Geometrical product specifications (GPS) - Surface texture: Areal - Part 607: Nominal characteristics of non-contact (confocal microscopy) instrumentss (ISO 25178-607:2018)

This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.

Geometrische Produktspezifikationen (GPS) - Oberflächenbeschaffenheit: Flächenhaft - Teil 607: Merkmale von berührungslos messenden Geräten (konfokale Mikroskopie) (ISO 25178-607:2018)

Dieses Dokument beschreibt die Einflussgrößen und Messgerätseigenschaften von konfokalen Mikroskopie-systemen zur flächenhaften Messung von Oberflächentopographien. Da Oberflächenprofile aus Oberflächen¬topographiebildern extrahierbar sind, können die Verfahren, die in diesem Dokument beschrieben werden, auch auf Profilmessungen angewendet werden.

Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 607: Caractéristiques nominales des instruments sans contact (microscopie confocale) (ISO 25178-607:2018)

Le présent document décrit les grandeurs d'influence et les caractéristiques des instruments utilisés dans les systèmes de microscopie confocale (MC) pour le mesurage surfacique de la topographie des surfaces. Comme les profils de surface peuvent être extraits des images par topographie de surface, les métodes décrites dans le présent document peuvent également être appliqués aux mesures de profilage

Specifikacija geometrijskih veličin izdelka (GPS) - Tekstura površine: ravna - 607. del: Imenske značilnosti nekontaktnih instrumentov (konfokalna mikroskopija) (ISO 25178-607:2018)

Ta dokument opisuje vplivne veličine in značilnosti instrumentov sistemov konfokalne mikroskopije za merjenje topografije ravne površine. Ker je mogoče profile površine izluščiti iz topografskih slik površine, je večino metod, opisanih v tem dokumentu, mogoče uporabiti tudi za meritve profiliranja.

General Information

Status
Published
Publication Date
09-Apr-2019
Withdrawal Date
30-Oct-2019
Current Stage
6060 - Definitive text made available (DAV) - Publishing
Start Date
10-Apr-2019
Due Date
28-Jan-2018
Completion Date
10-Apr-2019

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Standards Content (Sample)

SLOVENSKI STANDARD
SIST EN ISO 25178-607:2019
01-junij-2019
Specifikacija geometrijskih veličin izdelka (GPS) - Tekstura površine: ravna - 607.
del: Imenske značilnosti nekontaktnih instrumentov (konfokalna mikroskopija)
(ISO 25178-607:2018)
Geometrical product specifications (GPS) - Surface texture: Areal - Part 607: Nominal
characteristics of non-contact (confocal microscopy) instruments (ISO 25178-607:2018)
Geometrische Produktspezifikationen (GPS) - Oberflächenbeschaffenheit: Flächenhaft -
Teil 607: Merkmale von berührungslos messenden Geräten (konfokale Mikroskopie)
(ISO 25178-607:2018)
Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 607:
Caractéristiques nominales des instruments sans contact (microscopie confocale) (ISO
25178-607:2018)
Ta slovenski standard je istoveten z: EN ISO 25178-607:2019
ICS:
17.040.20 Lastnosti površin Properties of surfaces
17.040.40 Specifikacija geometrijskih Geometrical Product
veličin izdelka (GPS) Specification (GPS)
SIST EN ISO 25178-607:2019 en,fr,de
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

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SIST EN ISO 25178-607:2019

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SIST EN ISO 25178-607:2019


EN ISO 25178-607
EUROPEAN STANDARD

NORME EUROPÉENNE

April 2019
EUROPÄISCHE NORM
ICS 17.040.20
English Version

Geometrical product specifications (GPS) - Surface texture:
Areal - Part 607: Nominal characteristics of non-contact
(confocal microscopy) instrumentss (ISO 25178-
607:2018)
Spécification géométrique des produits (GPS) - État de Geometrische Produktspezifikationen (GPS) -
surface: Surfacique - Partie 607: Caractéristiques Oberflächenbeschaffenheit: Flächenhaft - Teil 607:
nominales des instruments sans contact (microscopie Merkmale von berührungslos messenden Geräten
confocale) (ISO 25178-607:2018) (konfokale Mikroskopie) (ISO 25178-607:2018)
This European Standard was approved by CEN on 15 February 2019.

CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this
European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references
concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN
member.

This European Standard exists in three official versions (English, French, German). A version in any other language made by
translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management
Centre has the same status as the official versions.

CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania,
Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland,
Turkey and United Kingdom.





EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION

EUROPÄISCHES KOMITEE FÜR NORMUNG

CEN-CENELEC Management Centre: Rue de la Science 23, B-1040 Brussels
© 2019 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 25178-607:2019 E
worldwide for CEN national Members.

