IEC 63041-3:2020

Piezoelectric sensors - Part 3: Physical sensors

IEC 63041-3:2020 is applicable to piezoelectric physical sensors mainly used in the field of process control, wireless monitoring, dynamics, thermodynamics, vacuum engineering, and environmental sciences. This document provides users with technical guidelines as well as basic knowledge of common physical sensors.
Piezoelectric sensors covered herein are those applied to the detection and measurement of physical quantities such as force, pressure, torque, viscosity, temperature, film thickness, acceleration, vibration, and tilt angle.

Capteurs piézoélectriques - Partie 3 : Capteurs physiques

L'IEC 63041-3:2020 s'applique aux capteurs physiques piézoélectriques principalement utilisés dans le domaine des commandes de processus, de la surveillance sans fil, de la dynamique, de la thermodynamique, des technologies du vide et des sciences environnementales. Le présent document donne aux utilisateurs des lignes directrices techniques ainsi que les connaissances de base concernant les capteurs physiques courants.
Les capteurs piézoélectriques traités ici sont ceux appliqués à la détection et au mesurage des grandeurs physiques telles que la force, la pression, le couple, la viscosité, la température, l'épaisseur de film, l'accélération, les vibrations, et l'angle d'inclinaison.

General Information

• Status: Published
• Publication Date: 11-Aug-2020
• ICS: 31.140 - Piezoelectric devices
• Technical Committee: TC 49 - Piezoelectric, dielectric and electrostatic devices and associated materials for frequency control, selection and detection
• Drafting Committee: WG 13 - TC 49/WG 13
• Current Stage: PPUB - Publication issued
• Start Date: 12-Aug-2020
• Completion Date: 07-Sep-2020

Overview

IEC 63041-3:2020 is an international standard published by the International Electrotechnical Commission (IEC) focusing on piezoelectric physical sensors. This part of the IEC 63041 series specifically addresses piezoelectric sensors used for detection and measurement of various physical quantities. It provides comprehensive technical guidelines and fundamental knowledge for users working with piezoelectric sensors in diverse scientific and industrial domains such as process control, wireless monitoring, dynamics, thermodynamics, vacuum engineering, and environmental sciences.

The standard applies to piezoelectric sensors designed to measure physical quantities including force, pressure, torque, viscosity, temperature, film thickness, acceleration, vibration, and tilt angle. As part of the broader IEC framework, it promotes international consistency in sensor specifications, testing, and application.

Key Topics

• Scope and Application
  IEC 63041-3 covers piezoelectric physical sensors, emphasizing practical usage in fields requiring precise measurement of mechanical and environmental parameters.

• Sensor Types and Concepts
  The standard elaborates on various sensor elements including surface acoustic wave (SAW) resonator and delay-line types.

  • SAW Resonator Sensors feature configurations such as single resonator types and differential resonators, where two resonators operate in tandem to improve measurement accuracy by compensating for undesired influence factors.
  • SAW Delay-Line Sensors include transmission (two-port) and reflective (one-port) delay lines. Reflective types enable compact designs with unique sensor identification via characteristic reflected signal patterns.

• Technical Specifications and Diagrams
  IEC 63041-3 details conceptual diagrams illustrating sensor architectures and functional principles. It aligns with IEC 63041-1 generic specifications to provide a unified framework for piezoelectric sensor design and documentation.

• Definitions and Terminology
  The document standardizes essential terms for various sensor elements such as piezoelectric acceleration, humidity, tilt angle, and vibration sensor elements. It also introduces concepts like dual mode, differential, and multi-measurand sensors, enhancing clarity in sensor classification and performance evaluation.

• Testing and Quality Assurance
  It outlines test and measurement procedures along with quality and reliability requirements to ensure sensor performance conforms to international standards.

