ISO TS 80004-8:2013
(Main)Nanotechnologies -- Vocabulary -- Part 8: Nanomanufacturing processes
Nanotechnologies -- Vocabulary -- Part 8: Nanomanufacturing processes
ISO TS 80004-8:2013 gives terms and definitions related to nanomanufacturing processes in the field of nanotechnologies. It forms one part of multi-part terminology and definitions documentation covering the different aspects of nanotechnologies.
Nanotechnologies - Vocabulaire - Partie 8: Processus de nanofabrication
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TECHNICAL ISO/TS
SPECIFICATION 80004-8
First edition
2013-12-15
Nanotechnologies — Vocabulary —
Part 8:
Nanomanufacturing processes
Nanotechnologies — Vocabulaire —
Partie 8: Processus de nanofabrication
Reference number
ISO/TS 80004-8:2013(E)
©
ISO 2013
ISO/TS 80004-8:2013(E)
© ISO 2013
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form
or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior
written permission. Permission can be requested from either ISO at the address below or ISO’s member body in the country of
the requester.
ISO copyright office
Case postale 56 • CH-1211 Geneva 20
Tel. + 41 22 749 01 11
Fax + 41 22 749 09 47
E-mail copyright@iso.org
Web www.iso.org
Published in Switzerland
ii © ISO 2013 – All rights reserved
ISO/TS 80004-8:2013(E)
Contents Page
Foreword .iv
Introduction .vi
1 Scope . 1
2 Terms and definitions from other parts of ISO/TS 80004 . 1
3 General terms . 3
4 Directed assembly . 4
5 Self-assembly processes . 4
6 Synthesis . 5
6.1 Gas process phase — Physical methods . 5
6.2 Gas process phase — Chemical methods . 6
6.3 Liquid process phase — Physical methods . 7
6.4 Liquid process phase — Chemical methods . 8
6.5 Solid process phase — Physical methods . 8
6.6 Solid process phase — Chemical methods .10
7 Fabrication .11
7.1 Nanopatterning lithography .11
7.2 Deposition processes .14
7.3 Etching processes .16
7.4 Printing and coating .18
Annex A (informative) Identification of output resulting from defined synthesis processes .19
Annex B (informative) Index .21
Bibliography .27
ISO/TS 80004-8:2013(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2. www.iso.org/directives
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of any
patent rights identified during the development of the document will be in the Introduction and/or on
the ISO list of patent declarations received. www.iso.org/patents
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation on the meaning of ISO specific terms and expressions related to conformity
assessment, as well as information about ISO’s adherence to the WTO principles in the Technical
Barriers to Trade (TBT) see the following URL: Foreword - Supplementary information
ISO/TS 80004-8 was prepared jointly by Technical Committee ISO/TC 229, Nanotechnologies, and Technical
Committee IEC/TC 113, Nanotechnology standardization for electrical and electronic products and systems.
Documents in the 80000 to 89999 range of reference numbers are developed by collaboration
between ISO and IEC.
ISO/TS 80004 consists of the following parts, under the general title Nanotechnologies — Vocabulary:
— Part 1: Core terms
— Part 3: Carbon nano-objects
— Part 4: Nanostructured materials
— Part 5: Nano/bio interface
— Part 6: Nano-object characterization
— Part 7: Diagnostics and therapeutics for healthcare
— Part 8: Nanomanufacturing processes
The following parts are under preparation:
1)
— Part 2: Nano-objects: Nanoparticle, nanofibre and nanoplate
— Part 9: Nano-enabled electrotechnical products and systems
— Part 10: Nano-enabled photonic components and systems
— Part 11: Nanolayer, nanocoating, nanofilm, and related terms
— Part 12: Quantum phenomena in nanotechnology
[5]
1) Revises and replaces ISO/TS 27687 .
iv © ISO 2013 – All rights reserved
ISO/TS 80004-8:2013(E)
Graphene and other two-dimensional materials is to form the subject of a future part 13.
ISO/TS 80004-8:2013(E)
Introduction
Nanomanufacturing is the essential bridge between the discoveries of the nanosciences and real-world
nanotechnology products.
