Piezoelectric sensors - Part 1: Generic specifications

IEC 63041-1:2017 applies to piezoelectric sensors of resonator, delay-line and non‑acoustic types, which are used in physical and engineering sciences, chemistry and biochemistry, medical and environmental sciences, etc. The purpose of this document is to specify the terms and definitions for the piezoelectric sensors, and to make sure from a technological perspective that users understand the state‑of-art piezoelectric sensors and how to use them correctly.

Capteurs piézoélectriques - Partie 1: Spécification générique

L'IEC 63041-1:2017 s'applique aux capteurs piézoélectriques de résonateur, à ligne de retard et non acoustique, utilisés en sciences physiques, en sciences de l'ingénierie, en chimie et en biochimie, en sciences médicales et environnementales, etc.
Le présent document a pour objet de spécifier les termes et définitions relatifs aux capteurs piézoélectriques et de vérifier, d'un point de vue technologique, que les utilisateurs ont une bonne approche des capteurs piézoélectriques de pointe et qu'ils savent les utiliser correctement.

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Status
Published
Publication Date
12-Dec-2017
Current Stage
DELPUB - Deleted Publication
Completion Date
17-Sep-2021
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IEC 63041-1
Edition 1.0 2017-12
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
Piezoelectric sensors –
Part 1: Generic specifications
Capteurs piézoélectriques –
Partie 1: Spécification générique
IEC 63041-1:2017-12(en-fr)
---------------------- Page: 1 ----------------------
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---------------------- Page: 2 ----------------------
IEC 63041-1
Edition 1.0 2017-12
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
Piezoelectric sensors –
Part 1: Generic specifications
Capteurs piézoélectriques –
Partie 1: Spécification générique
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
COMMISSION
ELECTROTECHNIQUE
INTERNATIONALE
ICS 31.140 ISBN 978-2-8322-7414-9

Warning! Make sure that you obtained this publication from an authorized distributor.

Attention! Veuillez vous assurer que vous avez obtenu cette publication via un distributeur agréé.

® Registered trademark of the International Electrotechnical Commission
Marque déposée de la Commission Electrotechnique Internationale
---------------------- Page: 3 ----------------------
– 2 – IEC 63041-1:2017 © IEC 2017
CONTENTS

FOREWORD ........................................................................................................................... 5

1 Scope .............................................................................................................................. 7

2 Normative references ...................................................................................................... 7

3 Terms and definitions ...................................................................................................... 7

3.1 General ................................................................................................................... 7

3.2 Piezoelectric sensors .............................................................................................. 8

3.3 Types of chemical sensors ...................................................................................... 8

3.4 Types of physical sensors ....................................................................................... 9

4 Symbols of sensor elements ............................................................................................ 9

4.1 General ................................................................................................................... 9

4.2 Symbol for sensor elements of BAW resonator type .............................................. 10

4.3 Symbol for sensor elements of SAW resonator type .............................................. 10

4.4 Symbol for sensor elements of SAW delay-line type .............................................. 11

4.5 Symbol for sensor elements of non-acoustic type .................................................. 11

4.6 Symbols ................................................................................................................ 11

5 Specifications ................................................................................................................ 12

5.1 Sensor elements ................................................................................................... 12

5.1.1 General ......................................................................................................... 12

5.1.2 Sensor elements of resonator and delay-line types ........................................ 12

5.1.3 Sensor elements of non-acoustic type ........................................................... 13

5.2 Frequency ranges ................................................................................................. 13

5.3 Level of drive or input power ................................................................................. 13

5.4 Unwanted response .............................................................................................. 13

5.5 Analysis of measurements .................................................................................... 13

5.6 Enclosure ............................................................................................................. 14

5.7 Performance confirmation ..................................................................................... 14

5.8 Long-term and short-term stabilities ...................................................................... 14

6 Measurement and detection methods ............................................................................ 14

7 Delivery conditions ........................................................................................................ 14

7.1 Marking ................................................................................................................. 14

7.2 Wrapping .............................................................................................................. 14

7.3 Packaging ............................................................................................................. 14

8 Quality and reliability ..................................................................................................... 15

8.1 Reuse ................................................................................................................... 15

8.2 Validity of release ................................................................................................. 15

8.3 Test procedures .................................................................................................... 15

8.4 Screening requirements ........................................................................................ 15

8.5 Unchecked parameters ......................................................................................... 15

9 Test and measurement procedures ................................................................................ 15

9.1 General ................................................................................................................. 15

