ISO 18516:2019

Surface chemical analysis — Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres

This document describes methods for measuring lateral resolution and sharpness in imaging surface chemical analysis. It applies to all methods of surface analysis which use a beam to analyse the chemical composition of surfaces under defined settings of an instrument. It applies to scanning instruments, where a finely focused beam is scanned over the sample in a preselected field of view, as well as to full field imaging instruments, where the field of view is simultaneously imaged by a broad beam, an imaging lens system and a pixelated detector. The methods for measuring lateral resolution and sharpness are — the straight edge method; — the narrow line method; — the grating method. This document applies to instruments and methods that provide information on layers with nanometre thicknesses and to surfaces with nanometre‐sized structures and individual nano‐objects.

Analyse chimique des surfaces — Détermination de la résolution latérale et de la netteté par des méthodes à base de faisceau utilisant une gamme allant des nanomètres aux micromètres

General Information

• Status: Published
• Publication Date: 13-Jan-2019
• ICS: 71.040.40 - Chemical analysis
• Technical Committee: ISO/TC 201/SC 2 - General procedures
• Drafting Committee: ISO/TC 201/SC 2 - General procedures
• Current Stage: 9060 - Close of review
• Start Date: 02-Sep-2029

Relations

• Revises: ISO 18516:2006 - Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy — Determination of lateral resolution
• Effective Date: 20-Apr-2013

Standards Content (Sample)

INTERNATIONAL ISO
STANDARD 18516
Second edition
2019-01
Surface chemical analysis —
Determination of lateral resolution
and sharpness in beam based methods
with a range from nanometres to
micrometres
Analyse chimique des surfaces — Détermination de la résolution
latérale et de la netteté par des méthodes à base de faisceau utilisant
une gamme allant des nanomètres aux micromètres
Reference number
ISO 18516:2019(E)
©
ISO 2019

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ISO 18516:2019(E)

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ii © ISO 2019 – All rights reserved

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ISO 18516:2019(E)

Contents Page
Foreword .v
Introduction .vi
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Symbols and abbreviated terms . 3
5 General information . 4
5.1 Background . 4
5.2 Survey on principal methods to characterize lateral resolution in imaging surface
chemical analysis . 5
5.3 Measurement of lateral resolution in imaging surface chemical analysis . 6
5.4 Dependence of lateral resolution on scan direction . 6
5.5 Reporting results . 7
6 Measurement of lateral resolution using the straight edge method .8
6.1 Introduction . 8
6.2 Model functions and sharpness parameters . 8
6.3 Requirements for a test sample . 9
6.4 Cleaning the straight-edge specimen .10
6.5 Mounting the straight-edge specimen .10
6.6 Operating the instrument .
...