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SIST EN ISO 25178-607:2019
EN ISO 25178-607:2019 (E)
Contents Page
European foreword . 3
Endorsement notice . 3

2

---------------------- Page: 4 ----------------------

SIST EN ISO 25178-607:2019
EN ISO 25178-607:2019 (E)
European foreword
This document (EN ISO 25178-607:2019) has been prepared by Technical Committee ISO/TC 213
"Dimensional and geometrical product specifications and verification" in collaboration with Technical
Committee CEN/TC 290 “Dimensional and geometrical product specification and verification” the
secretariat of which is held by AFNOR.
This European Standard shall be given the status of a national standard, either by publication of an
identical text or by endorsement, at the latest by October 2019, and conflicting national standards shall
be withdrawn at the latest by October 2019.
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. CEN shall not be held responsible for identifying any or all such patent rights.

According to the CEN-CENELEC Internal Regulations, the national standards organizations of
...

SLOVENSKI STANDARD
oSIST prEN ISO 25178-607:2017
01-junij-2017
6SHFLILNDFLMDJHRPHWULMVNLKYHOLþLQL]GHOND *36 7HNVWXUDSRYUãLQHUDYQD
GHO,PHQVNH]QDþLOQRVWLQHNRQWDNWQLKLQVWUXPHQWRY NRQIRNDOQDPLNURVNRSLMD
,62',6
Geometrical product specifications (GPS) - Surface texture: Areal - Part 607: Nominal
characteristics of non-contact (confocal microscopy) instruments (ISO/DIS 25178-
607:2017)
Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 607:
Caractéristiques nominales des instruments sans contact (microscopie confocale)
(ISO/DIS 25178-607:2017)
Ta slovenski standard je istoveten z: prEN ISO 25178-607
ICS:
17.040.20 Lastnosti površin Properties of surfaces
17.040.40 6SHFLILNDFLMDJHRPHWULMVNLK Geometrical Product
YHOLþLQL]GHOND *36 Specification (GPS)
oSIST prEN ISO 25178-607:2017 en,fr,de
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

---------------------- Page: 1 ----------------------
oSIST prEN ISO 25178-607:2017

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oSIST prEN ISO 25178-607:2017
DRAFT INTERNATIONAL STANDARD
ISO/DIS 25178-607
ISO/TC 213 Secretariat: DS
Voting begins on: Voting terminates on:
2017-03-31 2017-06-22
Geometrical product specifications (GPS) — Surface
texture: Areal —
Part 607:
Nominal characteristics of non-contact (confocal
microscopy) instruments
Spécification géométrique des produits (GPS) — État de surface: Surfacique —
Partie 607: Caractéristiques nominales des instruments sans contact (microscopie confocale)
ICS: 17.040.20
THIS DOCUMENT IS A DRAFT CIRCULATED
This document is circulated as received from the committee secretariat.
FOR COMMENT AND APPROVAL. IT IS
THEREFORE SUBJECT TO CHANGE AND MAY
NOT BE REFERRED TO AS AN INTERNATIONAL
STANDARD UNTIL PUBLISHED AS SUCH.
IN ADDITION TO THEIR EVALUATION AS
ISO/CEN PARALLEL PROCESSING
BEING ACCEPTABLE FOR INDUSTRIAL,
TECHNOLOGICAL, COMMERCIAL AND
USER PURPOSES, DRAFT INTERNATIONAL
STANDARDS MAY ON OCCASION HAVE TO
BE CONSIDERED IN THE LIGHT OF THEIR
POTENTIAL TO BECOME STANDARDS TO
WHICH REFERENCE MAY BE MADE IN
Reference number
NATIONAL REGULATIONS.
ISO/DIS 25178-607:2017(E)
RECIPIENTS OF THIS DRAFT ARE INVITED
TO SUBMIT, WITH THEIR COMMENTS,
NOTIFICATION OF ANY RELEVANT PATENT
RIGHTS OF WHICH THEY ARE AWARE AND TO
©
PROVIDE SUPPORTING DOCUMENTATION. ISO 2017

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oSIST prEN ISO 25178-607:2017
ISO/DIS 25178-607:2017(E)

COPYRIGHT PROTECTED DOCUMENT
© ISO 2017, Published in Switzerland
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form
or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior
written permission. Permission can be requested from either ISO at the address below or ISO’s member body in the country of
the requester.
ISO copyright office
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Tel. +41 22 749 01 11
Fax +41 22 749 09 47
copyright@iso.org
www.iso.org
ii © ISO 2017 – All rights reserved

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oSIST prEN ISO 25178-607:2017
ISO/DIS 25178-607:2017(E)

Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Descriptions of the influence quantities . 5
Annex A (informative) Classification of in-plane scanning technologiesfor confocal microscopes .7
Annex B (informative) Theory of operation of confocal microscopes .13
Annex C (informative) Thin and thick films with CMs .
...

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