Advancing nanotechnology from the laboratory into volume production ultimately requires careful
study of manufacturing process issues including product design, reliability and quality, process design
and control, shop floor operations, supply chain management, workplace safety and health practices
during the production, use, and handling of nanomaterials. Nanomanufacturing encompasses directed
self assembly and assembly techniques, synthetic methodologies, and fabrication processes such as
lithography and biological processes. Nanomanufacturing also includes bottom-up directed assembly,
top-down high resolution processing, molecular systems engineering, and hierarchical integration with
larger scale systems. As dimensional scales of materials and molecular systems approach the nanoscale,
the conventional rules governing their behaviour may change significantly. As such, the behaviour of a
final product is enabled by the collective performance of its nanoscale building blocks.
Biological process terms are not included in this first edition of the nanomanufacturing vocabulary, but
considering the rapid development of the field, it is expected that terms in this important area will be
added in a future update to this Technical Specification or in companion documents in the 80004 series.
This could include both the processing of biological nanomaterials and the use of biological processes to
manufacture materials at the nanoscale.
Similarly, additional terms from other developing areas of nanomanufacturing, including composite
manufacturing, roll-to-roll manufacturing, and others, will be included in future documents.
There is a distinction between the terms nanomanufacturing and nanofabrication. Nanomanufacturing
encompasses a broader range of processes than does nanofabrication. Nanomanufacturing
encompasses all nanofabrication techniques and also techniques associated with materials processing
and chemical synthesis.
This document provides an introduction to processes used in the early stages of the nanomanufacturing
value chain, namely the intentional synthesis, generation or control of nanomaterials, including
fabrication steps in the nanoscale. The nanomaterials that result from these manufacturing processes
are distributed in commerce where, for example, they may be further purified, be compatabilized to
be dispersed in mixtures or composite matrices, or serve as integrated components of systems and
devices. The nanomanufacturing value chain is, in actuality, a large and diverse group of commercial
value chains that stretch across these sectors:
— the semiconductor industry (where the push to create smaller, faster, and more efficient
microprocessors heralded the creation of circuitry less than 100 nm in size);
— electronics and telecommunications;
— aerospace, defence, and national security;
— energy and automotive;
— plastics and ceramics;
— forest and paper products;
— food and food packaging;
— pharmaceuticals, biomedicine, and biotechnology;
— environmental remediation;
— clothing and personal care.
There are thousands of tonnes of nanomaterials on the market with end use applications in several of
these sectors, such as carbon black and fumed silica. Nanomaterials which are rationally designed with
vi © ISO 2013 – All rights reserved
ISO/TS 80004-8:2013(E)
specific purpose are expected to radically change the landscape in areas such as biotechnology, water
purification, and energy development.
The majority of sections in this document are organized by process type. In the case of section 6, the logic
of placement is as follows: in the step before the particle is made, the material itself is in a gas/liquid/
solid phase. The phase of the substrate or carrier in the process does not drive the categorization of
the process. As an example, consider iron particles that are catalysts in a process by which you seed oil
with iron particles, the oil vaporizes and condenses forming carbon particles on the iron particles. What
vaporizes is the oil, and therefore it is a gas phase process. Nanotubes grown from the gas phase, starting
with catalyst particles that react with the gas phase to grow the nanotubes, thus this is characterized
as a gas process. Indication of whether synthesis processes are used to manufacture nano-objects,
nanoparticles, or both, is provided in Annex A.
A common understanding of the terminology used in practical applications will enable communities of
practice in nanomanufacturing and will advance nanomanufacturing strength worldwide. Extending
the understanding of terms across the existing manufacturing infrastructure will serve to bridge
the transition between the innovations of the research laboratory and the economic viability of
nanotechnologies.
For informational terms supportive of nanomanufacturing terminology, see Reference [1].
TECHNICAL SPECIFICATION ISO/TS 80004-8:2013(E)
Nanotechnologies — Vocabulary —
Part 8:
Nanomanufacturing processes
1 Scope
This Technical Specification gives terms and definitions related to nanomanufacturing processes in the
field of nanotechnologies. It forms one part of multi-part terminology and definitions documentation
covering the different aspects of nanotechnologies.
