SIST EN ISO 14644-15:2026

• Abstract:

  This document specifies requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments that are linked to the ISO standard for air cleanliness by chemical concentration (see ISO 14644-8).; This document does not apply to the following:; health and safety requirements;; compatibility with cleaning agents and techniques;; cleanability;; biocontamination;; specific requirements of equipment and materials for processes and products;; design details of equipment.

• Status: Published
• Public Enquiry End Date: 30-Jan-2026
• Publication Date: 18-Jun-2026
• ICS: 13.040.35 - Cleanrooms and associated controlled environments
• Technical Committee: I13 - Imaginarni 13
• Current Stage: 6060 - National Implementation/Publication (Adopted Project)
• Start Date: 10-Jun-2026
• Due Date: 15-Aug-2026
• Completion Date: 19-Jun-2026
• Ref Project: EN ISO 14644-15:2026 - Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (ISO 14644-15:2026)

• Revises: SIST EN ISO 14644-15:2018 - Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (ISO 14644-15:2017)
• Effective Date: 17-Mar-2025

SIST EN ISO 14644-15:2026 is the Slovenian adoption of EN ISO 14644-15:2026, based on ISO 14644-15:2026. It specifies requirements and guidance for assessing whether equipment and materials are suitable for use in cleanrooms and associated controlled environments by measuring airborne chemical concentration. The document is aimed at engineers, quality managers, test laboratories, and buyers who need to qualify items before they are installed or used.

What does SIST EN ISO 14644-15:2026 specify?

SIST EN ISO 14644-15:2026 specifies how to assess the chemical airborne cleanliness of equipment and materials intended for cleanrooms and associated controlled environments linked to ISO 14644-8. In practice, it tells users how to set up the test, measure emissions, calculate specific emission rates, and compare the results with the target cleanroom or controlled zone conditions.

The scope excludes health and safety requirements, compatibility with cleaning agents and techniques, cleanability, biocontamination, specific requirements of equipment and materials for processes and products, and design details of equipment. That keeps the document focused on airborne chemical emission and suitability assessment rather than broader product qualification.

The document is organized into scope, normative references, terms and definitions, symbols, test setup, representative mode, visual inspection, test description, calculation of measured concentrations, calculation of specific emission rate, assessment, documentation, and three informative annexes.

Annex	What it covers
Annex A	Example calculation for suitability assessment of one equipment in an existing installation
Annex B	Example calculation for suitability assessment of wall material in an existing cleanroom/clean zone installation
Annex C	Suitability assessment of a combination of equipment and floor material in a cleanroom to be designed

What are the key requirements of SIST EN ISO 14644-15:2026?

SIST EN ISO 14644-15:2026 is built around a practical test-and-assess workflow: define how the item will be used, measure its airborne chemical emission, and check whether the resulting concentration fits the intended cleanroom or controlled zone. The most important requirements are in Clauses 5 to 12.

Test setup and operating mode

Clause 5 requires a test setup that can collect representative contaminant samples from the test environment. The document allows a closed design, a closed design special application, or an open design.

The closed design is the preferred method for low specific emission rates. The open design is intended for larger equipment and equipment in operation, and it represents a cleanroom or controlled zone more closely. In practice, this means the chosen setup must match the item size and the way the item will actually be used.

Clause 6 requires a representative mode of operation. For equipment, the operating mode has to reflect intended use and the relevant operating parameters shall be agreed before testing. For materials, the sample has to reflect intended use, including age, physical state, surface area, layer structure, porosity, and surface texture.

Visual inspection before and after testing

Clause 7 requires qualitative visual inspection before and after quantitative testing. For equipment, the inspection checks that packaging has been removed, the item is undamaged, correctly assembled, and properly connected to utilities. For materials, the inspection focuses on sample condition, homogeneity, surface appearance, edge condition, and signs of degradation.

This matters because visible contamination, packaging residue, damage, or poor sample preparation can distort the emission test and lead to misleading results.

