IEC 62899-301-2:2017

Printed electronics - Part 301-2: Equipment - Contact printing - Rigid master - Measurement method of plate master pattern dimension

IEC 62899-301-2:2017(E) defines measurement terms and methods related to the critical dimension of features and the registration accuracy of features on rigid plate masters.
General critical dimensions are defined to evaluate the shape accuracy of features on the plate master. To evaluate the registration accuracy of features on the plate master, the specification for the registration mark for the plate master is specified. Then, common metrology procedures to measure the critical dimensions and the registration accuracy of the plate master are established for device manufacturers, printing master manufacturers and printing master manufacturing equipment vendors. The measurement terms which are measured by agreement between the user and the supplier are measured using the measurement methods given in this document.

General Information

• Status: Published
• Publication Date: 29-Aug-2017
• ICS: 01 - GENERALITIES. TERMINOLOGY. STANDARDIZATION. DOCUMENTATION
• ICS: 19.080 - Electrical and electronic testing
• ICS: 37.100.10 - Reproduction equipment
• Technical Committee: TC 119 - Printed Electronics
• Drafting Committee: WG 3 - TC 119/WG 3
• Current Stage: PPUB - Publication issued
• Start Date: 30-Sep-2017
• Completion Date: 30-Aug-2017

Standards Content (Sample)

IEC 62899-301-2 ®
Edition 1.0 2017-08
INTERNATIONAL
STANDARD
colour
inside
Printed electronics –
Part 301-2: Equipment – Contact printing – Rigid master – Measurement method
of plate master pattern dimension

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IEC 62899-301-2 ®
Edition 1.0 2017-08
INTERNATIONAL
STANDARD
colour
inside
Printed electronics –
Part 301-2: Equipment – Contact printing – Rigid master – Measurement method

of plate master pattern dimension

INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 19.080; 37.100.10 ISBN 978-2-8322-4768-6

– 2 – IEC 62899-301-2:2017  IEC 2017
CONTENTS
FOREWORD . 4
INTRODUCTION . 6
1 Scope . 7
2 Normative references . 7
3 Terms and definitions . 7
4 Coordinate system [1] . 10
5 1-D qualification features [1] . 10
5.1 Measurement instrument . 10
5.2 Feature types . 10
5.3 Pattern edge detection method . 11
5.4 Feature width and pitch . 11
5.4.1 Procedure . 11
5.4.2 Report . 12
5.5 Line edge roughness (LER) and line width roughness (LWR) . 12
5.5.1 Procedure . 12
5.5.2 Report . 13
5.6 Discussion . 13
6 2-D qualification features [2] . 13
6.1 Measurement instrument . 13
6.2 Pattern edge detection method . 13
6.3 Image alignment . 14
6.4 Feature types . 14
6.5 Contact . 14
6.5.1 Procedure . 14
6.5.2 Report . 15
6.6 Corner rounding . 15
6.6.1 Procedure . 15
6.6.2 Report . 16
6.7 Line-end shortening . 16
6.7.1 Procedure . 16
6.7.2 Report . 17
6.8 Discussion . 17
7 Cross-sectional qualification features [3] . 19
7.1 Measurement instrument . 19
7.2 Feature types . 19
7.3 Cross-sectional area and feature height [3] . 19
7.3.1 Procedure . 19
7.3.2 Report . 21
7.4 Discussion . 21
8 Registration accuracy . 22
8.1 Measurement instrument . 22
8.2 Specification for registration marks for the plate master [4] . 22
8.2.1 Overview . 22
8.2.2 Guidelines for shape and sizes of registration mark . 22

8.3 Algorithm for calculating the feature position from image . 24
8.4 Procedure . 24
8.5 Report. 25
Bibliography . 26

Figure 1 – Coordinate system for measuring patterns on the plate master . 10
Figure 2 – Evaluation example of feature width and pitch . 11
Figure 3 – 2-D qualification of contact hole or dot . 15
Figure 4 – 2-D qualification of corner rounding . 16
Figure 5 – 2D qualification of line-end shortening . 17
Figure 6 – Effect of 1-D parameter such as line width . 18
Figure 7 – Example of 1-D effect correction by reducing the line width . 18
Figure 8 – Example of 1-D effect correction by enlarging the line width . 18
Figure 9 – 3-D height distribution . 20
Figure 10 – Cross-sectional height profile . 20
Figure 11 – Trapezoidal feature model . 21
Figure 12 – Measurement of the relief pattern . 21
Figure 13 – Shape of registration mark (cross form) . 23
Figure 14 – Shape of registration mark (round form) . 23
Figure 15 – Measurement of registration accuracy . 25

Table 1 – Dimension of registration mark (cross from) . 23
Table 2 – Dimension of registration mark (round form) . 24
Table 3 – Example of report – Registration accuracy of reference marks relative to the
reference edges . 25
Table 4 – Example of report – Registration accuracy of marks relative to the
coordinate system of the plate master . 25

– 4 – IEC 62899-301-2:2017  IEC 2017
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
PRINTED ELECTRONICS –
Part 301-2: Equipment – Contact printing – Rigid master –
Measurement method of plate master pattern dimension

FOREWORD
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