IEC 60749-28:2017

Semiconductor devices - Mechanical and climatic test methods - Part 28: Electrostatic discharge (ESD) sensitivity testing - Charged device model (CDM) - device level

IEC 60749-28:2017(E) establishes the procedure for testing, evaluating, and classifying devices and microcircuits according to their susceptibility (sensitivity) to damage or degradation by exposure to a defined field-induced charged device model (CDM) electrostatic discharge (ESD). All packaged semiconductor devices, thin film circuits, surface acoustic wave (SAW) devices, opto-electronic devices, hybrid integrated circuits (HICs), and multi-chip modules (MCMs) containing any of these devices are to be evaluated according to this document. To perform the tests, the devices are assembled into a package similar to that expected in the final application. This CDM document does not apply to socketed discharge model testers. This document describes the field-induced (FI) method. An alternative, the direct contact (DC) method, is described in Annex I.
The purpose of this document is to establish a test method that will replicate CDM failures and provide reliable, repeatable CDM ESD test results from tester to tester, regardless of device type. Repeatable data will allow accurate classifications and comparisons of CDM ESD sensitivity levels.

Dispositifs à semiconducteurs - Méthodes d’essais mécaniques et climatiques - Partie 28: Essai de sensibilité aux décharges électrostatiques (DES) - Modèle du composant chargé (CDM) au niveau du dispositif

General Information

• Status: Published
• Publication Date: 27-Mar-2017
• ICS: 01 - GENERALITIES. TERMINOLOGY. STANDARDIZATION. DOCUMENTATION
• ICS: 31.080.01 - Semiconductor devices in general
• Technical Committee: TC 47 - Semiconductor devices
• Drafting Committee: WG 2 - TC 47/WG 2
• Current Stage: DELPUB - Deleted Publication
• Start Date: 01-Jul-2020
• Completion Date: 01-Mar-2022

Relations

• Replaces: IEC PAS 62162:2000 - Field-induced charged-device model test method for electrostatic discharge withstand thresholds of microelectronic components
• Effective Date: 05-Sep-2023
• Revised: IEC 60749-28:2022 - Semiconductor devices - Mechanical and climatic test methods - Part 28: Electrostatic discharge (ESD) sensitivity testing - Charged device model (CDM) - device level
• Effective Date: 05-Sep-2023

Standards Content (Sample)

IEC 60749-28 ®
Edition 1.0 2017-03
INTERNATIONAL
STANDARD
colour
inside
Semiconductor devices – Mechanical and climatic test methods –
Part 28: Electrostatic discharge (ESD) sensitivity testing – Charged device
model (CDM) – device level
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form
or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from
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IEC 60749-28 ®
Edition 1.0 2017-03
INTERNATIONAL
STANDARD
colour
inside
Semiconductor devices – Mechanical and climatic test methods –

Part 28: Electrostatic discharge (ESD) sensitivity testing – Charged device

model (CDM) – device level
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 31.080.01 ISBN 978-2-8322-4139-4

– 2 – IEC 60749-28:2017 © IEC 2017
CONTENTS
FOREWORD . 5
INTRODUCTION . 7
1 Scope . 8
2 Normative references . 8
3 Terms and definitions . 8
4 Required equipment . 9
4.1 CDM ESD tester . 9
4.1.1 General . 9
4.1.2 Current-sensing element . 10
4.1.3 Ground plane . 10
4.1.4 Field plate/field plate dielectric layer . 10
4.1.5 Charging resistor . 11
4.2 Waveform measurement equipment . 11
4.2.1 General . 11
4.2.2 Cable assemblies . 11
4.2.3 Equipment for high-bandwidth waveform measurement . 11
4.2.4 Equipment for 1,0 GHz waveform measurement . 11
4.3 Verification modules (metal discs) . 11
4.4 Capacitance meter . 11
4.5 Ohmmeter . 12
5 Periodic tester qualification, waveform records, and waveform verification
requirements . 12
5.1 Overview of required CDM tester evaluations . 12
5.2 Waveform capture hardware . 12
5.3 Waveform capture setup . 12
5.4 Waveform capture procedure . 12
5.5 CDM tester qualification/requalification procedure . 13
5.5.1 CDM tester qualification/requalification procedure . 13
5.5.2 Conditions requiring CDM tester qualification/requalification . 13
5.5.3 1 GHz oscilloscope correlation with high bandwidth oscilloscope . 14
5.6 CDM tester quarterly and routine waveform verification procedure . 14
5.6.1 Quarterly waveform verification procedure . 14
5.6.2 Routine waveform verification procedure . 14
5.7 Waveform characteristics . 14
5.8 Documentation . 16
5.9 Procedure for evaluating full CDM tester charging of a device . 16
6 CDM ESD testing requirements and procedures . 17
6.1 Device handling . 17
6.2 Test requirements . 17
6.2.1 Test temperature and humidity . 17
6.2.2 Device test . 17
6.3 Test procedures . 17
6.4 CDM test recording / reporting guidelines . 18
7 CDM classification criteria . 18
Annex A (normative) Verification module (metal disc) specifications and cleaning
guidelines for verification modules and testers . 19

