Nanotechnologies -- Vocabulary -- Part 8: Nanomanufacturing processes

ISO TS 80004-8:2013 gives terms and definitions related to nanomanufacturing processes in the field of nanotechnologies. It forms one part of multi-part terminology and definitions documentation covering the different aspects of nanotechnologies.

Nanotechnologies - Vocabulaire - Partie 8: Processus de nanofabrication

General Information

Status
Published
Publication Date
09-Dec-2013
Current Stage
DELPUB - Deleted Publication
Completion Date
23-Nov-2020
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ISO TS 80004-8:2013 - Nanotechnologies -- Vocabulary -- Part 8: Nanomanufacturing processes
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TECHNICAL ISO/TS
SPECIFICATION 80004-8
First edition
2013-12-15
Nanotechnologies — Vocabulary —
Part 8:
Nanomanufacturing processes
Nanotechnologies — Vocabulaire —
Partie 8: Processus de nanofabrication
Reference number
ISO/TS 80004-8:2013(E)
©
ISO 2013

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ISO/TS 80004-8:2013(E)

COPYRIGHT PROTECTED DOCUMENT
© ISO 2013
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form
or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior
written permission. Permission can be requested from either ISO at the address below or ISO’s member body in the country of
the requester.
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Published in Switzerland
ii © ISO 2013 – All rights reserved

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ISO/TS 80004-8:2013(E)

Contents Page
Foreword .iv
Introduction .vi
1 Scope . 1
2 Terms and definitions from other parts of ISO/TS 80004 . 1
3 General terms . 3
4 Directed assembly . 4
5 Self-assembly processes . 4
6 Synthesis . 5
6.1 Gas process phase — Physical methods . 5
6.2 Gas process phase — Chemical methods . 6
6.3 Liquid process phase — Physical methods . 7
6.4 Liquid process phase — Chemical methods . 8
6.5 Solid process phase — Physical methods . 8
6.6 Solid process phase — Chemical methods .10
7 Fabrication .11
7.1 Nanopatterning lithography .11
7.2 Deposition processes .14
7.3 Etching processes .16
7.4 Printing and coating .18
Annex A (informative) Identification of output resulting from defined synthesis processes .19
Annex B (informative) Index .
...

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