9.1.1 Classification of tests ..................................................................................... 15

9.1.2 Shipping test ................................................................................................. 15

9.1.3 Mechanical and environmental test ................................................................ 15

9.2 Test and measurement conditions ......................................................................... 16

9.2.1 Standard conditions for testing ...................................................................... 16

9.2.2 Equilibrium state ............................................................................................ 16

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IEC 63041-1:2017 © IEC 2017 – 3 –

9.2.3 Power supply ................................................................................................. 16

9.2.4 Alternative test system .................................................................................. 16

9.2.5 Visual inspection ........................................................................................... 17

9.3 Test conditions for shipment ................................................................................. 17

9.3.1 Temperature dependence of frequency, phase, insertion loss/gain,

motional resistance, and electric charge / voltage .......................................... 17

9.3.2 Unwanted response ....................................................................................... 17

9.3.3 Shunt capacitance ......................................................................................... 17

9.3.4 Insulation resistance ...................................................................................... 17

Annex A (normative) Measurement methods ........................................................................ 18

A.1 General ................................................................................................................. 18

A.2 Measurement methods using reflection and transmission characteristics .............. 18

A.3 Measurement methods using oscillation circuits .................................................... 19

A.4 Measurement method of non-acoustic type sensor elements and cells .................. 20

A.5 Other measurement methods ................................................................................ 20

Annex B (normative) Detection methods .............................................................................. 21

B.1 General ................................................................................................................. 21

B.2 Detection methods ................................................................................................ 21

B.2.1 Frequency difference measurement ............................................................... 21

B.2.2 Insertion loss/gain measurement ................................................................... 22

B.2.3 Phase difference measurement...................................................................... 22

B.2.4 Other detection methods ................................................................................ 23

Bibliography .......................................................................................................................... 24

Figure 1 – Conceptual diagrams for sensor elements of BAW resonator type ........................ 10

Figure 2 – Symbol for sensor elements of BAW resonator type ............................................. 10

Figure 3 – Conceptual diagram of sensor elements of SAW resonator type ........................... 10

Figure 4 – Symbol for sensor elements of SAW resonator type ............................................. 10

Figure 5 – Conceptual diagram for sensor elements of SAW delay-line type ......................... 11

Figure 6 – Symbol for sensor elements of SAW delay-line type ............................................. 11

Figure 7 – Conceptual diagrams for sensor elements of non-acoustic type............................ 11

Figure 8 – Symbol for sensor elements of non-acoustic type ................................................. 11

Figure A.1 – Measurement method using reflection characteristics of BAW resonator

type sensor elements and cells ............................................................................................. 18

Figure A.2 – Measurement method using reflection characteristics of SAW resonator

type sensor elements and cells ............................................................................................. 18

Figure A.3 – Measurement method using transmission characteristics of SAW delay-

line type sensor elements and cells ...................................................................................... 19

Figure A.4 – Measurement method using oscillation circuit consisting of BAW

resonator type sensor elements and cells ............................................................................. 19

Figure A.5 – Measurement method using oscillation circuit consisting of SAW

resonator type sensor elements and cells ............................................................................. 19

Figure A.6 – Measurement method using oscillation circuit consisting of SAW delay-

line type sensor elements and cells ...................................................................................... 20

Figure A.7 – Measurement method using amplifier consisting of non-acoustic type

sensor elements and cells ..................................................................................................... 20

Figure B.1 – Measurement of frequency difference using two oscillation circuits ................... 21

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– 4 – IEC 63041-1:2017 © IEC 2017

Figure B.2 – Measurement of frequency difference using an oscillation circuit and

frequency synthesizer ........................................................................................................... 22

Figure B.3 – Measurement of insertion loss/gain difference using two oscillation

circuits .................................................................................................................................. 22

Figure B.4 – Measurement of phase difference using signal generator and phase

detector ................................................................................................................................ 23

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IEC 63041-1:2017 © IEC 2017 – 5 –
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
PIEZOELECTRIC SENSORS –
Part 1: Generic specifications
FOREWORD

1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising

all national electrotechnical committees (IEC National Committees). The object of IEC is to promote

international co-operation on all questions concerning standardization in the electrical and electronic fields. To

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governmental organizations liaising with the IEC also participate in this preparation. IEC collaborates closely

with the International Organization for Standardization (ISO) in accordance with conditions determined by

agreement between the two organizations.

2) The formal decisions or agreements of IEC on technical matters express, as nearly as possible, an international

consensus of opinion on the relevant subjects since each technical committee has representation from all

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3) IEC Publications have the form of recommendations for international use and are accepted by IEC National

Committees in that sense. While all reasonable efforts are made to ensure that the technical content of IEC

Publications is accurate, IEC cannot be held responsible for the way in which they are used or for any

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4) In order to promote international uniformity, IEC National Committees undertake to apply IEC Publications

transparently to the maximum extent possible in their national and regional publications. Any divergence

between any IEC Publication and the corresponding national or regional publication shall be clearly indicated in

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5) IEC itself does not provide any attestation of conformity. Independent certification bodies provide conformity

assessment services and, in some areas, access to IEC marks of conformity. IEC is not responsible for any

services carried out by independent certification bodies.

