IEC 63041-1:2021

Piezoelectric sensors - Part 1: Generic specifications

IEC 63041-1:2021 applies to piezoelectric sensors of resonator, delay-line and non-acoustic types, which are used in physical and engineering sciences, chemistry and biochemistry, medical and environmental sciences, etc. The purpose of this document is to specify the terms and definitions for piezoelectric sensors, and to make sure from a technological perspective that users understand the state-of-art piezoelectric sensors and how to use them correctly. This edition includes the following significant technical changes with respect to the previous edition:
- the new terms "piezoelectric sensor system" and "wireless SAW sensor system" and their definitions have been added;
- new types of sensor modules and sensor system have been added;
- some symbols of sensor elements are added in Clause 4;
- a new Figure B.3 has been added in Annex B;
- Annex C has been added.

Capteurs piézoélectriques - Partie 1: Spécifications génériques

L'IEC 63041-1:2021 s'applique aux capteurs piézoélectriques de type résonateur, de type à ligne à retard et de type non acoustique, utilisés en sciences physiques, en sciences de l'ingénierie, en chimie et en biochimie, en sciences médicales et environnementales, etc. Le présent document a pour objet de spécifier les termes et définitions relatifs aux capteurs piézoélectriques et de vérifier, d'un point de vue technologique, que les utilisateurs ont une bonne approche des capteurs piézoélectriques de pointe et qu'ils savent les utiliser correctement. Cette édition inclut les modifications techniques majeures suivantes par rapport à l'édition précédente:
- ajout de nouveaux termes et définitions (système de capteur piézoélectrique et système de capteur à OAS sans fil);
- ajout de nouveaux types de modules et de systèmes de capteurs;
- ajout de certains symboles des éléments de capteurs à l'Article 4;
- ajout d’une nouvelle Figure B.3 à l'Annexe B;
- ajout de l’Annexe C.

General Information

• Status: Published
• Publication Date: 16-Sep-2021
• ICS: 31.140 - Piezoelectric devices
• Technical Committee: TC 49 - Piezoelectric, dielectric and electrostatic devices and associated materials for frequency control, selection and detection
• Drafting Committee: WG 13 - TC 49/WG 13
• Current Stage: PPUB - Publication issued
• Start Date: 17-Sep-2021
• Completion Date: 11-Oct-2021

Relations

• Revises: IEC 63041-1:2017 - Piezoelectric sensors - Part 1: Generic specifications
• Effective Date: 05-Sep-2023

Overview

IEC 63041-1:2021 - "Piezoelectric sensors - Part 1: Generic specifications" is an international standard that establishes generic terms, symbols, specifications and test/measurement guidance for piezoelectric sensors. It covers resonator (BAW), surface acoustic wave (SAW) delay-line and resonator types, and non-acoustic piezoelectric sensor elements and modules used across physical and engineering sciences, chemistry/biochemistry, medical and environmental applications. This edition adds definitions for piezoelectric sensor system and wireless SAW sensor system, expands sensor module/system types, updates element symbols, and introduces new figures and Annex C on wireless SAW sensors.

Key topics and technical requirements

• Terms and definitions (Clause 3): Unified vocabulary for piezoelectric sensors, chemical and physical sensor types, modules and systems to ensure consistent communication among designers and users.
• Symbols of sensor elements (Clause 4): Standardized symbols and conceptual diagrams for BAW resonator, SAW resonator, SAW delay-line, non-acoustic elements and wireless SAW elements (Figures 1–12).
• Specifications (Clause 5): Generic requirements for sensor elements, frequency ranges, drive/input power levels, unwanted responses, enclosure and performance confirmation, and stability (short- and long-term).
• Measurement and detection methods (Clause 6 & Annexes A–B):
  • Reflection and transmission characteristics
  • Oscillation circuit measurements
  • Frequency difference, insertion loss/gain and phase-difference detection methods
  • Special measurement guidance for non-acoustic elements
• Wireless SAW sensor guidance (Annex C): Detection concepts, system diagrams for wireless SAW resonator and reflective delay-line sensor systems and key detection mechanisms.
• Quality, reliability and delivery (Clauses 7–9): Marking, packaging, test classification (shipping, mechanical/environmental), test conditions, screening and test procedures.

Practical applications

IEC 63041-1 provides practical value to organizations working with piezoelectric sensing technologies:

• Ensures consistent specification and procurement of piezoelectric sensors for laboratory, industrial, medical and environmental monitoring systems.
• Guides sensor manufacturers and module integrators on symbols, performance confirmation and measurement techniques for BAW, SAW, and non-acoustic sensors.
• Supports designers of wireless SAW sensor systems with conceptual diagrams and detection methods for remote sensing and IoT applications.
• Helps test engineers and quality assurance teams define test procedures and acceptance criteria.

Who should use this standard

• Sensor designers and manufacturers
• Test and calibration laboratories
• System integrators and OEMs developing sensor modules or wireless sensing systems
• Procurement, regulatory and quality assurance professionals
• Researchers and academic developers working on piezoelectric sensing

Related standards

IEC 63041-1 is Part 1 (generic specifications) of the IEC guidance on piezoelectric sensors. Users should consult other parts of the IEC 63041 series and related IEC standards for specific performance, safety and application-level requirements.

Standards Content (Sample)

IEC 63041-1 ®
Edition 2.0 2021-09
REDLINE VERSION
INTERNATIONAL
STANDARD
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Piezoelectric sensors –
Part 1: Generic specifications

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IEC 63041-1 ®
Edition 2.0 2021-09
REDLINE VERSION
INTERNATIONAL
STANDARD
colour
inside
Piezoelectric sensors –
Part 1: Generic specifications
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 31.140 ISBN 978-2-8322-5486-8

– 2 – IEC 63041-1:2021 RLV © IEC 2021
CONTENTS
FOREWORD . 5
1 Scope . 7
2 Normative references . 7
3 Terms and definitions . 7
3.1 Piezoelectric sensors . 8
3.2 Types of chemical sensors . 9
3.3 Types of physical sensors . 9
3.4 Types of sensor modules . 10
3.5 Types of sensor systems. 10
4 Symbols of sensor elements . 10
4.1 General . 10
4.2 Symbol for sensor elements of BAW resonator type . 10
4.3 Symbol for sensor elements of SAW resonator type . 11
4.4 Symbol for sensor elements of SAW delay-line type . 11
4.5 Symbol for sensor elements of non-acoustic type . 12
4.6 Symbol for wireless SAW sensor element . 12
4.7 Symbols . 14
5 Specifications . 14
5.1 Sensor elements . 14
5.1.1 General . 14
5.1.2 Sensor elements of resonator and delay-line types . 14
5.1.3 Sensor elements of non-acoustic type . 15
5.2 Frequency ranges . 15
5.3 Level of drive or input power . 15
5.4 Unwanted response . 15
5.5 Analysis of measurements . 15
5.6 Enclosure . 16
5.7 Performance confirmation . 16
5.8 Long-term and short-term stabilities . 16
5.9 Transmission power . 16
6 Measurement and detection methods . 16
7 Delivery conditions . 16
7.1 Marking . 16
7.2 Wrapping . 16
7.3 Packaging . 17
8 Quality and reliability . 17
8.1 Reuse . 17
8.2 Validity of release . 17
8.3 Test procedures . 17
8.4 Screening requirements . 17
8.5 Unchecked parameters . 17
9 Test and measurement procedures . 17
9.1 General . 17
9.1.1 Classification of tests Test classification . 17
9.1.2 Shipping test . 17

