ASTM E1603/E1603M-11(2022)
(Practice)Standard Practice for Leakage Measurement Using the Mass Spectrometer Leak Detector or Residual Gas Analyzer in the Hood Mode
Standard Practice for Leakage Measurement Using the Mass Spectrometer Leak Detector or Residual Gas Analyzer in the Hood Mode
SIGNIFICANCE AND USE
5.1 Test Method A—This test method is the most frequently used in leak testing components. Testing of components is correlated to a standard leak, and the actual leak rate is measured. Acceptance is based on the maximum system allowable leakage. For most production needs, acceptance is based on acceptance of parts leaking less than an established leakage rate, which will ensure safe performance over the projected life of the component. Care must be exercised to ensure that large systems are calibrated with the standard leak located at a representative place on the test volume. As the volume tends to be large (>1 m3) and there are often low conductance paths involved, a check of the response time as well as system sensitivity should be made.
5.2 Test Method B—This test method is used for testing vacuum systems either as a step in the final test of a new system or as a maintenance practice on equipment used for manufacturing, environmental test, or conditioning parts. As with Test Method A, the response time and a system sensitivity check may be required for large volumes.
5.3 Test Method C—This test method is to be used only when there is no convenient method of connecting the LD to the outlet of the high-vacuum pump. If a helium LD is used and the high-vacuum pump is an ion pump or cryopump, leak testing is best accomplished during the roughing cycle, as these pumps leave a relatively high percentage of helium in the high-vacuum chamber. This will limit the maximum sensitivity that can be obtained.
SCOPE
1.1 This practice covers procedures for testing the sources of gas leaking at the rate of 1 × 10 −8 Pa m3/s (1 × 10−9 standard-cm3/s at 0 °C) or greater. These test methods may be conducted on any object that can be evacuated and to the other side of which helium or other tracer gas may be applied. The object must be structurally capable of being evacuated to pressures of 0.1 Pa (approximately 10−3 torr).
1.2 Three test methods are described;
1.2.1 Test Method A—For the object under test capable of being evacuated, but having no inherent pumping capability.
1.2.2 Test Method B—For the object under test with integral pumping capability.
1.2.3 Test Method C—For the object under test as in Test Method B, in which the vacuum pumps of the object under test replace those normally used in the leak detector (LD).
1.3 Units—The values stated in either SI or std-cc/sec units are to be regarded separately as standard. The values stated in each system may not be exact equivalents: therefore, each system shall be used independently of the other. Combining values from the two systems may result in non-conformance with the standard.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.
1.5 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
General Information
Relations
Standards Content (Sample)
This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the
Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
Designation: E1603/E1603M − 11 (Reapproved 2022)
Standard Practice for
Leakage Measurement Using the Mass Spectrometer Leak
Detector or Residual Gas Analyzer in the Hood Mode
ThisstandardisissuedunderthefixeddesignationE1603/E1603M;thenumberimmediatelyfollowingthedesignationindicatestheyear
of original adoption or, in the case of revision, the year of last revision.Anumber in parentheses indicates the year of last reapproval.
A superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope 2. Referenced Documents
2.1 ASTM Standards:
1.1 This practice covers procedures for testing the sources
−8 3 −9
E1316Terminology for Nondestructive Examinations
of gas leaking at the rate of 1×10 Pa m /s (1×10
standard-cm /s at 0°C) or greater. These test methods may be
2.2 ASNT Standards:
conducted on any object that can be evacuated and to the other
SNT-TC-1ARecommended Practice for Personnel Qualifi-
side of which helium or other tracer gas may be applied. The
cation and Certification in Nondestructive Testing
object must be structurally capable of being evacuated to
ANSI/ASNT-CP-189Standard for Qualification and Certifi-
−3
pressures of 0.1 Pa (approximately 10 torr).
cation of Nondestructive Testing Personnel
2.3 Military Standard:
1.2 Three test methods are described;
MIL-STD-410 Nondestructive Testing Personnel Qualifica-
1.2.1 Test Method A—For the object under test capable of
tion and Certification
being evacuated, but having no inherent pumping capability.