All the process terms in this document are relevant to nanomanufacturing. Many of the listed processes
are not exclusively relevant to the nanoscale. Depending on controllable conditions, such processes may
result in material features at the nanoscale or, alternatively, larger scales.
There are many other terms that name tools, components, materials, systems control methods or
metrology methods associated with nanomanufacturing that are beyond the scope of this document.
2 Terms and definitions from other parts of ISO/TS 80004
The terms and definitions in this clause are given in other parts of ISO/TS 80004. They are reproduced
here for context and better understanding.
2.1
carbon nanotube
CNT
nanotube (2.9) composed of carbon
Note 1 to entry: carbon nanotu
...
TECHNICAL ISO/TS
SPECIFICATION 80004-8
First edition
2013-12-15
Nanotechnologies — Vocabulary —
Part 8:
Nanomanufacturing processes
Nanotechnologies — Vocabulaire —
Partie 8: Processus de nanofabrication
Reference number
ISO/TS 80004-8:2013(E)
©
ISO 2013
ISO/TS 80004-8:2013(E)
© ISO 2013
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form
or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior
written permission. Permission can be requested from either ISO at the address below or ISO’s member body in the country of
the requester.
ISO copyright office
Case postale 56 • CH-1211 Geneva 20
Tel. + 41 22 749 01 11
Fax + 41 22 749 09 47
E-mail copyright@iso.org
Web www.iso.org
Published in Switzerland
ii © ISO 2013 – All rights reserved
ISO/TS 80004-8:2013(E)
Contents Page
Foreword .iv
Introduction .vi
1 Scope . 1
2 Terms and definitions from other parts of ISO/TS 80004 . 1
3 General terms . 3
4 Directed assembly . 4
5 Self-assembly processes . 4
6 Synthesis . 5
6.1 Gas process phase — Physical methods . 5
6.2 Gas process phase — Chemical methods . 6
6.3 Liquid process phase — Physical methods . 7
6.4 Liquid process phase — Chemical methods . 8
6.5 Solid process phase — Physical methods . 8
6.6 Solid process phase — Chemical methods .10
7 Fabrication .11
7.1 Nanopatterning lithography .11
7.2 Deposition processes .14
7.3 Etching processes .16
7.4 Printing and coating .18
Annex A (informative) Identification of output resulting from defined synthesis processes .19
Annex B (informative) Index .21
Bibliography .27
ISO/TS 80004-8:2013(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
orga nizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2. www.iso.org/directives
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of any
patent rights identified during the development of the document will be in the Introduction and/or on
the ISO list of patent declarations received. www.iso.org/patents
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation on the meaning of ISO specific terms and expressions related to conformity
assessment, as well as information about ISO’s adherence to the WTO principles in the Technical
Barriers to Trade (TBT) see the following URL: Foreword - Supplementary information
ISO/TS 80004-8 was prepared jointly by Technical Committee ISO/TC 229, Nanotechnologies, and Technical
Committee IEC/TC 113, Nanotechnology standardization for electrical and electronic products and systems.
Documents in the 80000 to 89999 range of reference numbers are developed by collaboration
between ISO and IEC.
ISO/TS 80004 consists of the following parts, under the general title Nanotechnologies — Vocabulary:
— Part 1: Core terms
— Part 3: Carbon nano-objects
— Part 4: Nanostructured materials
— Part 5: Nano/bio interface
— Part 6: Nano-object characterization
— Part 7: Diagnostics and therapeutics for healthcare
— Part 8: Nanomanufacturing processes
The following parts are under preparation:
1)
— Part 2: Nano-objects: Nanoparticle, nanofibre and nanoplate
— Part 9: Nano-enabled electrotechnical products and systems
— Part 10: Nano-enabled photonic components and systems
— Part 11: Nanolayer, nanocoating, nanofilm, and related terms
— Part 12: Quantum phenomena in nanotechnology
[5]
1) Revises and replaces ISO/TS 27687 .
iv © ISO 2013 – All rights reserved
ISO/TS 80004-8:2013(E)
Graphene and other two-dimensional materials is to form the subject of a future part 13.