Applications

IEC 63041-3:2020 enables reliable implementation of piezoelectric physical sensors in areas such as:

• Process Control: Real-time monitoring and control of industrial processes where parameters such as pressure and torque are critical.
• Wireless Monitoring: Deployment in wireless sensor networks with reliable detection of environmental and mechanical changes.
• Dynamics and Vibration Analysis: Precise measurement of acceleration and vibration for mechanical diagnostic and predictive maintenance.
• Thermodynamics and Environmental Sciences: Accurate sensing of temperature variations, humidity, and tilt angles in scientific research and environmental monitoring.
• Vacuum Engineering: Measurement of film thickness and viscosity, essential in vacuum technology and coating applications.

Related Standards

• IEC 63041-1:2017 – Piezoelectric Sensors Part 1: Generic Specifications
  Provides foundational specifications applicable for all piezoelectric sensors, complementing the physical sensor focus of Part 3.

• IEC 63041-2 – Piezoelectric Sensors Part 2: Chemical and Biochemical Sensors
  Covers sensors tailored for chemical and biochemical measurands, relevant for applications outside the physical quantities addressed in Part 3.

• IEC 60027 (all parts) – Letter Symbols
  Standardizes symbols used in electrical technology, referenced for consistent notation within piezoelectric sensor documentation.

• IEC 60050-561 – International Electrotechnical Vocabulary: Piezoelectric Devices
  Defines terms and concepts specific to piezoelectric and related sensor technologies, ensuring clarity in terminology.

• IEC 60617 – Graphical Symbols for Diagrams
  Provides standardized symbols for schematic representation of electrical and electrotechnical components including piezoelectric sensors.

• ISO 80000-1 – Quantities and Units
  Establishes general guidelines for quantities and units, ensuring harmonized measurement expression used in sensors and instrumentation.

Summary

IEC 63041-3:2020 is an essential international standard for professionals and manufacturers involved in piezoelectric physical sensors. By providing technical guidelines, definitions, and sensor conceptual models, it supports the design, testing, and application of sensors that measure critical physical quantities. Adherence to this standard ensures consistency, accuracy, and reliability in piezoelectric sensor technology used across industrial process control, scientific research, and environmental monitoring. Integrating IEC 63041-3 with related IEC and ISO standards fosters a comprehensive approach to sensor standardization worldwide.

Standards Content (Sample)

IEC 63041-3 ®
Edition 1.0 2020-08
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
Piezoelectric sensors –
Part 3: Physical sensors
Capteurs piézoélectriques –
Partie 3: Capteurs physiques
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IEC 63041-3 ®
Edition 1.0 2020-08
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
Piezoelectric sensors –
Part 3: Physical sensors
Capteurs piézoélectriques –
Partie 3: Capteurs physiques
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
COMMISSION
ELECTROTECHNIQUE
INTERNATIONALE
ICS 31.140 ISBN 978-2-8322-8742-2

– 2 – IEC 63041-3:2020 © IEC 2020
CONTENTS
FOREWORD . 3
1 Scope . 5
2 Normative references . 5
3 Terms, definitions, symbols and units . 5
3.1 Terms and definitions . 5
3.2 Symbols and units. 6
4 Specifications . 6
4.1 General . 6
4.2 Conceptual diagrams of sensor types. 6
4.2.1 General . 6
4.2.2 Conceptual diagram for sensor elements of SAW resonator type . 7
4.2.3 Conceptual diagram for sensor elements of SAW delay-line type . 7
4.3 Technical documents . 8
5 Delivery conditions . 8
6 Quality and reliability . 8
7 Test and measurement procedures . 8
Annex A (informative) Physical reaction in sensor cell and detection method . 9
A.1 Detection and measurement . 9
A.2 Typical formulae for detection methods of physical quantity . 9
A.2.1 General . 9
A.2.2 Non-acoustic type . 9
A.2.3 Acoustic type . 10
A.2.4 Delay-line type. 11
A.3 Calibration . 11
Bibliography . 12

