Geometrical product specifications (GPS) - Surface texture: Areal - Part 602: Design and characteristics of non- contact (confocal chromatic probe) instruments (ISO 25178-602:2025)

This document specifies the design and metrological characteristics of a particular non-contact instrument for measuring surface texture using a confocal chromatic probe based on axial chromatic aberration of white light. Additional metrological characteristics can be found in ISO 25178-600. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.

Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Flächenhaft - Teil 602: Aufbau und Merkmale von berührungslos messenden Geräten (mit chromatisch konfokaler Sonde) (ISO 25178-602:2025)

Dieses Dokument legt die Konstruktion und metrologischen Merkmale eines berührungslos messenden Geräts zur Messung der Oberflächentopographie fest, welches eine chromatisch konfokale Sonde verwendet, deren Funktion auf der axialen chromatischen Aberration von weißem Licht beruht. Zusätzliche messtechnische Merkmale können ISO25178-600 entnommen werden. Da Oberflächenprofile aus Daten von Oberflächento
pographien extrahiert werden können, können die meisten Verfahren, die in diesem Dokument festgelegt sind, auch auf Profilmessungen angewendet werden.

Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 602: Conception et caractéristiques des instruments sans contact (à capteur confocal chromatique) (ISO 25178-602:2025)

Le présent document spécifie la conception et les caractéristiques métrologiques d'un instrument particulier sans contact utilisé pour mesurer l'état de surface à l'aide d'un capteur confocal chromatique fonctionnant suivant le principe de l'aberration chromatique axiale de la lumière blanche. Des caractéristiques métrologiques supplémentaires peuvent être trouvées dans l'ISO 25178-600. Comme les profils de surface peuvent être extraits des données de topographie de surface surfacique, les méthodes décrites dans le présent document s'appliquent également aux mesurages de profil.

Specifikacija geometrijskih veličin izdelka - Tekstura površine: ploskovna - 602. del: Konstrukcije in značilnosti brezkontaktnih (fokusirna barvna sonda) instrumentov (ISO 25178-602:2025)

General Information

Status
Not Published
Public Enquiry End Date
26-Dec-2023
Technical Committee
Current Stage
6060 - National Implementation/Publication (Adopted Project)
Start Date
10-Mar-2025
Due Date
15-May-2025

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SLOVENSKI STANDARD
oSIST prEN ISO 25178-602:2023
01-december-2023
Specifikacija geometrijskih veličin izdelka - Tekstura površine: ploskovna - 602.
del: Konstrukcije in značilnosti brezkontaktnih (fokusirna barvna sonda)
instrumentov (ISO/DIS 25178-602:2023)
Geometrical product specifications (GPS) - Surface texture: Areal - Part 602: Design and
characteristics of non- contact (confocal chromatic probe) instruments (ISO/DIS 25178-
602:2023)
Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Flächenhaft -
Teil 602: Aufbau und Merkmale von berührungslos messenden Geräten (mit chromatisch
konfokaler Sonde) (ISO/DIS 25178-602:2023)
Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 602:
Conception et caractéristiques des instruments sans contact (à capteur confocal
chromatique) (ISO/DIS 25178-602:2023)
Ta slovenski standard je istoveten z: prEN ISO 25178-602
ICS:
17.040.20 Lastnosti površin Properties of surfaces
17.040.40 Specifikacija geometrijskih Geometrical Product
veličin izdelka (GPS) Specification (GPS)
oSIST prEN ISO 25178-602:2023 en,fr,de
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

oSIST prEN ISO 25178-602:2023
oSIST prEN ISO 25178-602:2023
DRAFT INTERNATIONAL STANDARD
ISO/DIS 25178-602
ISO/TC 213 Secretariat: BSI
Voting begins on: Voting terminates on:
2023-10-05 2023-12-28
Geometrical product specifications (GPS) — Surface
texture: Areal —
Part 602:
Design and characteristics of non-contact (confocal
chromatic probe) instruments
ICS: 17.040.20
This document is circulated as received from the committee secretariat.
THIS DOCUMENT IS A DRAFT CIRCULATED
FOR COMMENT AND APPROVAL. IT IS
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NATIONAL REGULATIONS.
ISO/DIS 25178-602:2023(E)
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NOTIFICATION OF ANY RELEVANT PATENT
RIGHTS OF WHICH THEY ARE AWARE AND TO
PROVIDE SUPPORTING DOCUMENTATION. © ISO 2023

oSIST prEN ISO 25178-602:2023
ISO/DIS 25178-602:2023(E)
DRAFT INTERNATIONAL STANDARD
ISO/DIS 25178-602
ISO/TC 213 Secretariat: BSI
Voting begins on: Voting terminates on:

Geometrical product specifications (GPS) — Surface
texture: Areal —
Part 602:
Design and characteristics of non-contact (confocal
chromatic probe) instruments
ICS: 17.040.20
This document is circulated as received from the committee secretariat.
THIS DOCUMENT IS A DRAFT CIRCULATED
FOR COMMENT AND APPROVAL. IT IS
© ISO 2023
ISO/CEN PARALLEL PROCESSING
THEREFORE SUBJECT TO CHANGE AND MAY
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
NOT BE REFERRED TO AS AN INTERNATIONAL
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on STANDARD UNTIL PUBLISHED AS SUCH.
the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below
IN ADDITION TO THEIR EVALUATION AS
or ISO’s member body in the country of the requester. BEING ACCEPTABLE FOR INDUSTRIAL,
TECHNOLOGICAL, COMMERCIAL AND
ISO copyright office
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NATIONAL REGULATIONS.
Website: www.iso.org ISO/DIS 25178-602:2023(E)
RECIPIENTS OF THIS DRAFT ARE INVITED
Published in Switzerland
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NOTIFICATION OF ANY RELEVANT PATENT
RIGHTS OF WHICH THEY ARE AWARE AND TO
ii
PROVIDE SUPPORTING DOCUMENTATION. © ISO 2023