ISO/TS 80004-8:2013(E)
Introduction
Nanomanufacturing is the essential bridge between the discoveries of the nanosciences and real-world
nanotechnology products.
Advancing nanotechnology from the laboratory into volume production ultimately requires careful
study of manufacturing process issues including product design, reliability and quality, process design
and control, shop floor operations, supply chain management, workplace safety and health practices
during the production, use, and handling of nanomaterials. Nanomanufacturing encompasses directed
self assembly and assembly techniques, synthetic methodologies, and fabrication processes such as
lithography and biological processes. Nanomanufacturing also includes bottom-up directed assembly,
top-down high resolution processing, molecular systems engineering, and hierarchical integration with
larger scale systems. As dimensional scales of materials and molecular systems approach the nanoscale,
the conventional rules governing their behaviour may change significantly. As such, the behaviour of a
final product is enabled by the collective performance of its nanoscale building blocks.
Biological process terms are not included in this first edition of the nanomanufacturing vocabulary, but
considering the rapid development of the field, it is expected that terms in this important area will be
added in a future update to this Technical Specification or in companion documents in the 80004 series.
This could include both the processing of biological nanomaterials and the use of biological processes to
manufacture materials at the nanoscale.
Similarly, additional terms from other developing areas of nanomanufacturing, including composite
manufacturing, roll-to-roll manufacturing, and others, will be included in future documents.
There is a distinction between the terms nanomanufacturing and nanofabrication. Nanomanufacturing
encompasses a broader range of processes than does nanofabrication. Nanomanufacturing
encompasses all nanofabrication techniques and also techniques associated with materials processing
and chemical synthesis.
This document provides an introduction to processes used in the early stages of the nanomanufacturing
value chain, namely the intentional synthesis, generation or control of nanomaterials, including
fabrication steps in the nanoscale. The nanomaterials that result from these manufacturing processes
are distributed in commerce where, for example, they may be further purified, be compatabilized to
be dispersed in mixtures or composite matrices, or serve as integrated components of systems and
devices. The nanomanufacturing value chain is, in actuality, a large and diverse group of commercial
value chains that stretch across these sectors:
— the semiconductor industry (where the push to create smaller, faster, and more efficient
microprocessors heralded the creation of circuitry less than 100 nm in size);
— electronics and telecommunications;
— aerospace, defence, and national security;
— energy and automotive;
— plastics and ceramics;
— forest and paper products;
— food and food packaging;
— pharmaceuticals, biomedicine, and biotechnology;
— environmental remediation;
— clothing and personal care.
There are thousands of tonnes of nanomaterials on the market with end use applications in several of
these sectors, such as carbon black and fumed silica. Nanomaterials which are rationally designed with
vi © ISO 2013 – All rights reserved
ISO/TS 80004-8:2013(E)
specific purpose are expected to radically change the landscape in areas such as biotechnology, water
purification, and energy development.
The majority of sections in this document are organized by process type. In the case of section 6, the logic
of placement is as follows: in the step before the particle is made, the material itself is in a gas/liquid/
solid phase. The phase of the substrate or carrier in the process does not drive the categorization of
the process. As an example, consider iron particles that are catalysts in a process by which you seed oil
with iron particles, the oil vaporizes and condenses forming carbon particles on the iron particles. What
vaporizes is the oil, and therefore it is a gas phase process. Nanotubes grown from the gas phase, starting
with catalyst particles that react with the gas phase to grow the nanotubes, thus this is characterized
as a gas process. Indication of whether synthesis processes are used to manufacture nano-objects,
nanoparticles, or both, is provided in Annex A.
A common understanding of the terminology used in practical applications will enable communities of
practice in nanomanufacturing and will advance nanomanufacturing strength worldwide. Extending
the understanding of terms across the existing manufacturing infrastructure will serve to bridge
the transition between the innovations of the research laboratory and the economic viability of
nanotechnologies.