Figure 1 – Conceptual diagram for SAW single resonator type . 7
Figure 2 – Conceptual diagram for SAW differential resonator type . 7
Figure 3 – Conceptual diagram for SAW transmission (two-port) delay-line type . 7
Figure 4 – Conceptual diagram for SAW reflective (one-port) delay-line type . 8

INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
PIEZOELECTRIC SENSORS –
Part 3: Physical sensors
FOREWORD
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International Standard IEC 63041-3 has been prepared by IEC technical committee TC 49:
Piezoelectric, dielectric and electrostatic devices and associated materials for frequency
control, selection and detection.
The text of this International Standard is based on the following documents:
CDV Report on voting
49/1333/CDV 49/1343/RVC
Full information on the voting for the approval of this International Standard can be found in
the report on voting indicated in the above table.
This document has been drafted in accordance with the ISO/IEC Directives, Part 2.

– 4 – IEC 63041-3:2020 © IEC 2020
A list of all part in the IEC 63041 series, published under the general title Piezoelectric
sensors, can be found on the IEC website.
The committee has decided that the contents of this document will remain unchanged until the
stability date indicated on the IEC website under "http://webstore.iec.ch" in the data related to
the specific document. At this date, the document will be
• reconfirmed,
• withdrawn,
• replaced by a revised edition, or
• amended.
PIEZOELECTRIC SENSORS –
Part 3: Physical sensors
1 Scope
This part of IEC 63041 is applicable to piezoelectric physical sensors mainly used in the field
of process control, wireless monitoring, dynamics, thermodynamics, vacuum engineering, and
environmental sciences. This document provides users with technical guidelines as well as
basic knowledge of common physical sensors.
Piezoelectric sensors covered herein are those applied to the detection and measurement of
physical quantities such as force, pressure, torque, viscosity, temperature, film thickness,
acceleration, vibration, and tilt angle.
2 Normative references
The following documents are referred to in the text in such a way that some or all of their
content constitutes requirements of this document. For dated references, only the edition
cited applies. For undated references, the latest edition of the referenced document (including
any amendments) applies.
IEC 60027 (all parts), Letter symbols to be used in electrical technology
IEC 60050-561, International electrotechnical vocabulary – Part 561: Piezoelectric, dielectric
and electrostatic devices and associated materials for frequency control, selection and
detection
IEC 60617:2012, Graphical symbols for diagrams (database available at
http://std.iec.ch/iec60617)
IEC 63041-1:2017, Piezoelectric sensors – Part 1: Generic specifications
IEC 63041-2, Piezoelectric sensors – Part 2: Chemical and biochemical sensors
ISO 80000-1, Quantities and units – Part 1: General
3 Terms, definitions, symbols and units
3.1 Terms and definitions
For the purposes of this document, the terms and definitions given in IEC 60027 (all parts),
IEC 60050-561, IEC 60617, IEC 63041-1, IEC 63041-2 and ISO 80000-1 and the following
apply.
ISO and IEC maintain terminological databases for use in standardization at the following
addresses:
• IEC Electropedia: available at http://www.electropedia.org/
• ISO Online browsing platform: available at http://www.iso.org/obp

