FprEN ISO 25178-605
(Main)Geometrical product specifications (GPS) - Surface texture: Areal - Part 605: Design and characteristics of non-contact (point autofocus probe) instruments (ISO/FDIS 25178-605:2024)
Geometrical product specifications (GPS) - Surface texture: Areal - Part 605: Design and characteristics of non-contact (point autofocus probe) instruments (ISO/FDIS 25178-605:2024)
Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Flächenhaft - Teil 605: Aufbau und Merkmale von berührungslos messenden Geräten (Punkt-Autofokus-Sensor) (ISO/FDIS 25178‑605:2024)
Dieses Dokument legt die Konstruktionsmerkmale und die messtechnischen Merkmale von Messgeräten mit Punkt-Autofokus-Sensor (PAS) zur flächenhaften Messung von Oberflächentopographien fest. Da Oberflächenprofile aus Daten der flächenhaften Oberflächentopografie extrahiert werden können, sind die in diesem Dokument festgelegten Verfahren auch auf Profilierungsmessungen anwendbar.
Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 605: Conception et caractéristiques des instruments sans contact (capteur autofocus à point) (ISO/FDIS 25178-605:2024)
Specifikacija geometrijskih veličin izdelka (GPS) - Tekstura površine: ploskovna - 605. del: Konstrukcije in značilnosti brezkontaktnih (točka avtofokusne sonde) instrumentov (ISO/FDIS 25178-605:2024)
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Standards Content (Sample)
SLOVENSKI STANDARD
oSIST prEN ISO 25178-605:2023
01-december-2023
Specifikacija geometrijskih veličin izdelka (GPS) - Tekstura površine: ploskovna -
605. del: Konstrukcije in značilnosti brezkontaktnih (točka avtofokusne sonde)
instrumentov (ISO/DIS 25178-605:2023)
Geometrical product specifications (GPS) - Surface texture: Areal - Part 605: Design and
characteristics of non-contact (point autofocus probe) instruments (ISO/DIS 25178-
605:2023)
Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Flächenhaft -
Teil 605: Aufbau und Merkmale von berührungslos messenden Geräten (Punkt-
Autofokus-Sensor) (ISO/DIS 25178-605:2023)
Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 605:
Conception et caractéristiques des instruments sans contact (capteur autofocus à point)
(ISO/DIS 25178-605:2023)
Ta slovenski standard je istoveten z: prEN ISO 25178-605
ICS:
17.040.20 Lastnosti površin Properties of surfaces
17.040.40 Specifikacija geometrijskih Geometrical Product
veličin izdelka (GPS) Specification (GPS)
oSIST prEN ISO 25178-605:2023 en,fr,de
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.
oSIST prEN ISO 25178-605:2023
oSIST prEN ISO 25178-605:2023
DRAFT INTERNATIONAL STANDARD
ISO/DIS 25178-605
ISO/TC 213 Secretariat: BSI
Voting begins on: Voting terminates on:
2023-10-23 2024-01-15
Geometrical product specifications (GPS) — Surface
texture: Areal —
Part 605:
Design and characteristics of non-contact (point autofocus
probe) instruments
ICS: 17.040.20
This document is circulated as received from the committee secretariat.
THIS DOCUMENT IS A DRAFT CIRCULATED
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ISO/DIS 25178-605:2023(E)
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PROVIDE SUPPORTING DOCUMENTATION. © ISO 2023
oSIST prEN ISO 25178-605:2023
ISO/DIS 25178-605:2023(E)
DRAFT INTERNATIONAL STANDARD
ISO/DIS 25178-605
ISO/TC 213 Secretariat: BSI
Voting begins on: Voting terminates on:
Geometrical product specifications (GPS) — Surface
texture: Areal —
Part 605:
Design and characteristics of non-contact (point autofocus
probe) instruments
ICS: 17.040.20
This document is circulated as received from the committee secretariat.
THIS DOCUMENT IS A DRAFT CIRCULATED
FOR COMMENT AND APPROVAL. IT IS
© ISO 2023
ISO/CEN PARALLEL PROCESSING
THEREFORE SUBJECT TO CHANGE AND MAY
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
NOT BE REFERRED TO AS AN INTERNATIONAL
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NATIONAL REGULATIONS.
Website: www.iso.org ISO/DIS 25178-605:2023(E)
RECIPIENTS OF THIS DRAFT ARE INVITED
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ii
PROVIDE SUPPORTING DOCUMENTATION. © ISO 2023
oSIST prEN ISO 25178-605:2023
ISO/DIS 25178-605:2023(E)
Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Instrument requirements .3
5 Metrological characteristics . 4
6 Design features .4
7 General information . 4
Annex A (informative) Principles of PAP (point autofocus probe) instruments for areal
surface topography measurement . 5
Annex B (informative) Sources of measurement error for PAP instruments .9
Annex C (informative) Relation to the GPS matrix model .15
Bibliography .17
iii
oSIST prEN ISO 25178-605:2023
ISO/DIS 25178-605:2023(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2 (see www.iso.org/directives).