2.4 AIA Standard:
1.2.2 Test Method B—Fortheobjectundertestwithintegral
NAS-410Certification and Qualification of Nondestructive
pumping capability.
Test Personnel
1.2.3 Test Method C—For the object under test as in Test
MethodB,inwhichthevacuumpumpsoftheobjectundertest
3. Terminology
replace those normally used in the leak detector (LD).
3.1 Definitions—For definitions of terms used in this
1.3 Units—The values stated in either SI or std-cc/sec units
practice, see Terminology E1316.
are to be regarded separately as standard. The values stated in
each system may not be exact equivalents: therefore, each
4. Summary of Practice
system shall be used independently of the other. Combining
4.1 These test methods covered in this practice require a
values from the two systems may result in non-conformance
heliumLDthatcanprovideasystemsensitivityof10%orless
with the standard.
of the intended leakage rate to be measured.
1.4 This standard does not purport to address all of the
4.2 Test Method A—This test method is used to helium leak
safety concerns, if any, associated with its use. It is the
test objects that are capable of being evacuated to a reasonable
responsibility of the user of this standard to establish appro-
test pressure by the LD pumps during an acceptable length of
priate safety, health, and environmental practices and deter-
time(seeFig.1).Thisrequiresthattheobjectbecleananddry.
mine the applicability of regulatory limitations prior to use.
Auxiliary vacuum pumps having greater capacity than those in
1.5 This international standard was developed in accor-
the LD may be used in conjunction with them. The leak test
dance with internationally recognized principles on standard-
sensitivity will be reduced under these conditions.
ization established in the Decision on Principles for the
Development of International Standards, Guides and Recom-
mendations issued by the World Trade Organization Technical
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
Barriers to Trade (TBT) Committee.
contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
Standards volume information, refer to the standard’s Document Summary page on
the ASTM website.
AvailablefromAmericanSocietyforNondestructiveTesting(ASNT),P.O.Box
This practice is under the jurisdiction of ASTM Committee E07 on Nonde- 28518, 1711 Arlingate Ln., Columbus, OH 43228-0518, http://www.asnt.org.
structive Testing and is the direct responsibility of Subcommittee E07.08 on Leak Available from Standardization Documents Order Desk, DODSSP, Bldg. 4,
Testing Method. Section D, 700 Robbins Ave., Philadelphia, PA 19111-5098, http://
CurrenteditionapprovedJune1,2022.PublishedJuly2022.Originallyapproved dodssp.daps.dla.mil.
in 1994. Last previous edition approved in 2017 as E1603/E1603M–11(2017). Available fromAerospace IndustriesAssociation ofAmerica, Inc. (AIA), 1000
DOI: 10.1520/E1603_E1603M-11R22. WilsonBlvd.,Suite1700,Arlington,VA22209-3928,http://www.aia-aerospace.org.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
E1603/E1603M − 11 (2022)
FIG. 1 Test Method A
4.3 Test Method B—This test method is used to leak test
equipmentthatcanprovideitsownvacuum(thatis,equipment
that has a built-in pumping system) at least to a level of a few
hundred pascals (a few torr) or lower. Refer to Fig. 2.
FIG. 3 Test Method C
4.4 Test Method C—When a vacuum system is capable of
−2 −4
producing internal pressures of less than 2×10 Pa (2×10
torr) in the presence of leaks, these leaks may be located and
withTestMethodA,theresponsetimeandasystemsensitivity
evaluatedbytheuseofeitheraresidualgasanalyzer(RGA)or
check may be required for large volumes.
by using the spectrometer tube and controls from a conven-
tionalMSLD,providedthattheleakageiswithinthesensitivity
5.3 Test Method C—This test method is to be used only
rangeoftheRGAorMSLDundertheconditionsexistinginthe
when there is no convenient method of connecting the LD to
vacuum system. Refer to Fig. 3.