oSIST prEN ISO 25178-602:2023
ISO/DIS 25178-602:2023(E)
Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Instrument requirements .3
5 Metrological characteristics . 4
6 Design features .4
7 General information . 4
Annex A (informative) Principles of confocal chromatic profilometry for areal surface
topography measurement .5
Annex B (informative) Source of measurement error for confocal chromatic probe
instruments .11
Annex C (informative) Relation with the GPS matrix .14
Bibliography .16
iii
oSIST prEN ISO 25178-602:2023
ISO/DIS 25178-602:2023(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2 (see www.iso.org/directives).
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of
any patent rights identified during the development of the document will be in the Introduction and/or
on the ISO list of patent declarations received (see www.iso.org/patents).
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation on the meaning of ISO specific terms and expressions related to conformity assessment,
as well as information about ISO's adherence to the World Trade Organization (WTO) principles in the
Technical Barriers to Trade (TBT) see the following URL: www.iso.org/iso/foreword.html.
The committee responsible for this document is Technical Committee ISO/TC 213, Dimensional and
geometrical product specifications and verification.
This second edition cancels and replaces the first edition (ISO 25178-602:2010), which has been
technically revised.
A list of all parts in the ISO 25178 series can be found on the ISO website.
iv
oSIST prEN ISO 25178-602:2023
ISO/DIS 25178-602:2023(E)
Introduction
This document is a geometrical product specification (GPS) standard and is to be regarded as a general
GPS standard (see ISO 14638). It influences chain link F of the chains of standards on profile and areal
surface texture.
The ISO GPS matrix model given in ISO 14638 gives an overview of the ISO GPS system of which this
document is a part. The fundamental rules of ISO GPS given in ISO 8015 apply to this document and
the default decision rules given in ISO 14253-1 apply to the specifications made in accordance with this
document, unless otherwise indicated.
For more detailed information of the relation of this document to other standards and the GPS matrix
model, see Annex C.
The confocal chromatic optical principle can be implemented in various set-ups. The configuration
described in this document comprises three basic elements: an optoelectronic controller, a linking fibre
optic cable and a chromatic objective (sometimes called “optical pen”).
Several techniques are possible to create the axial chromatic aberration or to extract the height
information from the reflected light. In addition to implementations as point sensors, chromatic
aberration can be integrated into line sensors and field sensors. Annex A describes in detail confocal
chromatic imaging and its implementation into distance measurement probes.
This type of instrument is mainly designed for areal measurements, but it is also able to perform profile
measurements.
This document describes the metrological characteristics of an optical profiler using a confocal
chromatic probe based on axial chromatic aberration of white light, designed for the measurement of
areal surface texture.
For more detailed information on the chromatic probe instrument technique, see Annex A. Reading this
annex before the main body can lead to a better understanding of this document.
NOTE Portions of this document, particularly the informative sections, may describe patented systems and
methods. This information is provided only to assist users in understanding the operating principles of confocal
chromatic probe. This document is not intended to establish priority for any intellectual property, nor does it
imply a license to proprietary technologies described herein.
v
oSIST prEN ISO 25178-602:2023
oSIST prEN ISO 25178-602:2023
DRAFT INTERNATIONAL STANDARD ISO/DIS 25178-602:2023(E)
Geometrical product specifications (GPS) — Surface
texture: Areal —
Part 602:
Design and characteristics of non-contact (confocal
chromatic probe) instruments
1 Scope
This document defines the design and metrological characteristics of a particular non-contact
instrument for measuring surface texture using a confocal chromatic probe based on axial chromatic
aberration of white light. Additional metrological characteristics can be found in ISO 25178-600.
Because surface profiles can be extracted from areal surface topography data, the methods described
in this document can be applied to profiling measurements as well.
2 Normative references
The following documents are referred to in the text in such a way that some or all of their content
constitutes requirements of this document. For dated references, only the edition cited applies. For
undated references, the latest edition of the referenced document (including any amendments) applies.
ISO 25178-600:2019, Geometrical product specifications (GPS) — Surface texture: Areal — Part 600:
Metrological characteristics for areal topography measuring methods
3 Terms and definitions
For the purposes of this document, the terms and definitions given in ISO 25178-600 and the following
apply.
ISO and IEC maintain terminological databases for use in standardization at the following addresses:
— ISO Online browsing platform: available at https:// www .iso .org/ obp
— IEC Electropedia: available at https:// www .electropedia .org/
3.1
chromatic aberration

optical effect of a lens that focuses light at different lengths depending on the wavelength
Note 1 to entry: Chromatic aberration can be axial (on the optical axis) or lateral (off the optical axis). It is defined
in ISO 10934:2020, 3.1.4.2.
3.2
chromatic objective
objective with axial chromatic aberration
3.3
confocal chromatic probe
device that senses surface heights using a chromatic objective (3.2) mounted into a confocal setup
Note 1 to entry: Various optical configurations are discussed in Annex A.
oSIST prEN ISO 25178-602:2023
ISO/DIS 25178-602:2023(E)
3.4
confocal chromatic microscopy
surface topography measurement method consisting of a confocal microscope with chromatic objective
integrated with a spectrometer whereby the surface height at a single point is sensed
...

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