A.1 Tester verification modules and field plate dielectric . 19
A.2 Care of verification modules . 19
Annex B (normative) Capacitance measurement of verification modules (metal discs)
sitting on a tester field plate dielectric . 20
Annex C (informative) CDM test hardware and metrology improvements . 21
Annex D (informative) CDM tester electrical schematic . 23
Annex E (informative) Sample oscilloscope setup and waveform . 24
E.1 General . 24
E.2 Settings for the 1 GHz bandwidth oscilloscope . 24
E.3 Settings for the high-bandwidth oscilloscope . 24
E.4 Setup . 24
E.5 Sample waveforms from a 1 GHz oscilloscope . 24
E.6 Sample waveforms from an 8 GHz oscilloscope . 25
Annex F (informative) Field-induced CDM tester discharge procedures . 27
F.1 General . 27
F.2 Single discharge procedure . 27
F.3 Dual discharge procedure . 27
Annex G (informative) Waveform verification procedures . 29
G.1 Factor/offset adjustment method . 29
G.2 Software voltage adjustment method. 32
G.3 Example parameter recording tables . 34
Annex H (informative) Determining the appropriate charge delay for full charging of a
large module or device . 36
H.1 General . 36
H.2 Procedure for charge delay determination . 36
Annex I (informative) Electrostatic discharge (ESD) sensitivity testing direct contact
charged device model (DC-CDM) . 38
I.1 General . 38
I.2 Standard test module . 38
I.3 Test equipment (CDM simulator) . 38
I.3.1 Test equipment design. 38
I.3.2 DUT (device under test) support . 38
I.3.3 Metal bar/board . 39
I.3.4 Equipment setup . 39
I.4 Verification of test equipment . 39
I.4.1 General description of verification test equipment . 39
I.4.2 Instruments for measurement . 41
I.4.3 Verification of test equipment, using a current probe . 41
I.5 Test procedure . 42
I.5.1 Initial measurement . 42
I.5.2 Tests . 42
I.5.3 Intermediate and final measurement . 43
I.6 Failure criteria . 43
I.7 Classification criteria . 43
I.8 Summary . 43
Bibliography . 44

Figure 1 – Simplified CDM tester hardware schematic . 10

– 4 – IEC 60749-28:2017 © IEC 2017
Figure 2 – CDM characteristic waveform and parameters . 16
Figure D.1 – Simplified CDM tester electrical schematic .
...

IEC 60749-28 ®
Edition 1.0 2017-03
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
colour
inside
Semiconductor devices – Mechanical and climatic test methods –
Part 28: Electrostatic discharge (ESD) sensitivity testing – Charged device model
(CDM) – device level
Dispositifs à semiconducteurs – Méthodes d’essais mécaniques et climatiques –
Partie 28: Essai de sensibilité aux décharges électrostatiques (DES) – Modèle du
composant chargé (CDM) au niveau du dispositif

All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form

or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from

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copyright or have an enquiry about obtaining additional rights to this publication, please contact the address below or

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IEC 60749-28 ®
Edition 1.0 2017-03
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
colour
inside
Semiconductor devices – Mechanical and climatic test methods –