– 6 – IEC 63041-3:2020 © IEC 2020
3.1.1
piezoelectric acceleration sensor element
piezoelectric sensor component whose resonance frequency or delay is used to measure the
change in velocity of an object with time
3.1.2
piezoelectric humidity sensor element
piezoelectric sensor component whose resonance frequency or delay is used for dew point
and moisture detection
3.1.3
piezoelectric tilt angle sensor element
piezoelectric sensor component whose resonance frequency or delay is used to measure tilt
angles, elevation, or depression of an object with respect to gravity's detection
3.1.4
piezoelectric vibration sensor element
piezoelectric sensor component whose resonance frequency or delay is used for
measurement of vibration
3.1.5
dual mode sensor
piezoelectric sensor which is able to detect physical quantities from a change in resonance
frequencies of two independent modes on a single piezoelectric plate
Note 1 to entry: In order to achieve improved precision and/or to eliminate undesired influence factors, sensor
solutions are employed that utilize two or more modes. By evaluation of combinations of these modes’ sensitivities
to various ambient conditions, on the one hand, improved detection sensitivity can be achieved, while, on the other
hand, undesirable sensitivities can be reduced or eliminated.
3.1.6
differential sensor
piezoelectric sensor which is able to detect physical quantities from a change in resonance
frequencies or delays of two independent and same micro-acoustic structures assembled on
the same or different piezoelectric plates
3.1.7
multi-measurand sensor
piezoelectric sensor which is able to detect two or more different physical quantities from an
analysis of different sensor responses
3.2 Symbols and units
The symbols and units given in IEC 63041-1 apply.
4 Specifications
4.1 General
Key points of the specification are identified in IEC 63041-1:2017, Clause 5.
4.2 Conceptual diagrams of sensor types
4.2.1 General
In addition to the sensor types listed in IEC 63041-1:2017, Clause 4, specific realizations are
common for surface acoustic wave (SAW) sensors.

4.2.2 Conceptual diagram for sensor elements of SAW resonator type
Figure 1 and Figure 2 show conceptual diagrams for resonator type SAW sensors. Figure 1
provides one resonance which is sensitive to undesirable influence factors such as frequency
pulling. In the case of Figure 2, comprising e.g. a parallel connection of two resonators at
different resonance frequencies, the sensor will be designed to have similar sensitivities of
both resonators to such undesired effects and is therefore suitable to achieve higher accuracy
with respect to the target measurand due to this compensation technique.

Figure 1 – Conceptual diagram for SAW single resonator type

Figure 2 – Conceptual diagram for SAW differential resonator type
4.2.3 Conceptual diagram for sensor elements of SAW delay-line type
Figure 3 shows a transmission type (two-port) and Figure 4 shows a reflective type (one-port).
Reflective delay lines use the SAW propagation path which is evaluated for delay and
attenuation changes twice for incident and reflected wave, and therefore can be designed as
smaller realizations. Reflective delay-line sensors can be designed to feature a unique sensor
identification, in combination with their sensor capabilities, by using several SAW reflector
structures resulting in a characteristic pattern of the reflected signal which can be
distinguished from other sensors using the same frequency range.

Figure 3 – Conceptual diagram for SAW transmission (two-port) delay-line type

– 8 – IEC 63041-3:2020 © IEC 2020

Figure 4 – Conceptual diagram for SAW reflective (one-port) delay-line type
4.3 Technical documents
The physical reaction in sensor cell and detection methods are defined in Annex A.
The following a) to f) shall clearly be defined in the specifications to be concluded between
the manufacturer and customers:
a) Avoidance of coupling of main and unwanted vibration modes;
b) Detection direction of sensor element;
c) Hysteresis of sensor elements;
d) Linearity between sensor outputs and physical quantities to be detected;
e) Overload characteristics by excessive physical quantities to be detected;
f) Response time of sensor elements.
5 Delivery conditions
See IEC 63041-1:2017, Clause 7.
6 Quality and reliability
See IEC 63041-1:2017, Clause 8.
7 Test and measurement procedures
See IEC 63041-1:2017, Annexes A and B.