9.1.3 Mechanical and environmental test . 18
9.2 Test and measurement conditions . 18
9.2.1 Standard conditions for testing . 18
9.2.2 Equilibrium state . 18
9.2.3 Power supply . 18
9.2.4 Alternative test system . 19
9.2.5 Visual inspection . 19
9.3 Test conditions for shipment . 19
9.3.1 Temperature dependence of frequency, phase, insertion loss/gain,
motional resistance, and electric charge / voltage . 19
9.3.2 Unwanted response . 19
9.3.3 Shunt capacitance . 19
9.3.4 Insulation resistance . 20
Annex A (normative) Measurement methods . 21
A.1 General . 21
A.2 Measurement methods using reflection and transmission characteristics . 21
A.3 Measurement methods using oscillation circuits . 22
A.4 Measurement method of non-acoustic type sensor elements and cells . 23
A.5 Other measurement methods . 23
Annex B (normative) Detection methods . 24
B.1 General . 24
B.2 Detection methods . 24
B.2.1 Frequency difference measurement . 24
B.2.2 Insertion loss/gain measurement . 25
B.2.3 Phase difference measurement. 26
B.2.4 Other detection methods . 26
Annex C (normative) Wireless SAW sensor . 27
C.1 General . 27
C.2 Detection methods . 27
C.2.1 General . 27
C.2.2 Conceptual diagrams of wireless SAW resonator type sensor system . 27
C.2.3 Conceptual diagrams of wireless SAW reflective delay-line type sensor
system . 27
C.2.4 Key points of detection mechanism . 28
C.2.5 Technical documents . 28
Bibliography . 29

Figure 1 – Conceptual diagrams for sensor elements of BAW resonator type . 11
Figure 2 – Symbol for sensor elements of BAW resonator type . 11
Figure 3 – Conceptual diagram of sensor elements of SAW resonator type . 11
Figure 4 – Symbol for sensor elements of SAW resonator type . 11
Figure 5 – Conceptual diagram for sensor elements of SAW delay-line type . 12
Figure 6 – Symbol for sensor elements of SAW delay-line type . 12
Figure 7 – Conceptual diagrams for sensor elements of non-acoustic type. 12
Figure 8 – Symbol for sensor elements of non-acoustic type . 12
Figure 9 – Conceptual diagram for basic sensor elements of wireless SAW
resonator type . 13
Figure 10 – Symbol for basic sensor elements of wireless SAW resonator type . 13

– 4 – IEC 63041-1:2021 RLV © IEC 2021
Figure 11 – Conceptual diagram for basic sensor elements of wireless SAW reflective
delay-line type . 13
Figure 12 – Symbol for basic sensor elements of wireless SAW reflective
delay‑line type . 13
Figure A.1 – Measurement method using reflection characteristics of BAW resonator
type sensor elements and cells . 21
Figure A.2 – Measurement method using reflection characteristics of SAW resonator
type sensor elements and cells . 21
Figure A.3 – Measurement method using transmission characteristics of SAW delay-
line type sensor elements and cells . 22
Figure A.4 – Measurement method using oscillation circuit consisting of BAW
resonator type sensor elements and cells . 22
Figure A.5 – Measurement method using oscillation circuit consisting of SAW
resonator type sensor elements and cells . 22
Figure A.6 – Measurement method using oscillation circuit consisting of SAW delay-
line type sensor elements and cells . 23
Figure A.7 – Measurement method using amplifier consisting of non-acoustic type
sensor elements and cells . 23
Figure B.1 – Measurement of frequency difference using two oscillation circuits . 24
Figure B.2 – Measurement of frequency difference using an oscillation circuit and
frequency synthesizer . 25
Figure B.3 – Conceptual diagram of piezoelectric dual mode sensor module . 25
Figure B.4 – Measurement of insertion loss/gain difference using two oscillation
circuits . 26
Figure B.5 – Measurement of phase difference using signal generator and phase
detector . 26
Figure C.1 – Fundamental measurement system of wireless SAW resonator type
sensor . 27
Figure C.2 – Fundamental measurement system of wireless SAW reflective delay-line
type sensor . 28

INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
PIEZOELECTRIC SENSORS –
Part 1: Generic specifications

FOREWORD
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rights. IEC shall not be held responsible for identifying any or all such patent rights.
This redline version of the official IEC Standard allows the user to identify the changes made to
the previous edition IEC 63041-1:2017. A vertical bar appears in the margin wherever a change
has been made. Additions are in green text, deletions are in strikethrough red text.

– 6 – IEC 63041-1:2021 RLV © IEC 2021
IEC 63041-1 has been prepared by IEC technical committee 49: Piezoelectric, dielectric and
electrostatic devices and associated materials for frequency control, selection and detection. It
is an International Standard.
This second edition cancels and replaces the first edition published in 2017. This edition
constitutes a technical revision.
This edition includes the following significant technical changes with respect to the previous
edition:
a) the new terms "piezoelectric sensor system" and "wireless SAW sensor system" and their
definitions have been added;
b) new types of sensor modules and sensor system have been added;
c) some symbols of sensor elements are added in Clause 4;
d) a new Figure B.3 has been added in Annex B;
e) Annex C has been added.
The text of this International Standard is based on the following documents:
Draft Report on voting
49/1357/CDV 49/1364/RVC
Full information on the voting for its approval can be found in the report on voting indicated in
the above table.
The language used for the development of this International Standard is English.
This document was drafted in accordance with ISO/IEC Directives, Part 2, and developed in
accordance with ISO/IEC Directives, Part 1 and ISO/IEC Directives, IEC Supplement, available
at www.iec.ch/members_experts/refdocs. The main document types developed by IEC are
described in greater detail at www.iec.ch/standardsdev/publications.
A list of all parts in the IEC 63041 series, published under the general title Piezoelectric sensors,
can be found on the IEC website.
The committee has decided that the contents of this document will remain unchanged until the
stability date indicated on the IEC website under webstore.iec.ch in the data related to the
specific document. At this date, the document will be
• reconfirmed,
• withdrawn,
• replaced by a revised edition, or
• amended.
IMPORTANT – The 'colour inside' logo on the cover page of this publication indicates that it
contains colours which are considered to be useful for the correct understanding of its
contents. Users should therefore print this document using a colour printer.