Part 28: Electrostatic discharge (ESD) sensitivity testing – Charged device model

(CDM) – device level
Dispositifs à semiconducteurs – Méthodes d’essais mécaniques et climatiques –

Partie 28: Essai de sensibilité aux décharges électrostatiques (DES) – Modèle du

composant chargé (CDM) au niveau du dispositif

INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
COMMISSION
ELECTROTECHNIQUE
INTERNATIONALE
ICS 31.080.01 ISBN 978-2-8322-0571-6

– 2 – IEC 60749-28:2017 © IEC 2017

CONTENTS
FOREWORD . 5

INTRODUCTION . 7

1 Scope . 8

2 Normative references . 8

3 Terms and definitions . 8

4 Required equipment . 9

4.1 CDM ESD tester . 9

4.1.1 General . 9
4.1.2 Current-sensing element . 10
4.1.3 Ground plane . 10
4.1.4 Field plate/field plate dielectric layer . 10
4.1.5 Charging resistor . 11
4.2 Waveform measurement equipment . 11
4.2.1 General . 11
4.2.2 Cable assemblies . 11
4.2.3 Equipment for high-bandwidth waveform measurement . 11
4.2.4 Equipment for 1,0 GHz waveform measurement . 11
4.3 Verification modules (metal discs) . 11
4.4 Capacitance meter . 11
4.5 Ohmmeter . 12
5 Periodic tester qualification, waveform records, and waveform verification
requirements . 12
5.1 Overview of required CDM tester evaluations . 12
5.2 Waveform capture hardware . 12
5.3 Waveform capture setup . 12
5.4 Waveform capture procedure . 12
5.5 CDM tester qualification/requalification procedure . 13
5.5.1 CDM tester qualification/requalification procedure . 13
5.5.2 Conditions requiring CDM tester qualification/requalification . 13
5.5.3 1 GHz oscilloscope correlation with high bandwidth oscilloscope . 13
5.6 CDM tester quarterly and routine waveform verification procedure . 14
5.6.1 Quarterly waveform verification procedure . 14
5.6.2 Routine waveform verification procedure . 14

5.7 Waveform characteristics . 14
5.8 Documentation . 16
5.9 Procedure for evaluating full CDM tester charging of a device . 16
6 CDM ESD testing requirements and procedures . 17
6.1 Device handling . 17
6.2 Test requirements . 17
6.2.1 Test temperature and humidity . 17
6.2.2 Device test . 17
6.3 Test procedures . 17
6.4 CDM test recording / reporting guidelines . 18
7 CDM classification criteria . 18
Annex A (normative) Verification module (metal disc) specifications and cleaning
guidelines for verification modules and testers . 19

A.1 Tester verification modules and field plate dielectric . 19

A.2 Care of verification modules . 19

Annex B (normative) Capacitance measurement of verification modules (metal discs)

sitting on a tester field plate dielectric . 20

Annex C (informative) CDM test hardware and metrology improvements . 21

Annex D (informative) CDM tester electrical schematic . 23

Annex E (informative) Sample oscilloscope setup and waveform . 24

E.1 General . 24

E.2 Settings for the 1 GHz bandwidth oscilloscope . 24

E.3 Settings for the high-bandwidth oscilloscope . 24
E.4 Setup . 24
E.5 Sample waveforms from a 1 GHz oscilloscope . 24
E.6 Sample waveforms from an 8 GHz oscilloscope . 25
Annex F (informative) Field-induced CDM tester discharge procedures . 27
F.1 General . 27
F.2 Single discharge procedure . 27
F.3 Dual discharge procedure . 27
Annex G (informative) Waveform verification procedures . 29
G.1 Factor/offset adjustment method . 29
G.2 Software voltage adjustment method. 32
G.3 Example parameter recording tables . 34
Annex H (informative) Determining the appropriate charge delay for full charging of a
large module or device . 36
H.1 General . 36
H.2 Procedure for charge delay determination . 36
Annex I (informative) Electrostatic discharge (ESD) sensitivity testing direct contact
charged d
...