Annex A
(informative)
Physical reaction in sensor cell and detection method
A.1 Detection and measurement
Generally, detection and measurement items are a) to d).
a) Resonance frequency, delay, and electrical charged voltage covered herein are applied to
the detection and measurement of force, pressure, torque, vibration, acceleration, etc.
b) Resonance frequency, delay or insertion loss / gain covered herein are applied to the
detection and measurement of viscosity.
c) Resonance frequency or delay is applied to the detection and measurement of
temperature.
d) Resonance frequency is applied to the detection and measurement of film thickness.
NOTE An electrical charged voltage is measured by non-acoustic type piezoelectric ceramic and quartz crystal
sensors.
For these specifications, the manufacturer and customer shall have detailed discussions, the
discrepancies shall be eliminated, and the results shall clearly be described in the contract
clause, the requirements specifications of the customer, the delivery specifications thereof or
the like, and shall be settled as one of the contracts with the customer.
A.2 Typical formulae for detection methods of physical quantity
A.2.1 General
Formulae (A.1) to (A.6) presented as below are typical examples applied to physical sensor
elements and cells. For these formulae, the manufacturer and customer shall have detailed
discussions, the discrepancies shall be eliminated, and the results shall be described clearly
in the contract clause.
A.2.2 Non-acoustic type
A.2.2.1 Piezoelectric ceramics
When a sensor element is made of piezoelectric ceramics,
F
V gl33
S
(A.1)
where
V is the voltage;
g is the piezoelectric voltage coefficient;
l is the length of the piezoelectric ceramics element and is the direction in which force is
applied to the one;
F is the force applied to the piezoelectric ceramic element and cell;
S is the electrode area and is formed in a direction in which a force is applied to the
piezoelectric ceramic element and cell.

– 10 – IEC 63041-3:2020 © IEC 2020
A.2.2.2 X-cut quartz crystal
When sensor element is X-cut quartz crystal,
F
V= g t
(A.2)
S
where
g is the piezoelectric voltage coefficient;
t is the thickness of quartz crystal.
A.2.3 Acoustic type
A.2.3.1 Resonator type
For resonator-type piezoelectric sensors, the change of one or more resonance frequencies
related to the effect of the measurand is interpreted to quantify the measurand. Typical
measuring range transform function is defined by polynomials as
N
i
(A.3)
y= g(∆f)= a f
∑
r i r
i=0
where
y is the measurand (e.g. temperature, pressure, film thickness, etc.);
Δf is the change of resonance frequency under the influence of the measurand;
r
a are transform coefficients, determined by design and material system.
i
Biunique the transform function is generally desirable. Hence, the order of the polynomial
should be kept low, ideally N = 1.
A.2.3.2 Differential resonator type
For differential resonator type sensors, it is common to evaluate two resonances with different
sensitivities to the measurand in order to eliminate undesired frequency pulling effects (e.g.
from load pulling effects in wireless piezoelectric sensor systems), such as
i
N
y= g(∆f −∆f )= b(∆f −∆f ) (A.4)
r1 r 2 ∑ i r1 r 2
i=0
where
, Δf are resonance frequencies of two resonators or resonant modes with different
Δf
r1 r2
sensitivities with respect to the measurand, but preferably similar sensitivities with
respect to undesired influence actors;
are transform coefficients, determined by design and material system.
b
i
A.2.3.3 Multi-measurand resonator type
Evaluation of two or more resonators and their resonance frequencies, having arbitrary
sensitivities with respect to the measurands to be quantified, can be transformed by

 
a a ⋅ ⋅ ⋅ a
 
1,0 1,1 1,N
 
y
 
∆f
 
 
 
a a ⋅ ⋅ ⋅ ⋅
2,0 2,1
y
 
 f 
  ∆
 
⋅ ⋅ ⋅ ⋅ ⋅ ⋅
.
 
 
= ⋅ (A.5)
 
 
 
. ⋅ ⋅ ⋅ ⋅ ⋅ ⋅
 
 
  ⋅
.
 