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of
any patent rights identified during the development of the document will be in the Introduction and/or
on the ISO list of patent declarations received (see www.iso.org/patents).
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation of the voluntary nature of standards, the meaning of ISO specific terms and
expressions related to conformity assessment, as well as information about ISO's adherence to
the World Trade Organization (WTO) principles in the Technical Barriers to Trade (TBT), see
www.iso.org/iso/foreword.html.
This document was prepared by Technical Committee ISO/TC 213, Dimensional and geometrical product
specifications and verification.
This second edition cancels and replaces the first edition (ISO 25178-605:2014), which has been
technically revised.
A list of all parts in the ISO 25178 series can be found on the ISO website.
Any feedback or questions on this document should be directed to the user’s national standards body. A
complete listing of these bodies can be found at www.iso.org/members.html.
iv
oSIST prEN ISO 25178-605:2023
ISO/DIS 25178-605:2023(E)
Introduction
This document is a geometrical product specification (GPS) standard and is to be regarded as a general
GPS standard (see ISO 14638). It influences chain link F of the chains of standards on profile and areal
surface texture.
The ISO GPS matrix model given in ISO 14638 gives an overview of the ISO GPS system of which this
document is a part. The fundamental rules of ISO GPS given in ISO 8015 apply to this part of ISO 25178
and the default decision rules given in ISO 14253-1 apply to the specifications made in accordance with
this document, unless otherwise indicated.
For more detailed information of the relation of this document to other standards and the GPS matrix
model, see Annex C.
This document includes normative terms and definitions relevant to the point autofocus probe
instruments for the measurement of areal surface topography. The informative Annex A briefly
summarizes point autofocus probe instruments and methods to clarify the normative definitions and
to provide a foundation for informative Annex B, which describes common sources of uncertainty and
their relation to the metrological characteristics of point autofocus probe.
NOTE Portions of this document, particularly the informative sections, describe patented systems and
methods. This information is provided only to assist users in understanding the operating principles of point
autofocus instruments. This document is not intended to establish priority for any intellectual property, nor does
it imply a license to proprietary technologies described herein.
v
oSIST prEN ISO 25178-605:2023
oSIST prEN ISO 25178-605:2023
DRAFT INTERNATIONAL STANDARD ISO/DIS 25178-605:2023(E)
Geometrical product specifications (GPS) — Surface
texture: Areal —
Part 605:
Design and characteristics of non-contact (point autofocus
probe) instruments
1 Scope
This document describes the design and characteristics of point autofocus probe instruments for areal
measurement of surface topography. Because surface profiles can be extracted from areal surface
topography data, the methods described in this document can be applied to profiling measurements as
well.
2 Normative references
The following documents are referred to in the text in such a way that some or all of their content
constitutes requirements of this document. For dated references, only the edition cited applies. For
undated references, the latest edition of the referenced document (including any amendments) applies.
ISO 25178-600:2019, Geometrical product specifications (GPS) — Surface texture: Areal — Part 600:
Metrological characteristics for areal topography measuring methods
3 Terms and definitions
For the purposes of this document, the terms and definitions given in ISO 25178-600 and the following
apply.
ISO and IEC maintain terminological databases for use in standardization at the following addresses:
— ISO Online browsing platform: available at https:// www .iso .org/ obp
— IEC Electropedia: available at https:// www .electropedia .org/
3.1
probing system
component of the instrument consisting of an autofocus optical system, an
autofocus mechanism, and an electronic controller
3.2
point autofocus probe
PAP
device that converts the height of a point on a surface into a signal during measurement using the
autofocus function
3.3
point autofocus profiling
surface topography measurement method whereby the local surface height is measured by
automatically centring a focused light beam reflected from the sample on a position sensitive detector
as a function of surface height
[SOURCE: ISO 25178-6:2010, 3.3.11]
oSIST prEN ISO 25178-605:2023
ISO/DIS 25178-605:2023(E)
3.4
objective
objective lens that focuses the light source image on the workpiece surface
3.5
autofocus sensor
optical sensor that detects a focal position using the light reflected from the workpiece surface
3.6
autofocus mechanism
autofocus driving mechanism that positions optical elements or the whole optical system
3.7
z position sensor
sensor that measures the vertical position of the measured point
3.8
working distance
distance along the optical axis between the element closest to the surface and
the focus point on the surface
Note 1 to entry: Maximum measurable step height is related to working distance.
3.9
spot size
W
SPOT
size of the light source image focused on the workpiece surface
Note 1 to entry: See Annex B.2.
3.10
focus range
range of z heights, within which it is possible to achieve adequate focus
3.11
vertical range
R
VERT
measuring range of the autofocus probe in z heights within which it is possible
to output reliable data
3.12
measurable minimum reflection
...
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