of the radiant power mean square fluctuations to the mean square radiant power, normalized

to a frequency band of unit width
ΔPf()
Rf = · (1)

Note 1 to entry: The relative intensity noise R( f ) or RIN [see Formula (1)] is explicitly spoken of as the “relative

intensity noise spectral density”, but usually simply referred to as RIN.
Note 2 to entry: For further details, see Annex A.
© ISO 2017 – All rights reserved 1
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SIST EN ISO 11554:2017
ISO 11554:2017(E)
3.2
small signal cut off frequency

frequency at which the laser power output modulation drops to half the value obtained at low

frequencies when applying small, constant input power modulation and increasing the frequency

4 Symbols and units of measurement

The symbols and units specified in ISO 11145 and in Table 1 are used in this document.

Table 1 — Symbols and units of measurement
Symbol Unit Term
f Hz Frequency
f Hz Small signal cut-off frequency

[ f ,f ] Hz Frequency range for which the relative intensity noise R( f ) is given

1 2
k 1 Coverage factor for the determination of uncertainty
1 Reading
1 Mean value of readings
P W Power averaged over the sampling period
Mean power, averaged over the measurement period at the operating con-
ditions specified by the manufacturer
Relative power fluctuation to a 95 % confidence level for the appropri-
ΔP 1 ate sampling period [ΔP (1 µs) and/or ΔP (1 ms) and/or ΔP (0,1 s) and/or
ΔP (1 s)]
J Mean pulse energy
1 Relative pulse energy fluctuation to a 95 % confidence level
R( f ) Hz or dB/Hz Relative intensity noise, RIN
S(t) 1 Detector signal
s 1 Measured standard deviation
T s Pulse repetition period
t s Measurement period
Expanded relative uncertainty corresponding to a 95 % confidence level
U 1
rel
(coverage factor k = 2)
Expanded relative uncertainty of calibration corresponding to a 95 %
U (C) 1
rel
confidence level (coverage factor k = 2)
τ s Fall time of laser pulse
Relative pulse duration fluctuation with regard to τ to a 95 % confi-
Δτ 1
dence level
τ s Rise time of laser pulse
Relative pulse duration fluctuation with regard to τ to a 95 % confi-
Δτ 1
dence level
[1]
NOTE 1 For further details regarding 95 % confidence level see ISO 2602 .

NOTE 2 The expanded uncertainty is obtained by multiplying the standard uncertainty by a coverage factor

[3]

k = 2. It is determined according to the Guide to the Expression of Uncertainty in Measurement . In general, with

this coverage factor, the value of the measurand lies with a probability of approximately 95 % within the interval

defined by the expanded uncertainty.
NOTE 3 R( f ) expressed in dB/Hz equals 10 log R( f ) with R( f ) given in Hz .
2 © ISO 2017 – All rights reserved
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SIST EN ISO 11554:2017
ISO 11554:2017(E)
5 Measurement principles

The laser beam is directed on to the detector surface to produce a signal with amplitude proportional to

the power or energy of the laser. The amplitude versus time is measured. Radiation emitted by sources

with large divergence angles is collected by an integrating sphere. Beam forming and attenuation

devices may be used when appropriate.

The evaluation method depends on the parameter to be determined and is described in Clause 8.

6 Measurement configuration, test equipment and auxiliary devices
6.1 Preparation
6.1.1 Sources with small divergence angles

The laser beam and the optical axis of the measuring system shall be coaxial. Select the diameter (cross-

section) of the optical system such that it accommodates the entire cross section of the laser beam and

so that clipping or diffraction loss is smaller than 10 % of the intended measurement uncertainty.

Arrange an optical axis so that it is coaxial with the laser beam to be measured. Suitable optical

alignment devices are available for this purpose (e.g. aligning lasers or steering mirrors). Mount the

attenuators or beam forming optics such that the optical axis runs through the geometrical centres.

Care should be exercised to avoid systematic errors.

NOTE 1 Reflections, external ambient light, thermal radiation and air currents are all potential sources of errors.

After the initial preparation is completed, make an evaluation to determine if the entire laser beam

reaches the detector surface. For this determination, apertures of different diameters can be introduced

into the beam path in front of each optical component. Reduce the aperture size until the output signal

has been reduced by 5 %. This aperture should have a diameter at least 20 % smaller than the aperture

of the optical component. For divergent beams, the aperture should be placed immediately in front of

the detector to ensure total beam capture.

NOTE 2 Remove these apertures before performing the power (energy) measurements described in Clause 7.

6.1.2 Sources with large divergence angles

The radiation emitted by sources with large divergence angles shall be collected by an integrating

sphere. The collected radiation is subjected to multiple reflections from the wall of the integrating

sphere; this leads to a uniform irradiance of the surface proportional to the collected flux. A detector

located in the wall of the sphere measures this irradiance. An opaque screen shields the detector from

the direct radiation of the device being measured. The emitting device is positioned at or near the

entrance of the integrating sphere, so that no direct radiation will reach the detector.

Figure 1 shows an integrating sphere measurement configuration for a small emitting source positioned

inside the integrating sphere. Large sized sources should, of course, be positioned outside the sphere

but close enough to the input aperture so that all emitted radiation enters the sphere.

© ISO 2017 – All rights reserved 3
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SIST EN ISO 11554:2017
ISO 11554:2017(E)
Key
1 integrating sphere
2 diffusing opaque screen
3 device being measured
4 detector
Figure 1 — Schematic arrangement for the measurement of highly divergent sources
6.1.3 RIN measurement

The measuring arrangement for determination of the RIN is shown in Figure 2. The beam propagates

through the lens, an attenuator or other lossy medium, and falls on the detector. When adjusting the

measuring arrangement, feedback of the output power into the laser shall be minimized to avoid

measurement errors.

The RIN, R( f ) is determined at reference plane A, before any losses. The Poisson component of the RIN

is increased at plane B due to losses, and again at plane C due to inefficiency in the detection process.

NOTE For an explanation of the different components of RIN, see Annex A.

To measure RIN, an electrical splitter sends the dc detector signal produced by a test laser to a meter

while the ac electrical noise is amplified and then displayed on an electrical spectrum analyser. RIN

depends
...

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