For informational terms supportive of nanomanufacturing terminology, see Reference [1].
TECHNICAL SPECIFICATION ISO/TS 80004-8:2013(E)
Nanotechnologies — Vocabulary —
Part 8:
Nanomanufacturing processes
1 Scope
This Technical Specification gives terms and definitions related to nanomanufacturing processes in the
field of nanotechnologies. It forms one part of multi-part terminology and definitions documentation
covering the different aspects of nanotechnologies.
All the process terms in this document are relevant to nanomanufacturing. Many of the listed processes
are not exclusively relevant to the nanoscale. Depending on controllable conditions, such processes may
result in material features at the nanoscale or, alternatively, larger scales.
There are many other terms that name tools, components, materials, systems control methods or
metrology methods associated with nanomanufacturing that are beyond the scope of this document.
2 Terms and definitions from other parts of ISO/TS 80004
Th
...
SPÉCIFICATION ISO/TS
TECHNIQUE 80004-8
Première édition
2013-12-15
Nanotechnologies — Vocabulaire —
Partie 8:
Processus de nanofabrication
Nanotechnologies — Vocabulary —
Part 8: Nanomanufacturing processes
Numéro de référence
ISO/TS 80004-8:2013(F)
©
ISO 2013
ISO/TS 80004-8:2013(F)
DOCUMENT PROTÉGÉ PAR COPYRIGHT
© ISO 2013
Droits de reproduction réservés. Sauf indication contraire, aucune partie de cette publication ne peut être reproduite ni utilisée
sous quelque forme que ce soit et par aucun procédé, électronique ou mécanique, y compris la photocopie, l’affichage sur
l’internet ou sur un Intranet, sans autorisation écrite préalable. Les demandes d’autorisation peuvent être adressées à l’ISO à
l’adresse ci-après ou au comité membre de l’ISO dans le pays du demandeur.
ISO copyright office
Case postale 56 • CH-1211 Geneva 20
Tel. + 41 22 749 01 11
Fax + 41 22 749 09 47
E-mail copyright@iso.org
Web www.iso.org
Version française parue en 2014
Publié en Suisse
ii © ISO 2013 – Tous droits réservés
ISO/TS 80004-8:2013(F)
Sommaire Page
Avant-propos .iv
Introduction .vi
1 Domaine d’application . 1
2 Termes et définitions provenant d’autres parties de l’ISO/TS 80004 .1
3 Termes généraux . 3
4 Assemblage dirigé . 4
5 Processus d’auto-assemblage . 5
6 Synthèse . 6
6.1 Processus en phase gazeuse — Méthodes physiques . 6
6.2 Processus en phase gazeuse — Méthodes chimiques . 7
6.3 Processus en phase liquide — Méthodes physiques . 7
6.4 Processus en phase liquide — Méthodes chimiques . 8
6.5 Processus en phase solide — Méthodes physiques . 9
6.6 Processus en phase solide — Méthodes chimiques .11
7 Fabrication .11
7.1 Lithographie de formation de nanomotifs .11
7.2 Processus de dépôt .14
7.3 Processus de gravure .17
7.4 Impression et revêtement .19
Annexe A (informative) Identification des résultats obtenus à partir de processus de
synthèse définis .21
Annexe B (informative) Index .25
Bibliographie .31
ISO/TS 80004-8:2013(F)
Avant-propos
L’ISO (Organisation internationale de normalisation) est une fédération mondiale d’organismes
nationaux de normalisation (comités membres de l’ISO). L’élaboration des Normes internationales est
en général confiée aux comités techniques de l’ISO. Chaque comité membre intéressé par une étude
a le droit de faire partie du comité technique créé à cet effet. Les organisations internationales,
gouv ernementales et non gouvernementales, en liaison avec l’ISO participent également aux travaux.
L’ISO c ollabore étroitement avec la Commission électrotechnique internationale (CEI) en ce qui concerne
la normalisation électrotechnique.