6) All users should ensure that they have the latest edition of this publication.

7) No liability shall attach to IEC or its directors, employees, servants or agents including individual experts and

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expenses arising out of the publication, use of, or reliance upon, this IEC Publication or any other IEC

Publications.

8) Attention is drawn to the Normative references cited in this publication. Use of the referenced publications is

indispensable for the correct application of this publication.

9) Attention is drawn to the possibility that some of the elements of this IEC Publication may be the subject of

patent rights. IEC shall not be held responsible for identifying any or all such patent rights.

International Standard IEC 63041-1 has been prepared by IEC technical committee TC 49:

Piezoelectric, dielectric and electrostatic devices and associated materials for frequency

control, selection and detection.

This bilingual version (2019-11) corresponds to the monolingual English version, published in

2017-12.
The text of this International Standard is based on the following documents:
CDV Report on voting
49/1220/CDV 49/1249/RVC

Full information on the voting for the approval of this International Standard can be found in

the report on voting indicated in the above table.
---------------------- Page: 7 ----------------------
– 6 – IEC 63041-1:2017 © IEC 2017
The French version of this standard has not been voted upon.

This document has been drafted in accordance with the ISO/IEC Directives, Part 2.

A list of all parts in the IEC 63041 series, published under the general title Piezoelectric

sensors, can be found on the IEC website.
---------------------- Page: 8 ----------------------
IEC 63041-1:2017 © IEC 2017 – 7 –
PIEZOELECTRIC SENSORS –
Part 1: Generic specifications
1 Scope

This part of IEC 63041 applies to piezoelectric sensors of resonator, delay-line and

non-acoustic types, which are used in physical and engineering sciences, chemistry and

biochemistry, medical and environmental sciences, etc.

The purpose of this document is to specify the terms and definitions for the piezoelectric

sensors, and to make sure from a technological perspective that users understand the

state-of-art piezoelectric sensors and how to use them correctly.
2 Normative references

The following documents are referred to in the text in such a way that some or all of their

content constitutes requirements of this document. For dated references, only the edition

cited applies. For undated references, the latest edition of the referenced document (including

any amendments) applies.
IEC 60027 (all parts), Letter symbols to be used in electrical technology

IEC 60050-561:2014, International Electrotechnical Vocabulary – Part 561: Piezoelectric,

dielectric and electrostatic devices and associated materials for frequency control, selection

and detection

IEC 60122-2-1, Quartz crystal units for frequency control and selection – Part 2: Guide to the

use of quartz crystal units for frequency control and selection – Section One: Quartz crystal

units for microprocessor clock supply

IEC 60444-9, Measurement of quartz crystal unit parameters – Part 9: Measurement of

spurious resonances of piezoelectric crystal units

IEC 60617, Graphical symbols for diagrams, available at http://std.iec.ch/iec60617

ISO 2859-1:1999, Sampling procedures for inspection by attributes – Part 1: Sampling

schemes indexed by acceptance quality limit (AQL) for lot-by-lot inspection
ISO 80000-1:2009, Quantities and units – Part 1: General
3 Terms and definitions
3.1 General
For the purpose of this document, the following terms and definitions apply.

ISO and IEC maintain terminological databases for use in standardization at the following

addresses;
• IEC Electropedia: available at http://www.electropedia.org/
• ISO Online browsing platform: available at http;//www.iso,org/obp
---------------------- Page: 9 ----------------------
– 8 – IEC 63041-1:2017 © IEC 2017

Units, letter symbols and terminology shall, wherever possible, be taken from the following

standards: IEC 60027, IEC 60050-561, IEC 60617, and ISO 80000-1.

NOTE Piezoelectric sensors covered herein are those used for the detection and measurement of physical

quantities, chemical substances or biological molecules.
3.2 Piezoelectric sensors
3.2.1
piezoelectric sensor element

electronic component which is able to detect physical quantities as a change in its frequency,

phase, delay, electrical charge, resistance, Q-value, bandwidth, etc.