⋅ ⋅ ⋅ ⋅ ⋅ ⋅
 
 
  ⋅
 
y 
 K
a a ⋅ ⋅ ⋅ a
 
K ,0 K ,0 K ,N
 
 
∆f
 N
j n
or higher-order polynomials of ∆f ⋅∆f (i, m∈[1.N]) ,
i m
where
y y are a range of measurands;
1 . K
a are the coefficients of a transform matrix;
k.l
Δf , Δf are the changes in resonance frequencies obtained for 𝑁𝑁 resonators of the
1 N
piezoelectric sensor;
K < N to allow for determination of multiple measurands and compensation for undesired
effects;
j, n are the exponents of higher order polynomial transform functions and should be
kept minimum, e.g. j, n ≤ 2.
A.2.4 Delay-line type
For delay-line type piezoelectric sensors, the change of the delay of the transmitted or
reflected impulses related to the effect of the measurand is interpreted to quantify the
measurand. Typical the transform function is defined by polynomials:
N
i
y= g(∆τ)= c∆τ
(A.6)
∑
i
i=0
y is the measurand (e.g. temperature, pressure, etc.);
Δτ is the change of the delay of the transmitted or reflected signal under the influence of
the measurand;
c are transform coefficients, determined by design and material system.
i
For reflective delay lines of Figure 4, realization and evaluation of multiple reflected signals
are common to enhance sensitivity and/or to enable unique sensor identification, e.g.,
allowing for use of multiple sensors within the same frequency range in wireless sensor
systems.
A.3 Calibration
The calibration method should be specified in the detailed specification and/or contract.

– 12 – IEC 63041-3:2020 © IEC 2020
Bibliography
IEC 60068 (all parts), Environmental testing
IEC 60122-1, Quartz crystal units of assessed quality – Part 1: Generic specification
IEC 60122-2-1, Quartz crystal units for frequency control and selection – Part 2: Guide to the
use of quartz crystal units for frequency control and selection – Section one: Quartz crystal
units for microprocessor clock supply
IEC 60444-1, Measurement of quartz crystal unit parameters by zero phase technique in a pi-
network – Part 1: Basic method for the measurement of resonance frequency and resonance
resistance of quartz crystal units by zero phase technique in a pi-network
IEC 60444-5, Measurement of quartz crystal unit parameters – Part 5: Methods for the
determination of equivalent electrical parameters using automatic network analyzer
techniques and error correction
IEC 60444-9, Measurement of quartz crystal unit parameters – Part 9: Measurement of
spurious resonances of piezoelectric crystal units
IEC 60642, Piezoelectric ceramic resonators and resonator units for frequency control and
selection – Chapter I: Standard values and conditions – Chapter II: Measuring and test
conditions
IEC 60679 (all parts), Piezoelectric, dielectric and electrostatic oscillators of assessed quality
IEC 60758:2016, Synthetic quartz crystal – Specifications and guidelines for use
IEC 60862-1, Surface acoustic wave (SAW) filters of assessed quality – Part 1: Generic
specification
IEC 61019-1, Surface acoustic wave (SAW) resonators – Part 1: Generic specification
IEC 61240:2016, Piezoelectric devices – Preparation of outline drawings of surface-mounted
devices (SMD) for frequency control and selection – General rules
IEC 61760 (all parts), Surface mounting technology
IEC 61837 (all parts), Surface mounted piezoelectric devices for frequency control and
selection – Standard outlines and terminal lead connections
IEC TS 61994 (all parts), Piezoelectric, dielectric and electrostatic devices and associated
materials for frequency control, selection and detection – Glossary
IEC 62276:2016, Single crystal wafers for surface acoustic wave (SAW) device applications –
Specifications and measuring methods
ISO 2859-1:1999, Sampling procedures for inspection by attributes – Part 1: Sampling
schemes indexed by acceptance quality limit (AQL) for lot-by-lot inspection
ISO 11843-1: 1997, Capability of detection – Part 1: Terms and definitions
ISO 11843-2: 2000, Capability of detection – Part 2: Methodology in the linear calibration
case
ISO/IEC Guide 99:2007, International vocabulary of metrology – Basic and general concepts
and associated terms (VIM)
ISO/IEC 17025, General requirements for the competence of testing and calibration
laboratories
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