ASTM E996-10
(Practice)Standard Practice for Reporting Data in Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy
Standard Practice for Reporting Data in Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy
SIGNIFICANCE AND USE
Include the experimental conditions under which spectra are taken in the “Experiment” section of all reports and publications.
Identify any parameters that are changed between different spectra in the “Experiment” section of publications and reports, and include the specific parameters applicable to each spectrum in the figure caption.
SCOPE
1.1 Auger and X-ray photoelectron spectra are obtained using a variety of excitation methods, analyzers, signal processing, and digitizing techniques.
1.2 This practice lists the desirable information that shall be reported to fully describe the experimental conditions, specimen conditions, data recording procedures, and data transformation processes.
1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
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Designation: E996 − 10
Standard Practice for
Reporting Data in Auger Electron Spectroscopy and X-ray
1
Photoelectron Spectroscopy
This standard is issued under the fixed designation E996; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope E1127 Guide for Depth Profiling in Auger Electron Spec-
troscopy
1.1 Auger and X-ray photoelectron spectra are obtained
using a variety of excitation methods, analyzers, signal
3. Terminology
processing, and digitizing techniques.
3.1 Definitions—For definitions of terms used in this guide,
1.2 This practice lists the desirable information that shall be
refer to Terminology E673.
reported to fully describe the experimental conditions, speci-
men conditions, data recording procedures, and data transfor-
4. Summary of Practice
mation processes.
4.1 Report all experimental conditions that affectAuger and
1.3 The values stated in SI units are to be regarded as
X-ray photoelectron spectra so spectra can be reproduced in
standard. No other units of measurement are included in this
other laboratories or be compared with other spectra.
standard.
5. Significance and Use
1.4 This standard does not purport to address all of the
5.1 Includetheexperimentalconditionsunderwhichspectra
safety concerns, if any, associated with its use. It is the
are taken in the “Experiment” section of all reports and
responsibility of the user of this standard to establish appro-
publications.
priate safety and health practices and determine the applica-
bility of regulatory limitations prior to use.
5.2 Identify any parameters that are changed between dif-
ferent spectra in the “Experiment” section of publications and
2. Referenced Documents
reports, and include the specific parameters applicable to each
2
2.1 ASTM Standards: spectrum in the figure caption.
E673 Terminology Relating to SurfaceAnalysis (Withdrawn
3
6. Information To Be Reported
2012)
E902 Practice for Checking the Operating Characteristics of
6.1 Equipment Used:
3
X-Ray Photoelectron Spectrometers (Withdrawn 2011)
6.1.1 If a commercial electron spectroscopy system is used,
E983 Guide for Minimizing Unwanted Electron Beam Ef-
specify the manufacturer and model. Indicate the type of
fects in Auger Electron Spectroscopy
electron excitation source and electron analyzer as well as the
E995 Guide for Background Subtraction Techniques in Au-
model designation of other equipment used for generating the
ger Electron Spectroscopy and X-Ray Photoelectron
experimental data, such as a sputter ion source.
Spectroscopy
6.1.2 If a spectrometer system has been assembled from
E1078 Guide for Specimen Preparation and Mounting in several components specify the manufacturers and model
Surface Analysis
numbers of excitation source, analyzer, and auxiliary equip-
ment.
6.1.3 Identify the model name, version number, and manu-
1
This practice is under the jurisdiction of ASTM Committee E42 on Surface
facturer of software packages used to acquire or process the
Analysis and is the direct responsibility of Subcommittee E42.03 on Auger Electron
data.
Spectroscopy and X-Ray Photoelectron Spectroscopy.
Current edition approved Nov. 1, 2010. Published December 2010. Originally
6.2 Specimen Analyzed:
approved in 1984. Last previous edition approved in 2004 as E996 – 04. DOI:
6.2.1 Describe the specimen as completely as possible, for
10.1520/E0996-10.
2
example, its bulk composition, history, any methods of clean-
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
ing or sectioning, pre-analysis treatments, and dimensions.
Standards volume information, refer to the standard’s Document Summary page on
6.2.2 Describe the method of mounting and positioning the
the ASTM website.