Sampling, background correction, and calculation

Clause 8 sets out the sampling and analysis sequence. The test uses a trapping system or, for some contaminants, direct analytical techniques such as PTR-MS, FTIR, FID, or CRDS. The procedure includes a background measurement, then a measurement with the test object in place, with temperature held near the agreed value and purge conditions controlled.

Clauses 9 and 10 show how to convert the measured masses into concentrations and then into a specific emission rate. Background mass has to be subtracted. For both closed and open designs, the mass or concentration from the test object shall be at least ten times the background value; otherwise the test conditions or measurement method need to be reconsidered.

In practice, this means users must demonstrate that the test signal is clearly above the background before they rely on the emission result.

Assessment against the cleanroom or controlled zone

Clause 11 uses the specific emission rate to assess the effect on a cleanroom or controlled zone. The required input data include temperature, volume, air change rates, make-up air concentration, recirculation conditions, chemical filtration efficiency, the existing cleanroom or controlled-zone concentration, the metric for the item, and the target ISO-ACC level.

Suitability can be assessed only for matching chemicals or chemical groups. The sampling temperature for the emission test has to be equal to or higher than the temperature of the cleanroom installation being evaluated. The calculated concentration is then compared with the ISO-ACC level number from ISO 14644-8:2022.

Documentation for traceability

Clause 12 requires documentation detailed enough to reproduce the assessment. It covers the test setup, standards used, date and place, personnel, customer, identification of the test object, equipment identification and calibration records, the object’s operating mode or sample form, transport blanks, analysis setup, and visual inspection records.

For users, this is the part that supports traceability, repeatability, and internal or external review of the suitability decision.

What terms does SIST EN ISO 14644-15:2026 define?

• Air cleanliness by chemical concentration (ACC) - The amount of chemicals in air, expressed as an ISO-ACC level N that represents the maximum allowable concentration of a chemical species or group of species.
• Breakthrough volume - The maximum purge gas volume that can pass through a trapping system without loss of analyte at a specified temperature.
• Controlled zone - A designated space where one or more contamination categories are controlled and specified, and where contamination is minimized.
• Representative mode - The operating mode of equipment that reflects its intended use during testing.
• Representative form - A material sample made to represent the intrinsic physical and chemical properties of the finished object.
• Specific emission rate - The normalized mass flow of chemical contaminants emitted from the test object, expressed per surface area for materials or per unit for equipment.
• Purge gas - The gas or gas mixture used to carry contaminants to an outlet or trapping system.

Who uses SIST EN ISO 14644-15:2026?

SIST EN ISO 14644-15:2026 is used by cleanroom engineers, contamination-control specialists, quality managers, equipment suppliers, material suppliers, test laboratories, and auditors. It is relevant to anyone who has to decide whether a piece of equipment or a material can be introduced into a cleanroom, clean zone, or controlled zone without pushing airborne chemical concentration above the chosen ISO-ACC level.

The introduction links the subject to aerospace, microelectronics, optics, nuclear, and life sciences, including pharmaceuticals, medical devices, food, and healthcare. In those sectors, the standard supports qualification of equipment and materials before installation, acceptance testing, and design-stage assessment.

What changed in SIST EN ISO 14644-15:2026 from the previous edition?

SIST EN ISO 14644-15:2026 supersedes EN ISO 14644-15:2017 and replaces ISO 14644-15:2017 as a second edition. The changes listed for this edition are:

• the term class was changed to level or assessment where appropriate, and the Introduction was reworded to match;
• the phrase “has to be” was changed to “shall be”;
• document titles and source dates were updated where needed;
• references not mentioned in the text were removed from the bibliography;
• minor editorial changes were made.

Which standards are used with SIST EN ISO 14644-15:2026?