Les procédures utilisées pour élaborer le présent document et celles destinées à sa mise à jour sont
décrites dans les Directives ISO/CEI, Partie 1. Il convient en particulier de prendre note des différents
critères d’approbation requis pour les différents types de documents ISO. Le présent document a été
rédigé conformément aux règles de rédaction données dans les Directives ISO/CEI, Partie 2. www.iso.
org/directives
L’attention est appelée sur le fait que certains des éléments du présent document peuvent faire l’objet de
droits de propriété intellectuelle ou de droits analogues. L’ISO ne saurait être tenue pour responsable
de ne pas avoir identifié de tels droits de propriété et averti de leur existence. Les détails concernant les
références aux droits de propriété intellectuelle ou autres droits analogues identifiés lors de l’élaboration
du document sont indiqués dans l’Introduction et/ou sur la liste ISO des déclarations de brevets reçues.
www.iso.org/patents
Les éventuelles appellations commerciales utilisées dans le présent document sont données pour
information à l’intention des utilisateurs et ne constituent pas une approbation ou une recommandation.
Pour plus d’explications sur la signification des termes et expressions spécifiques employés par l’ISO
pour l’évaluation de la conformité, et pour plus d’informations au sujet de l’adhésion de l’ISO aux principes
de l’OMC relatifs aux obstacles techniques au commerce (OTC), voir l’URL suivante: Avant-propos —
Informations supplémentaires
L’ISO/TS 80004-8 a été élaborée conjointement par le comité technique ISO/TC 229, Nanotechnologies,
et le comité technique CEI/TC 113, Normalisation dans le domaine des nanotechnologies relatives aux
appareils et systèmes électriques et électroniques.
Les documents dont les numéros de référence sont compris entre 80000 et 89999 sont développés en
collaboration par l’ISO et la CEI.
L’ISO/TS 80004 comprend les parties suivantes, présentées sous le titre général Nanotechnologies —
Vocabulaire:
— Partie 1: Termes «cœur»
— Partie 3: Nano-objets en carbone
— Partie 4: Matériaux nanostructurés
— Partie 5: Interface nano/bio
— Partie 6: Caractérisation des nano-objets
— Partie 7: Diagnostics et thérapies pour les soins de santé
— Partie 8: Processus de nanofabrication
Les parties suivantes sont en cours d’élaboration:
1)
— Partie 2: Nano-objets: Nanoparticule, nanofibre et nanoplaque
— Partie 9: Produits et systèmes électrotechniques permis par les nanotechnologies
[5]
1) Révise et remplace l’ISO/TS 27687 .
iv © ISO 2013 – Tous droits réservés
ISO/TS 80004-8:2013(F)
— Partie 10: Produits et systèmes photoniques permis par les nanotechnologies
— Partie 11: Nanocouche, nanorevêtement, nanofilm et termes associés
— Partie 12: Effets quantiques dans les nanotechnologies
Le graphène et d’autres matériaux bidimensionnels formeront l’objet d’une future partie 13.
ISO/TS 80004-8:2013(F)
Introduction
La nanofabrication constitue le pont essentiel entre les découvertes du domaine des nanosciences et les
produits du monde réel issus des nanotechnologies.
Le passage des nanotechnologies du laboratoire à la production de masse exige, à terme, une étude
approfondie des questions liées aux procédés de fabrication, y compris la conception, la fiabilité et
la qualité des produits, la conception et la maîtrise des procédés, les opérations en atelier, la gestion
de la chaîne d’approvisionnement, les pratiques de sécurité et de santé sur le lieu de travail durant
la production, l’utilisation et la manipulation de nanomatériaux. La nanofabrication englobe des
techniques d’assemblage et d’auto-assemblage dirigé, des méthodologies de synthèse et des procédés de
fabrication tels que la lithographie et des processus biologiques. La nanofabrication comprend également
l’assemblage dirigé par approche ascendante («bottom-up»), le traitement à haute résolution par approche
descendante («top-down»), l’ingénierie des systèmes moléculaires et l’intégration hiérarchique avec des
systèmes à plus grande échelle. Au fur et à mesure que les échelles dimensionnelles des matériaux et des
systèmes moléculaires se rapprochent de l’échelle nanométrique, les règles conventionnelles régissant
leur comportement peuvent varier considérablement. À ce titre, le comportement d’un produit final est
directement lié à la performance collective de ses constituants de base à l’échelle nanométrique.