Note 1 to entry: For chemical and biochemical sensor applications, the piezoelectric sensor element includes a

sensitive or receptive layer (target recognition material).
3.2.2
resonator type sensor element
piezoelectric sensor component using acoustic resonances
3.2.3
delay line type sensor element
piezoelectric sensor component using a surface acoustic wave (SAW) delay-line of
transversal type
3.2.4
non-acoustic type sensor element

piezoelectric sensor component using the electrical charge induced by a quasi-static force,

torque or the like

Note 1 to entry: Here, the term, "non-acoustic", represents "quasi-static piezoelectric". Accordingly, the

(piezoelectric) non-acoustic type sensor element means a sensor element using the quasi-static piezoelectric effect.

3.2.5
piezoelectric sensor cell
sensor element equipped with necessary mechanical accessories and attachments to
correctly detect the parameters to be measured
3.2.6
piezoelectric sensor module

sensor element or cell equipped with electronic accessories for interfacing to external data

acquisitions
3.2.7
piezoelectric sensor
generic term that includes a sensor element, cell and module
3.2.8
QCM
quartz crystal microbalance
one of the families of chemical and biochemical sensors using crystal resonators
Note 1 to entry: A thickness share mode (TSM) sensor is identical with a QCM.
3.3 Types of chemical sensors
3.3.1
piezoelectric chemical sensor element

piezoelectric sensor component including a sensitive layer (target recognition material), which

is necessary for the practical measurement of simple non-biological molecules in quantity,

and which works and detects chemical substances mainly in the gas phase
---------------------- Page: 10 ----------------------
IEC 63041-1:2017 © IEC 2017 – 9 –
Note 1 to entry: A gas sensor element is one of the chemical sensor elements.
3.3.2
piezoelectric biochemical sensor element

piezoelectric sensor component including a receptive layer (target recognition material), which

is necessary for the practical measurement of complex biological molecules in quantity, and

which works mainly in aqueous media and detects biomolecules therein
3.4 Types of physical sensors
3.4.1
piezoelectric force sensor element
piezoelectric sensor component whose resonance frequency, delay or electrical
charge/voltage is used for force measurement
3.4.2
piezoelectric pressure sensor element
piezoelectric sensor component whose resonance frequency, delay or electrical
charge/voltage is used for pressure measurement
3.4.3
piezoelectric torque sensor element
piezoelectric sensor component whose resonance frequency, delay or electrical
charge/voltage is used for torque measurement
3.4.4
piezoelectric viscosity sensor element

piezoelectric sensor component whose resonance frequency, delay or insertion loss/gain is

used for viscosity measurement
3.4.5
piezoelectric temperature sensor element

piezoelectric sensor component whose resonance frequency or delay is used for temperature

measurement
3.4.6
piezoelectric film-thickness sensor element

piezoelectric sensor component whose resonance frequency is used for film-thickness

measurement
4 Symbols of sensor elements
4.1 General

Figures 1 to 6 show the conceptual diagrams and defined symbols for sensor elements of bulk

acoustic wave (BAW) resonator, SAW resonator and SAW delay-line types. The symbols are

essentially the same as those given in IEC 60122-1, IEC 61019-1 and IEC 60862-1.

Figure 7 and Figure 8 show the conceptual diagram and defined symbol for sensor elements

of non-acoustic type.

NOTE 1 The diagonal line in Figure 2, Figure 4, Figure 6 and Figure 8 shows an emblem expressing changes in

objects to be measured.

NOTE 2 Letter symbols (see 4.6) showing the types of sensors are put in the circle at the upper right corner in

Figure 2, Figure 4, Figure 6 and Figure 8.
---------------------- Page: 11 ----------------------
– 10 – IEC 63041-1:2017 © IEC 2017
4.2 Symbol for sensor elements of BAW resonator type

Figure 1 shows the conceptual diagrams for sensor elements of BAW resonator type from

which a mounting portion is omitted. Figure 2 shows the symbol for sensor elements of BAW

resonator type.
IEC
Figure 1 – Conceptual diagrams for sensor elements of BAW resonator type
IEC
Figure 2 – Symbol for sensor elements of BAW resonator type
4.3 Symbol for sensor elements of SAW resonator type

Figure 3 and Figure 4 show, respectively, the conceptual diagram and symbol for sensor

elements of SAW resonator type.
Reflector IDT Reflector
IEC
Figure 3 – Conceptual diagram of sensor elements of SAW resonator type
IEC
Figure 4 – Symbol for sensor elements of SAW resonator type
---------------------- Page: 12 ----------------------
IEC 63041-1:2017 © IEC 2017 – 11 –
4.4 Symbol for sensor elements of SAW delay-line type

Figure 5 and Figure 6 show, respectively, the conceptual diagram and symbol for sensor

elements of SAW delay-line type.
IDT IDT
IEC
Figure 5 – Conceptual diagram for sensor elements of SAW delay-line t
...

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