Standard	Contribution
ISO 14644-8:2022	The normative reference. It provides the ACC framework and the ISO-ACC level number used in the suitability assessment.
ISO 14644-1:2015	Used in definitions for cleanroom and clean zone.
ISO 14644-14:2025	Cited in the definition of equipment and test environment.
ISO 16000-6	Cited for VOC sampling and analysis techniques in the bibliography.
ISO 16000-9	Cited for material age in the material assessment guidance.
ISO 16017-1	Cited as a VOC sampling and analysis reference in the notes and bibliography.
ISO 2889:2023	Cited for the definition of emission in the terms section and for related sampling practice.

What does the SIST EN ISO 14644-15:2026 document contain?

SIST EN ISO 14644-15:2026 contains the symbols and units used in the calculations, including background concentration, test-object concentration, sampling flow rate, sampling time, volume, air-change rate, and filtration efficiency. It also contains three test setup figures showing the closed, closed special application, and open arrangements.

The main technical content is the sampling and analysis procedure, the background-corrected concentration calculations, and the formulas for specific emission rate in closed and open designs. Clause 11 then turns those results into an assessment against an existing or target cleanroom or controlled zone.

The annexes provide worked examples that show how the method is applied to one equipment item, a wall material, and a combined equipment-plus-floor-material case. Those examples are useful for design checks, testing, and suitability decisions because they show how multiple emission sources are handled in practice.

SLOVENSKI STANDARD
01-julij-2026
Čiste sobe in podobna nadzorovana okolja - 15. del: Ocena ustreznosti uporabe
opreme in materialov na osnovi koncentracije onesnaževal v zraku (ISO 14644-
15:2026)
Cleanrooms and associated controlled environments - Part 15: Assessment of suitability
for use of equipment and materials by airborne chemical concentration (ISO 14644-
15:2026)
Reinräume und zugehörige Reinraumbereiche - Teil 15: Bewertung der
Reinraumtauglichkeit von Ausrüstungsgegenständen und Materialien anhand der
chemischen Luft- und Oberflächenkonzentration (ISO 14644-15:2026)
Salles propres et environnements maîtrisés apparentés - Partie 15: Évaluation de
l'aptitude à l'emploi des équipements et des matériaux par la détermination de la
concentration chimique aéroportée (ISO 14644-15:2026)
Ta slovenski standard je istoveten z: EN ISO 14644-15:2026
ICS:
13.040.35 Brezprašni prostori in Cleanrooms and associated
povezana nadzorovana controlled environments
okolja
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

EN ISO 14644-15
EUROPEAN STANDARD
NORME EUROPÉENNE
May 2026
EUROPÄISCHE NORM
ICS 13.040.35 Supersedes EN ISO 14644-15:2017
English Version
Cleanrooms and associated controlled environments - Part
15: Assessment of suitability for use of equipment and
materials by airborne chemical concentration (ISO 14644-
15:2026)
Salles propres et environnements maîtrisés apparentés Reinräume und zugehörige Reinraumbereiche - Teil
- Partie 15: Évaluation de l'aptitude à l'emploi des 15: Bewertung der Reinraumtauglichkeit von
équipements et des matériaux par la détermination de Ausrüstungsgegenständen und Materialien anhand der
la concentration chimique aéroportée (ISO 14644- chemischen Luft- und Oberflächenkonzentration (ISO
15:2026) 14644-15:2026)
This European Standard was approved by CEN on 7 March 2026.

CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this
European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references
concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN
member.
This European Standard exists in three official versions (English, French, German). A version in any other language made by
translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management
Centre has the same status as the official versions.

CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway,
Poland, Portugal, Republic of North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Türkiye and
United Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION

EUROPÄISCHES KOMITEE FÜR NORMUNG

CEN-CENELEC Management Centre: Rue de la Science 23, B-1040 Brussels
© 2026 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 14644-15:2026 E
worldwide for CEN national Members.