theoutletofthehigh-vacuumpump.IfaheliumLDisusedand
the high-vacuum pump is an ion pump or cryopump, leak
5. Significance and Use
testingisbestaccomplishedduringtheroughingcycle,asthese
5.1 Test Method A—This test method is the most frequently pumps leave a relatively high percentage of helium in the
used in leak testing components. Testing of components is high-vacuumchamber.Thiswilllimitthemaximumsensitivity
correlated to a standard leak, and the actual leak rate is that can be obtained.
measured. Acceptance is based on the maximum system
6. Basis of Application
allowable leakage. For most production needs, acceptance is
based on acceptance of parts leaking less than an established
6.1 Personnel Qualification—If specified in the contractual
leakage rate, which will ensure safe performance over the
agreement, personnel performing examinations to these test
projected life of the component. Care must be exercised to
methods shall be qualified in accordance with a nationally
ensure that large systems are calibrated with the standard leak
recognized NDT personnel qualification practice or standard,
located at a representative place on the test volume. As the
such as ANSI/ASNT-CP-189, SNT-TC-1A, MIL-STD-410,
volume tends to be large (>1 m ) and there are often low
NAS-410, or a similar document and certified by the employer
conductance paths involved, a check of the response time as
or certifying agency, as applicable. The practice or standard
well as system sensitivity should be made.
used and its applicable revision shall be identified in the
contractual agreement between the using parties.
5.2 Test Method B—This test method is used for testing
vacuum systems either as a step in the final test of a new
7. Interferences
system or as a maintenance practice on equipment used for
manufacturing, environmental test, or conditioning parts. As 7.1 Series leaks with an unpumped volume between them
present a difficult if not impossible problem in helium leak
testing. Although the trace gas enters the first leak readily
enough since the pressure difference of helium across the first
leak is approximately one atmosphere, it may take many hours
to build up the partial pressure of helium in the volume
betweenthetwoleakssothatenoughheliumentersthevacuum
system to be detected by the LD. This type of leak occurs
frequently under the following conditions:
7.1.1 Double-welded joints and lap welds,
7.1.2 Double O-rings,
7.1.3 Threaded joints,
7.1.4 Ferrule and flange-type tubing fittings,
7.1.5 Casting with internal voids,
7.1.6 Flat polymer gaskets, and
FIG. 2 Test Method B 7.1.7 Unvented O-ring grooves.
E1603/E1603M − 11 (2022)
7.2 In general, the solution is proper design to eliminate 8.7 Test Component/System Enclosure (Hood)—Either a
theseconditions;however,whendoublesealsmustbeused,an rigid structure or heavy plastic cover to contain and surround
accessportbetweenthemshouldbeprovidedforattachmentto the test part totally in helium tracer gas.
the LD. Leaks may then be located from each side of the seal.
The access port can be sealed or pumped continuously after
9. Instrument Calibration
repair by a holding pump (large vacuum system).
9.1 Attach the capsule leak to the LD and tune the LD to
7.3 Temporarily plugged leaks often occur because of poor
achieve the desired sensitivity scale in accordance with the
manufacturing techniques. Water, cleaning solvent, plating,
manufacturer’s instructions.Allow sufficient time for the flow
flux, grease, paint, etc. are common problems.These problems
rate from the capsule leak to equilibrate. The permeation-type
canbeeliminatedtoalargeextentbyproperpreparationofthe
capsuleleakshouldbestoredwiththeshutoffvalve(ifpresent)
parts before leak testing. Proper degreasing, vacuum baking,
open, and the leak should be allowed to equilibrate to ambient
and testing before plating or painting are desirable.
temperature for several hours.
7.4 The time constant for evacuation and for the rise of the
9.2 AdjusttheLDreadouttocorrespondtothetemperature-
helium signal is inversely proportional to the pumping speed
corrected standard leak value in accordance with the manufac-
and directly proportional to the volume being evacuated.
turers’ instructions.
τ 5 V/S (1)
NOTE 1—Valve closures may be accomplished automatically on some
LDs, and some counterflow-type MSLDs require continued use of the
Low-conductance tubing, or any other flow impedance, can
roughing pump during testing. Refer to the manufacturer’s operating
reducethepumpingspeedofthesystemverysignificantly,thus
manual.
extending the system response time constant. If such an
9.3 Disconnect the capsu
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