Standard Test Method for Measurement of Surface Layer Thickness by Radial Sectioning (Withdrawn 2002)

SCOPE
1.1 This test method covers the radial sectioning technique 2,3,4  for measurement of the thickness of thin surface layers, made by a wide variety of processes, on metals, alloys, carbides, and oxides.  
1.2 This test method is applicable to measurement of a wide variety of surface layer types where the interface between the layer and substrate is discernible by natural color or reflectivity differences or by means of color or reflectivity differences due to etching or staining.  
1.3 This test method does not pertain to layer thickness measurements made by analysis of compositional variations.  
1.4 This test method deals only with the recommended test method and nothing in it should be construed as defining or establishing limits of acceptability for any coating method.  
1.5 The measurement values stated are in the metric system, as defined in Standard E380.  
1.6  This standard may involve hazardous materials, operations, and equipment. This standard does not purport to address all of the safety problems associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.  For specific precautionary statements, see Section 7.

General Information

Status
Withdrawn
Publication Date
09-Dec-2001
Withdrawal Date
10-Nov-2002
Technical Committee
Current Stage
Ref Project

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ASTM E1182-01 - Standard Test Method for Measurement of Surface Layer Thickness by Radial Sectioning (Withdrawn 2002)
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NOTICE: This standard has either been superseded and replaced by a new version or withdrawn. Contact ASTM
International (www.astm.org) for the latest information.
Designation: E 1182 – 01
Standard Test Method for
Measurement of Surface Layer Thickness by Radial
1
Sectioning
This standard is issued under the fixed designation E1182; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision.Anumber in parentheses indicates the year of last reapproval.A
superscript epsilon (e) indicates an editorial change since the last revision or reapproval.
This standard has been approved for use by agencies of the Department of Defense.
6
1. Scope E7 Terminology Relating to Metallography
6
E407 Practice for Microetching Metals and Alloys
1.1 This test method covers the radial sectioning tech-
2,3,4
E691 Practice for Conducting an Interlaboratory Study to
nique for measurement of the thickness of thin surface
7
Determine the Precision of a Test Method
layers, made by a wide variety of processes, on metals, alloys,
F110 Test Method for Thickness of Epitaxial or Diffused
carbides, and oxides.
Layers in Silicon by the Angle Lapping and Staining
1.2 Thistestmethodisapplicabletomeasurementofawide
8
Technique
variety of surface layer types where the interface between the
IEEE/ASTM SI 10 Standard for Use of the International
layerandsubstrateisdiscerniblebynaturalcolororreflectivity
7
System of Units (SI): The Modern Metric System
differences or by means of color or reflectivity differences due
to etching or staining.
3. Terminology
1.3 This test method does not pertain to layer thickness
3.1 Definitions:
measurements made by analysis of compositional variations.
3.1.1 For definitions of terms used in this test method, see
1.4 This test method deals only with the recommended test
TerminologyE7.
method and nothing in it should be construed as defining or
3.2 Definitions of Terms Specific to This Standard:
establishing limits of acceptability for any coating method.
3.2.1 arcuic trigonometric measurement—method for mea-
1.5 Themeasurementvaluesstatedareinthemetricsystem,
suring the thickness of a surface layer using a radial cut of
as defined in Practice E380.
radius R through the layer into the substrate and measurement
1.6 This standard does not purport to address all of the
of the widths of the cut at the top of the layer and at the
safety concerns associated with its use. It is the responsibility
layer-substrate interface.
of the user of this standard to establish appropriate safety and
3.2.2 radial sectioning—amachiningprocedureforproduc-
health practices and determine the applicability of regulatory
ing a precise groove on the surface of a sample to a depth
limitations prior to use. For specific precautionary statements,
below the layer interface, that is, through a surface layer into
see Section 7.
the substrate, using a line or spot spindle of known radius.
2. Referenced Documents 3.3 Symbols:
3.3.1 x—thickness of the surface layer.
2.1 ASTM Standards: t
3.3.2 R—radius of the machined groove.
B487 Test Method for Measurement of Metal and Oxide
3.3.3 W — width of the groove at the layer-substrate
Coating Thickness by Microscopical Examination of a 2
5
interface.
Cross Section
3.3.4 C—correlation factor to correct for the deflection of
the spindle when the spindle contacts the specimen.
1
3.3.5 W — width of the groove at the top surface.
This test method is under the jurisdiction of ASTM Committee E04 on 1
Metallography and is the direct responsibility of Subcommittee E04.14 on Quanti-
3.3.6 n—number of fields measured
tative Metallography.
3.3.7 s—standard deviation
Current edition approved Dec. 10, 2001. Published January 2002. Originally
3.3.8 95%CI—confidence interval
published as E1182–87. Last previous edition E1182–93 (1998).
2
3.3.9 t—a multiplier related to the number of fields exam-
Happ, W. W., and Shockley, W., “Diffusion Depths in Silicon Measured by
Using Cylindrical Grooves,” Bulletin of the American Physical Society, Series II,
inedandusedinconjunctionwiththestandarddeviationofthe
Vol 1, 1956, p. 382.
measurements to determine the 95% CI.
3
McDonald, B., and Goetzuberger,A., “Measurement of the Depth of Diffused
LayersinSiliconbytheGroovingMethod,” Journal of the Electrochemical Society,
Vol 109, February 1962, pp. 141–144.
4 6
Whitelam, F. E., “Using Radial Sectioning to Measure Thin Layers,” Metal Annual Book of ASTM Standards, Vol 03.01.
7
Progress, Vol 127, March 1985, pp. 45, 46, 49, and 50. Annual Book of ASTM Standards, Vol 14.02.
5 8
Annual Book of ASTM Standards, Vol 02.05. Annual Book of ASTM Standards, Vol 10.05.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.
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NOTICE: This standard has either been superseded and replaced by a new version or withdrawn. Contact ASTM
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