3
specimen for analysis, for example, mounted on a carousel, or
The last approved version of this historical standard is referenced on
www.astm.org. mounted between strips of a particular metal. If the specimen
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
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E996 − 10
is heated, cooled or treated in the spectrometer system, mended that the procedure described in Practice E902 be used
describe the method used (for example, heated by electron to ensure that the spectrometer is operating in a reproducible
bombardment on the back of the specimen, or resistively manner.
heated). See Guide E1078 for more detail. 6.3.8 Detector Description—Describe the detector used. If
an elect
...
This document is not an ASTM standard and is intended only to provide the user of an ASTM standard an indication of what changes have been made to the previous version. Because
it may not be technically possible to adequately depict all changes accurately, ASTM recommends that users consult prior editions as appropriate. In all cases only the current version
of the standard as published by ASTM is to be considered the official document.
Designation:E996–04 Designation: E996 – 10
Standard Practice for
Reporting Data in Auger Electron Spectroscopy and X-ray
1
Photoelectron Spectroscopy
This standard is issued under the fixed designation E996; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope
1.1 Augerandx-rayX-rayphotoelectronspectraareobtainedusingavarietyofexcitationmethods,analyzers,signalprocessing,
and digitizing techniques.
1.2 This practice lists the desirable information that shall be reported to fully describe the experimental conditions, specimen
conditions, data recording procedures, and data transformation processes.
1.3
1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility
of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory
limitations prior to use.
2. Referenced Documents
2
2.1 ASTM Standards:
E673 Terminology Relating to Surface Analysis
E902 Practice for Checking the Operating Characteristics of X-Ray Photoelectron Spectrometers
E983 Guide for Minimizing Unwanted Electron Beam Effects in Auger Electron Spectroscopy
E995 Guide for Background Subtraction Techniques in Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy
E1078 Guide for Specimen Preparation and Mounting in Surface Analysis
E1127 Guide for Depth Profiling in Auger Electron Spectroscopy
3. Terminology
3.1 Definitions—For definitions of terms used in this guide, refer to Terminology E673.
4. Summary of Practice
4.1 Report all experimental conditions that affect Auger and x-rayX-ray photoelectron spectra so spectra can be reproduced in
other laboratories or be compared with other spectra.
5. Significance and Use
5.1 Include the experimental conditions under which spectra are taken in the “Experiment” section of all reports and
publications.
5.2 Identify any parameters that are changed between different spectra in the “Experiment” section of publications and reports,
and include the specific parameters applicable to each spectrum in the figure caption.
6. Information To Be Reported
6.1 Equipment Used:
6.1.1 If a commercial electron spectroscopy system is used, specify the manufacturer and model. Indicate the type of electron
excitation source and electron analyzer as well as the model designation of other equipment used for generating the experimental
data, such as a sputter ion source.
1
This practice is under the jurisdiction of ASTM Committee E42 on Surface Analysis and is the direct responsibility of Subcommittee E42.03 on Auger Electron
Spectroscopy and X-Ray Photoelectron Spectroscopy.
Current edition approved Nov. 1, 2004.2010. Published December 2004.2010. Originally approved in 1984. Last previous edition approved in 19992004 as E996–94
(1999). E996 – 04. DOI: 10.1520/E0996-104.
2
For referencedASTM standards, visit theASTM website, www.astm.org, or contactASTM Customer Service at service@astm.org. For Annual Book ofASTM Standards
volume information, refer to the standard’s Document Summary page on the ASTM website.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.
1
---------------------- Page: 1 ----------------------
E996 – 10
6.1.2 If a spectrometer system has been assembled from several components specify the manufacturers and model numbers of
excitation source, analyzer, and auxiliary equipment.
6.1.3 Identify the model name, version number, and manufacturer of software packages used to acquire or process the data.
6.2 Specimen Analyzed:
6.2.1 Describe the specimen as completely as possible, for example, its bulk composition, history, any methods of cleaning or
sectioning, pre-analysis treatments, and dimensions.
6.2.2 Describe the method of mounting and positioning the specimen for analysis, for example, mounted on a carousel, or
mounted between strips of a particular metal. If the specimen is heated, cooled or treated in the spectrometer system, describe the
method used (for example, heated by electron bombardment on the back of the specimen, or resistively heated). See Guide E1078
for more detail.
6.2.3 State
...
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