Contents Page
European foreword . 3

European foreword
This document (EN ISO 14644-15:2026) has been prepared by Technical Committee ISO/TC 209
"Cleanrooms and associated controlled environments" in collaboration with Technical Committee
CEN/TC 243 “Cleanroom technology” the secretariat of which is held by BSI.
This European Standard shall be given the status of a national standard, either by publication of an
identical text or by endorsement, at the latest by November 2026, and conflicting national standards
shall be withdrawn at the latest by November 2026.
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. CEN shall not be held responsible for identifying any or all such patent rights.
This document supersedes EN ISO 14644-15:2017.
Any feedback and questions on this document should be directed to the users’ national standards
body/national committee. A complete listing of these bodies can be found on the CEN website.
According to the CEN-CENELEC Internal Regulations, the national standards organizations of the
following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria,
Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland,
Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Republic of
North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Türkiye and the
United Kingdom.
Endorsement notice
The text of ISO 14644-15:2026 has been approved by CEN as EN ISO 14644-15:2026 without any
modification.
International
Standard
ISO 14644-15
Second edition
Cleanrooms and associated
2026-05
controlled environments —
Part 15:
Assessment of suitability for use
of equipment and materials by
airborne chemical concentration
Salles propres et environnements maîtrisés apparentés —
Partie 15: Évaluation de l'aptitude à l'emploi des équipements et
des matériaux par la détermination de la concentration chimique
aéroportée
Reference number
ISO 14644-15:2026(en) © ISO 2026

ISO 14644-15:2026(en)
© ISO 2026
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on
the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below
or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: [phone]
Email: [e-mail]
Website: www.iso.org
Published in Switzerland
ii
ISO 14644-15:2026(en)
Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Symbols . 4
5 Test setup . 4
5.1 General .4
5.2 Closed design .5
5.3 Closed design special application .6
5.4 Open design .7
6 Representative mode . 7
6.1 Equipment .7
6.2 Material .7
7 Visual inspection . 8
7.1 General .8
7.2 Equipment .8
7.3 Material .8
8 Test description . 9
9 Calculation of the measured concentrations . 9
10 Calculation of specific emission rate . 10
10.1 Calculation of specific emission rate — Closed design.10
10.2 Calculation of specific emission rate — Open design .10
11 Assessment . .11
11.1 General .11
11.2 Required input data .11
11.3 Calculation to determine the effect on a cleanroom or controlled zone . 12
11.4 Assessment of the suitability of material(s) or equipment for an existing cleanroom or
controlled zone . 12
12 Documentation .12
12.1 General . 12
12.2 Common documentation requirements . 13
12.3 Test documentation . . 13
12.4 Visual inspection . 13
12.4.1 Equipment . 13
12.4.2 Materials . 13
Annex A (informative) Example calculation for suitability assessment of one equipment
(existing installation) . 14
Annex B (informative) Example calculation for suitability assessment of wall material (existing
cleanroom/clean zone installation) .16
Annex C (informative) Suitability assessment of a combination of equipment and floor material
in a cleanroom to be designed . 17
Bibliography . 19