Les termes propres aux procédés biologiques ne sont pas inclus dans cette première édition du
vocabulaire de la nanofabrication mais, compte tenu de l’évolution rapide dans ce domaine, il est prévu
que les termes propres à cet important domaine soient ajoutés lors d’une mise à jour ultérieure de la
présente Spécification technique ou dans des documents accompagnant la série de normes 80004. Ces
documents pourraient inclure à la fois le traitement des nanomatériaux biologiques et l’utilisation de
procédés biologiques pour la fabrication de matériaux à l’échelle nanométrique.
De la même manière, des termes supplémentaires issus d’autres domaines de nanofabrication en
développement, y compris la fabrication de composites, la fabrication «roll-to-roll» et autres techniques,
seront inclus dans de futurs documents.
Une distinction doit être faite entre les termes «nanofabrication» et «nanoconstruction». Le
«nanofabrication» englobe un éventail de procédés plus vaste que celui de la «nanoconstruction». Le
«nanofabrication» englobe toutes les techniques de «nanofabrication», ainsi que les techniques associées
au traitement des matériaux et à la synthèse chimique.
Le présent document se veut une introduction aux processus utilisés pour les premières étapes de la
chaîne de valeur de la nanofabrication, c’est-à-dire la synthèse, la production ou le contrôle intentionnels
de nanomatériaux, y compris les étapes de fabrication à l’échelle nanométrique. Les nanomatériaux issus
de ces processus de fabrication sont commercialisés lorsqu’ils peuvent, par exemple, faire l’objet d’une
purification supplémentaire, être rendus compatibles pour une dispersion dans des mélanges ou des
matrices composites, ou servir de composants intégrés dans des systèmes et des appareils. En réalité,
la chaîne de valeur de la nanofabrication est un ensemble important et diversifié de chaînes de valeur
commerciales qui couvrent les secteurs suivants:
— l’industrie des semi-conducteurs (où la pression exercée pour créer des microprocesseurs plus
petits, plus rapides et plus performants a conduit à la création de circuits inférieurs à 100 nm);
— l’électronique et les télécommunications;
— l’aérospatiale, la défense et la sécurité nationale;
— l’énergie et l’industrie automobile;
— l’industrie plastique et l’industrie céramique;
— les produits forestiers et papiers;
— l’alimentation et l’emballage alimentaire;
— l’industrie pharmaceutique, la biomédecine et les biotechnologies;
vi © ISO 2013 – Tous droits réservés
ISO/TS 80004-8:2013(F)
— la dépollution de l’environnement;
— l’habillement et les soins de santé.
Sur le marché, des milliers de tonnes de nanomatériaux font l’objet d’applications finales dans plusieurs
des secteurs en question, tels que le noir de carbone et la fumée de silice. Les nanomatériaux qui sont
conçus de manière rationnelle dans un but spécifique sont censés bouleverser le paysage de secteurs
tels que les biotechnologies, l’assainissement de l’eau et le développement énergétique.
La plupart des parties du présent document sont organisées par type de processus. Dans le cas de
l’Article 6, la logique de classement est la suivante: avant la fabrication de la particule, le matériau
lui-même est en phase gazeuse/liquide/solide. La phase du substrat ou porteur dans le processus ne
détermine pas la catégorisation du processus. Par exemple, des particules de fer sont des catalyseurs
pour un processus dans lequel de l’huile est ensemencée par des particules de fer, l’huile se vaporise
puis se condense, formant des particules de carbone sur les particules de fer. Dans la mesure où l’huile
est l’élément qui se vaporise, il s’agit d’un processus en phase gazeuse. Du fait que les nanotubes sont
synthétisés en phase gazeuse, en présence de particules de catalyseur réagissant avec la phase gazeuse
pour produire les nanotubes, ce processus est caractérisé comme étant
...
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