PIEZOELECTRIC SENSORS –
Part 1: Generic specifications

1 Scope
This part of IEC 63041 applies to piezoelectric sensors of resonator, delay-line and non-
acoustic types, which are used in physical and engineering sciences, chemistry and
biochemistry, medical and environmental sciences, etc.
The purpose of this document is to specify the terms and definitions for piezoelectric sensors,
and to make sure from a technological perspective that users understand the state-of-art
piezoelectric sensors and how to use them correctly.
2 Normative references
The following documents are referred to in the text in such a way that some or all of their content
constitutes requirements of this document. For dated references, only the edition cited applies.
For undated references, the latest edition of the referenced document (including any
amendments) applies.
IEC 60027 (all parts), Letter symbols to be used in electrical technology
IEC 60050-561:2014, International Electrotechnical Vocabulary – Part 561: Piezoelectric,
dielectric and electrostatic devices and associated materials for frequency control, selection
and detection
IEC 60122-2-1, Quartz crystal units for frequency control and selection – Part 2: Guide to the
use of quartz crystal units for frequency control and selection – Section One: Quartz crystal
units crystals for microprocessor clock supply
IEC 60444-9, Measurement of quartz crystal unit parameters – Part 9: Measurement of spurious
resonances of piezoelectric crystal units
IEC 60617, Graphical symbols for diagrams, available at https://std.iec.ch/iec60617
IEC 63041-3:2020, Piezoelectric sensors – Part 3: Physical sensors
ISO 2859-1:1999, Sampling procedures for inspection by attributes – Part 1: Sampling schemes
indexed by acceptance quality limit (AQL) for lot-by-lot inspection
ISO 80000-1:2009, Quantities and units – Part 1: General
3 Terms and definitions
3.1 General
For the purposes of this document, the terms and definitions given in IEC 60027, IEC 60050-
561, IEC 60617, ISO 80000-1 and the following apply.

– 8 – IEC 63041-1:2021 RLV © IEC 2021
ISO and IEC maintain terminological databases for use in standardization at the following
addresses:
• IEC Electropedia: available at https://www.electropedia.org/
• ISO Online browsing platform: available at https://www.iso.org/obp
Units, letter symbols and terminology shall, wherever possible, be taken from the following
standards: IEC 60027, IEC 60050-561, IEC 60617, and ISO 80000-1.
NOTE Piezoelectric sensors covered herein are those used for the detection and measurement of physical
quantities, chemical substances or biological molecules.
3.1 Piezoelectric sensors
3.1.1
piezoelectric sensor element
electronic component which is able to detect physical quantities as a change in its frequency,
phase, delay, electrical charge, resistance, Q-value, bandwidth, etc.
Note 1 to entry: For chemical and biochemical sensor applications, the piezoelectric sensor element includes a
sensitive or receptive layer (target recognition material).
3.1.2
resonator type sensor element
piezoelectric sensor component using acoustic resonances
3.1.3
delay-line type sensor element
piezoelectric sensor component using a delay-line of surface acoustic wave (SAW) delay-line
of transversal filter type
3.1.4
non-acoustic type sensor element
piezoelectric sensor component using the electrical charge induced by a quasi-static force,
torque or the like
Note 1 to entry: Here, the term, "non-acoustic", represents "quasi-static piezoelectric". Accordingly, the
(piezoelectric) non-acoustic type sensor element means a sensor element using the quasi-static piezoelectric effect.
3.1.5
piezoelectric sensor cell
sensor element equipped with necessary mechanical accessories and attachments to correctly
detect the parameters to be measured
3.1.6
piezoelectric sensor module
sensor element or cell equipped with electronic accessories for interfacing to external data
acquisitions
3.1.7
piezoelectric sensor system
organized system including detection, amplification of detected value, communication with other
equipment and analysis of detected value
Note 1 to entry: Here, these functions cooperate mutually.
3.1.8
piezoelectric sensor
generic term that includes a sensor element, cell, module and system

3.1.9
QCM
quartz crystal microbalance
one of the families of chemical and biochemical sensors using crystal resonators
Note 1 to entry: A thickness share shear mode (TSM) sensor is identical with a QCM.
3.2 Types of chemical sensors
3.2.1
piezoelectric chemical sensor element
piezoelectric sensor component including a sensitive layer (target recognition material), which
is necessary for the practical measurement of simple non-biological molecules in quantity, and
which works and detects chemical substances mainly in the gas phase
Note 1 to entry: A gas sensor element is one of the chemical sensor elements.
3.2.2
piezoelectric biochemical sensor element
piezoelectric sensor component including a receptive layer (target recognition material), which
is necessary for the practical measurement of complex biological molecules in quantity, and
which works mainly in aqueous media and detects biomolecules therein
3.3 Types of physical sensors
3.3.1
piezoelectric force sensor element
piezoelectric sensor component whose resonance frequency, delay or electrical charge/voltage
is used for force measurement
3.3.2
piezoelectric pressure sensor element
piezoelectric sensor component whose resonance frequency, delay or electrical charge/voltage
is used for pressure measurement
3.3.3
piezoelectric torque sensor element
piezoelectric sensor component whose resonance frequency, delay or electrical charge/voltage
is used for torque measurement
3.3.4
piezoelectric viscosity sensor element
piezoelectric sensor component whose resonance frequency, delay or insertion loss/gain is
used for viscosity measurement
3.3.5
piezoelectric temperature sensor element
piezoelectric sensor component whose resonance frequency or delay is used for temperature
measurement
3.3.6
piezoelectric film-thickness sensor element
piezoelectric sensor component whose resonance frequency is used for film-thickness
measurement
– 10 – IEC 63041-1:2021 RLV © IEC 2021
3.4 Types of sensor modules
3.4.1
wireless SAW sensor module
piezoelectric sensor element or cell equipped with an antenna for wirelessly connecting with
interrogation unit
Note 1 to entry: Here, the resonator and delay line type elements of the SAW are used for the piezoelectric sensor
element or cell.
3.4.2
dual mode sensor module
dual mode sensor element or cell equipped with circuit units for temperature compensation and
electronic accessories for interfacing to external data acquisitions
Note 1 to entry: Dual mode sensor is a piezoelectric sensor which is able to detect physical quantities from a change
in resonance frequencies of two independent modes on a single piezoelectric plate (see IEC 63041-3:2020, 3.1.5).
3.5 Types of sensor systems
3.5.1
wireless SAW sensor system
generic term that includes wireless SAW sensors and reader unit for sending and receiving RF
signals
SEE: Annex C.
3.5.2
dual mode sensor system
generic term that includes dual mode quartz crystal sensor modules, electric device, PC,
memory, wired or wireless devices, software, etc.
4 Symbols of sensor elements
4.1 General
Figures 1 to 6 show the conceptual diagrams and defined symbols for sensor elements of bulk
acoustic wave (BAW) resonator, SAW resonator and SAW delay-line types. The symbols are
essentially the same as those given in IEC 60122-1, IEC 61019-1 and IEC 60862-1.
Figure 7 and Figure 8 show the conceptual diagram and defined symbol for sensor elements of
non-acoustic type.
Figures 9 to 12 show the conceptual diagram and defined symbol for sensor elements of
wireless SAW resonator and SAW delay-line types. This is shown in Annex C.
NOTE 1 The diagonal line in Figure 2, Figure 4, Figure 6, Figure 8, Figure 10 and Figure 12 shows an emblem
expressing changes in objects to be measured.
NOTE 2 For letter symbols (see 4.7) showing the types of sensors, these symbols are put should
be defined in the circle at the upper right corner of Figure 2, Figure 4, Figure 6, Figure 8,
Figure 10 and Figure 12, and for each sensor application.
4.2 Symbol for sensor elements of BAW resonator type
Figure 1 shows the conceptual diagrams for sensor elements of BAW resonator type from which
a mounting portion is omitted. Figure 2 shows the symbol for sensor elements of BAW resonator
type.
Figure 1 – Conceptual diagrams for sensor elements of BAW resonator type
NOTE Figure 1 shows examples of disk type and tuning fork type sensor elements.