iii
ISO 14644-15:2026(en)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out through
ISO technical committees. Each member body interested in a subject for which a technical committee
has been established has the right to be represented on that committee. International organizations,
governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely
with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are described
in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the different types
of ISO document should be noted. This document was drafted in accordance with the editorial rules of the
ISO/IEC Directives, Part 2 (see www.iso.org/directives).
ISO draws attention to the possibility that the implementation of this document may involve the use of (a)
patent(s). ISO takes no position concerning the evidence, validity or applicability of any claimed patent
rights in respect thereof. As of the date of publication of this document, ISO had not received notice of (a)
patent(s) which may be required to implement this document. However, implementers are cautioned that
this may not represent the latest information, which may be obtained from the patent database available at
www.iso.org/patents. ISO shall not be held responsible for identifying any or all such patent rights.
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation of the voluntary nature of standards, the meaning of ISO specific terms and expressions
related to conformity assessment, as well as information about ISO's adherence to the World Trade
Organization (WTO) principles in the Technical Barriers to Trade (TBT), see www.iso.org/iso/foreword.html.
This document was prepared by Technical Committee ISO/TC 209, Cleanrooms and associated controlled
environments, in collaboration with the European Committee for Standardization (CEN) Technical Committee
CEN/TC 243, Cleanroom technology,in accordance with the Agreement on technical cooperation between ISO
and CEN (Vienna Agreement).
This second edition cancels and replaces the first edition (ISO 14644-15:2017), of which it constitutes a
minor revision. The changes are as follows:
— term class (classification, classified) changed to level or assessment where appropriate and Introduction
reworded to accommodate the change;
— phrase “has to be” changed to “shall be”;
— updated ‘document titles’ and ‘Source’ dates where appropriate;
— removed references not mentioned in the text from the bibliography;
— minor editorial changes.
A list of all parts in the ISO 14644 series can be found on the ISO website.
Any feedback or questions on this document should be directed to the user’s national standards body. A
complete listing of these bodies can be found at www.iso.org/members.html.

iv
ISO 14644-15:2026(en)
Introduction
Cleanrooms and associated controlled environments provide for the control of contamination to levels
appropriate for accomplishing contamination-sensitive activities. Products and processes that benefit from
the control of contamination include those in industries such as aerospace, microelectronics, optics, nuclear,
and life sciences (pharmaceuticals, medical devices, food, healthcare).
The assessment of suitability of equipment for use in cleanrooms and associated controlled environments
is related to the assessment of air cleanliness for chemical contamination. Examples and suitability
assessments are given in Annexes A, B and C.

v
International Standard ISO 14644-15:2026(en)
Cleanrooms and associated controlled environments —
Part 15:
Assessment of suitability for use of equipment and materials
by airborne chemical concentration
1 Scope
This document specifies requirements and guidelines for assessing the chemical airborne cleanliness
of equipment and materials which are foreseen to be used in cleanrooms and associated controlled
environments that are linked to the ISO standard for air cleanliness by chemical concentration (see
ISO 14644-8).
This document does not apply to the following:
— health and safety requirements;
— compatibility with cleaning agents and techniques;
— cleanability;
— biocontamination;
— specific requirements of equipment and materials for processes and products;
— design details of equipment.
2 Normative references
The following documents are referred to in the text in such a way that some or all of their content constitutes
requirements of this document. For dated references, only the edition cited applies. For undated references,
the latest edition of the referenced document (including any amendments) applies.
ISO 14644-8:2022, Cleanrooms and associated controlled environments — Part 8: Assessment of air cleanliness
by chemical concentration (ACC)
3 Terms and definitions
For the purposes of this document, the following terms and definitions apply.
ISO and IEC maintain terminology databases for use in standardization at the following addresses:
— ISO Online browsing platform: available at https:// www .iso .org/ obp
— IEC Electropedia: available at https:// www .electropedia .org/

