ASTM E1508-12a(2019)
(Guide)Standard Guide for Quantitative Analysis by Energy-Dispersive Spectroscopy
Standard Guide for Quantitative Analysis by Energy-Dispersive Spectroscopy
SIGNIFICANCE AND USE
5.1 This guide covers procedures for quantifying the elemental composition of phases in a microstructure. It includes both methods that use standards as well as standardless methods, and it discusses the precision and accuracy that one can expect from the technique. The guide applies to EDS with a solid-state X-ray detector used on an SEM or EPMA.
5.2 EDS is a suitable technique for routine quantitative analysis of elements that are 1) heavier than or equal to sodium in atomic weight, 2) present in tenths of a percent or greater by weight, and 3) occupying a few cubic micrometres, or more, of the specimen. Elements of lower atomic number than sodium can be analyzed with either ultra-thin-window or windowless spectrometers, generally with less precision than is possible for heavier elements. Trace elements, defined as 2 can be analyzed but with lower precision compared with analyses of elements present in greater concentration.
SCOPE
1.1 This guide is intended to assist those using energy-dispersive spectroscopy (EDS) for quantitative analysis of materials with a scanning electron microscope (SEM) or electron probe microanalyzer (EPMA). It is not intended to substitute for a formal course of instruction, but rather to provide a guide to the capabilities and limitations of the technique and to its use. For a more detailed treatment of the subject, see Goldstein, et al. (1) This guide does not cover EDS with a transmission electron microscope (TEM).
1.2 Units—The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.
1.4 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
General Information
Relations
Standards Content (Sample)
This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the
Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
Designation: E1508 − 12a (Reapproved 2019)
Standard Guide for
1
Quantitative Analysis by Energy-Dispersive Spectroscopy
This standard is issued under the fixed designation E1508; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope E691 Practice for Conducting an Interlaboratory Study to
Determine the Precision of a Test Method
1.1 This guide is intended to assist those using energy-
dispersive spectroscopy (EDS) for quantitative analysis of
3. Terminology
materials with a scanning electron microscope (SEM) or
electron probe microanalyzer (EPMA). It is not intended to 3.1 Definitions—For definitions of terms used in this guide,
substitute for a formal course of instruction, but rather to
see Terminologies E7 and E673.
provide a guide to the capabilities and limitations of the
3.2 Definitions of Terms Specific to This Standard:
technique and to its use. For a more detailed treatment of the
3.2.1 accelerating voltage—the high voltage between the
subject,seeGoldstein,etal. (1)ThisguidedoesnotcoverEDS
cathode and the anode in the electron gun of an electron beam
with a transmission electron microscope (TEM).
instrument, such as an SEM or EPMA.
1.2 Units—The values stated in SI units are to be regarded
3.2.2 beam current—the current of the electron beam mea-
as standard. No other units of measurement are included in this
sured with a Faraday cup positioned near the specimen.
standard.
3.2.3 Bremsstrahlung—background X rays produced by in-
1.3 This standard does not purport to address all of the
elastic scattering (loss of energy) of the primary electron beam
safety concerns, if any, associated with its use. It is the
in the specimen. It covers a range of energies up to the energy
responsibility of the user of this standard to establish appro-
of the electron beam.
priate safety, health, and environmental practices and deter-
3.2.4 critical excitation voltage—the minimum voltage re-
mine the applicability of regulatory limitations prior to use.
quired to ionize an atom by ejecting an electron from a specific
1.4 This international standard was developed in accor-
electron shell.
dance with internationally recognized principles on standard-
3.2.5 dead time—the time during which the system will not
ization established in the Decision on Principles for the
process incoming X rays (real time less live time).
Development of International Standards, Guides and Recom-
mendations issued by the World Trade Organization Technical
3.2.6 k-ratio—the ratio of background-subtracted X-ray in-
Barriers to Trade (TBT) Committee.
tensity in the unknown specimen to that of the standard.
3.2.7 live time—the time that the system is available to
2. Referenced Documents
detect incoming X rays.
2
2.1 ASTM Standards:
3.2.8 overvoltage—the ratio of accelerating voltage to the
E3 Guide for Preparation of Metallographic Specimens
critical excitation voltage for a particular X-ray line.
E7 Terminology Relating to Metallography
3.2.9 SDD (silicon drift detector)—An x-ray detector char-
E673 Terminology Relating to SurfaceAnalysis (Withdrawn
acterized by a pattern in the biasing electrodes which induces
3
2012)
generated electrons to move laterally (drift) to a small-area
anode for collection, resulting in greatly reduced capacitance
which to a first approximation does not depend on the active
1
ThisguideisunderthejurisdictionofASTMCommitteeE04onMetallography
area, in contrast to conventional detectors using flat-plate
and is the direct responsibility of Subcommittee E04.11 on X-Ray and Electron
electrodes. (2)
Metallography.
Current edition approved Nov. 1, 2019. Published November 2019. Originally 3.2.10 shaping time—a measure of the time it takes the
approved in 1993. Last previous edition approved in 2012 as E1508 – 12a. DOI:
amplifier to integrate the incoming charge; it depends on the
10.1520/E1508-12AR19.
time constant of the circuitry.
2
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
3.2.11 spectrum—the energy range of electromagnetic ra-
Standards volume information, refer to the standard’s Document Summary page on
diation produced by the method and, when graphically
the ASTM website.
3
displayed, is the relationship of X-ray counts detected to X-ray
The last approved version of this historical standard is referenced on
www.astm.org. energy.
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