Figure 2 – Symbol for sensor elements of BAW resonator type
4.3 Symbol for sensor elements of SAW resonator type
Figure 3 and Figure 4 show, respectively, the conceptual diagram and symbol for sensor
elements of SAW resonator type.

Figure 3 – Conceptual diagram of sensor elements of SAW resonator type

Figure 4 – Symbol for sensor elements of SAW resonator type
4.4 Symbol for sensor elements of SAW delay-line type
Figure 5 and Figure 6 show, respectively, the conceptual diagram and symbol for sensor
elements of SAW delay-line type.

– 12 – IEC 63041-1:2021 RLV © IEC 2021

Figure 5 – Conceptual diagram for sensor elements of SAW delay-line type

Figure 6 – Symbol for sensor elements of SAW delay-line type
4.5 Symbol for sensor elements of non-acoustic type
Figure 7 shows the conceptual diagrams for sensor elements of non-acoustic type from which
a mounting portion is omitted. Figure 8 shows the symbol for sensor elements of non-acoustic
type.
Figure 7 – Conceptual diagrams for sensor elements of non-acoustic type

Figure 8 – Symbol for sensor elements of non-acoustic type
4.6 Symbol for wireless SAW sensor element
Figures 9 to 12 show, respectively, the conceptual diagram and symbol for sensor elements of
wireless SAW resonator and delay-line type.

Figure 9 – Conceptual diagram for basic sensor elements
of wireless SAW resonator type

Figure 10 – Symbol for basic sensor elements of wireless SAW resonator type

Figure 11 – Conceptual diagram for basic sensor elements
of wireless SAW reflective delay-line type

Figure 12 – Symbol for basic sensor elements of wireless SAW reflective delay‑line type

– 14 – IEC 63041-1:2021 RLV © IEC 2021
NOTE Patch antenna is a type of low-profile wireless antenna that can be mounted on a flat surface and is
connected to the SAW element and cells.
4.7 Symbols
The symbols put in the circle at the upper right corner in Figure 2, Figure 4, Figure 6, Figure 8,
Figure 10 and Figure 12 are defined below (see the ISO 80000 series):
a) film-thickness: d;
b) force: F;
c) mass: m;
d) density: ρ;
e) pressure: P;
f) temperature: T;
g) torque: τ;
h) viscosity: υ.
In chemical, biochemical and gas sensor applications, antigen-antibody or chemical reaction
occurs between the sensitive or receptive layer and target substances, which is detected as a
change in mass density, viscosity or shear modulus of the sensitive or receptive layer.
Accordingly, the following specific symbols are defined for biochemical, chemical and gas
sensor elements:
i) biochemical: Bi;
j) chemical: Ch;
k) gas: Ga.
5 Specifications
5.1 Sensor elements
5.1.1 General
In consideration of the target sensitivity, dynamic range or the like, the specifications of sensor
elements and cells shall be determined. They should be defined clearly in the contract to be
concluded between the manufacturer and customers.
Subclauses 5.1.2 and 5.1.3 present key points to be described in the specifications. These
elements should be specified numerically unless confidential technological information is
concerned.
5.1.2 Sensor elements of resonator and delay-line types
Sensor elements of resonator and delay-line types include the following:
a) range of measurand;
b) sensitivity of output signal with respect to measurand;
c) nominal frequency;
d) frequency tolerance;
e) parameters of equivalent circuit;
f) operating temperature range;
g) unwanted response;
h) level of drive or input power;
i) insertion loss/gain;
j) delay time (for sensor elements of SAW delay-line type);
k) phase response;
l) piezoelectric material, cut angle, or the like;
m) electrode material, dimension, shape, structure or the like;
n) mounting material, dimension, shape, structure or the like;
o) dimensions of enclosure, or name, model number or the like corresponding thereto;
p) category of environmental test;
q) others.
5.1.3 Sensor elements of non-acoustic type
Sensor elements of non-acoustic type include the following:
a) operating temperature range;
b) piezoelectric material, cut angle, dimension, shape, structure or the like;
c) electrode material, dimension, shape, structure or the like;
d) mounting material, dimension, shape, structure or the like;
e) dimensions of enclosure, or name, model number or the like corresponding thereto;
f) category of environmental test;
g) others.
5.2 Frequency ranges
The frequency range applied herein should be 10 kHz to 10 GHz.
When one of the higher-order overtones is used or the frequency deviates from the specified
range, the manufacturer and customer shall consult, and the results shall clearly be defined in
the contract.
NOTE The frequency ranges for sensor elements of non-acoustic type are not defined.
5.3 Level of drive or input power
For sensor elements and cells, the level of drive or input power shall be limited so that an
influence of "heat generation" or a "non-linear effect" does not deteriorate their performance.
NOTE The level of drive or input power for non-acoustic type sensor elements is not defined.
5.4 Unwanted response
Unwanted responses shall be measured based on IEC 60444-9. This rule shall be applied only
to sensor elements of BAW resonator type.
According to IEC 60122-2-1, the ratio of the motional resistance R for the unwanted response
N
to R for the main response (N = R /R ) shall be two and a half times or more.
1 N 1
NOTE Conceptually, the sensitivity increases with an increase in the electrode area, which reduces the ratio of
R /R . Under this situation, unwanted responses affect the main response, and sensor elements of BAW resonator
N 1
type occasionally oscillate, caused by the unwanted response.
5.5 Analysis of measurements
Electronic circuits and measuring instruments are generally used in sensor systems. The output
signals such as frequency, phase, insertion loss/gain, electrical charge / voltage, etc., and their
response functions and graphs are obtained as system data.

– 16 – IEC 63041-1:2021 RLV © IEC 2021
The rule on how to apply this system data to data analyses shall clearly be defined in the
contract to be concluded between the manufacturer and customer, or in individual specifications.
NOTE The response function based on the linear response theory is effective in the analysis of acoustic wave
sensor elements and cells of resonator and delay-line types. For example, it is possible for the frequency response
to predict the resonant response levels of the acoustic wave sensor.
5.6 Enclosure
Holder specifications shall be clearly defined in the contract to be concluded between the
manufacturer and customer, or in individual specifications.
5.7 Performance confirmation
The basic performance of sensor elements and cells such as the minimum and maximum
detection limits, dynamic range, sensitivity, etc. should be specified.
5.8 Long-term and short-term stabilities
At the time of the measurement, attention should be paid to long-term stability as well as to
short-term stability affected by a background noise such as an electronic and/or foreign noise.
The specifications for long-term and short-term stabilities shall clearly be defined in the contract
to be concluded between the manufacturer and customer, or in individual specifications.
NOTE The long-term and short-term stabilities for sensor elements of non-acoustic type are not defined.
5.9 Transmission power
Transmit power and communication distance are related to the electric field strength of wireless
SAW sensor systems. This should be dealt with in accordance with the country specific radio
laws and regulations.
6 Measurement and detection methods
Required measurement and detection methods are shown in Annex A to Annex B Annex C.
7 Delivery conditions
7.1 Marking
The content to be marked should be selected at least out of the following items. Moreover, the
marking shall be made at the place from which sensor elements and cells can easily be viewed
to the greatest extent possible. If such a place is unavailable, the marking shall be made on a
packing plane.
a) type designation as defined in the detailed specifications;
b) year and week (four digits) of manufacture, or serial number;
c) factory identification code;
d) name of manufacturer or trademark;
e) country of production;
f) mark of conformity (unless a certificate of conformity is used).
7.2 Wrapping
In the wrapping of sensor elements and cells, sealing is desirable. Moreover, vacuum wrapping
must also be taken into consideration. This rule shall be clearly defined in the contract to be
concluded between the manufacturer and customer, or in individual specifications.