ISO 14644-15:2026(en)
3.1
air cleanliness by chemical concentration
ACC
quantity of chemicals detected in the air, expressed in terms of an ISO-ACC level N, which represents the
maximum allowable concentration of a given chemical species or a group of chemical species, expressed in
grams per cubic metre
Note 1 to entry: This definition does not include macromolecules of biological origin, which are judged to be particles.
[SOURCE: ISO 14644-8:2022, 3.1.2]
3.2
breakthrough volume
maximum purge gas (3.12) volume that can be drawn through a trapping system without loss of analyte at a
specific temperature
3.3
chemical contamination
non-particulate substances that can have a deleterious effect on the product, process or equipment
[SOURCE: ISO 14644-8:2022, 3.1.1]
3.4
cleanliness
condition not exceeding a specified level of contamination
3.5
cleanroom
room within which the number concentration of airborne particles is controlled and classified, and which
is designed, constructed and operated in a manner to control the introduction, generation, and retention of
particles inside the room
Note 1 to entry: The class of airborne particle concentration is specified.
Note 2 to entry: Levels of other cleanliness attributes such as chemical, viable or nanoscale concentrations in the air,
and also surface cleanliness in terms of particle, nanoscale, chemical and viable concentrations may also be specified
and controlled.
Note 3 to entry: Other relevant physical parameters may also be controlled as required, e.g. temperature, humidity,
pressure, vibration and electrostatic.
[SOURCE: ISO 14644-1:2015, 3.1.1]
3.6
clean zone
defined space within which the number concentration of airborne particles is controlled and classified, and
which is constructed and operated in a manner to control the introduction, generation, and retention of
contaminants inside the space
Note 1 to entry: The class of airborne particle concentration is specified.
Note 2 to entry: Levels of other cleanliness attributes such as chemical, viable or nanoscale concentrations in the air,
and also surface cleanliness in terms of particle, nanoscale, chemical and viable concentrations may also be specified
and controlled.
Note 3 to entry: A clean zone(s) may be a defined space within a cleanroom or may be achieved by a separative device.
Such a device may be located inside or outside a cleanroom.
Note 4 to entry: Other relevant physical parameters may also be controlled as required, e.g. temperature, humidity,
pressure, vibration and electrostatic.
[SOURCE: ISO 14644-1:2015, 3.1.2]

ISO 14644-15:2026(en)
3.7
controlled zone
designated space in which the concentration of at least one contamination category (particles, chemical,
biocontamination) in air and/or on surfaces is controlled and specified and which is constructed and used in
a manner to minimize the introduction and impact of contamination
Note 1 to entry: Levels of cleanliness attributes such as chemical and viable concentrations in the air or cleanliness in
terms of particle, chemical and viable concentrations on surfaces may be specified by level(s).
Note 2 to entry: Other relevant parameters may also be controlled as necessary, e.g. temperature, humidity and
pressure, vibration and electrostatic.
Note 3 to entry: A controlled zone can be a defined space within a cleanroom or may be achieved by a separative
device. Such a device may be located inside or outside a cleanroom.
3.8
emission
contaminants that are discharged into the environment
[SOURCE: ISO 2889:2023, 3.29]
Note 1 to entry: For the purposes of this document, only chemical emission is considered.
3.9
emission rate
rate describing the mass of one or more volatile chemical(s) emitted from the equipment or material per
time unit
3.10
equipment
system designed for specific function(s), integrating materials, components and/or controls
EXAMPLE Testing and manufacturing equipment and machinery; equipment for transport and handling; storage
units; tools; furniture; doors; ceilings; IT hardware; handling robots.
[SOURCE: ISO 14644-14:2025, 3.6]
3.11
material
single substance or composite
Note 1 to entry: It might be necessary to provide material in a representative form to enable testing.
3.12
purge gas
gas or gas mixture to carry contaminant to a defined outlet
Note 1 to entry: In a controlled or clean zone (3.6) or a cleanroom (3.5), filtered air might be used as purge gas.
Note 2 to entry: A test environment (3.16) might be purged with air or other gases or gas mixtures to carry the
contaminant to a trapping system or measurement device.
3.13
representative form
material sample produced to represent the intrinsic physical and chemical properties of an object
3.14
representative mode
mode of operation that reflects the intended use of the equipment

ISO 14644-15:2026(en)
3.15
specific emission rate
normalized mass flow of chemical contaminants emitted from a test object
Note 1 to entry: Material-specific emission rate (3.9) is based on surface area.
Note 2 to entry: Equipment-specific emission rate is based on one single unit of equipment.
3.16
test environment
space in which the test is carried out, described by a set of parameters
[SOURCE: ISO 14644-14:2025, 3.7]
4 Symbols
Symbol Meaning Unit
p Background concentration in the test environment without the test g/m
b
object
p Concentration in the test environment with the test object g/m
o
p Chemical mass concentration in the cleanroom/controlled zone g/m
c
p Chemical mass co
...