Nanomanufacturing - Key control characteristics - Part 6-3: Graphene-based material - Domain size: substrate oxidation

IEC TS 62607:2020 establishes a standardized method to determine the structural key control characteristic
– domain size
for films consisting of graphene grown by chemical vapour deposition (CVD) on copper by
– substrate oxidation.
It provides a fast, facile and reliable method to evaluate graphene domains formed on copper foil or copper film for understanding the effect of the graphene domain size on properties of graphene and enhancing the performance of high speed, flexible, and transparent devices using CVD graphene.
– The domain size determined in accordance with this document will be listed as a key control characteristic in the blank detail specification for graphene IEC 62565-3-1. Domain density is an equivalent measure.
– The domain size as derived by this method is defined as the mean value of size of the domains in the observed area specified by supplier in terms of cm2 or µm2.
– The method is applicable for graphene grown on copper by CVD. The characterization is done on the copper foil before transfer to the final substrate.
– As the method is destructive, the samples cannot be re-launched into the fabrication process.

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IEC TS 62607-6-3 ®
Edition 1.0 2020-10
Nanomanufacturing – Key control characteristics –
Part 6-3: Graphene-based material – Domain size: substrate oxidation

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IEC TS 62607-6-3 ®
Edition 1.0 2020-10
Nanomanufacturing – Key control characteristics –

Part 6-3: Graphene-based material – Domain size: substrate oxidation

ICS 07.030, ICS 07.120 ISBN 978-2-8322-8939-6 0

– 2 – IEC TS 62607-6-3:2020 © IEC 2020
1 Scope . 7
2 Normative references . 7
3 Terms and definitions . 7
3.1 General terms . 8
3.2 Graphene related terms . 8
3.3 Key control characteristics measured in accordance with this document . 9
4 General . 9
4.1 Measurement principle . 9
4.2 Sample preparation method . 10
4.3 Measurement system . 11
4.4 Description of measurement equipment/apparatus . 12
4.5 Calibration standards . 12
4.6 Ambient conditions during measurement . 12
5 Measurement procedure . 12
5.1 Calibration of measurement equipment . 12
5.2 Detailed protocol of the measurement procedure . 12
5.2.1 General . 12
5.2.2 Example . 13
6 Results to be reported . 13
6.1 General . 13
6.2 Product/sample identification . 13
6.3 Test conditions . 13
6.4 Measurement specific information . 14
6.5 Test results . 14
Annex A (informative) Worked example . 15
A.1 Example. 15
A.2 Sampling plan . 18
A.3 Format of the test report . 19
Annex B (informative) Alternative methods for evaluating graphene domains and
defects . 21
Bibliography . 22

Figure 1 – Applications of graphene . 6
Figure 2 – Schematics for oxidation of copper foil through the graphene boundaries. 10
Figure 3 – Optical image of the graphene domains on Cu foil . 11
Figure 4 – Schematic view of oxidation system . 11
Figure 5 – Optical images of graphene/Cu after oxidation and analysed grain size
distribution . 12
Figure 6 – Example of domain size analysis . 13
Figure A.1 – Photograph of graphene/Cu foil (7cm × 7 cm) for graphene grown at
1 050 °C by CVD with CH . 15
Figure A.2 – SEM image of graphene/Cu after oxidation at the points as specified in
Figure A.6 . 16

Figure A.3 – Measuring graphene domain size of Figure A.2 using Image J . 16
Figure A.4 –Domain size distribution and average domain size of graphene shown in
Figure A.2 . 17
Figure A.5 – Accumulative domain size distribution shown in Figure A.4 and average
domain size of graphene measured at 9 points shown in Figure A.6 . 18
Figure A.6 – Location of the analysed area on the sample . 18
Figure B.1 – Typical methods for observing graphene domain and grain boundaries . 21

Table A.1 – Product identification (in accordance with IEC 62565-3-1) . 19
Table A.2 – General material description (in accordance with IEC 62565-3-1). 19
Table A.3 – Measurement related information . 19
Table A.4 – KCC measurement results . 20

– 4 – IEC TS 62607-6-3:2020 © IEC 2020
Part 6-3: Graphene-based material –
Domain size: substrate oxidation

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IEC TS 62607-6-3, which is a Technical Specification, has been prepared by technical
committee 113, Nanotechnology for electrotechnical products and systems.

The text of this Technical Specification is based on the following documents:
Enquiry draft Report on voting
113/496/DTS 113/549/RVDTS
Full information on the voting for the approval of this Technical Specification can be found in
the report on voting indicated in the above table.
This document has been drafted in accordance with the ISO/IEC Directives, Part 2.
A list of all parts in the IEC TS 62607 series, published under the general title
Nanomanufacturing – Key control characteristics, can be f

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