7.3 Packaging
The packaging specifications shall be clearly defined in the contract to be concluded between
the manufacturer and customer, or in individual specifications.
8 Quality and reliability
8.1 Reuse
Reuse of sensor elements and cells shall be clearly defined in the contract to be concluded
between the manufacturer and customer, or in individual specifications.
8.2 Validity of release
Inspection before shipment and re-inspection when the products are stored for a predetermined
period of time and then shipped, shall be clearly defined in the contract to be concluded between
the manufacturer and customer, or in individual specifications.
8.3 Test procedures
Test procedures to be used shall be selected from this document. If any required test is not
found, then it shall be defined in detailed individual specifications.
8.4 Screening requirements
Where screening by the customer is required for sensor elements and cells, this shall be defined
in the detailed individual specifications.
8.5 Unchecked parameters
Only those parameters of sensor elements and cells which have been described in detailed
specifications and which were subjected to testing can be assumed to be within the specified
limits. It should not be assumed that any parameter not specified will remain unchanged from
one sensor element and cell to another. Should it be necessary for further unchecked
parameters to be controlled verified, then new, more extensive and detailed specifications
should be prepared. The additional test method(s) shall be fully described with appropriate
limits, AQLs and inspection levels specified (see ISO 2859-1).
9 Test and measurement procedures
9.1 General
9.1.1 Classification of tests Test classification
The tests are classified into tests for shipping products, and mechanical and environmental
tests for confirming the reliability of products.
9.1.2 Shipping test
The test is conducted to confirm whether sensor elements and cells maintain the state satisfying
the contract between the manufacturer and customer when unsealed sensor elements are
shipped. The following shall be clearly defined in the contract between the manufacturer and
customer, or individual specifications.
a) When the specifications can presumably be sufficiently ensured, no inspection or sampling
inspection shall be allowed.
b) When inspections are required, all sensor elements and cells shall be inspected.

– 18 – IEC 63041-1:2021 RLV © IEC 2021
9.1.3 Mechanical and environmental test
9.1.3.1 General
Tests should be conducted to confirm whether or not sensor elements and cells have
predetermined performances. Regarding test samples, those sealed into enclosures shall be
used. When no sealing is required, however, such samples may also be used.
9.1.3.2 Test samples
With regard to all test samples, the sensor elements and cells which maintain the state meeting
the contract between the manufacturer and customer shall be used. Selection of the test sample
shall be clearly defined in the contract between the manufacturer and customer, or in individual
specifications.
9.1.3.3 Test items
Test items such as vibration, shock, thermal
...

IEC 63041-1 ®
Edition 2.0 2021-09
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
Piezoelectric sensors –
Part 1: Generic specifications

Capteurs piézoélectriques –
Partie 1: Spécifications génériques

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IEC 63041-1 ®
Edition 2.0 2021-09
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
Piezoelectric sensors –
Part 1: Generic specifications

Capteurs piézoélectriques –
Partie 1: Spécifications génériques

INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
COMMISSION
ELECTROTECHNIQUE
INTERNATIONALE
ICS 31.140 ISBN 978-2-8322-1023-7

– 2 – IEC 63041-1:2021 © IEC 2021
CONTENTS
FOREWORD . 5
1 Scope . 7
2 Normative references . 7
3 Terms and definitions . 7
3.1 Piezoelectric sensors . 8
3.2 Types of chemical sensors . 9
3.3 Types of physical sensors . 9
3.4 Types of sensor modules . 10
3.5 Types of sensor systems. 10
4 Symbols of sensor elements . 10
4.1 General . 10
4.2 Symbol for sensor elements of BAW resonator type . 10
4.3 Symbol for sensor elements of SAW resonator type . 11
4.4 Symbol for sensor elements of SAW delay-line type . 11
4.5 Symbol for sensor elements of non-acoustic type . 12
4.6 Symbol for wireless SAW sensor element . 12
4.7 Symbols . 14
5 Specifications . 14
5.1 Sensor elements . 14
5.1.1 General . 14
5.1.2 Sensor elements of resonator and delay-line types . 14
5.1.3 Sensor elements of non-acoustic type . 15
5.2 Frequency ranges . 15
5.3 Level of drive or input power . 15
5.4 Unwanted response . 15
5.5 Analysis of measurements . 15
5.6 Enclosure . 16
5.7 Performance confirmation . 16
5.8 Long-term and short-term stabilities . 16
5.9 Transmission power . 16
6 Measurement and detection methods . 16
7 Delivery conditions . 16
7.1 Marking . 16
7.2 Wrapping . 16
7.3 Packaging . 17
8 Quality and reliability . 17
8.1 Reuse . 17
8.2 Validity of release . 17
8.3 Test procedures . 17
8.4 Screening requirements . 17
8.5 Unchecked parameters . 17
9 Test and measurement procedures . 17
9.1 General . 17
9.1.1 Test classification . 17
9.1.2 Shipping test . 17

9.1.3 Mechanical and environmental test . 18
9.2 Test and measurement conditions . 18
9.2.1 Standard conditions for testing . 18
9.2.2 Equilibrium state . 18
9.2.3 Power supply . 18
9.2.4 Alternative test system . 19
9.2.5 Visual inspection . 19
9.3 Test conditions for shipment . 19
9.3.1 Temperature dependence of frequency, phase, insertion loss/gain,
motional resistance, and electric charge / voltage . 19
9.3.2 Unwanted response . 19
9.3.3 Shunt capacitance . 19
9.3.4 Insulation resistance . 20
Annex A (normative) Measurement methods . 21
A.1 General . 21
A.2 Measurement methods using reflection and transmission characteristics . 21
A.3 Measurement methods using oscillation circuits . 22
A.4 Measurement method of non-acoustic type sensor elements and cells . 23
A.5 Other measurement methods . 23
Annex B (normative) Detection methods . 24
B.1 General . 24
B.2 Detection methods . 24
B.2.1 Frequency difference measurement . 24
B.2.2 Insertion loss/gain measurement . 25
B.2.3 Phase difference measurement. 26
B.2.4 Other detection methods . 26
Annex C (normative) Wireless SAW sensor . 27
C.1 General . 27
C.2 Detection methods . 27
C.2.1 General . 27
C.2.2 Conceptual diagrams of wireless SAW resonator type sensor system . 27
C.2.3 Conceptual diagrams of wireless SAW reflective delay-line type sensor
system . 27
C.2.4 Key points of detection mechanism . 28
C.2.5 Technical documents . 28
Bibliography . 29

