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IEC TR 63258:2021

(Main)

Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films

Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films

IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.

General Information

Status
Published
Publication Date
18-Mar-2021
ICS
07.120 - Nanotechnologies
Technical Committee
TC 113 - Nanotechnology for electrotechnical products and systems
Current Stage
PPUB - Publication issued
Start Date
22-Apr-2021
Completion Date
19-Mar-2021
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IEC TR 63258:2021 - Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale filmsIEC TR 63258:2021 - Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films
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Technical report
IEC TR 63258:2021 - Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films
English language
21 pages
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IEC TR 63258
Edition 1.0 2021-03
TECHNICAL
REPORT
colour
inside
Nanotechnologies – A guideline for ellipsometry application to evaluate the
thickness of nanoscale films


IEC TR 63258:2021-03(en)

---------------------- Page: 1 ----------------------
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---------------------- Page: 2 ----------------------
IEC TR 63258


Edition 1.0 2021-03




TECHNICAL



REPORT








colour

inside










Nanotechnologies – A guideline for ellipsometry application to evaluate the

thickness of nanoscale films


























INTERNATIONAL

ELECTROTECHNICAL


COMMISSION





ICS 07.120 ISBN 978-2-8322-9584-7




  Warning! Make sure that you obtained this publication from an authorized distributor.

---------------------- Page: 3 ----------------------
– 2 – IEC TR 63258:2021 © IEC 2021
CONTENTS
FOREWORD . 3
INTRODUCTION . 5
1 Scope . 6
2 Normative references . 6
3 Terms and definitions . 6
3.1 General terms . 6
3.2 Terms specific to this document . 7
4 Measurement of ellipsometry . 8
4.1 General . 8
4.2 Measurement procedure . 9
4.2.1 Sample preparation for system check . 9
4.2.2 Experimental procedure for system check . 9
4.2.3 Sample handling . 9
4.2.4 Experimental procedures .
...

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