ASTM E2088-06(2021)
(Practice)Standard Practice for Selecting, Preparing, Exposing, and Analyzing Witness Surfaces for Measuring Particle Deposition in Cleanrooms and Associated Controlled Environments
Standard Practice for Selecting, Preparing, Exposing, and Analyzing Witness Surfaces for Measuring Particle Deposition in Cleanrooms and Associated Controlled Environments
SIGNIFICANCE AND USE
5.1 This practice provides a standard approach to measuring particle deposition, or fallout, in cleanrooms and other controlled environments. It is based on the use of a witness surface to collect particles that deposit from the surrounding environment and subsequently sizing and counting the particles by conventional methods. Several options are introduced, with limitations and guidelines for selecting the best choice for the intended application.
5.2 This practice is applicable across numerous industries including aerospace, microelectronics, and pharmaceuticals.
SCOPE
1.1 This practice is intended to assist in the selection, preparation, exposure, and analysis of witness surfaces for the purpose of characterizing particle deposition rates in cleanrooms and associated controlled environments, particularly for aerospace applications.
1.2 Requirements may be defined in terms of particle size distribution and count, percent area coverage, or product performance criteria such as optical transmission or scatter. Several choices for witness surfaces are provided.
1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.
1.5 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
General Information
Relations
Standards Content (Sample)
This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the
Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.
Designation: E2088 − 06 (Reapproved 2021)
Standard Practice for
Selecting, Preparing, Exposing, and Analyzing Witness
Surfaces for Measuring Particle Deposition in Cleanrooms
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and Associated Controlled Environments
This standard is issued under the fixed designation E2088; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope Contamination on Surfaces
F312 Test Methods for Microscopical Sizing and Counting
1.1 This practice is intended to assist in the selection,
Particles from Aerospace Fluids on Membrane Filters
preparation, exposure, and analysis of witness surfaces for the
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purpose of characterizing particle deposition rates in clean- 2.2 ISO Standard:
ISO 14644-1 Cleanrooms and Associated Controlled
rooms and associated controlled environments, particularly for
aerospace applications. Environments—Part 1: Classification of Air Cleanliness
2.3 Government Standards:
1.2 Requirements may be defined in terms of particle size
Fed-Std-209 Airborne Particulate Cleanliness Classes in
distribution and count, percent area coverage, or product
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Cleanrooms and Clean Zones
performance criteria such as optical transmission or scatter.
IEST-STD-CC1246 Product Cleanliness Levels and Con-
Several choices for witness surfaces are provided.
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tamination Control Program
1.3 The values stated in SI units are to be regarded as
standard. No other units of measurement are included in this NOTE 1—The Institute of Environmental Sciences and Technology has
several Recommended Practices which may also be useful.
standard.
1.4 This standard does not purport to address all of the
3. Terminology
safety concerns, if any, associated with its use. It is the
3.1 Definitions:
responsibility of the user of this standard to establish appro-
3.1.1 bidirectional reflectance distribution function
priate safety, health, and environmental practices and deter-
(BRDF)—the scattering properties of light reflected off
mine the applicability of regulatory limitations prior to use.
surfaces, expressed as the ratio of differential outputs of
1.5 This international standard was developed in accor-
radiance divided by differential inputs of radiance. Surface
dance with internationally recognized principles on standard-
contaminants scatter the incident radiation in all directions and
ization established in the Decision on Principles for the
withvariableintensities.TheBRDFisamethodtoquantifythe
Development of International Standards, Guides and Recom-
spatial distribution of the scattered energy.
mendations issued by the World Trade Organization Technical
Barriers to Trade (TBT) Committee. 3.1.2 cleanliness level—an established maximum allowable
amount of contamination in a given area or volume, or on a
2. Referenced Documents (Note 1)
component.
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2.1 ASTM Standards:
3.1.3 cleanroom—an environmentally conditioned area in
E1216 Practice for Sampling for Particulate Contamination
which temperature, humidity, and airborne contaminants are
by Tape Lift
controlled by design and operation. High-efficiency particulate
F24 Test Method for Measuring and Counting Particulate
air (HEPA) filters or better are usually required to achieve the
air cleanliness level. Air particulate cleanliness is classified in
accordance with Fed-Std-209 or ISO 14644-1.
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This practice is under the jurisdiction of ASTM Committee E21 on Space
Simulation andApplications of Space Technology and is the direct responsibility of
Subcommittee E21.05 on Contamination.
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Current edition approved Sept. 1, 2021. Published October 2021. Originally Available fromAmerican National Standards Institute (ANSI), 25 W. 43rd St.,
approved in 2000. Last previous edition approved in 2015 as E2088 – 06(2015). 4th Floor, New York, NY 10036, http://www.ansi.org.
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DOI: 10.1520/E2088-06R21. Although Fed-Std-209 has been cancelled, it still may be used and designations
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For referenced ASTM standards, visit the ASTM website, www.astm.org, or in Fed-Std-209 may be used in addition to the ISO designations.
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contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM Available from Institute of Environmental Sciences and Technology (IEST),
Standards volume information, refer to the standard’s Document Summary page on Arlington Place One, 2340 South Arlington Heights Road, Suite 100, Arlington
the ASTM website. Heights, IL 60005-4516, http://www.iest.org.
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