Figure 1 – Conceptual diagrams for sensor elements of BAW resonator type . 11
Figure 2 – Symbol for sensor elements of BAW resonator type . 11
Figure 3 – Conceptual diagram of sensor elements of SAW resonator type . 11
Figure 4 – Symbol for sensor elements of SAW resonator type . 11
Figure 5 – Conceptual diagram for sensor elements of SAW delay-line type . 12
Figure 6 – Symbol for sensor elements of SAW delay-line type . 12
Figure 7 – Conceptual diagrams for sensor elements of non-acoustic type. 12
Figure 8 – Symbol for sensor elements of non-acoustic type . 12
Figure 9 – Conceptual diagram for basic sensor elements of wireless SAW
resonator type . 13
Figure 10 – Symbol for basic sensor elements of wireless SAW resonator type . 13

– 4 – IEC 63041-1:2021 © IEC 2021
Figure 11 – Conceptual diagram for basic sensor elements of wireless SAW reflective
delay-line type . 13
Figure 12 – Symbol for basic sensor elements of wireless SAW reflective
delay‑line type . 13
Figure A.1 – Measurement method using reflection characteristics of BAW resonator
type sensor elements and cells . 21
Figure A.2 – Measurement method using reflection characteristics of SAW resonator
type sensor elements and cells . 21
Figure A.3 – Measurement method using transmission characteristics of SAW delay-
line type sensor elements and cells . 22
Figure A.4 – Measurement method using oscillation circuit consisting of BAW
resonator type sensor elements and cells . 22
Figure A.5 – Measurement method using oscillation circuit consisting of SAW
resonator type sensor elements and cells . 22
Figure A.6 – Measurement method using oscillation circuit consisting of SAW delay-
line type sensor elements and cells . 23
Figure A.7 – Measurement method using amplifier consisting of non-acoustic type
sensor elements and cells . 23
Figure B.1 – Measurement of frequency difference using two oscillation circuits . 24
Figure B.2 – Measurement of frequency difference using an oscillation circuit and
frequency synthesizer . 25
Figure B.3 – Conceptual diagram of piezoelectric dual mode sensor module . 25
Figure B.4 – Measurement of insertion loss/gain difference using two oscillation
circuits . 26
Figure B.5 – Measurement of phase difference using signal generator and phase
detector . 26
Figure C.1 – Fundamental measurement system of wireless SAW resonator type
sensor . 27
Figure C.2 – Fundamental measurement system of wireless SAW reflective delay-line
type sensor . 28

INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
PIEZOELECTRIC SENSORS –
Part 1: Generic specifications

FOREWORD
1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising
all national electrotechnical committees (IEC National Committees). The object of IEC is to promote international
co-operation on all questions concerning standardization in the electrical and electronic fields. To this end and
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Standardization (ISO) in accordance with conditions determined by agreement between the two organizations.
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5) IEC itself does not provide any attestation of conformity. Independent certification bodies provide conformity
assessment services and, in some areas, access to IEC marks of conformity. IEC is not responsible for any
services carried out by independent certification bodies.
6) All users should ensure that they have the latest edition of this publication.
7) No liability shall attach to IEC or its directors, employees, servants or agents including individual experts and
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Publications.
8) Attention is drawn to the Normative references cited in this publication. Use of the referenced publications is
indispensable for the correct application of this publication.
9) Attention is drawn to the possibility that some of the elements of this IEC Publication may be the subject of patent
rights. IEC shall not be held responsible for identifying any or all such patent rights.
IEC 63041-1 has been prepared by IEC technical committee 49: Piezoelectric, dielectric and
electrostatic devices and associated materials for frequency control, selection and detection. It
is an International Standard.
This second edition cancels and replaces the first edition published in 2017. This edition
constitutes a technical revision.
This edition includes the following significant technical changes with respect to the previous
edition:
a) the new terms "piezoelectric sensor system" and "wireless SAW sensor system" and their
definitions have been added;
b) new types of sensor modules and sensor system have been added;
c) some symbols of sensor elements are added in Clause 4;
d) a new Figure B.3 has been added in Annex B;
e) Annex C has been added.
– 6 – IEC 63041-1:2021 © IEC 2021
The text of this International Standard is based on the following documents:
Draft Report on voting
49/1357/CDV 49/1364/RVC
Full information on the voting for its approval can be found in the report on voting indicated in
the above table.
The language used for the development of this International Standard is English.
This document was drafted in accordance with ISO/IEC Directives, Part 2, and developed in
accordance with ISO/IEC Directives, Part 1 and ISO/IEC Directives, IEC Supplement, available
at www.iec.ch/members_experts/refdocs. The main document types developed by IEC are
described in greater detail at www.iec.ch/standardsdev/publications.
A list of all parts in the IEC 63041 series, published under the general title Piezoelectric sensors,
can be found on the IEC website.
The committee has decided that the contents of this document will remain unchanged until the
stability date indicated on the IEC website under webstore.iec.ch in the data related to the
specific document. At this date, the document will be
• reconfirmed,
• withdrawn,
• replaced by a revised edition, or
• amended.
PIEZOELECTRIC SENSORS –
Part 1: Generic specifications

1 Scope
This part of IEC 63041 applies to piezoelectric sensors of resonator, delay-line and non-
acoustic types, which are used in physical and engineering sciences, chemistry and
biochemistry, medical and environmental sciences, etc.
The purpose of this document is to specify the terms and definitions for piezoelectric sensors,
and to make sure from a technological perspective that users understand the state-of-art
piezoelectric sensors and how to use them correctly.
2 Normative references
The following documents are referred to in the text in such a way that some or all of their content
constitutes requirements of this document. For dated references, only the edition cited applies.
For undated references, the latest edition of the referenced document (including any
amendments) applies.
IEC 60027 (all parts), Letter symbols to be used in electrical technology
IEC 60050-561, International Electrotechnical Vocabulary – Part 561: Piezoelectric, dielectric
and electrostatic devices and associated materials for frequency control, selection and
detection
IEC 60122-2-1, Quartz crystal units for frequency control and selection – Part 2: Guide to the
use of quartz crystal units for frequency control and selection – Section One: Quartz crystals
for microprocessor clock supply
IEC 60444-9, Measurement of quartz crystal unit parameters – Part 9: Measurement of spurious
resonances of piezoelectric crystal units
IEC 60617, Graphical symbols for diagrams, available at https://std.iec.ch/iec60617
IEC 63041-3:2020, Piezoelectric sensors – Part 3: Physical sensors
ISO 2859-1:1999, Sampling procedures for inspection by attributes – Part 1: Sampling schemes
indexed by acceptance quality limit (AQL) for lot-by-lot inspection
ISO 80000-1, Quantities and units – Part 1: General
3 Terms and definitions
For the purposes of this document, the terms and definitions given in IEC 60027, IEC 60050-
561, IEC 60617, ISO 80000-1 and the following apply.

– 8 – IEC 63041-1:2021 © IEC 2021
ISO and IEC maintain terminological databases for use in standardization at the following
addresses:
• IEC Electropedia: available at https://www.electropedia.org/
• ISO Online browsing platform: available at https://www.iso.org/obp
NOTE Piezoelectric sensors covered herein are those used for the detection and measurement of physical
quantities, chemical substances or biological molecules.
3.1 Piezoelectric sensors
3.1.1
piezoelectric sensor element
electronic component which is able to detect physical quantities as a change in its frequency,
phase, delay, electrical charge, resistance, Q-value, bandwidth, etc.
Note 1 to entry: For chemical and biochemical sensor applications, the piezoelectric sensor element includes a
sensitive or receptive layer (target recognition material).
3.1.2
resonator type sensor element
piezoelectric sensor component using acoustic resonances
3.1.3
delay-line type sensor element
piezoelectric sensor component using a delay-line of surface acoustic wave (SAW) transversal
filter type
3.1.4
non-acoustic type sensor element
piezoelectric sensor component using the electrical charge induced by a quasi-static force,
torque or the like
Note 1 to entry: Here, the term, "non-acoustic", represents "quasi-static piezoelectric". Accordingly, the
(piezoelectric) non-acoustic type sensor element means a sensor element using the quasi-static piezoelectric effect.
3.1.5
piezoelectric sensor cell
sensor element equipped with necessary mechanical accessories and attachments to correctly
detect the parameters to be measured
3.1.6
piezoelectric sensor module
sensor element or cell equipped with electronic accessories for interfacing to external data
acquisitions
3.1.7
piezoelectric sensor system
organized system including detection, amplification of detected value, communication with other
equipment and analysis of detected value
Note 1 to entry: Here, these functions cooperate mutually.
3.1.8
piezoelectric sensor
generic term that includes a sensor element, cell, module and system

3.1.9
QCM
quartz crystal microbalance
one of the families of chemical and biochemical sensors using crystal resonators
Note 1 to entry: A thickness shear mode (TSM) sensor is identical with a QCM.
3.2 Types of chemical sensors
3.2.1
piezoelectric chemical sensor element
piezoelectric sensor component including a sensitive layer (target recognition material), which
is necessary for the practical measurement of simple non-biological molecules in quantity, and
which works and detects chemical substances mainly in the gas phase
Note 1 to entry: A gas sensor element is one of the chemical sensor elements.
3.2.2
piezoelectric biochemical sensor element
piezoelectric sensor component including a receptive layer (target recognition material), which
is necessary for the practical measurement of complex biological molecules in quantity, and
which works mainly in aqueous media and detects biomolecules therein
3.3 Types of physical sensors
3.3.1
piezoelectric force sensor element
piezoelectric sensor component whose resonance frequency, delay or electrical charge/voltage
is used for force measurement
3.3.2
piezoelectric pressure sensor element
piezoelectric sensor component whose resonance frequency, delay or electrical charge/voltage
is used for pressure measurement
3.3.3
piezoelectric torque sensor element
piezoelectric sensor component whose resonance frequency, delay or electrical charge/voltage
is used for torque measurement
3.3.4
piezoelectric viscosity sensor element
piezoelectric sensor component whose resonance frequency, delay or insertion loss/gain is
used for viscosity measurement
3.3.5
piezoelectric temperature sensor element
piezoelectric sensor component whose resonance frequency or delay is used for temperature
measurement
3.3.6
piezoelectric film-thickness sensor element
piezoelectric sensor component whose resonance frequency is used for film-thickness
measurement
– 10 – IEC 63041-1:2021 © IEC 2021
3.4 Types of sensor modules
3.4.1
wireless SAW sensor module
piezoelectric sensor element or cell equipped with an antenna for wirelessly connecting with
interrogation unit
Note 1 to entry: Here, the resonator and delay line type elements of the SAW are used for the piezoelectric sensor
element or cell.
3.4.2
dual mode sensor module
dual mode sensor element or cell equipped with circuit units for temperature compensation and
electronic accessories for interfacing to external data acquisitions
Note 1 to entry: Dual mode sensor is a piezoelectric sensor which is able to detect physical quantities from a change
in resonance frequencies of two independent modes on a single piezoelectric plate (see IEC 63041-3:2020, 3.1.5).
3.5 Types of sensor systems
3.5.1
wireless SAW sensor system
generic term that includes wireless SAW sensors and reader unit for sending and receiving RF
signals
SEE: Annex C.
3.5.2
dual mode sensor system
generic term that includes dual mode quartz crystal sensor modules, electric device, PC,
memory, wired or wireless devices, software, etc.
4 Symbols of sensor elements
4.1 General
Figures 1 to 6 show the conceptual diagrams and defined symbols for sensor elements of bulk
acoustic wave (BAW) resonator, SAW resonator and SAW delay-line types. The symbols are
essentially the same as those given in IEC 60122-1, IEC 61019-1 and IEC 60862-1.
Figure 7 and Figure 8 show the conceptual diagram and defined symbol for sensor elements of
non-acoustic type.
Figures 9 to 12 show the conceptual diagram and defined symbol for sensor elements of
wireless SAW resonator and SAW delay-line types. This is shown in Annex C.
NOTE The diagonal line in Figure 2, Figure 4, Figure 6, Figure 8, Figure 10 and Figure 12 shows an emblem
expressing changes in objects to be measured.
For letter symbols (see 4.7) showing the types of sensors, these symbols should be defined in
the circle at the upper right corner of Figure 2, Figure 4, Figure 6, Figure 8, Figure 10 and
Figure 12, and for each sensor application.
4.2 Symbol for sensor elements of BAW resonator type
Figure 1 shows the conceptual diagrams for sensor elements of BAW resonator type from which
a mounting portion is omitted. Figure 2 shows the symbol for sensor elements of BAW resonator
type.
Figure 1 – Conceptual diagrams for sensor elements of BAW resonator type
NOTE Figure 1 shows examples of disk type and tuning fork type sensor elements.

Figure 2 – Symbol for sensor elements of BAW resonator type
4.3 Symbol for sensor elements of SAW resonator type
Figure 3 and Figure 4 show, respectively, the conceptual diagram and symbol for sensor
elements of SAW resonator type.

Figure 3 – Conceptual diagram of sensor elements of SAW resonator type

Figure 4 – Symbol for sensor elements of SAW resonator type
4.4 Symbol for sensor elements of SAW delay-line type
Figure 5 and Figure 6 show, respectively, the conceptual diagram and symbol for sensor
elements of SAW delay-line type.

– 12 – IEC 63041-1:2021 © IEC 2021

Figure 5 – Conceptual diagram for sensor elements of SAW delay-line type

Figure 6 – Symbol for sensor elements of SAW delay-line type
4.5 Symbol for sensor elements of non-acoustic type
Figure 7 shows the conceptual diagrams for sensor elements of non-acoustic type from which
a mounting portion is omitted. Figure 8 shows the symbol for sensor elements of non-acoustic
type.
Figure 7 – Conceptual diagrams for sensor elements of non-acoustic type

Figure 8 – Symbol for sensor elements of non-acoustic type
4.6 Symbol for wireless SAW sensor element
Figures 9 to 12 show, respectively, the conceptual diagram and symbol for sensor elements of
wireless SAW resonator and delay-line type.

Figure 9 – Conceptual diagram for basic sensor elements
of wireless SAW resonator type

Figure 10 – Symbol for basic sensor elements of wireless SAW resonator type

Figure 11 – Conceptual diagram for basic sensor elements
of wireless SAW reflective delay-line type

Figure 12 – Symbol for basic sensor elements of wireless SAW reflective delay‑line type

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NOTE Patch antenna is a type of low-profile wireless antenna that can be mounted on a flat surface and is
connected to the SAW element and cells.
4.7 Symbols
The symbols put in the circle at the upper right corner in Figure 2, Figure 4, Figure 6, Figure 8,
Figure 10 and Figure 12 are defined below (see the ISO 80000 series):
a) film-thickness: d;
b) force: F;
c) mass: m;
d) density: ρ;
e) pressure: P;
f) temperature: T;
g) torque: τ;
h) viscosity: υ.
In chemical, biochemical and gas sensor applications, antigen-antibody or chemical reaction
occurs between the sensitive or receptive layer and target substances, which is detected as a
change in mass density, viscosity or shear modulus of the sensitive or receptive layer.
Accordingly, the following specific symbols are defined for biochemical, chemical and gas
sensor elements:
i) biochemical: Bi;
j) chemical: Ch;
k) gas: Ga.
5 Specifications
5.1 Sensor elements
5.1.1 General
In consideration of the target sensitivity, dynamic range or the like, the specifications of sensor
elements and cells shall be determined. They should be defined clearly in the contract to be
concluded between the manufacturer and customers.
Subclauses 5.1.2 and 5.1.3 present key points to be described in the specifications. These
elements should be specified numerically unless confidential technological information is
concerned.
5.1.2 Sensor elements of resonator and delay-line types
Sensor elements of resonator and delay-line types include the following:
a) range of measurand;
b) sensitivity of output signal with respect to measurand;
c) nominal frequency;
d) frequency tolerance;
e) parameters of equivalent circuit;
f) operating temperature range;
g) unwanted response;
h) level of drive or input power;
i) insertion loss/gain;
j) delay time (for sensor elements of SAW delay-line type);
k) phase response;
l) piezoelectric material, cut angle, or the like;
m) electrode material, dimension, shape, structure or the like;
n) mounting material, dimension, shape, structure or the like;
o) dimensions of enclosure, or name, model number or the like corresponding thereto;
p) category of environmental test;
q) others.
5.1.3 Sensor elements of non-acoustic type
Sensor elements of non-acoustic type include the following:
a) operating temperature range;
b) piezoelectric material, cut angle, dimension, shape, structure or the like;
c) electrode material, dimension, shape, structure or the like;
d) mounting material, dimension, shape, structure or the like;
e) dimensions of enclosure, or name, model number or the like corresponding thereto;
f) category of environmental test;
g) others.
5.2 Frequency ranges
The frequency range applied herein should be 10 kHz to 10 GHz.
When one of the higher-order overtones is used or the frequency deviates from the specified
range, the manufacturer and customer shall consult, and the results shall clearly be defined in
the contract.
NOTE The frequency ranges for sensor elements of non-acoustic type are not defined.
5.3 Level of drive or input power
For sensor elements and cells, the level of drive or input power shall be limited so that an
influence of "heat generation" or a "non-linear effect" does not deteriorate their performance.
NOTE The level of drive or input power for non-acoustic type sensor elements is not defined.
5.4 Unwanted response
Unwanted responses shall be measured based on IEC 60444-9. This rule shall be applied only
to sensor elements of BAW resonator type.
According to IEC 60122-2-1, the ratio of the motional resistance R for the unwanted response
N
to R for the main response (N = R /R ) shall be two and a half times or more.
1 N 1
NOTE Conceptually, the sensitivity increases with an increase in the electrode area, which reduces the ratio of
R /R . Under this situation, unwanted responses affect the main response, and sensor elements of BAW resonator
N 1
type occasionally oscillate, caused by the unwanted response.
5.5 Analysis of measurements
Electronic circuits and measuring instruments are generally used in sensor systems. The output
signals such as frequency, phase, insertion loss/gain, electrical charge / voltage, etc., and their
response functions and graphs are obtained as system data.

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The rule on how to apply this system data to data analyses shall clearly be defined in the
contract to be concluded between the manufacturer and customer, or in individual specifications.
NOTE The response function based on the linear response theory is effective in the analysis of acoustic wave
sensor elements and cells of resonator and delay-line types. For example, it is possible for the frequency response
to predict the resonant response levels of the acoustic wave sensor.
5.6 Enclosure
Holder specifications shall be clearly defined in the contract to be concluded between the
manufacturer and customer, or in individual specifications.
5.7 Performance confirmation
The basic performance of sensor elements and cells such as the minimum and maximum
detection limits, dynamic range, sensitivity, etc. should be specified.
5.8 Long-term and short-term stabilities
At the time of the measurement, attention should be paid to long-term stability as well as to
short-term stability affected by a background noise such as an electronic and/or foreign noise.
The specifications for long-term and short-term stabilities shall clearly be defined in the contract
to be concluded between the manufacturer and customer, or in individual specifications.
NOTE The long-term and short-term stabilities for sensor elements of non-acoustic type are not defined.
5.9 Transmission power
Transmit power and communication distance are related to the electric field strength of wireless
SAW sensor systems. This should be dealt with in accordance with the country specific radio
laws and regulations.
6 Measurement and detection methods
Required measurement and detection methods are shown in Annex A to Annex C.
7 Delivery conditions
7.1 Marking
The content to be marked should be selected at least out of the following items. Moreover, the
marking shall be made at the place from which sensor elements and cells can easily be viewed
to the greatest extent possible. If such a place is unavailable, the marking shall be made on a
packing plane.
a) type designation as defined in the detailed specifications;
b) year and week (four digits) of manufacture, or serial number;
c) factory identification code;
d) name of manufacturer or trademark;
e) country of production;
f) mark of conformity (unless a certificate of conformity is used).
7.2 Wrapping
In the wrapping of sensor elements and cells, sealing is desirable. Moreover, vacuum wrapping
must also be taken into consideration. This rule shall be clearly defined in the contract to be
concluded between the manufacturer and customer, or in individual specifications.

7.3 Packaging
The packaging specifications shall be clearly defined in the contract to be concluded between
the manufacturer and customer, or in individual specifications.
8 Quality and reliability
8.1 Reuse
Reuse of sensor elements and cells shall be clearly defined in the contract to be concluded
between the manufacturer and customer, or in individual specifications.
8.2 Validity of release
Inspection before shipment and re-inspection when the products are stored for a predetermined
period of time and then shipped, shall be clearly defined in the contract to be concluded between
the manufacturer and customer, or in individual specifications.
8.3 Test procedures
Test procedures to be used shall be selected from this document. If any required test is not
found, then it shall be defined in detailed individual specifications.
8.4 Screening requirements
Where screening by the customer is required for sensor elements and cells, this shall be defined
in the detailed individual specifications.
8.5 Unchecked parameters
Only those parameters of sensor elements and cells which have been described in detailed
specifications and which were subjected to testing can be assumed to be within the specified
limits. It should not be assumed that any parameter not specified will remain unchanged from
one sen
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